JPH07297073A - Multilayered ceramic capacitor and its manufacture - Google Patents

Multilayered ceramic capacitor and its manufacture

Info

Publication number
JPH07297073A
JPH07297073A JP8831594A JP8831594A JPH07297073A JP H07297073 A JPH07297073 A JP H07297073A JP 8831594 A JP8831594 A JP 8831594A JP 8831594 A JP8831594 A JP 8831594A JP H07297073 A JPH07297073 A JP H07297073A
Authority
JP
Japan
Prior art keywords
sheet
laminated
ceramic green
internal electrode
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8831594A
Other languages
Japanese (ja)
Inventor
Mitsuhiro Yamazaki
三浩 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8831594A priority Critical patent/JPH07297073A/en
Publication of JPH07297073A publication Critical patent/JPH07297073A/en
Pending legal-status Critical Current

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  • Ceramic Products (AREA)
  • Ceramic Capacitors (AREA)

Abstract

PURPOSE:To provide a multilayered ceramic capacitor with for defects like shorting, and its manufacturing method. CONSTITUTION:Inner electrodes 3 are formed on a ceramic green sheets 2, and 70-80% of solvent component in the inner electrodes are evaporated for drying. A ceramic green sheet 4 is thermocompression bonded to obtain a sheet of three-layered structure. The sheets of three-layered structure are stacked and then baked, and external electrodes are formed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は積層セラミックコンデン
サとその製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated ceramic capacitor and a method for manufacturing the same.

【0002】[0002]

【従来の技術】近年、積層セラミックコンデンサは、ま
すます小型化かつ大容量化が望まれている。
2. Description of the Related Art In recent years, it has been demanded that the monolithic ceramic capacitors become smaller and larger in capacity.

【0003】従来の製造方法は、先ずセラミックス原料
粉体、有機結合剤、有機溶剤を混練して得られるセラミ
ックススラリーを作成し、ドクターブレード法やリバー
スロールコータ法により、ポリエチレンテレフタレート
フィルム上にセラミックススラリーを塗工し、これを乾
燥させセラミックスグリーンシートを得ていた。次に、
セラミックスグリーンシート上にパラジウムや銀−パラ
ジウム等の金属粉末ペーストをスクリーン印刷法により
内部電極として印刷し、これらを複数枚積み重ねて加圧
圧着してセラミックス積層体ブロックとしていた。そし
てこれを切断して所定形状のセラミックス積層体グリー
ンチップとし、規定された焼成温度にて焼結・磁器化さ
せていた。その後内部電極が露出している端面に銀等の
導電材料を付与して外部電極を形成して積層セラミック
コンデンサを得ていた。
In the conventional manufacturing method, first, a ceramics slurry obtained by kneading a ceramics raw material powder, an organic binder and an organic solvent is prepared, and the ceramics slurry is formed on a polyethylene terephthalate film by a doctor blade method or a reverse roll coater method. Was coated and dried to obtain a ceramic green sheet. next,
A metal powder paste of palladium, silver-palladium, or the like was printed as an internal electrode on the ceramic green sheet by a screen printing method, and a plurality of these were stacked and pressure-bonded to form a ceramic laminate block. Then, this was cut into a ceramic laminate green chip having a predetermined shape, which was sintered and porcelain at a specified firing temperature. After that, a conductive material such as silver was applied to the exposed end faces of the internal electrodes to form external electrodes, and thus a monolithic ceramic capacitor was obtained.

【0004】[0004]

【発明が解決しようとする課題】上記従来の構成では、
大容量化を図るためにセラミックスグリーンシートの厚
みを薄くすると、セラミックスグリーンシートの表面粗
さ、内部電極層の表面粗さにより、上下層の短絡(ショ
ート不良)を誘発するという問題点を有していた。
SUMMARY OF THE INVENTION In the above conventional configuration,
When the thickness of the ceramic green sheet is reduced to increase the capacity, there is a problem that the surface roughness of the ceramic green sheet and the surface roughness of the internal electrode layers may cause a short circuit (short circuit defect) between the upper and lower layers. Was there.

【0005】そこで本発明は、上記従来の問題点を解決
し、優れた積層セラミックコンデンサとその製造方法を
提供することを目的とするものである。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to solve the above-mentioned conventional problems and provide an excellent monolithic ceramic capacitor and a manufacturing method thereof.

【0006】[0006]

【課題を解決するための手段】この目的を達成するため
に本発明はグリーンシートに内部電極を形成した後、こ
の内部電極中に含まれる石油系溶剤を70〜80%を乾
燥、揮発させて半ウェット状態とする。次にこの内部電
極を形成したグリーンシート上に、内部電極を間にはさ
むようにして、別のグリーンシートを重ねて加圧、圧着
させて三層構造のシートを作成する。そしてこの三層構
造のシートを内部電極が交互にシートの相対向する端部
に導出するように積層、圧着、追加乾燥して積層体を作
成する。この積層体を焼結させた後、導出した内部電極
を電気的に接続するように外部電極を設ける。
In order to achieve this object, the present invention forms an internal electrode on a green sheet and then dries and volatilizes 70 to 80% of a petroleum solvent contained in the internal electrode. Make it semi-wet. Next, another green sheet is stacked on the green sheet having the internal electrode formed thereon with the internal electrode sandwiched therebetween, and the sheet is pressed and pressure-bonded to form a three-layer structure sheet. Then, the sheet having the three-layer structure is laminated, pressure-bonded, and additionally dried so that the internal electrodes are alternately led out to the opposite ends of the sheet to form a laminated body. After this laminated body is sintered, external electrodes are provided so as to electrically connect the derived internal electrodes.

【0007】[0007]

【作用】以上のように、本発明によると、セラミックス
グリーンシート上に形成した内部電極が半ウェット状態
で三層構造のセラミックスシートを形成するので、内部
電極表面に多少突起が存在していても、セラミックスグ
リーンシートに与えるダメージを軽減することができ
る。そして内部電極間には2枚のセラミックスグリーン
シートが存在するため、セラミックスグリーンシートの
表面粗さやピンホール等の欠陥をカバーすることができ
るのでショート不良を低減することができる。
As described above, according to the present invention, since the internal electrode formed on the ceramic green sheet forms a three-layer structure ceramic sheet in a semi-wet state, even if there are some protrusions on the internal electrode surface. , It is possible to reduce the damage given to the ceramic green sheet. Since the two ceramic green sheets are present between the internal electrodes, defects such as surface roughness and pinholes of the ceramic green sheets can be covered, and short-circuit defects can be reduced.

【0008】[0008]

【実施例】以下、本発明の一実施例について、図面を参
照しながら説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

【0009】まず、チタン酸バリウムを主成分とするセ
ラミック粉末にポリビニルブチラール系の有機結合剤、
可塑剤としてフタル酸ジブチル、有機溶媒としてメチル
エチルケトンをそれぞれ所定量配合し、分散メディアと
してアルミナボールを用い48時間ボールミリングして
セラミックススラリーを得た。次にこのセラミックスス
ラリーを図1に示すようにポリエチレンテレフタレート
のフィルム1上にロールコート法により、厚さ7μmの
セラミックスグリーンシート2を塗工、乾燥して得た。
その後図2に示すようにこのセラミックスグリーンシー
ト2上に内部電極3を、スクリーン印刷法により、パラ
ジウムペーストを用いて所定形状に形成した。そしてこ
の内部電極3内に含有されている石油系溶剤成分の約7
5%を揮発、乾燥させた後に、図3に示すように別の内
部電極の形成されていない厚さ7μmのセラミックスグ
リーンシート4を、内部電極3を間にはさむようにし
て、セラミックスグリーンシート2上に、80℃,50
kg/cm2の圧力で加熱圧着して三層構造のシートを
得た。この三層構造のシートを更に追加乾燥して、残存
する石油系溶剤を揮発、乾燥させた。
First, a polyvinyl butyral type organic binder is added to a ceramic powder containing barium titanate as a main component,
Dibutyl phthalate as a plasticizer and methyl ethyl ketone as an organic solvent were mixed in predetermined amounts, and alumina balls were used as a dispersion medium for ball milling for 48 hours to obtain a ceramics slurry. Next, as shown in FIG. 1, this ceramic slurry was obtained by applying a ceramic green sheet 2 having a thickness of 7 μm on a polyethylene terephthalate film 1 by a roll coating method and drying.
Thereafter, as shown in FIG. 2, the internal electrodes 3 were formed in a predetermined shape on the ceramic green sheet 2 by a screen printing method using a palladium paste. And about 7 petroleum solvent components contained in the internal electrode 3
After volatilizing and drying 5%, another ceramic green sheet 4 having a thickness of 7 μm and having no internal electrode formed thereon is sandwiched between the internal electrodes 3 as shown in FIG. 80 ℃, 50
A sheet having a three-layer structure was obtained by thermocompression bonding under a pressure of kg / cm 2 . The sheet having the three-layer structure was further dried to volatilize and dry the remaining petroleum solvent.

【0010】その後、電極の印刷されていない厚さ50
μmのセラミックスグリーンシートを3枚積み重ねたも
のの上に、三層構造のシートを内部電極3が交互に相対
向する端部にそれぞれ導出されるように70枚積み重ね
た。そしてこの上に内部電極3の付与されていないセラ
ミックスグリーンシートを3枚積み重ねて圧力600k
g/cm2の本加圧条件にて圧着し、セラミックス積層
体ブロックを形成した。
Thereafter, the unprinted thickness 50 of the electrodes
Seventy sheets of three-layer structure were stacked on three sheets of ceramic green sheets having a thickness of 70 μm so that the internal electrodes 3 were respectively led out to opposite ends. Then, three ceramic green sheets to which the internal electrodes 3 have not been applied are stacked on top of this and pressure 600 k is applied.
The ceramic laminate block was formed by pressure bonding under the main pressurization condition of g / cm 2 .

【0011】次に、このセラミックス積層体ブロックを
切断刃で所定形状に切断し、独立したセラミックス積層
体グリーンチップを得る。
Next, the ceramic laminated body block is cut into a predetermined shape with a cutting blade to obtain an independent ceramic laminated body green chip.

【0012】更に、セラミックス積層体グリーンチップ
を焼成用セッターに整列させ、バーンアウト炉に投入
し、室温から400℃まで、約30時間のバーンアウト
を施した後、焼成炉へ投入して、最高温度1280℃ま
で約20時間の焼成を行ない、焼結させた。
Further, the ceramic laminated green chips are aligned with the setter for firing, put into a burnout furnace, burned out from room temperature to 400 ° C. for about 30 hours, and then put into the fired furnace to obtain the maximum. Baking was performed for about 20 hours up to a temperature of 1280 ° C. for sintering.

【0013】その後、内部電極3の露出している端面に
外部電極となるべき銀電極を形成し、半田付性を向上さ
せるためにメッキ処理を施して積層セラミックコンデン
サを得た。
Thereafter, a silver electrode to be an external electrode was formed on the exposed end surface of the internal electrode 3, and a plating process was performed to improve solderability to obtain a laminated ceramic capacitor.

【0014】このようにして得た積層セラミックコンデ
ンサと、従来の積層セラミックコンデンサのデラミネー
ション発生率、初期ショート不良率、従来を100%と
したときの耐電圧、耐湿負荷寿命、高温負荷寿命を測定
した。耐湿負荷寿命はJIS規格に則り、85℃,85
%Rhで、定格電圧(25V)の2倍の電圧を1000
時間かけた後の絶縁抵抗の劣化数を測定した。また高温
負荷寿命もJIS規格に則り、85℃で定格電圧の4倍
の電圧を1000時間かけた後の絶縁抵抗の劣化数を測
定した。
The laminated ceramic capacitor thus obtained and the conventional laminated ceramic capacitor were measured for delamination occurrence rate, initial short circuit defect rate, withstand voltage, humidity resistant load life and high temperature load life when the conventional value was 100%. did. Moisture resistance load life is 85 ℃, 85 according to JIS standard.
% Rh, 1000 times the voltage twice the rated voltage (25V)
The number of deterioration of insulation resistance after taking time was measured. Also, the high temperature load life was measured according to the JIS standard, and the number of deterioration of the insulation resistance was measured after applying a voltage four times the rated voltage at 85 ° C. for 1000 hours.

【0015】結果を(表1)に示す。The results are shown in (Table 1).

【0016】[0016]

【表1】 [Table 1]

【0017】(表1)を見るとわかるようにデラミネー
ションや、ショート不良が本実施例においては、ほとん
どない。また耐電圧、耐湿負荷寿命は向上し、高温負荷
寿命は従来のものと遜色ない。
As can be seen from Table 1, delamination and short-circuit defects are almost absent in this embodiment. In addition, the withstand voltage and moisture resistance load life are improved, and the high temperature load life is comparable to conventional ones.

【0018】なお、本実施例において示した、ショート
厚み、焼成条件などの組み合せを変えても、その効果に
何ら影響を与えるものではない。
It should be noted that even if the combination of the short-circuit thickness, the firing conditions and the like shown in this embodiment is changed, the effect is not affected at all.

【0019】[0019]

【発明の効果】以上のように、本発明によると、セラミ
ックスグリーンシート上に形成した内部電極が半ウェッ
ト状態で三層構造のセラミックスシートを形成するの
で、内部電極表面に多少突起が存在していても、セラミ
ックスグリーンシートに与えるダメージを軽減すること
ができる。そして内部電極間には2枚のセラミックスグ
リーンシートが存在するため、セラミックスグリーンシ
ートの表面粗さやピンホール等の欠陥をカバーすること
ができるのでショート不良を低減することができる。そ
の上、三層構造にすることにより、従来あった電極の有
無による段差を低減することができ積層する際、高積層
化、セラミックスグリーンシート間の密着性の向上を容
易に図ることができる。そして内部電極中に残存させた
溶剤成分がセラミックスグリーンシート間の密着性を向
上させるので、焼成時の内部電極の収縮を防ぎ、容量の
低下を防ぐことができる。
As described above, according to the present invention, since the internal electrode formed on the ceramic green sheet forms a ceramic sheet having a three-layer structure in a semi-wet state, some protrusions are present on the internal electrode surface. However, the damage given to the ceramic green sheet can be reduced. Since the two ceramic green sheets are present between the internal electrodes, defects such as surface roughness and pinholes of the ceramic green sheets can be covered, and short-circuit defects can be reduced. In addition, the three-layer structure makes it possible to reduce the level difference due to the presence / absence of electrodes, which is conventionally present, and when stacking, it is possible to easily achieve high stacking and improve the adhesion between the ceramic green sheets. Since the solvent component left in the internal electrodes improves the adhesion between the ceramic green sheets, it is possible to prevent the internal electrodes from shrinking during firing and prevent the capacity from decreasing.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例における製造工程を示す断面
FIG. 1 is a sectional view showing a manufacturing process according to an embodiment of the present invention.

【図2】同製造工程を示す断面図FIG. 2 is a sectional view showing the same manufacturing process.

【図3】同製造工程を示す断面図FIG. 3 is a cross-sectional view showing the same manufacturing process.

【符号の説明】[Explanation of symbols]

1 フィルム 2 セラミックスグリーンシート 3 内部電極 4 セラミックスグリーンシート 1 Film 2 Ceramics Green Sheet 3 Internal Electrodes 4 Ceramics Green Sheet

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 内部電極を上下両面からセラミックスグ
リーンシートではさんだ三層構造のシートを、内部電極
が交互に相対向する端部に導出するよう積層した積層体
と、この積層体の端部に導出させた内部電極を電気的に
接続するようにした外部電極を備えた積層セラミックコ
ンデンサ。
1. A laminated body in which a sheet having a three-layer structure in which internal electrodes are sandwiched between ceramic green sheets from the upper and lower surfaces is laminated so as to lead out to the end portions where the internal electrodes are alternately opposed to each other, and at the end portions of the laminated body. A monolithic ceramic capacitor provided with an external electrode adapted to electrically connect the led out internal electrode.
【請求項2】 セラミックスグリーンシート上面に内部
電極を形成し、次に前記内部電極中に含まれている石油
系溶剤を70〜80%乾燥、揮発させ、その後前記内部
電極の上にセラミックスグリーンシートを積層後加圧
し、セラミックスシートと内部電極の三層構造のシート
を形成し、前記三層構造のシートを前記内部電極が交互
に相対向する端部に導出するように積層し、圧着して積
層体を得、その後前記積層体を焼成し、導出した前記内
部電極を電気的に接続するようにして外部電極を形成す
る積層セラミックコンデンサの製造方法。
2. An internal electrode is formed on the upper surface of the ceramic green sheet, the petroleum solvent contained in the internal electrode is dried and volatilized by 70 to 80%, and then the ceramic green sheet is placed on the internal electrode. Is laminated and pressed to form a sheet having a three-layer structure of a ceramics sheet and an internal electrode, and the sheets having the three-layer structure are laminated so that the internal electrodes are alternately led out to opposite ends, and pressure-bonded. A method for producing a laminated ceramic capacitor, comprising: obtaining a laminated body, then firing the laminated body, and forming external electrodes by electrically connecting the derived internal electrodes.
JP8831594A 1994-04-26 1994-04-26 Multilayered ceramic capacitor and its manufacture Pending JPH07297073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8831594A JPH07297073A (en) 1994-04-26 1994-04-26 Multilayered ceramic capacitor and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8831594A JPH07297073A (en) 1994-04-26 1994-04-26 Multilayered ceramic capacitor and its manufacture

Publications (1)

Publication Number Publication Date
JPH07297073A true JPH07297073A (en) 1995-11-10

Family

ID=13939507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8831594A Pending JPH07297073A (en) 1994-04-26 1994-04-26 Multilayered ceramic capacitor and its manufacture

Country Status (1)

Country Link
JP (1) JPH07297073A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6780494B2 (en) 2002-03-07 2004-08-24 Tdk Corporation Ceramic electronic device and method of production of same
JP2007095813A (en) * 2005-09-27 2007-04-12 Tdk Corp Manufacturing method of laminated capacitor
US7653973B2 (en) 2004-06-28 2010-02-02 Tdk Corporation Production method of multilayer electronic device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6780494B2 (en) 2002-03-07 2004-08-24 Tdk Corporation Ceramic electronic device and method of production of same
EP1347476A3 (en) * 2002-03-07 2006-08-23 TDK Corporation Ceramic electronic device and method of production of same
US7131174B2 (en) 2002-03-07 2006-11-07 Tdk Corporation Ceramic electronic device and method of production of same
US7653973B2 (en) 2004-06-28 2010-02-02 Tdk Corporation Production method of multilayer electronic device
JP2007095813A (en) * 2005-09-27 2007-04-12 Tdk Corp Manufacturing method of laminated capacitor

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