JP2000502496A - 電気スイッチング装置とこのスイッチング装置を利用した表示装置 - Google Patents
電気スイッチング装置とこのスイッチング装置を利用した表示装置Info
- Publication number
- JP2000502496A JP2000502496A JP10513325A JP51332598A JP2000502496A JP 2000502496 A JP2000502496 A JP 2000502496A JP 10513325 A JP10513325 A JP 10513325A JP 51332598 A JP51332598 A JP 51332598A JP 2000502496 A JP2000502496 A JP 2000502496A
- Authority
- JP
- Japan
- Prior art keywords
- film
- switching device
- state
- switching
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 239000012528 membrane Substances 0.000 claims abstract description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- 239000011159 matrix material Substances 0.000 claims description 18
- 229910052710 silicon Inorganic materials 0.000 claims description 17
- 239000010703 silicon Substances 0.000 claims description 17
- 239000000377 silicon dioxide Substances 0.000 claims description 9
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 239000004973 liquid crystal related substance Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000001393 microlithography Methods 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 241000255925 Diptera Species 0.000 description 1
- LFVLUOAHQIVABZ-UHFFFAOYSA-N Iodofenphos Chemical compound COP(=S)(OC)OC1=CC(Cl)=C(I)C=C1Cl LFVLUOAHQIVABZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005119 centrifugation Methods 0.000 description 1
- 210000001520 comb Anatomy 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 235000011118 potassium hydroxide Nutrition 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezoelectric relays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezoelectric relays
- H01H2057/006—Micromechanical piezoelectric relay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H67/00—Electrically-operated selector switches
- H01H67/22—Switches without multi-position wipers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9611199A FR2753565B1 (fr) | 1996-09-13 | 1996-09-13 | Dispositif de commutation electrique et dispositif d'affichage utilisant ce dispositif de commutation |
| FR96/11199 | 1996-09-13 | ||
| PCT/FR1997/001616 WO1998011586A1 (fr) | 1996-09-13 | 1997-09-12 | Dispositif de commutation electrique et dispositif d'affichage utilisant ce dispositif de commutation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000502496A true JP2000502496A (ja) | 2000-02-29 |
Family
ID=9495721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10513325A Pending JP2000502496A (ja) | 1996-09-13 | 1997-09-12 | 電気スイッチング装置とこのスイッチング装置を利用した表示装置 |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0861496A1 (fr) |
| JP (1) | JP2000502496A (fr) |
| FR (1) | FR2753565B1 (fr) |
| WO (1) | WO1998011586A1 (fr) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2002309106A1 (en) * | 2001-07-05 | 2003-02-24 | International Business Machines Coporation | Microsystem switches |
| EP1556876A1 (fr) | 2002-10-29 | 2005-07-27 | Matsushita Electric Industrial Co., Ltd. | Appareil de commutation, procede d'application de champ electrique et systeme de commutation |
| WO2004063090A2 (fr) * | 2003-01-13 | 2004-07-29 | Triad Sensors Inc. | Micro-actionneur bistable a deplacement eleve |
| KR100645640B1 (ko) * | 2003-11-03 | 2006-11-15 | 삼성전기주식회사 | 회절형 박막 압전 마이크로 미러 및 그 제조 방법 |
| EP1976015B1 (fr) | 2007-03-26 | 2014-09-10 | Semiconductor Energy Laboratory Co., Ltd. | Élément de commutation, son procédé de fabrication, et dispositif d'affichage incorporant cet élément de commutation |
| FR3018389B1 (fr) | 2014-03-06 | 2017-09-01 | St Microelectronics Sa | Procede de fabrication de lamelles bistables de courbures differentes |
| WO2016193412A1 (fr) * | 2015-06-03 | 2016-12-08 | Koninklijke Philips N.V. | Dispositif d'actionnement |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8103377A (nl) * | 1981-07-16 | 1983-02-16 | Philips Nv | Weergeefinrichting. |
| GB2215914B (en) * | 1988-03-17 | 1991-07-03 | Emi Plc Thorn | A microengineered diaphragm pressure switch and a method of manufacture thereof |
| DE3833158A1 (de) * | 1988-09-29 | 1990-04-12 | Siemens Ag | Bistabiler biegewandler |
| DE4444070C1 (de) * | 1994-12-10 | 1996-08-08 | Fraunhofer Ges Forschung | Mikromechanisches Element |
-
1996
- 1996-09-13 FR FR9611199A patent/FR2753565B1/fr not_active Expired - Fee Related
-
1997
- 1997-09-12 WO PCT/FR1997/001616 patent/WO1998011586A1/fr not_active Application Discontinuation
- 1997-09-12 JP JP10513325A patent/JP2000502496A/ja active Pending
- 1997-09-12 EP EP97919091A patent/EP0861496A1/fr not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO1998011586A1 (fr) | 1998-03-19 |
| EP0861496A1 (fr) | 1998-09-02 |
| FR2753565A1 (fr) | 1998-03-20 |
| FR2753565B1 (fr) | 1998-11-27 |
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