JP2000501842A - 多次元容量変換器 - Google Patents
多次元容量変換器Info
- Publication number
- JP2000501842A JP2000501842A JP9522780A JP52278097A JP2000501842A JP 2000501842 A JP2000501842 A JP 2000501842A JP 9522780 A JP9522780 A JP 9522780A JP 52278097 A JP52278097 A JP 52278097A JP 2000501842 A JP2000501842 A JP 2000501842A
- Authority
- JP
- Japan
- Prior art keywords
- force
- converter
- plate
- transducer
- pickup
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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Classifications
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- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/22—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G7/00—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups
- G01G7/06—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups by electrostatic action
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/168—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using counterbalancing forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
- G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/36—DC mode
- G01Q60/366—Nanoindenters, i.e. wherein the indenting force is measured
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/003—Generation of the force
- G01N2203/005—Electromagnetic means
- G01N2203/0051—Piezoelectric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/026—Specifications of the specimen
- G01N2203/0286—Miniature specimen; Testing on microregions of a specimen
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
- G01N2203/0647—Image analysis
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/872—Positioner
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Power Engineering (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Electromagnetism (AREA)
- Nanotechnology (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Measuring Fluid Pressure (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.高精度多次元変換器であって、 駆動板に対して相対移動可能に取り付けられたピックアップ板を有し、力ま たは運動および/または検出力、重量あるいは位置を第1の方向に付与する第1 の容量変換器と、 駆動板に対して相対移動可能に取り付けられたピックアップ板を有し、力ま たは運動および/または検出力、重量あるいは位置を第2の方向に付与する第2 の容量変換器と、 を備える高精度多次元変換器。 2.前記各第1及び第2変換器は、前記ピックアップ板から遠隔にある物体と 前記ピックアップ板との間に力を伝達する手段を含む請求項1に記載の変換器。 3.前記駆動板に対する前記ピックアップ板の相対位置に応答して当該相対位 置に比例する出力信号を供給する手段を更に備える請求項2に記載の変換器。 4.前記各ピックアップ板を選択的に制御する手段を更に備える請求項1に記 載の変換器。 5.前記各ピックアップ板を選択的に制御する手段は、前記ピックアップ板を 介して前記遠隔にある物体に力を選択的に付与する手段を更に含む請求項4に記 載の変換器。 6.前記ピックアップ板を介して前記遠隔にある物体に力を選択的に付与する 手段は、静電作動を含むこと請求項5に記載の変換器。 7.前記各ピックアップ板を選択的に制御する手段は、各変換器に結合された 静電アクチュエータを有する制御装置を含む請求項4に記載の変換器。 8.移動可能に取り付けられたピックアップ板を有し、力または運動および/ または検出力、重量あるいは位置を第3の方向に付与する第3の容量変換器を更 に備える請求項1に記載の変換器。 9.駆動板に対して相対移動可能に取り付けられたピックアップ板を有し、力 または運動および/または検出力、重量あるいは位置を前記第2の方向に付与す る第4の容量変換器を更に備える請求項8に記載の変換器。 10.駆動板に対して相対移動可能に取り付けられたピックアップ板を有し、力 や運動および/または検出力、重量あるいは位置を前記第2の方向に付与する第 3の容量変換器を更に備える請求項1に記載の変換器。 11.高精度多次元変換器であって、 駆動板に対して相対移動可能に取り付けられたピックアップ板を有し、第1 の方向の力、重量あるいは位置を検出する第1の容量変換器と、 駆動板に対して相対移動可能に取り付けられたピックアップ板を有し、第2 の方向の力、重量あるいは位置を検出する第2の容量変換器と、 前記各ピックアップ板を遠隔にある物体に結合する手段と、 前記検出された力、重量あるいは位置に比例する出力信号を発生する手段と 、 を備える高精度多次元変換器。 12.前記各ピックアップ板の位置および/または各ピックアップ板が発生する 力を選択的に制御する手段を更に備える請求項11に記載の変換器。 13.前記位置および/または力を選択的に制御する手段は、静電作動を含む請 求項12に記載の変換器。 14.前記第2変換器と類似した第3の変換器を含み、前記第2の方向のドリフ トを補正する手段を更に備える請求項12に記載の変換器。 15.駆動板に対して相対移動可能に取り付けられたピックアップ板を有し、第 3の方向の力、重量あるいは位置を検出する第3の容量変換器を更に備える請求 項11に記載の変換器。 16.走査プローブ型顕微鏡装置における高精度多次元変換器であって、 駆動板に対して相対移動可能に取り付けられたピックアップ板を有し、力ま たは運動および/または検出力、重量あるいは位置を第1の方向に付与する第1 の容量変換器と、 駆動板に対して相対移動可能に取り付けられたピックアップ板を有し、力ま たは運動および/または検出力、重量あるいは位置を第2の方向に付与する第2 の容量変換器とを備える高精度多次元変換器。 17.前記各第1及び第2変換器は、前記ピックアップ板から遠隔にある物体と 前記ピックアップ板との間に力を伝達する手段を含む請求項16に記載の変換器 。 18.前記駆動板に対する前記ピックアップ板の相対位置に応答して当該相対位 置に比例する出力信号を供給する手段を更に備える請求項17に記載の変換器。 19.前記各ピックアップ板を選択的に制御する手段を更に備える請求項16に 記載の変換器。 20.前記各ピックアップ板を選択的に制御する手段は、前記ピックアップ板を 介して前記遠隔にある物体に力を選択的に付与する手段を更に備える請求項19 に記載の変換器。 21.前記ピックアップ板を介して前記遠隔にある物体に力を選択的に付与する 手段は、静電作動を含む請求項20記載の変換器。 22.前記各ピックアップ板を選択的に制御する手段は、各変換器に結合された 静電アクチュエータを有する制御装置を含む請求項19に記載の変換器。 23.移動可能に取り付けられたピックアップ板を有し、力や運動および/また は検出力、重量あるいは位置を第3の方向に付与する第3の容量変換器を更に備 える請求項16に記載の変換器。 24.移動可能に取り付けられたピックアップ板を有し、力または運動および/ または検出力、重量あるいは位置を前記第2の方向に付与する第3の容量変換器 を更に備える請求項16に記載の変換器。 25.試料のマイクロメカニカル試験方法であって、 試料を載置する工程と、 高精度多次元容量変換器を用いてマイクロメカニカル試験を遂行する工程と を備える械試験方法。 26.前記多次元容量変換器を用いて前記試料を所定の位置に作像する工程を更 に備える請求項25に記載の方法。 27.前記多次元容量変換器を用いてマイクロメカニカル試験を遂行する工程は 、 力または運動および/または検出力、重量あるいは位置を第1の方向に付与 する工程と、 力または運動および/または検出力、重量あるいは位置を第2の方向に付与 する工程と、 を更に備える請求項25に記載の方法。 28.前記高精度多次元容量変換器を用いてマイクロメカニカル試験を遂行する 工程は、力または運動および/または検出力、重量あるいは位置を第3の方向に 付与する工程を更に備える請求項27に記載の方法。 29.尖端に対して試料を相対移動させるための圧電走査装置を有する走査プロ ーブ型顕微鏡装置であって、 駆動板に対して相対移動可能に取り付けられたピックアップ板を有し、第 1の方向の力、重量または位置を検出する第1の容量変換器と、 駆動板に対して相対移動可能に取り付けられたピックアップ板を有し、第 2の方向の力、重量または位置を検出する第2の容量変換器と、 を有する多次元変換器を含む表面作像ならびに多軸力および/または変位測 定手段と、 前記各ピックアップ板を遠隔にある物体に結合する手段と、 検出された前記力、重量または位置に比例する出力信号を発生する手段と、 を備える走査プローブ型顕微鏡装置。 30.多軸力および/または変位を付与する手段を更に備える請求項29に記載 の装置。 31.走査プローブ型顕微鏡装置であって、 多次元容量変換器と、 当該変換器に結合されて表面作像ならびに多軸力および/または変位測定を 行う手段と、 前記変換器に結合されて多軸力および/または変位を付与する手段と、 を備える走査プローブ型顕微鏡装置。 32.高解像度の表面作像をし、かつ、マイクロメカニカル特性試験を遂行する ための装置であって、 プローブと、 多次元変換器を含み、前記プローブと試料との間に相対運動を与える走査手 段と、 データ取得及び制御システムと静電制御装置とを含み、前記多次元変換器に 結合された制御装置と、 を備える装置。 33.前記制御装置に結合されたビデオディスプレイモニターと、前記制御装置 に結合された操作盤とを更に備える請求項32に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US579,996 | 1990-09-11 | ||
US08/579,996 US5661235A (en) | 1993-10-01 | 1995-12-20 | Multi-dimensional capacitive transducer |
PCT/US1996/017655 WO1997022845A1 (en) | 1995-12-20 | 1996-10-31 | Multi-dimensional capacitive transducer |
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JP2007241895A Division JP2008070373A (ja) | 1995-12-20 | 2007-09-19 | 多次元容量変換器 |
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JP2000501842A true JP2000501842A (ja) | 2000-02-15 |
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Application Number | Title | Priority Date | Filing Date |
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JP9522780A Pending JP2000501842A (ja) | 1995-12-20 | 1996-10-31 | 多次元容量変換器 |
JP2007241895A Pending JP2008070373A (ja) | 1995-12-20 | 2007-09-19 | 多次元容量変換器 |
Family Applications After (1)
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JP2007241895A Pending JP2008070373A (ja) | 1995-12-20 | 2007-09-19 | 多次元容量変換器 |
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US (2) | US5661235A (ja) |
EP (1) | EP0868644B1 (ja) |
JP (2) | JP2000501842A (ja) |
AT (1) | ATE272826T1 (ja) |
DE (1) | DE69633067T2 (ja) |
WO (1) | WO1997022845A1 (ja) |
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JP2009531656A (ja) * | 2006-03-13 | 2009-09-03 | アサイラム リサーチ コーポレーション | ナノ圧子 |
JP2013525798A (ja) * | 2010-04-30 | 2013-06-20 | ヒシトロン・インコーポレイテッド | コムドライブを備えた2次元memsトライボメータ |
US9157845B2 (en) | 2010-04-30 | 2015-10-13 | Hysitron Incorporated | 2-D MEMS tribometer with comb drives |
JP2016122015A (ja) * | 2010-04-30 | 2016-07-07 | ヒシトロン・インコーポレイテッドHysitron, Incorporated | コムドライブを備えた2次元memsトライボメータ |
US20180038749A1 (en) | 2016-08-03 | 2018-02-08 | Toyota Jidosha Kabushiki Kaisha | Surface pressure measuring device |
US10365175B2 (en) | 2016-08-03 | 2019-07-30 | Toyota Jidosha Kabushiki Kaisha | Surface pressure measuring device |
Also Published As
Publication number | Publication date |
---|---|
JP2008070373A (ja) | 2008-03-27 |
US5869751A (en) | 1999-02-09 |
DE69633067T2 (de) | 2005-10-06 |
EP0868644A1 (en) | 1998-10-07 |
EP0868644B1 (en) | 2004-08-04 |
WO1997022845A1 (en) | 1997-06-26 |
EP0868644A4 (en) | 1999-12-29 |
DE69633067D1 (de) | 2004-09-09 |
ATE272826T1 (de) | 2004-08-15 |
US5661235A (en) | 1997-08-26 |
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