JP2000354971A - Manufacture of polishing body and polishing body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent occurrence of a warp in product and improve durability by making a binder large in Young's modulus usable in manufacturing a polishing body made by providing an abrasive layer on a support body. SOLUTION: An abrasive layer 3 is formed on material by applying a coating liquid 5 containing an abrasive fine powder and a binder on a support body 2, a rolled material 10 wound into a roll shape with the abrasive layer 3 put outside is left as it is for 24 hours or more under a prescribed atmosphere, after that the rolled material 10 is blanked to form a polishing body of a prescribed shape, and then a flat polishing body is provided by correcting curled deformation due to drying shrinkage of the abrasive layer 3 with winding curl of the material 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a polishing body having a polishing layer containing a fine abrasive powder and a binder on a support, which is used for applications such as surface polishing of a magnetic head and the like, and this production method. The present invention relates to a polishing body obtained by the method, and more particularly to a treatment after applying a coating liquid on a support and providing a polishing layer.

[0002]

2. Description of the Related Art Conventionally, for polishing a surface of an object to be polished such as a magnetic head, for example, a polishing sheet such as a polishing sheet or a polishing disk having a polishing layer in which fine abrasive powder is dispersed in a binder is used. For example, these polishing bodies are set on, for example, a support table and brought into contact with an object to be polished to perform polishing.

In order to form the above-mentioned polishing layer on a support, a coating solution comprising fine abrasive powder, a binder, a solvent and the like is applied continuously on the support and then dried. The polishing layer is cured, and then wound up and formed into polishing bodies of various shapes.

[0004]

In order to improve the durability of the above-mentioned polishing body, a binder having a large Young's modulus after curing is used for the purpose of strengthening the coating film of the polishing layer. When used, there is a problem that the drying shrinkage of the polishing layer increases, and a polishing body such as a polishing sheet produced from the polishing layer warps.

[0005] The warpage of the polishing body is caused by the curling deformation of the polishing layer surface inside due to drying shrinkage of the polishing layer coating film. Then, when the raw material having the polishing layer applied on the continuous support is wound up in a roll shape as usual with the polishing layer inward so as to protect the polishing layer or so that the display on the back side can be seen, the roll shape is obtained. The curl of the material promotes the above-described curl deformation, and a large warpage occurs in a polishing body such as a polishing sheet formed from the material.

When the warped polishing body is used by setting it on a support such as a rotary table, the polishing layer surface is not flat, but irregularities are generated, and the polishing layer is brought into constant contact with the object to be polished. As a result, the polishing characteristics deteriorate, and the surface properties after polishing are impaired.

By the way, when a polishing body having a predetermined shape is set on the support table with the polishing surface facing outward (upper surface),
Normally, water or a surfactant is used for water-pasting, that is, water or a surfactant-containing water is interposed between the front surface of the support and the back surface of the polishing body to fix and adhere to each other.

However, if the polishing body is warped as described above, it becomes difficult to easily and flatly fix the polishing body on a support table by water bonding using the above-mentioned water or a surfactant. In addition, the surface of the polishing layer is not flat, which causes the above-mentioned polishing problem.

[0009] From the above point, it is possible to correct the warp by fixing the warped polishing body on the support table with a double-sided tape or the like, but there is a step at the portion where the double-sided tape is stuck. Causes polishing failure. In addition, the above point can be solved by applying a double-sided tape and an adhesive to the entire surface of the abrasive body and fixing it. However, the work of attaching the abrasive body on the support and the peeling work for replacement become complicated, and the workability is increased. And the polishing operation efficiency becomes disadvantageous.

In view of the above, the present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to provide a method for manufacturing a polishing body and a polishing body which are designed to improve durability while suppressing warpage. is there.

[0011]

A method for manufacturing a polishing body according to the present invention, which has solved the above-mentioned problems, comprises a method of applying a coating solution containing fine abrasive powder and a binder on a support to form a material having a polishing layer formed thereon. Winding the roll material with the polishing layer on the outside, leaving the roll material in a predetermined atmosphere for 24 hours or more, and then forming a polishing body of a predetermined shape from the roll material. is there.

It is preferable that the roll material is left in a heating atmosphere of 30 ° C. or more for 24 hours or more. Further, it is desirable to form a sheet-like abrasive by punching the roll-shaped material.

[0013] Further, the polishing body of the present invention is a polishing body having a polishing layer comprising a fine abrasive powder and a binder on a support, wherein the polishing layer containing the fine abrasive powder and the binder is formed on a continuous support. It is characterized in that it is formed into a predetermined shape from a roll-shaped material which is wound up with the polishing layer outside after being applied and left in a predetermined atmosphere for 24 hours or more.

The polishing body is suitable as a polishing sheet set on a support table. The thickness of the support is 25 μ
m to 200 μm, and the thickness of the polishing layer is 10 μm to
Preferably, it is 150 μm.

Further, it is preferable that the polishing layer has an orange peel-like minute concave portion formed by Benard convection when a polishing layer coating liquid is applied on the surface of the polishing layer.

The polishing layer has a Young's modulus of 20 kg / mm ² or more, and the support has a Young's modulus of 100 to 1000 kg / mm ^2.
mm ² is preferred.

[0017]

According to the production method of the present invention as described above,
After a polishing layer is formed by applying a coating liquid for a polishing layer on a support, the roll-shaped material wound up into a roll with the polishing layer facing outward is left in a predetermined atmosphere for at least 24 hours, and then has a predetermined shape. By forming the abrasive body of the above, the abrasive layer is wound in a direction opposite to the curl deformation direction due to drying shrinkage of the abrasive layer with the abrasive layer coating surface facing outward, and after leaving for 24 hours or more, The curl deformation can be corrected, and a flat abrasive body can be obtained when the abrasive body is formed from this roll-shaped material.

According to the polishing body of the present invention, since a warp does not occur, a binder having a large Young's modulus can be easily and flatly installed by setting the polishing layer on a support base or the like with the polishing layer on the upper side. When used, the durability is improved and good polishing becomes possible.

When the roll-shaped material is left in a heating atmosphere of 30 ° C. or more for 24 hours or more, by applying heat, it is possible to satisfactorily correct drying shrinkage of the polishing layer and significantly reduce the occurrence of warpage. You.

The polishing body according to the present invention has characteristics suitable as a polishing sheet set on a support table. Particularly, a support having a thickness of 25 μm to 200 μm is preferable.
If it is less than μm, it is unsuitable for practical use as a polishing body such as a polishing sheet. If it exceeds 200 μm, the strength of the support is increased and there is little fear of warpage, and the above treatment becomes unnecessary.
The thickness of the polishing layer is preferably 10 μm to 150 μm. If the thickness is less than 10 μm, there is no fear of warping due to drying shrinkage of the polishing layer, and the formation of a polishing layer thicker than 150 μm is practically unnecessary.

In the polishing layer having fine orange peel-shaped concave portions on the surface thereof, curl deformation due to drying shrinkage of the polishing layer is reduced by the fine concave portions.
Warpage can be reduced.

Further, the polishing layer has a Young's modulus of 20 kg /
mm ² or more is preferable. If it is lower than this, the effect of improving durability is small and there is no fear that warpage occurs. Further, the Young's modulus of the support is 100 to 1000 kg / mm.
² is preferable, and is preferable in that occurrence of warpage is reduced.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of a polishing body and a method for manufacturing the same according to the present invention will be described, and the present invention will be described in more detail.

As shown in FIG. 2, the abrasive body 1 as a product
Has a thickness of 25 μm to 20 due to a polyester film or the like.
A polishing layer 3 containing fine abrasive powder and a binder is laminated on a support 2 of 0 μm to a thickness of 10 μm to 150 μm, and is formed in a polishing sheet of a predetermined shape such as a disk. This polishing body 1 is fixed flatly on a support 15 such as a rotating table by water or a water-based surfactant. The Young's modulus of the support 2 is 100
１０００1000 kg / mm ² , the Young's modulus of the polishing layer 3 is 20
Kg / mm ² or more.

As shown in FIG. 1, the basic manufacturing process of the abrasive body 1 is as follows: the support 2 is unwound from a roll and is run at a predetermined running speed. A step of applying a polishing layer coating liquid 5 containing a fine abrasive powder, a binder, a solvent, and the like to a predetermined thickness with a blade coater 6 or the like to apply the polishing layer 3; Drying the polishing layer 3 by a drying device 7 having two drying zones 7a to 7c.

In the drying step, the polishing layer 3 applied on the support 2 gradually decreases in thickness, and is hardened to the above-mentioned predetermined dry thickness. After the drying, the support 2 is wound inside and the polishing layer 3 is wound outside to form a roll material 10. The rolled material 10 that has been wound is placed in a predetermined atmosphere (preferably a heating atmosphere of 30 ° C. or higher) under
Leave for more than an hour, and wait for the polishing layer 3 to sufficiently cure.

Thereafter, the abrasive body 1 such as the abrasive sheet of the above-mentioned predetermined shape is formed by punching the roll-shaped material 10 or the like.

The surface of the polishing layer 3 is provided with orange peel-shaped minute recesses formed by Benard convection based on the temperature difference of the coating liquid when the coating liquid 5 for the polishing layer is applied. Is also good.

The Benard convection in the formation of the orange peel-shaped minute recesses on the surface of the polishing layer 3 is such that when a horizontal liquid layer is given a temperature gradient up and down, if the temperature gradient exceeds a certain critical value, the liquid layer becomes four to four. It is divided into hexagonal cell-like vortex regions (Benard cells), and an upward flow occurs at the center and a downward flow occurs at the peripheral portion, and a predetermined polishing layer coating liquid 5 is applied on the support 2. When drying, the above-mentioned Benard convection is generated. Then, on the surface of the polishing layer after drying, the peripheral boundary portion of each Benard cell becomes a notch-shaped concave portion, a point-shaped concave portion is also formed at the center portion, and the entire surface forms an orange peel-shaped minute concave portion. Things
The form (the size, depth, width, etc., of the cell) of the minute concave portion varies depending on the composition of the polishing layer coating solution, drying conditions, and the like. Regarding the Benard convection, C. Patton, Kyoritsu Shuppan Publishing, “Flow of Paint and Dispersion of Pigments,” Nos. 346-3
The description on page 57, and for specific matters, see Patent No. 25
Known contents described in, for example, JP-A-71750 can be referred to.

The fine abrasive powder used in the polishing layer of the present invention has a Mohs hardness of 6 to 10 and contains at least 60% of the total amount of the powder. As the abrasive, generally, a material having an abrasive action or a polishing action, α-alumina, γ-alumina,
α, γ-alumina, fused alumina, silicon carbide, chromium oxide, corundum, artificial diamond, diamond, α
-Iron oxide, silicon nitride, boron nitride, molybdenum carbide, boron carbide, tungsten carbide, titanium carbide, silica,
Materials such as zirconia, titanium oxide, cerium oxide, red iron oxide, garnet, and the like, mainly having a Mohs hardness of 7 or more can be used in combinations of 1 to 4 types. These abrasives have an average particle size of 0.1 to 100 μm. These abrasives are abrasives 1 in the case of a polishing layer.
The binder is used in the range of 10 to 1000 parts by weight based on 00 parts by weight.

Specific examples of the abrasive include AKP1, AKP15, AKP20, AKP30, and AK manufactured by Sumitomo Chemical Co., Ltd.
P50, AKP80, Hit50, Hit100 and the like. These are described in JP-B-52-28642.
No., JP-B-49-39402, JP-A-63-9882
8, U.S. Pat. No. 3,687,725, U.S. Pat.
No. 07, U.S. Pat. No. 3,041,196, U.S. Pat.
066, U.S. Pat. No. 3,630,910, U.S. Pat.
No. 3412, US Pat. No. 4,117,190, British Patent 11
No. 45349 and West German Patent No. 853211.

As the binder used in the polishing layer of the present invention, conventionally known thermoplastic resins, thermosetting resins, reactive resins, electron beam curable resins, ultraviolet ray curable resins, visible ray curable resins, and the like can be used. Is used.

As the thermoplastic resin, the softening temperature is 200
C. or lower, having an average molecular weight of 10,000 to 300,000 and a degree of polymerization of about 50 to 2,000, more preferably 20 to 2,000.
It is about 0 to 800. For example, vinyl chloride vinyl acetate copolymer, vinyl chloride copolymer, vinyl chloride vinyl acetate vinyl alcohol copolymer, vinyl chloride vinyl alcohol copolymer, vinyl chloride vinylidene copolymer, vinyl acrylonitrile copolymer, acrylic acid Ester acrylonitrile copolymer, acrylate vinylidene chloride copolymer, acrylate styrene copolymer, methacrylate acrylonitrile copolymer,
Methacrylic acid ester vinylidene chloride copolymer, methacrylic acid ester styrene copolymer, urethane elastomer, nylon-silicone resin, nitrocellulose-polyamide resin, polyfucca vinyl, vinylidene chloride acrylonitrile copolymer, butadiene acrylonitrile copolymer, polyamide Resins, polyvinyl butyral, cellulose derivatives (cellulose acetate butyrate, cellulose diacetate, cellulose triacetate, cellulose propionate, nitrocellulose, ethyl cellulose, methyl cellulose, propyl cellulose, methyl ethyl cellulose, carboxymethyl cellulose,
Acetylcellulose), various synthetic rubber-based thermoplastic resins such as styrene-butadiene copolymer, polyester resin, polycarbonate resin, chlorovinyl ether acrylate copolymer, amino resin, polyamide resin, and mixtures thereof. .

Examples of these resins are described in JP-B-37-68.
No. 77, JP-B-39-12528, JP-B-39-19
No. 282, No. 40-5349, No. 40-20
No. 907, JP-B-41-9463, JP-B-41-14
No. 059, JP-B-41-16985, JP-B-42-6
No. 428, JP-B-42-11621, JP-B-43-4
No. 623, JP-B-43-15206, JP-B-44-2
No. 889, No. 44-17947, No. 44-1
No. 8232, No. 45-14020, No. 45-
14500, JP-B-47-18573, JP-B-47
-22063, JP-B-47-2264, JP-B-4
7-22068, JP-B-47-22069, JP-B-47-22070, JP-B-47-27886, JP-A-57-133521, JP-A-58-137133, JP-A-58-166533, and JP-A-58-166533. 58-222433,
JP-A-59-58642 and the like, U.S. Pat.
And U.S. Pat. No. 4,752,530.

The thermosetting resin or the reactive resin has a molecular weight of 200,000 or less in the state of a coating liquid, and becomes infinite by a reaction such as condensation or addition by heating and humidifying after coating and drying. Is preferred. Among these resins, those which do not soften or melt before the resin is thermally decomposed are preferable. Specifically, for example, a phenol resin, a phenoxy resin, an epoxy resin, a polyurethane resin, a polyester resin, a polyurethane polycarbonate resin, a urea resin, a melamine resin, an alkyd resin, a silicone resin, an acrylic reaction resin (an electron beam curing resin), and an epoxy-polyamide Resin, nitrocellulose melamine resin, mixture of high molecular weight polyester resin and isocyanate prepolymer, mixture of methacrylate copolymer and diisocyanate prepolymer, mixture of polyester polyol and polyisocyanate, urea formaldehyde resin, low molecular weight glycol / high molecular weight A diol / triphenylmethane triisocyanate mixture, a polyamine resin, a polyimine resin, and mixtures thereof.

Examples of these resins are described in JP-B-39-810.
No. 3, JP-B-40-9779, JP-B-41-7192
No., JP-B-41-8016, JP-B-41-14275
No., JP-B-42-18179, JP-B-43-1208
No. 1, Japanese Patent Publication No. 44-28023, Japanese Patent Publication No. 45-145
No. 01, JP-B-45-24902, JP-B-46-13
103, JP-B-47-2265, JP-B-47-2
No. 2066, JP-B-47-22067, JP-B-47-
22072, JP-B-47-22073, JP-B-47
-28045, JP-B-47-28048, JP-B-4
It is described in publications such as 7-28922.

These thermoplastic resins, thermosetting resins and reactive resins have a functional group other than the main functional group, such as carboxylic acid (COOM), sulfinic acid, sulfenic acid, sulfonic acid (SO ₃ M) and phosphoric acid (PO ₃ M). (OM) (OM)), phosphonic acid, sulfuric acid (OSO ₃ M), and acidic groups such as ester groups thereof (M is H, an alkali metal, an alkaline earth metal,
Hydrocarbon groups), amino acids; aminosulfonic acids, sulfuric acid or phosphoric acid esters of amino alcohols, amphoteric groups such as alkyl betaine, amino groups, imino groups, imide groups,
An amide group, etc., a hydroxyl group, an alkoxyl group, a thiol group, an alkylthio group, a halogen group (F, Cl, Br,
I) a silyl group, a siloxane group, an epoxy group, an isocyanato group, a cyano group, a nitrile group, an oxo group, an acryl group, and a phosphine group. ^-6 eq ~ 1 × 10 ^-2
It is preferable to include eq.

The polyisocyanate as a curing agent used in the polishing layer of the present invention includes tolylene diisocyanate, 4,4'-diphenylmethane diisocyanate, hexamethylene diisocyanate, xylylene diisocyanate, naphthylene-1,5-diisocyanate, o-
Isocyanates such as toluidine diisocyanate, isophorone diisocyanate, triphenylmethane triisocyanate, isophorone diisocyanate, products of the isocyanates and polyalcohols, polyisocyanates of 2 to 10-mers produced by condensation of isocyanates, polyisocyanates and polyurethanes And those whose terminal functional groups are isocyanates can be used. The average molecular weight of these polyisocyanates is preferably 100 to 20,000.

Commercially available trade names of these polyisocyanates include Coronate L, Coronate HL, Coronate 2030, Coronate 2031, Millionate MR, Millionate MTL (all manufactured by Nippon Polyurethane Co., Ltd.), Takenate D-102, and Takenate D-110.
N, Takenate D-200, Takenate D-202, Takenate 300S, Takenate 500 (manufactured by Takeda Pharmaceutical Co., Ltd.), Sumidur T-80, Sumidur 44S, Sumidur PF, Sumidur L, Sumidur N, Desmodur L , Death module IL, death module N, death module HL, death module T65, death module 15, death module R, death module R
F, death module SL, death module Z4273
(Manufactured by Sumitomo Bayer Co., Ltd.), and these can be used alone or in combination of two or more by utilizing the difference in curing reactivity.

For the purpose of accelerating the curing reaction, a hydroxyl group (butanediol, hexanediol, having a molecular weight of 100
A compound having an amino group (such as monomethylamine, dimethylamine, or trimethylamine), a metal oxide catalyst, or a catalyst such as iron acetylacetonate can also be used in combination. It is desirable that these compounds having a hydroxyl group or an amino group are polyfunctional. These polyisocyanates have a total amount of binder resin and polyisocyanate of 10 in the polishing layer and the back layer.
It is preferably used in an amount of 2 to 70 parts by weight per 0 parts by weight, more preferably 5 to 50 parts by weight. Examples of these are disclosed in JP-A-60-131622 and JP-A-61-741.
No. 38 and the like.

In addition, compounds having various functions are added to the polishing layer as additives. For example, a dispersant, a lubricant, an antistatic agent, an antioxidant, a fungicide, a coloring agent, a solvent, and the like are added.

The powdery lubricant used in the present invention includes graphite, molybdenum disulfide, boron nitride, graphite fluoride, calcium carbonate, barium sulfate, silicon oxide, titanium oxide, zinc oxide, tin oxide, and tungsten disulfide. Inorganic fine powder, acrylic styrene resin fine powder, benzoguanamine resin fine powder, melamine resin fine powder, polyolefin resin fine powder, polyester resin fine powder, polyamide resin fine powder, polyimide resin fine powder, polyimide resin fine powder There are resin fine powders such as ethylene resin fine powder.

Examples of the organic compound lubricant include silicone oils (dialkyl polysiloxane, dialkoxy polysiloxane, phenyl polysiloxane, fluoroalkyl polysiloxane (KF96, KF69 manufactured by Shin-Etsu Chemical Co., Ltd.).
)), Fatty acid-modified silicone oil, fluoroalcohol, polyolefin (polyethylene wax, polypropylene, etc.), polyglycol (ethylene glycol, polyethylene oxide wax, etc.), tetrafluoroethylene oxide wax, polytetrafluoroglycol, perfluoroalkyl ether, perfluoro Fatty acids, perfluoro fatty acid esters, perfluoroalkyl sulfates, perfluoroalkyl sulfonates, perfluoroalkylbenzene sulfonates, perfluoroalkyl phosphates, and other compounds containing fluorine or silicon, alkyl sulfates, alkyl sulfonates , Alkyl phosphonic acid triester,
Organic acids and organic acid ester compounds such as alkyl phosphonic acid monoesters, alkyl phosphonic acid diesters, alkyl phosphates, succinates, etc., triazaindolizine, tetraazaindene, benzotriazole, benzotriazine, benzodiazole, EDTA, etc. nitrogen·
Heterocyclic compound containing sulfur, having 10 to 40 carbon atoms
Consisting of a monobasic fatty acid of formula (I) and any one or more of monohydric or dihydric alcohols having 2 to 40 carbon atoms, trihydric alcohol, tetrahydric alcohol, and hexahydric alcohol Esters, fatty acid esters of monohydric to hexavalent alcohols having a total of 11 to 70 carbon atoms in total with monobasic fatty acids having 10 or more carbon atoms and carbon atoms of the fatty acids, 8 to 40 carbon atoms And fatty acid amides, fatty acid alkyl amides and aliphatic alcohols.

Specific examples of these compounds include butyl caprylate, octyl caprylate, ethyl laurate, butyl laurate, octyl laurate, ethyl myristate, butyl myristate, octyl myristate, 2-ethylhexyl myristate, Ethyl palmitate, butyl palmitate, octyl palmitate, 2 ethylhexyl palmitate, ethyl stearate, butyl stearate, isobutyl stearate, octyl stearate, 2 ethylhexyl stearate, amyl stearate, isoamyl stearate, 2 stearic acid
Ethylpentyl, 2-hexyldecyl stearate, isotridecyl stearate, stearic acid amide, alkyl stearate, butoxyethyl stearate,
Anhydrosorbitan monostearate, anhydrosorbitan distearate, anhydrosorbitan tristearate, anhydrosorbitan tetrastearate, oleyl oleate, oleyl alcohol, lauryl alcohol, montan wax, carnauba wax, etc. used alone or in combination it can.

The lubricant used in the present invention includes:
Lubricating oil additives can be used alone or in combination. Antioxidants known as rust inhibitors (metal chelates such as alkylphenol, benzotriazine, tetraazaindene, sulfamide, guanidine, nucleic acid, pyridine, amine, hydroquinone, EDTA, etc.) Agents), rust inhibitors (naphthenic acid, alkenyl succinic acid, phosphoric acid, dilauryl phosphate, etc.), oil agents (rapeseed oil, lauryl alcohol, etc.), extreme pressure agents (dibenzyl sulfide, tricresyl phosphate, tributyl) Phosphite, etc.), detergents / dispersants, viscosity index improvers, pour point depressants, foaming agents and the like. These lubricants are added in the range of 0.01 to 30 parts by weight based on 100 parts by weight of the binder. These are described in JP-B-43-23889 and JP-B-48-24.
No. 041, JP-B-48-18482, JP-B-44-1
No. 8221, JP-B-47-28043, JP-B-57-
No. 56132, JP-A-59-8136, JP-A-59-8136
No. 8139, JP-A-61-85621, U.S. Pat.
No. 23233, US Pat. No. 3470021, US Pat.
492,235, U.S. Pat. No. 3,497,411, U.S. Pat.
US Patent No. 4,552,794, IBM Technical
Disclosure Bulletin (IBM Technica
l Disclosure Bulletin) Vo
l. 9, No7, p779 (December 1966), Electronic (ELEKTRONIK) 1961 No1
2, p380, Handbook of Chemistry, Application, p954-967,
It is described in the publication of Maruzen shares in 1980.

As the dispersant and dispersing agent for the abrasive used in the present invention, caprylic acid, capric acid, lauric acid, myristic acid, palmitic acid, stearic acid, oleic acid, elaidic acid, linoleic acid, linolenic acid, C2 of stearic acid, behenic acid, maleic acid, phthalic acid, etc.
40 pieces of fatty acids (R ₁ COOH, R ₁ is carbon 1-39
Alkyl groups, phenyl groups, aralkyl groups), alkali metals (Li, Na, K, NH ₄ ^+, etc.) or alkaline earth metals (Mg, Ca, Ba, etc.) of the above fatty acids, Cu, P
Metallic soaps (copper oleate), fatty acid amides, lecithin (soybean oil lecithin) and the like comprising b. In addition, higher alcohols having 4 to 40 carbon atoms (butanol, octyl alcohol, myristyl alcohol, stearyl alcohol) and their sulfates, sulfonic acids,
Phenylsulfonic acid, alkylsulfonic acid, sulfonic acid ester, phosphoric acid monoester, phosphoric diester, phosphoric triester, alkylphosphonic acid, phenylphosphonic acid, amine compounds and the like can also be used. In addition, polyethylene glycol, polyethylene oxide, sulfosuccinic acid, metal salts of sulfosuccinic acid, sulfosuccinate, and the like can also be used. One or more of these dispersants are usually used, and one kind of the dispersant is added in an amount of 0.005 to 20 parts by weight based on 100 parts by weight of the binder. Regarding the method of using these dispersants, the dispersants may be pre-applied to the surface of the abrasive or the non-abrasive fine powder, or may be added during dispersion.
Such a thing is, for example, JP-B-39-28369,
JP-B-44-17945, JP-B-44-18221
No., JP-B-48-7441, JP-B-48-15001
No., JP-B-48-15002, JP-B-48-1636
No. 3, JP-B-49-39402, U.S. Pat.
No. 93 and No. 3470021.

The fungicides used in the present invention include 2- (4
-Thiazolyl) -benzimidazole, N- (fluorodichloromethylthio) -phthalimide, 10.10'-
Oxybisphenoxalcin, 2,4,5.6 tetrachloroisophthalonitrile, P-tolyldiiodomethylsulfone, triiodoallyl alcohol, dihydroacetoacid, mercury phenyloleate, bis (tributyltin) oxide, saltylani There are rides. Such a substance is described in, for example, "Microbial Disaster and Prevention Technology", Engineering Book, 1972, "Chemistry and Industry", 32, 904 (1979).

As the antistatic agent used in the present invention, carbon black can be used.
Thermal for rubber, black for color, acetylene black and the like can be used. Its specific surface area is 5-500
m ² / g, DBP oil absorption 10-400 ml / 100
g, pH 2-10, water content 0.1-10%, tap density 0.1-1 g / cm ² . As a specific example of this carbon black, BLACKPEARLS 2000, 1300, 1 manufactured by Cabot Corporation
000,900,800,700, manufactured by Mitsubishi Chemical Corporation:
650B, 950B, 3250B, 850, 900, 9
60,980,1000,2300,2400,260
0 and the like. In addition, carbon black that has been subjected to surface treatment with a dispersant or the like or graphitized with a resin can also be used.

As the antistatic agent other than carbon black used in the present invention, graphite, modified graphite,
Conductive powders such as carbon black graft polymer, tin oxide-antimony oxide, tin oxide, titanium oxide-tin oxide-antimony oxide; natural surfactants such as saponin; alkylene oxide-based, glycerin-based, glycidol-based, polyhydric alcohol, Nonionic surfactants such as polyhydric alcohol esters and alkylphenol EO adducts; higher alkylamines, cyclic amines, hydantoin derivatives, amidoamines, esteramides, quaternary ammonium salts, pyridine and other heterocycles, phosphoniums and sulfoniums Anionic surfactants containing acidic groups such as carboxylic acid, sulfonic acid, phosphonic acid, phosphoric acid, sulfate ester group, phosphonate ester, phosphate ester group; amino acids; aminosulfonic acids, sulfuric acid of amino alcohol or Phosphoric esters, amphoteric surfactants such as alkyl betaine type and the like are used.

Some of the examples of the surfactant compound which can be used as an antistatic agent are described in JP-A-60-28025, US Pat. Nos. 2,271,623, 2,224,472, and 22.
88226, 2676122, 2676924
Nos. 2,676,975, 2,691,566,27
27860, 2730498, 2742379
Nos. 2739891, 3068101, 31
No. 58484, No. 3201253, No. 32010191
Nos. 3,294,540, 3,415,649 and 34
No. 41413, No. 3444254, No. 3475174
No. 3,545,974, West German Patent Publication (OLS) 19
No. 42665, British Patent Nos. 1077317 and 1198
No. 450, Ryohei Oda et al., "Synthesis of Surfactants and Their Applications" (Maki Shoten, 1972 edition); W. "Surfes Active Age Entities" by Beili (Interscience Publication Corporation 1
985); P. Encyclopedia of Surfactive Agents, Vol. 2 (Chemical publishing company, 1964 edition) by Sisley; Surfactant Handbook, 6th printing (Sangyo Tosho Co., Ltd.,
December 20, 1966); Hideo Marumo, "Antistatic Agent"
Koshobo (1968) and the like.

These surfactants may be added alone or as a mixture. The amount of these surfactants used in the abrasive body is 0.01 to 10 parts by weight per 100 parts by weight of the abrasive. The amount used in the back layer is 10 binders.
It is 0.01 to 30 parts by weight per 0 parts by weight. These are used as antistatic agents, but are sometimes applied for other purposes such as improvement of dispersion, improvement of lubricity, coating aid, wetting agent, curing accelerator, and dispersion accelerator. .

As the organic solvent used in the dispersion, kneading and coating of the present invention, ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, isophorone and tetrahydrofuran in any ratio; methanol, ethanol, propanol and butanol , Isobutyl alcohol, isopropyl alcohol, alcohols such as methylcyclohexanol; methyl acetate,
Ester systems such as ethyl acetate, butyl acetate, isobutyl acetate, isopropyl acetate, ethyl lactate and glycol monoethyl ether; ether systems such as diethyl ether, tetrahydrofuran, glycol dimethyl ether, glycol monoethyl ether and dioxane; benzene, toluene, xylene, Tar-based (aromatic hydrocarbons) such as cresol, chlorobenzene, and styrene; chlorinated hydrocarbons such as methylene chloride, ethylene chloride, carbon tetrachloride, chloroform, ethylene chlorohydrin, and dichlorobenzene; NN-dimethylformaldehyde , Hexane and the like can be used. These solvents are generally used in two or more kinds at an arbitrary ratio. Further, a trace amount of impurities (polymer of the solvent itself, moisture, raw material components, etc.) may be contained in an amount of 1% by weight or less. An aqueous solvent (water, alcohol, acetone, etc.) can be used instead of the organic solvent.

The polishing layer is formed by dissolving the above composition and the like in a solvent by arbitrarily combining the above compositions and the like, coating the mixture on a support as a coating solution.
dry. As the material of the support, polyethylene terephthalate, polyesters such as polyethylene naphthalate, polyolefins such as polypropylene, cellulose derivatives such as cellulose triacetate and cellulose diacetate, vinyl resins such as polyvinyl chloride,
In addition to plastics such as polycarbonate, polyimide, polyamide, and polysulfone, metals such as aluminum and copper, and ceramics such as glass can also be used. Prior to coating, these supports may be subjected to corona discharge treatment, plasma treatment, undercoating treatment, heat treatment, dust removal treatment, metal deposition treatment, and alkali treatment. For these supports,
For example, West German Patent 3338854A, Japanese Patent Laid-Open No. 59-116
No. 926, JP-A-61-129731, U.S. Pat.
No. 88368; Yukio Mitsuishi, Textile and Industry, vol. 31, p5
0-55, 1975, and the like. The center line average surface roughness of these supports is 0.001 to 0.5 μm
(Cutoff value 0.25 mm) is preferred. In addition, the Young's modulus (F5 value) of these supports is determined in the width direction,
100 to 1000 kg / mm ² (1 kg / mm)
m ² = 9.8 Pa) can be selected.

The method of dispersion and kneading is not particularly limited, and the order of addition of each component (resin, powder, lubricant, solvent, etc.),
The addition position during dispersion / kneading, the dispersion temperature (0 to 80 ° C.) and the like can be appropriately set. For the preparation of the abrasive paint a usual kneading machine, for example, a two-roll mill, a three-roll mill,
Ball mill, pebble mill, tron mill, sand grinder, Szegvari attritor,
High-speed impeller, disperser, high-speed stone mill, high-speed impact mill, disper, kneader, high-speed mixer, ribbon blender, co-kneader, intensive mixer, tumbler, blender, disperser, homogenizer, single screw extruder, twin screw extruder And an ultrasonic disperser. Usually, a plurality of these dispersing and kneading machines are provided for dispersing and kneading, and the treatment is continuously performed. For more information on kneading and dispersing technology,
T. C. PATTON (T.C.Patton) "P
aint Flow and Pigment Dis
version "(Paint Flow and Pigment Dispersion) 1964 John Wile
Published by y & Sons (John Wheelie and
Sands)) and Shinichi Tanaka, Industrial Materials, Vol. 25, 37 (19
77) and the cited reference of the book. As an auxiliary material for the dispersion and kneading, a steel ball, a steel bead, a ceramic bead, a glass bead, and an organic polymer bead having an equivalent sphere diameter of 10 cmφ to 0.05 mmφ can be used in order to efficiently promote the dispersion and kneading. These materials are not limited to spherical shapes. It is also described in specifications such as U.S. Patent Nos. 2,581,414 and 2,855,156. Also in the present invention, a polishing layer coating liquid can be prepared by kneading and dispersing according to the method described in the above book or the cited document of the book.

As a method of applying the above-mentioned coating liquid for a polishing layer on a support, the viscosity of the coating liquid is adjusted to 1 to 20,000 centistokes (25 ° C.), and an air doctor coater, a blade coater, an air knife coater, a squeeze Coater, impregnated coater, reverse roll coater, transfer roll coater, gravure coater, kiss coater, cast coater, spray coater, rod coater, forward rotation roll coater, curtain coater, extrusion coater, bar coater, lip coater, etc. can be used, and other methods It is also possible to provide specific descriptions of these in “Coating Engineering” published by Asakura Shoten, pages 253 to 2
This is described in detail on page 77 (issued in 1963, 1963). When the polishing layer has a multilayer structure, simultaneous multilayer coating, sequential multilayer coating, or the like may be performed. These are described, for example, in JP-A-57-123532 and JP-B-62-2.
No. 37451, JP-A-59-142741,
This is disclosed in the specification of JP-A-59-165239.

By such a method, about 1 to about
The coating liquid applied at about 200 μm is 20 ° C. (room temperature)
While drying at ~ 130 ° C. in multiple stages as shown in FIG.
The formed polishing layer is dried to a thickness of about 10 to 150 μm. Then, if necessary, a surface smoothing process is performed to reduce the center line average surface roughness of the polishing layer or the back layer to 0.001 to 1
The thickness is 0 μm, and the film is wound into a roll with the polishing layer on the outside and the support on the inside. These manufacturing methods are used for
It is desirable that the steps of surface treatment, kneading / dispersing, coating / drying, smoothing treatment, heat treatment, EB treatment, ultraviolet curing treatment, surface polishing treatment, and winding up be performed continuously. These are described, for example, in Japanese Patent Publication No. 40-23625 and Japanese Patent Publication No. 39-2.
No. 8368, Japanese Patent Publication No. 47-38802, British Patent No. 1191424, Japanese Patent Publication No. 48-11336, JP-A-49-53631, JP-A-50-1120.
No. 05, JP-A-51-77303, JP-B-52-17
No. 404, JP-A-60-70532, JP-A-2-
No. 2,656,672, U.S. Pat. No. 3,473,960, U.S. Pat. No. 4,728,569, U.S. Pat. No. 4,746,542, and the like. The method disclosed in Japanese Patent Publication No. 41-13181 is considered to be a basic and important technique in this field.

The roll-shaped material wound as described above is
As described above, a predetermined atmosphere condition (for example, 30 ° C. to 100 ° C.)
At about ℃ and under humidification) for about 24 hours to 72 hours, and then the rolled material is punched to form a polishing body such as a polishing sheet having a predetermined shape. It is desirable to burnish and / or clean the raw material or the abrasive body before processing into the abrasive body. The varnish smoothes the protrusions on the polished surface with a hard material such as a sapphire blade, a razor blade, a super hard material blade, a diamond blade, or a ceramic blade. The Mohs hardness of these materials is preferably 8 or more, but is not particularly limited as long as protrusions can be removed. The shape of these materials does not need to be a blade in particular, and shapes such as a square shape, a round shape, and a wheel (these materials may be provided around a rotating cylindrical shape) can be used. The cleaning of the material or the abrasive body is performed by wiping the surface layer with a nonwoven fabric or the like for the purpose of removing surface dirt and excess lubricant. Examples of such wiping materials include various types of virgin manufactured by Japan Vilene Co., Ltd., Toraysee, Exaine manufactured by Toray Industries, Kimwipe, and various abrasives manufactured by Fuji Photo Film Co., Ltd.
Tissue paper and the like such as polyester nonwoven fabric, rayon nonwoven fabric, acrylonitrile nonwoven fabric, and blended nonwoven fabric can be used. These are described, for example, in JP-B-46-3930.
9, JP-B-58-46768, JP-A-56-904
No. 29, JP-B-58-46767, JP-A-63-25
No. 9830 and JP-A-1-201824.

The abrasive used in the present invention, the binder,
Additives (lubricants, dispersants, antistatic agents, surface treatment agents, carbon black, abrasives, light-blocking agents, antioxidants, antifungal agents, etc.), solvents and supports (undercoat layer, back layer, under back) (It may have a coating layer) or the production method thereof can be referred to the production method described in JP-B-56-26890 or the like.

[0059]

EXAMPLES Examples and comparative examples of the present invention will be shown below.
Evaluate its properties. In the examples, "parts" indicates "parts by weight".

<Examples 1 to 3> The following compositions were uniformly kneaded and dispersed, the viscosity was adjusted, and a coating solution for a polishing layer mixed with a curing agent was prepared. The coating solution was coated on a 125 μm-thick polyester film support. As shown in FIG. 1, after the coating liquid for the polishing layer is applied, the coating liquid is dried, and the thickness of the dried coating film is 60 μm.
A material on which a polishing layer was formed was obtained. This material is wound up in a roll shape in a winding direction with the polishing layer on the outside. Thereafter, the rolled material was treated for 24 hours in Example 1, 48 hours in Example 2, 72 hours in Example 3,
After being left in an atmosphere of 0 ° C. or higher, a sample was obtained by punching out a disc-shaped abrasive body (abrasive sheet).

The polishing bodies of Examples 1 to 3 were placed on a platen,
The result of measuring the warpage of the abrasive body is expressed by the winding direction of each abrasive body,
Table 1 below shows the standing time and the thickness of the polishing layer. The warpage of the polished body was indicated as an average value by placing the polished body on a surface plate with the polishing layer facing upward, measuring the height of the warped edge from the upper surface of the surface plate, and indicating the average value.

<Comparative Examples 1 to 6> Table 1 shows Comparative Examples 1 to 6.
The results of the same polishing test performed on the polishing body of Example 1 are also shown. In Comparative Examples 1 to 3, the winding direction of the roll-shaped material was such that the polishing layer was on the outside as in the previous example, and the subsequent standing time was 0 hour, 10 hours, and 2 hours.
This is an example in which 0 hour is shorter than the above-described embodiment. In Comparative Examples 4 to 6, the standing time was 24 hours, 48 hours,
This is an example in which the winding direction of the roll-shaped material is 72 hours, which is as long as the above-mentioned embodiment, but the winding direction is the reverse of that of the above-mentioned embodiment with the polishing layer being inside.

From the results shown in Table 1, in the case of Examples 1 to 3 of the present invention, the raw material was wound up with the polishing layer as the outer side, and the polishing body was not warped by being left for 24 to 72 hours. Instead, it is flat on the surface plate
When the magnetic head was polished with the polished body, the polishing was successfully performed. On the other hand, in Comparative Examples 1 to 3, the winding direction of the material was such that the polishing layer was on the outside.
Because of the short time, the polishing body was warped by 6 mm to 2 mm, which hindered the polishing of the magnetic head. The warpage of Comparative Example 3 after leaving for 20 hours was 2 mm, which was smaller than that of the other Comparative Examples, but it was found that a longer standing time was required. In Comparative Examples 4 to 6, since the polishing layer was wound in the opposite direction with the polishing layer being on the inside, the curl deformation accompanying the drying shrinkage of the polishing layer could not be corrected by the curl of the material. Large warpage occurred, which hindered the polishing of the magnetic head.

[Composition of Polishing Layer Coating Solution] Abrasive (alumina # 400) 100 parts Binder (sulfonic acid group-containing vinyl chloride resin, MR110: manufactured by Zeon Corporation) 6 parts Binder (sulfonic acid group-containing polyester polyurethane resin, UR8200) : 9 parts Binder (polyisocyanate, Coronate 3041: Nippon Polyurethane) 15 parts MEK (methyl ethyl ketone) 150 parts

[0065]

[Table 1]

[Brief description of the drawings]

FIG. 1 is a schematic view showing a manufacturing process of a polishing body according to one embodiment of the present invention.

FIG. 2 is a cross-sectional view of a polishing body according to one embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Polishing body (polishing sheet) 2 Support 3 Polishing layer 5 Coating liquid for polishing layer 6 Blade coater 7 Drying device 10 Roll material 15 Support base

Claims (8)

[Claims] 1. A material having a polishing layer formed by applying a coating solution containing fine abrasive powder and a binder on a support, is wound up in a roll shape with the polishing layer being outside, and the roll material is rolled. A method for producing a polishing body, comprising: forming a polishing body of a predetermined shape from the roll-shaped material after leaving the roll-shaped material for 24 hours or more in a predetermined atmosphere. 2. The method according to claim 1, wherein the roll-shaped material is left in a heating atmosphere of 30 ° C. or more for 24 hours or more. 3. The method for producing a polishing body according to claim 1, wherein the roll-shaped material is punched to form a sheet-like polishing body. 4. A polishing body having a polishing layer comprising a fine abrasive powder and a binder on a support, wherein the polishing layer comprising the fine abrasive powder and the binder is coated on a continuous support and then polished. A polishing body characterized in that it is formed into a predetermined shape from a roll-shaped material wound up with the layer outside and left in a predetermined atmosphere for 24 hours or more. 5. The polishing body according to claim 4, wherein the polishing body is a polishing sheet set on a support table. 6. The thickness of the support is 25 μm to 200 μm.
5. The polishing body according to claim 4, wherein the polishing layer has a thickness of 10 μm to 150 μm. 7. The polishing body according to claim 4, wherein the polishing body has an orange peel-shaped minute concave portion formed by Benard convection when a polishing layer coating liquid is applied on the surface of the polishing layer. 8. The Young's modulus of the polishing layer is 20 kg / mm ² or more, and the Young's modulus of the support is 100 to 1000 kg.
Abrasive body according to claim 4, wherein the a / mm ^2.