JP2000345240A - Production of sendust thin sheet - Google Patents

Production of sendust thin sheet

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Publication number
JP2000345240A
JP2000345240A JP11150784A JP15078499A JP2000345240A JP 2000345240 A JP2000345240 A JP 2000345240A JP 11150784 A JP11150784 A JP 11150784A JP 15078499 A JP15078499 A JP 15078499A JP 2000345240 A JP2000345240 A JP 2000345240A
Authority
JP
Japan
Prior art keywords
powder
sintered body
sendust
silicon steel
thin plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11150784A
Other languages
Japanese (ja)
Inventor
Osamu Yamashita
治 山下
Akira Makita
顕 槇田
Masao Nomi
正夫 能見
Tsunekazu Saigo
恒和 西郷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Metals Ltd
Original Assignee
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Special Metals Co Ltd filed Critical Sumitomo Special Metals Co Ltd
Priority to JP11150784A priority Critical patent/JP2000345240A/en
Publication of JP2000345240A publication Critical patent/JP2000345240A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To obtain an extremely thin sendust sheet having extremely excellent magnetic properties by obtaining a sintered body having an F-enriched phase and an Si-enriched Fe-Si solid solution phase, subjecting this stock to cold rolling, impregnating the cold rolling stock with Al and annealing this Al- impregnated material. SOLUTION: Preferably, the content of Si in the sintered body is 8.3 to 11.7 wt.%, additionally, the content of Al is 0 to 2.0 wt.%, and the balance Fe with inevitable impurities. The thickness of the sintered body is preferably controlled to <=5 mm. A powdery mixture obtd. by blending Fe powder and Fe-Si powder in a prescribed ratio is formed into the sintered body by a powder metallurgical method to produce a rolling stock of the sintered silicon steel in which an Fe-enriched phase enough in expansibility is remained, this is subjected to cold rolling, both sides of the obtd. rolled silicon steel sheet are stuck with Al by a vacuum deposition method, a sputtering method, a CVD method or the like, and, after that, heat treatment is executed to diffuse it to the inside of the thin sheet, by which a sendust thin sheet having extremely excellent magnetic properties is obtd.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、圧延の困難なFe
-Si-Al合金(センダスト)の薄板の製造方法に係り、予め
Feリッチな主相とFe‐Si相からなる厚み5mm以下の薄板
状の焼結体を作製し、Feリッチ相の結晶粒の優れた展延
性を利用して、これを素材としてそのまま冷間圧延する
ことを可能にし、さらに圧延後の薄板両面にAlを付着さ
せた後、熱処理することにより該薄板の内部まで拡散浸
透させ、所要組成からなる極薄のセンダスト薄板を得る
製造方法に関する。
BACKGROUND OF THE INVENTION The present invention relates to a method for producing Fe which is difficult to roll.
-Si-Al alloy (Sendust)
A thin plate-shaped sintered body with a thickness of 5 mm or less consisting of an Fe-rich main phase and an Fe-Si phase is produced, and cold rolling is directly performed using this as a raw material, utilizing the excellent ductility of the Fe-rich phase crystal grains. The present invention also relates to a manufacturing method for obtaining an ultra-thin sendust thin plate having a required composition by allowing Al to adhere to both surfaces of a rolled thin plate and then performing heat treatment to diffuse and infiltrate into the inside of the thin plate.

【0002】[0002]

【従来の技術】センダストは、透磁率が高いために軟質
磁性材料としては非常に優れているが、非常に脆くかつ
硬いために、従来よりセンダスト薄板の製造は困難とさ
れてきた。
2. Description of the Related Art Sendust is very excellent as a soft magnetic material because of its high magnetic permeability, but it has been difficult to manufacture Sendust thin plates conventionally because it is very brittle and hard.

【0003】このためにセンダストの所要成分よりFeが少な
い含有量のインゴットを作製した後、粉砕し、該粉砕粉
にFe粉を添加して所要組成にして該Fe粉にバインダーの
役目をさせて、圧延、熱処理を繰り返して、厚みが0.35
mm程度のセンダスト薄板を製造する方法(H.H.Helms and
E.Adams:J.Appl.Phys.35(1964)3)が提案された。
[0003] For this purpose, an ingot having a content of Fe less than the required components of Sendust is prepared and then crushed, and Fe powder is added to the crushed powder to obtain a required composition to make the Fe powder serve as a binder. , Rolling and heat treatment are repeated to achieve a thickness of 0.35
mm of sendust sheet (HHHelms and
E. Adams: J. Appl. Phys. 35 (1964) 3) was proposed.

【0004】上記の粉末冶金を用いた方法は、添加元素の拡
散が不十分なために、磁気特性を低下させるという問題
があり、汎用されるには至らなかった。
[0004] The above-mentioned method using powder metallurgy has a problem that the magnetic properties are deteriorated due to insufficient diffusion of additional elements, and has not been widely used.

【0005】[0005]

【発明が解決しようとする課題】このために、欠陥の少
ないセンダストの結晶を作製し、これを薄く切断加工し
たり、スパッター法により所要基板上に蒸着させてセン
ダスト薄板となし、VTR用磁気ヘッドとしてその優れた
機能を利用している。
For this purpose, a sendust crystal having few defects is prepared and thinly cut or formed on a required substrate by a sputtering method to form a sendust thin plate. Utilizing its excellent features.

【0006】すなわち、従来は、製造に際して多大の手間を
要して量産が困難なため、センダスト薄板の生産量は非
常に少なく、また用途が限られているのが現状である。
That is, conventionally, since mass production is difficult and mass production is difficult in the past, the production amount of sendust thin plates is very small, and the application is limited at present.

【0007】この発明は、センダスト薄板が製造困難で積層
鉄心などを構成することができなかった現状に鑑み、冷
間圧延によりセンダスト薄板の作製が可能であり、しか
も非常に優れた磁気特性を有するセンダスト薄板が得ら
れる、センダスト薄板製造方法の提供を目的としてい
る。
[0007] In view of the present situation in which a sendust thin plate was difficult to manufacture and a laminated iron core or the like could not be constructed, a sendust thin plate can be manufactured by cold rolling, and has very excellent magnetic properties. It is an object of the present invention to provide a method for producing a sendust thin plate, from which a sendust thin plate can be obtained.

【0008】[0008]

【課題を解決するための手段】発明者らは、Fe-Si-Al合
金とは別に、Si含有量が3wt%以上の珪素鋼を冷間圧延可
能にすることを目的に、冷間圧延性の良好な珪素鋼の製
造方法について種々検討した結果、結晶粒内の組成に着
目し、従来の溶融徐冷してFeとSiが完全に固溶した相の
結晶粒と違って、Feリッチな相とSiリッチなFe‐Si固溶
体相を有する混合相となし、展延性に富んだFeリッチ相
を残存させた焼結珪素鋼を作製し、これを冷間圧延する
ことにより圧延が可能であり、また特に該鋼材の板厚を
5mm以下とし、さらに平行度を0.5mm以下とすることによ
って比較的容易に圧延できることを知見した。
Means for Solving the Problems In order to enable cold rolling of silicon steel having a Si content of 3 wt% or more, apart from the Fe-Si-Al alloy, the present inventors As a result of various investigations on the production method of silicon steel with good iron content, focusing on the composition within the crystal grains, unlike the conventional crystal grains of the phase in which Fe and Si were completely dissolved by slow melting and melting, Fe-rich It is possible to produce a sintered silicon steel with a mixed phase having a Fe-Si solid solution phase and a Si-rich Fe-Si solid solution phase, leaving a Fe-rich phase rich in ductility and rolling it by cold rolling. And especially the thickness of the steel
It has been found that the rolling can be performed relatively easily by setting the parallelism to 5 mm or less and the parallelism to 0.5 mm or less.

【0009】また、発明者らは、焼結珪素鋼の製造方法とし
て、Fe粉末とFe‐Si粉末を所定の割合で配合した混合粉
を粉末冶金的手法で焼結することにより、所望の平均結
晶粒径を有する焼結体を作製可能であり、粉末冶金的手
法としては、金属射出成形、圧粉成形、スラリー状にし
て流し込むスリップキャスト成形等で成形した後、所定
の温度で焼結する方法、またはホットプレスやプラズマ
焼結等の熱間成形法により作製する方法が採用できるこ
とを知見した。
[0009] Further, as a method for producing sintered silicon steel, the inventors of the present invention sinter a powder mixture obtained by mixing Fe powder and Fe-Si powder at a predetermined ratio by powder metallurgy to obtain a desired average A sintered body having a crystal grain size can be produced. As a powder metallurgy method, after molding by metal injection molding, compaction molding, slip cast molding in a slurry state, etc., sintering is performed at a predetermined temperature. It has been found that a method or a method of producing by a hot forming method such as hot pressing or plasma sintering can be adopted.

【0010】さらに発明者らは、Fe-Si-Al合金を製造するこ
とを目的に、Feリッチな相を残存させた焼結体を使用
し、そのFeリッチな相を有する結晶粒の展延性を利用し
て冷間圧延して得た焼結珪素鋼板の両面に、Alを種々の
条件で蒸着させた後、熱処理することにより、その表面
からAlが内部まで拡散し、また透磁率も珪素鋼板に比べ
て飛躍的に向上して磁気特性の優れたセンダスト薄板が
得られることを知見し、この発明を完成した。
[0010] Furthermore, the present inventors used a sintered body in which an Fe-rich phase was left for the purpose of producing an Fe-Si-Al alloy, and examined the ductility of crystal grains having the Fe-rich phase. Al is vapor-deposited on both sides of the sintered silicon steel sheet obtained by cold rolling using various conditions, and then heat-treated, whereby Al diffuses from the surface to the inside, and the magnetic permeability is also silicon. The present inventors have found that a sendust thin plate having excellent magnetic properties can be obtained by remarkably improving as compared with a steel plate, and the present invention has been completed.

【0011】すなわち、この発明は、Feリッチな相とSiリッ
チなFe‐Si固溶体相を有する焼結珪素鋼を圧延した後、
真空蒸着法やスパッター法、CVD(Chemical Vapor Depos
ition)法等により焼結珪素鋼板の両面にAlを含浸させた
後、焼き鈍しを施して拡散浸透させることにより、非常
に薄くて磁気特性にも優れた薄板が得られるセンダスト
薄板の製造方法である。
[0011] That is, the present invention is to roll a sintered silicon steel having a Fe-rich phase and a Si-rich Fe-Si solid solution phase,
Vacuum evaporation method, sputtering method, CVD (Chemical Vapor Depos
After impregnating both surfaces of a sintered silicon steel sheet with Al by the method, etc., annealed and diffused and permeated, this is a method for producing sendust thin sheets that can be made extremely thin and have excellent magnetic properties. .

【0012】[0012]

【発明の実施の形態】この発明は、Fe粉末とFe‐Si粉末
を所定の割合で配合した混合粉を粉末冶金的手法で焼結
体となして、展延性に富んだFeリッチ相を残存させた焼
結珪素鋼の圧延素材を作製し、これを冷間圧延し、得ら
れた該圧延珪素鋼板の両面に真空蒸着法、スパッター
法、CVD法などにより、Alを付着させた後、熱処理して
薄板内部まで拡散させることにより、非常に優れた磁気
特性を有するセンダスト薄板を得る製造方法である。
BEST MODE FOR CARRYING OUT THE INVENTION The present invention relates to a method for producing a sintered body by mixing a powder mixture of Fe powder and Fe-Si powder at a predetermined ratio by a powder metallurgical method, and leaving an Fe-rich phase rich in ductility. After preparing a rolled material of sintered silicon steel that has been subjected to cold rolling, the Al is deposited on both sides of the obtained rolled silicon steel sheet by a vacuum deposition method, a sputtering method, a CVD method, etc., followed by heat treatment. This is a manufacturing method of obtaining a sendust thin plate having very excellent magnetic properties by diffusing into the inside of the thin plate.

【0013】使用原料 この発明において、素材となる焼結珪素鋼の成分として
は、鋼中のSiの含有量が8.3〜11.7wt%で、Alの含有量が
0〜2wt%の所要組成からなることが望ましい。該使用原
料粉末としては、Fe粉末とFe‐Si粉末あるいはFe粉末と
Fe‐Si‐Al粉末を所定の割合で配合した混合粉、もしく
は所定の組成を有するFe‐Si化合物やFe‐Si‐Al化合物
粉末を使用する方法がある。
[0013] In the present invention, as the components of the sintered silicon steel as a raw material, the content of Si in the steel is 8.3 to 11.7 wt%, and the content of Al is
It is desirable to have a required composition of 0 to 2 wt%. As the raw material powder used, Fe powder and Fe-Si powder or Fe powder
There is a method of using a mixed powder in which Fe-Si-Al powder is blended at a predetermined ratio, or an Fe-Si compound or a Fe-Si-Al compound powder having a predetermined composition.

【0014】該混合粉末原料としては、所望組成よりも多く
のSiを含有した、脆性破壊しやすい成分のFe‐Si化合物
のガスアトマイズ粉末もしくは該成分を有するインゴッ
トを粉砕してジェットミル粉砕した粉末とカーボニル鉄
粉を所定の割合で配合した混合粉末、あるいは所望組成
よりも多くのSiを含有した、脆性破壊しやすい成分にAl
を微量添加したFe‐Si‐Al化合物のガスアトマイズ粉末
もしくは該成分を有するインゴットを粉砕してジェット
ミル粉砕した粉末とカーボニル鉄粉を所定の割合で配合
した混合粉末が望ましい。
[0014] As the mixed powder raw material, a gas atomized powder of Fe-Si compound which contains more Si than a desired composition and is a brittle and fragile component, or a powder obtained by crushing an ingot having the component and jet milling the same is used. A mixed powder containing carbonyl iron powder at a predetermined ratio, or a component containing more Si than desired and easily brittle,
It is desirable to use a gas-atomized powder of a Fe-Si-Al compound to which a trace amount is added, or a mixed powder obtained by crushing an ingot having the component and jet mill-crushing powder and carbonyl iron powder at a predetermined ratio.

【0015】また使用するFe‐Si‐(Al)化合物としては、β
相のFe2Si化合物やε相のFeSi化合物、さらにζβ相のF
eSi2化合物が脆性破壊しやすいので、好ましい。Fe‐Si
化合物中のSi含有量としては、20wt%〜51wt%が好まし
い。Si含有量がこの範囲外となると、非常に酸化しやす
くなり、磁気特性の劣化を引き起こす。またFe‐Si化合
物中のAl含有量としては、0〜6.0wt%が好ましい。Al含
有量がこの範囲外となると、冷間圧延時にヒビ、ワレが
発生しやすくなると同時に、更に酸化しやすくなるの
で、磁気特性の劣化を招く。
[0015] The Fe-Si- (Al) compound used is β
Phase Fe 2 Si compound, ε phase FeSi compound, and ζβ phase F
eSi 2 compounds are preferred because they are liable to brittle fracture. Fe-Si
The Si content in the compound is preferably from 20 wt% to 51 wt%. If the Si content is out of this range, it becomes very susceptible to oxidation and causes deterioration of magnetic properties. The Al content in the Fe-Si compound is preferably 0 to 6.0 wt%. If the Al content is out of this range, cracks and cracks are liable to occur during cold rolling, and at the same time, oxidation is further liable to occur, resulting in deterioration of magnetic properties.

【0016】Fe‐Si化合物やFe‐Si‐Al化合物の粉末の平均
粒度は3μm〜100μmの範囲が最も望ましく、平均粒度が
3μm未満では、粉末自体に多量の酸素を含有しやすくな
り、磁気特性が劣化し、また100μmを超える場合は、焼
結体がポーラスになりやすく焼結密度が低下するので、
冷間圧延時にヒビ、ワレ発生の原因になる。
The average particle size of the powder of the Fe-Si compound or the Fe-Si-Al compound is most preferably in the range of 3 μm to 100 μm.
If it is less than 3 μm, the powder itself tends to contain a large amount of oxygen and the magnetic properties deteriorate, and if it exceeds 100 μm, the sintered body tends to become porous and the sintered density decreases,
This causes cracks and cracks during cold rolling.

【0017】一方、カーボニル鉄粉は、市販の3〜10μmの粒
径を有し、できるだけ酸素量の少ない粉末が望ましい。
いずれにしてもFe粉末とFe‐Si化合物粉末あるいはFe粉
末とFe‐Si‐Al化合物粉末の混合粉末の酸素含有量は、
少なければ少ないほど良いが、少なくとも3000ppm以下
が望ましい。
On the other hand, the carbonyl iron powder is preferably a commercially available powder having a particle size of 3 to 10 μm and containing as little oxygen as possible.
In any case, the oxygen content of the mixed powder of Fe powder and Fe-Si compound powder or Fe powder and Fe-Si-Al compound powder,
The smaller the better, the better, but preferably at least 3000 ppm or less.

【0018】所望の組成を有する原料粉末を使用する場合
は、初めから該成分を含有したガスアトマイズ粉もしく
は水アトマイズ粉が適しており、その平均粒度は、10〜
100μmが望ましい。また使用する原料粉末の含有酸素量
は、少なければ少ないほど良いが、少なくとも3000ppm
以下が望ましい。
When a raw material powder having a desired composition is used, a gas atomized powder or a water atomized powder containing the component from the beginning is suitable, and the average particle size is 10 to
100 μm is desirable. The oxygen content of the raw material powder used is preferably as small as possible, but at least 3000 ppm
The following is desirable.

【0019】上記アトマイズ粉の平均粒度が10μm未満で
は、焼結体の密度は向上するが、粉末自体に多量の酸素
を含有するので、冷間圧延時にヒビ、ワレ発生の原因に
なりやすく、且つ磁気特性の劣化の原因にもなる。また
平均粒度が100μmを超える場合は、焼結体がポーラスに
なりやすく焼結密度が低下するので、これも冷間圧延時
のヒビ、ワレ発生の原因になる。
When the average particle size of the atomized powder is less than 10 μm, the density of the sintered body is improved, but since the powder itself contains a large amount of oxygen, cracks and cracks are likely to occur during cold rolling, and It also causes deterioration of magnetic characteristics. If the average particle size exceeds 100 μm, the sintered body tends to be porous and the sintering density decreases, which also causes cracks and cracks during cold rolling.

【0020】圧延前の焼結珪素鋼 圧延前の焼結体の作製には、粉末冶金的手法が採用でき
るが、金属射出成形、圧粉成形、スリップキャスト法等
による焼結体あるいはホットプレスやプラズマ焼結等の
熱間成形法による焼結体の作製が適している。具体的に
は、金属射出成形、圧粉成形、スリップキャスト成形
は、珪素鋼粉末にバインダーを添加し成形する方法であ
り、成形後、脱バインダー、焼結を行って作成する方法
である。また、熱間成形法は、炭素金型の中に原料粉末
を入れ、熱間中(1000℃〜1300℃)で圧力をかけて成形と
焼成を同時に行う方法である。
Sintered Silicon Steel Before Rolling Powder metallurgy can be used to produce a sintered body before rolling. A sintered body by metal injection molding, powder compaction, slip casting, etc. Production of a sintered body by a hot forming method such as plasma sintering is suitable. Specifically, metal injection molding, compaction molding, and slip cast molding are methods in which a binder is added to silicon steel powder and molding is performed, and after molding, the binder is removed and sintering is performed. The hot forming method is a method in which a raw material powder is placed in a carbon mold, and pressure and pressure are applied during hot (1000 ° C. to 1300 ° C.) to simultaneously perform forming and firing.

【0021】得られた焼結珪素鋼は、Feリッチな主相とSiリ
ッチなFe‐Si固溶体相を有する混合相であって、展延性
に富んだFeリッチな相が多く生成したものとなる。なお
ここでは、相中のSi量が10%を超える場合をSiリッチ、
これを超えない場合をFeリッチと呼ぶ。
[0021] The obtained sintered silicon steel is a mixed phase having a Fe-rich main phase and a Si-rich Fe-Si solid solution phase, in which a large number of Fe-rich phases rich in ductility are formed. . Note that here, the case where the amount of Si in the phase exceeds 10% is Si-rich,
The case not exceeding this is called Fe-rich.

【0022】一般にSiを多く含有する珪素鋼粉末は、非常に
酸化し易く、また成形用にバインダーを使用すると特に
酸化したり、炭化したりするので、脱バインダーと焼結
時の雰囲気制御は不可欠である。また、酸化や炭化した
焼結体は硬く、脆くなるので、冷間圧延すると、ヒビ、
ワレが発生すると同時に焼き鈍し後の磁気特性も著しく
低下する。このために焼結体中に含まれる酸素量と炭素
量は、それぞれ3000ppmと200ppm以下が望ましい。
In general, silicon steel powder containing a large amount of Si is very easily oxidized, and when a binder is used for molding, it is particularly oxidized or carbonized. Therefore, debinding and controlling the atmosphere during sintering are indispensable. It is. In addition, since the oxidized and carbonized sintered body is hard and brittle, when cold-rolled, cracks,
At the same time as cracking occurs, the magnetic properties after annealing are significantly reduced. For this reason, the amount of oxygen and the amount of carbon contained in the sintered body are desirably 3000 ppm and 200 ppm or less, respectively.

【0023】焼結温度は、混合粉の組成、平均粒度、成形方
法等によって異なるが、1100℃から1250℃の温度で不活
性ガス雰囲気中、水素ガス雰囲気中、真空中等焼結雰囲
気は、成形方法に応して使い分ければ良い。しかし、で
きるかぎり焼結時の変形を防止しなければ、冷間圧延時
のヒビ、ワレ発生の原因になる。
The sintering temperature varies depending on the composition of the mixed powder, the average particle size, the molding method, etc., and the sintering atmosphere such as an inert gas atmosphere, a hydrogen gas atmosphere, or a vacuum at a temperature of 1100 ° C. to 1250 ° C. You can use them properly according to the method. However, if deformation during sintering is not prevented as much as possible, cracks and cracks may occur during cold rolling.

【0024】特に、焼結後に展延性に富んだFeリッチ相を残
存させるために、本来の焼結温度よりやや低い温度で焼
結させることが重要である。焼結時には、できるかぎり
焼結時の変形を防止し、50mm長さに対する平行度を0.5m
m以下に抑えなければ、冷間圧延時のヒビ、ワレ発生の
原因になる。
In particular, it is important to perform sintering at a temperature slightly lower than the original sintering temperature in order to leave a Fe-rich phase rich in ductility after sintering. During sintering, deformation during sintering is prevented as much as possible, and the parallelism for 50 mm length is 0.5 m
If it is not less than m, cracks and cracks may occur during cold rolling.

【0025】圧延 珪素鋼は、一般の金属と比べて硬くて脆い性質があるた
めに、冷間圧延用のロール径とその周速度は、圧延前の
板厚とその平行度によって変える必要がある。つまり圧
延前の板厚が厚く、平行度が悪ければ、小さいロール径
で、しかも低周速度で圧延することが望ましい。
Rolled silicon steel is hard and brittle compared to general metals, so the roll diameter for cold rolling and its peripheral speed need to be changed depending on the thickness before rolling and its parallelism. . That is, if the sheet thickness before rolling is large and the parallelism is poor, it is desirable to perform rolling at a small roll diameter and at a low peripheral speed.

【0026】しかし、逆に板厚が薄く平行度さえよければ、
この条件はかなり緩和される。特に熱間圧延の場合に
は、珪素鋼は組成変形しやすくなるので、ロール径と周
速度の条件は、冷間圧延に比べて大幅に緩和される。冷
間圧延前に熱間圧延をすることは有効であるが、最終的
には冷間圧延を行わなければ、薄板の圧延は不可能とな
る。表面層が酸化し磁気特性が劣化するためである。い
ずれの方法でも圧延前の鋼板の平行度を0.5mm以下にし
なければ、良好な圧延珪素鋼板は作製できない。
However, conversely, if the plate thickness is small and parallelism is good,
This condition is relaxed considerably. In particular, in the case of hot rolling, since the composition of silicon steel is easily deformed, the conditions of the roll diameter and the peripheral speed are remarkably relaxed as compared with the cold rolling. It is effective to perform hot rolling before cold rolling, but finally, if cold rolling is not performed, rolling of a thin plate becomes impossible. This is because the surface layer is oxidized and the magnetic properties deteriorate. In any method, unless the parallelism of the steel sheet before rolling is set to 0.5 mm or less, a good rolled silicon steel sheet cannot be produced.

【0027】この発明では、Feリッチ相を有する珪素鋼板の
場合、圧延前の板厚が5mm以下で平行度0.5mm(50mmの長
さに対する)以下では、ロール径は80mm以下で、ロール
周速度60mm/sec以下の条件であれば、冷間圧延の際に焼
き鈍し工程を入れずに、ヒビ、ワレが起きずに冷間圧延
できる。
According to the present invention, in the case of a silicon steel sheet having an Fe-rich phase, when the sheet thickness before rolling is 5 mm or less and the parallelism is 0.5 mm or less (for a length of 50 mm), the roll diameter is 80 mm or less, and the roll peripheral speed is Under the condition of 60 mm / sec or less, cold rolling can be performed without an annealing step at the time of cold rolling and without causing cracks and cracks.

【0028】この発明において、珪素鋼板の板厚が1mm以下
になれば、ロール径のさらに小さいロールで圧延した方
が、圧延効率と厚み寸法精度が向上し、しかもヒビ、ワ
レも発生しにくくなる傾向がある。
In the present invention, when the thickness of the silicon steel sheet becomes 1 mm or less, rolling with a roll having a smaller roll diameter improves rolling efficiency and thickness dimensional accuracy, and furthermore, cracks and cracks are less likely to occur. Tend.

【0029】珪素鋼の平均結晶粒径が300μmを超える場合に
は、ロール径とロール周速度に関係なく、圧延時にヒ
ビ、ワレが発生する。また平均結晶粒径5μm未満の珪素
鋼板の作製は、粉末冶金的な焼結法でのみ作製可能であ
り、それは焼結温度を下げるか、成形密度を下げて焼結
する方法であるが、いずれの方法でも気孔率の高い焼結
体になるので、圧延時に必ずヒビ、ワレが発生する。
When the average crystal grain size of the silicon steel exceeds 300 μm, cracks and cracks occur during rolling regardless of the roll diameter and the roll peripheral speed. The production of silicon steel sheet having an average crystal grain size of less than 5 μm can be produced only by powder metallurgy sintering method, which is a method of sintering by lowering the sintering temperature or lowering the molding density. Even with the method described above, a sintered body having a high porosity is obtained, so that cracks and cracks always occur during rolling.

【0030】圧延後の板厚は、1mm以下にした方が蒸着後のA
lは珪素鋼板内部まで拡散し易い。さらに最適圧延条件
下では、50μmの板厚まで簡単に冷間圧延できることが
わかった。
The thickness of the sheet after rolling should be 1 mm or less.
l easily diffuses into the silicon steel plate. Furthermore, it was found that cold rolling can be easily performed to a thickness of 50 μm under optimum rolling conditions.

【0031】また上記の方法で圧延した珪素鋼板は、圧延後
に切断機、打抜機による加工が可能であり、加工後に後
述のAl含浸を行うことにより、種々の形状のセンダスト
薄板の製品対応が可能である。
[0031] The silicon steel sheet rolled by the above method can be processed by a cutting machine or a punching machine after rolling, and can be used for sendust thin sheets of various shapes by performing Al impregnation described later after the processing. It is.

【0032】この発明によるFeリッチ相による塑性変形を利
用した圧延珪素鋼板は、通常の(110)面を集合組織とす
る方向性珪素鋼板とは違って、(100)面を集合組織とす
る方向性珪素鋼板の特徴を有する。
[0032] The rolled silicon steel sheet utilizing plastic deformation due to the Fe-rich phase according to the present invention has a direction in which the (100) plane has a texture unlike a normal oriented silicon steel sheet having a (110) plane as a texture. It has the characteristics of a conductive silicon steel sheet.

【0033】Al含浸 所望の組成のセンダスト薄板を作製するために、シート
状の圧延珪素鋼板の両面に、Alを含浸させるが、具体的
にはAlを真空蒸着法、スパッター法、CVD法等により、
拡散後所定の組成になるように付着、成膜し、その後熱
処理により含浸させる。Alの付着、成膜量は、拡散後の
最終成分がAl:2〜6wt%、Si:8〜11wt%、残部Feとなるよ
うに適宜決定するとよい。
Al impregnation In order to produce a sendust thin plate having a desired composition, both sides of a sheet-shaped rolled silicon steel sheet are impregnated with Al. Specifically, Al is impregnated by a vacuum evaporation method, a sputtering method, a CVD method, or the like. ,
After the diffusion, the film is adhered and formed to have a predetermined composition, and then impregnated by heat treatment. The adhesion and film formation amount of Al may be appropriately determined so that the final components after diffusion are Al: 2 to 6 wt%, Si: 8 to 11 wt%, and the balance Fe.

【0034】上記の付着、成膜条件は、圧延珪素鋼板の板
厚、組成、蒸着方法によって異なるが、冷間圧延後表面
を清浄にした珪素鋼板に直接蒸着した方がAlは均一に拡
散しやすく、磁気特性も向上しやすい特徴がある。つま
り、圧延後の結晶粒径は焼き鈍し後の結晶粒径に比べて
小さく、また残留結晶歪みが大きいために、Alが粒界拡
散し易いということである。
The above adhesion and film formation conditions differ depending on the thickness, composition, and vapor deposition method of the rolled silicon steel sheet. However, when the vapor deposition is performed directly on the silicon steel sheet whose surface has been cleaned after cold rolling, Al diffuses uniformly. It is easy to improve the magnetic properties. That is, the crystal grain size after rolling is smaller than the crystal grain size after annealing, and the residual crystal strain is large, so that Al is easily diffused at the grain boundary.

【0035】Alを含浸するための熱処理は、珪素鋼板の組成
とAlの付着量、さらに圧延前の平均結晶粒径によって適
宜選定する必要がある。この温度は、真空中で熱処理す
る場合には、1000〜1100℃と低く設定し、不活性ガス雰
囲気中で熱処理する場合には、1100〜1200℃の僅かに高
い温度に設定することが好ましい。
The heat treatment for impregnating Al must be appropriately selected depending on the composition of the silicon steel sheet, the amount of Al attached, and the average crystal grain size before rolling. This temperature is preferably set as low as 1000 to 1100 ° C. in the case of heat treatment in a vacuum, and is preferably set to a slightly higher temperature of 1100 to 1200 ° C. in the case of heat treatment in an inert gas atmosphere.

【0036】さらにこの発明における圧延珪素鋼板は、通常
の(110)面を集合組織とする方向性珪素鋼板とは違っ
て、(100)面を集合組織とする方向性珪素鋼板の特徴を
有し、圧延面が最密面ではないので、蒸着後の熱処理時
に結晶粒内拡散も起こし易い利点もある。
Further, the rolled silicon steel sheet according to the present invention has the characteristics of a directional silicon steel sheet having a (100) plane texture unlike a normal directional silicon steel sheet having a (110) plane texture. In addition, since the rolled surface is not the closest surface, there is an advantage that intracrystalline diffusion is liable to occur during heat treatment after vapor deposition.

【0037】焼き鈍し すなわち、従来では、圧延珪素鋼板の焼き鈍しは、圧延
時のヒビ、ワレ防止のために、何回か圧延した後に必ず
行われていが、この発明では、含浸したAlの拡散浸透と
磁壁移動の障害となる結晶粒界を減らし、保磁力を低下
させて透磁率の向上を目的に、結晶粒径の粗大化を狙っ
たものである。また、予めTi,V等の非磁性金属元素を単
独もしくは複合で0.01〜1.0wt%添加すると、焼き鈍し時
にFeリッチ相とSiリッチ相が固溶しやすくなり、また結
晶粒の粒成長を促進させることかできる。
Annealing That is, conventionally, annealing of a rolled silicon steel sheet is always performed after rolling several times in order to prevent cracks and cracks during rolling. However, in the present invention, the diffusion and infiltration of impregnated Al The purpose of the present invention is to increase the crystal grain size for the purpose of reducing crystal grain boundaries which hinder domain wall movement, lowering coercive force and improving magnetic permeability. In addition, when a nonmagnetic metal element such as Ti, V or the like is added alone or in a combination of 0.01 to 1.0 wt%, a Fe-rich phase and a Si-rich phase are likely to form a solid solution at the time of annealing, and promote the growth of crystal grains. I can do it.

【0038】この発明において、焼き鈍しの熱処理温度は、
前述のAl含浸熱処理によってAlが拡散浸透した後に、12
00〜1300℃の温度に昇温して結晶粒径を粗大化させる。
焼き鈍しの熱処理は、Alを含浸させるための熱処理と連
続して行うこともできる。
In the present invention, the annealing heat treatment temperature is:
After Al diffuses and infiltrates by the Al impregnation heat treatment described above, 12
The temperature is raised to a temperature of 00 to 1300 ° C. to increase the crystal grain size.
The annealing heat treatment can be performed continuously with the heat treatment for impregnating Al.

【0039】真空中ではこの焼き鈍し温度が高過ぎると、Al
が鋼板から蒸発して拡散浸透し難くなる。Alが拡散した
後の温度が高過ぎると、結晶粒が異常粒成長しすぎて鋼
板が非常に脆くなり、逆に温度が低過ぎると、粒成長し
ないために、磁気特性が向上しなくなるので、上記温度
範囲が最適温度である。上記温度での焼き鈍しによって
平均結晶粒径は、約0.5〜3mmにまで成長させることがで
きる。この焼き鈍しによってセンダスト薄板の磁気特性
は、通常の溶製材に近い特性が得られることを確認し
た。
In a vacuum, if the annealing temperature is too high, Al
Evaporates from the steel sheet and becomes difficult to diffuse and permeate. If the temperature after Al diffusion is too high, the crystal grains will grow abnormally abnormally and the steel sheet will become very brittle.On the contrary, if the temperature is too low, the grains will not grow and the magnetic properties will not improve, so The above temperature range is the optimum temperature. The average crystal grain size can be grown to about 0.5 to 3 mm by annealing at the above temperature. It was confirmed that the magnetic properties of the sendust thin plate obtained by this annealing were similar to those of a normal ingot.

【0040】従来、センダスト合金は、硬くて脆いことによ
り、圧延困難で薄板状のシート材を作製することは不可
能とされてきた。しかし、この発明では、出発原料とし
てFe粉とFe‐Si粉末あるいはFe粉とFe‐Si‐Al粉末を所
定の割合で配合した混合粉もしくは所望組成の粉末を用
いて、焼結後に展延性に富んだFeリッチ相を残存させた
薄板を5mm以下の厚みで作製することにより、冷間圧延
が可能になった。
Conventionally, Sendust alloys are hard and brittle, so that it has been difficult to roll and it is impossible to produce thin sheet materials. However, in the present invention, using a powder mixture of Fe powder and Fe-Si-Al powder or a powder mixture of Fe powder and Fe-Si-Al powder in a predetermined ratio or a powder of a desired composition as a starting material, the sinterability is improved after sintering. By producing a thin plate having a rich Fe-rich phase remaining with a thickness of 5 mm or less, cold rolling became possible.

【0041】さらにこの発明では、前記圧延珪素鋼板の両面
にAlを付着、成膜した後、熱処理してAlの拡散と結晶粒
の粗大化を図ることにより、センダスト薄板としての磁
気特性は、従来の溶製材とほぼ同等になり、磁気特性の
優れたセンダスト薄板が作製できることを確認した。
Further, in the present invention, Al is deposited on both sides of the rolled silicon steel sheet, a film is formed, and then heat treatment is performed to diffuse Al and increase the crystal grain size. It was confirmed that a sendust thin plate with excellent magnetic properties could be produced, which was almost equivalent to the ingot material of No. 1.

【0042】また、素材の圧延珪素鋼板は、圧延後の切断、
打抜等の加工が可能であり、各種用途に応じて種々の形
状のセンダスト薄板の製品が作製できるので、低コスト
で高特性、高寸法精度のセンダスト薄板の作製が可能で
ある利点を有する。
Further, the rolled silicon steel sheet of the material is cut after rolling,
Since processing such as punching is possible and various types of sendust thin plates can be manufactured according to various applications, there is an advantage that it is possible to manufacture sendust thin plates with low cost, high characteristics, and high dimensional accuracy.

【0043】[0043]

【実施例】実施例1 焼結珪素鋼板の原料粉末として、表1に示すような成分
のFe‐Si化合物とFe‐Si‐Al化合物になるように高周波
溶解してインゴットを作製した後、粗粉砕、ジェットミ
ル粉砕して表1に示すような平均粒度の粉末を作製し
た。
Example 1 As a raw material powder for a sintered silicon steel sheet, an ingot was produced by high-frequency melting to obtain an Fe-Si compound and an Fe-Si-Al compound having the components shown in Table 1 and then forming an ingot. Pulverization and jet mill pulverization produced powder having an average particle size as shown in Table 1.

【0044】また、鉄粉末として表1に示すような成分と平
均粒度のカーボニル鉄粉を使用した。Fe‐Si化合物ある
いはFe‐Si‐Al化合物とカーボニル鉄粉を表2に示すよ
うな割合で配合した後、Vコーンで混合した。
[0044] Carbonyl iron powder having the components and average particle size shown in Table 1 was used as the iron powder. The Fe-Si compound or Fe-Si-Al compound and carbonyl iron powder were blended in the ratio shown in Table 2 and then mixed with a V cone.

【0045】さらに所望組成の粉末としては、表3に示すよ
うな成分と平均粒度のガスアトマイズ粉末を使用した。
各原料粉末に表4に示すような添加量でPVA(ポリビニー
ルアルコール)バインダー、水、可塑剤を添加し、スラ
リー状となし、該スラリーを完全密閉型スプレードライ
ヤー装置により窒素ガスで熱風入口温度100℃、出口温
度40℃に設定して造粒を行った。
Further, as the powder having the desired composition, the components shown in Table 3 and gas atomized powder having an average particle size were used.
The PVA (polyvinyl alcohol) binder, water, and plasticizer were added to each raw material powder in the amounts shown in Table 4 to form a slurry, and the slurry was heated with nitrogen gas using a completely sealed spray dryer with hot air at the inlet temperature. Granulation was performed at a temperature of 100 ° C. and an outlet temperature of 40 ° C.

【0046】平均粒径約80μmの該造粒粉を圧縮プレス機で
圧力2ton/cm2で表5に示すような形状に圧粉成形した
後、真空中で表5に示すような脱バインダー、焼結温度
で焼結を行って表6に示す寸法の焼結体を得た。得られ
た焼結体の平行度を図6に、鉄リッチ相の含有率、残留
酸素量、残留炭素量、平均結晶粒径、相対密度を表7に
示す。この鉄リッチ相の含有率は、FeSi化合物の特有の
最大X線回折強度と体心立方構造(bcc)を有する珪素鋼の
(110)回折強度比で相対評価した。
[0046] The granulated powder having an average particle size of about 80 µm was pressed into a shape as shown in Table 5 with a compression press at a pressure of 2 ton / cm 2 , and then debindered as shown in Table 5 in a vacuum. Sintering was performed at the sintering temperature to obtain a sintered body having the dimensions shown in Table 6. FIG. 6 shows the parallelism of the obtained sintered body, and Table 7 shows the content of the iron-rich phase, the residual oxygen content, the residual carbon content, the average crystal grain size, and the relative density. The content of the iron-rich phase depends on the specific maximum X-ray diffraction intensity of the FeSi compound and the silicon steel having the body-centered cubic structure (bcc).
Relative evaluation was made based on the (110) diffraction intensity ratio.

【0047】表8に示す寸法の焼結体をまず外径60mmの2段ロ
ールで、ロール周速度60mm/secで圧延率50%まで冷間圧
延した後、さらに外径20φの4段ロールにより同一ロー
ル周速度で表8に示す厚みまで冷間圧延した。その圧延
状態を表9に示す。
[0047] The sintered body having the dimensions shown in Table 8 was first cold-rolled to a rolling reduction of 50% at a roll peripheral speed of 60 mm / sec with a two-stage roll having an outer diameter of 60 mm, and further rolled with a four-stage roll having an outer diameter of 20φ. Cold rolling was performed to the thickness shown in Table 8 at the same roll peripheral speed. Table 9 shows the rolling state.

【0048】また圧延後、20φ×10φのリングを打ち抜いた
後、鋼板の両面にAlを表10に示す厚みで真空蒸着し、表
10に示すような焼き鈍し温度で熱処理をして直流磁気特
性を測定した。その結果を表10に示す。表9中の圧延状
態で、◎は非常に良好、○は良好、△は圧延板の端面に
ヒビ発生、×は全面にワレ発生を表す。
Further, after rolling, a 20φ × 10φ ring was punched out, and then Al was vacuum-deposited on both surfaces of the steel sheet to a thickness shown in Table 10,
Heat treatment was performed at an annealing temperature as shown in FIG. 10, and DC magnetic characteristics were measured. Table 10 shows the results. In the rolling state in Table 9, ◎ indicates very good, ○ indicates good, △ indicates occurrence of cracks on the end face of the rolled sheet, and × indicates occurrence of cracks on the entire surface.

【0049】比較例 磁気特性の比較例として通常のFe-6.5Siとセンダスト合
金の溶製材の磁気特性を表10に示す。
Comparative Example As a comparative example of the magnetic properties, Table 10 shows the magnetic properties of the ingots of ordinary Fe-6.5Si and Sendust alloy.

【0050】[0050]

【表1】 【table 1】

【0051】[0051]

【表2】 [Table 2]

【0052】[0052]

【表3】 [Table 3]

【0053】[0053]

【表4】 [Table 4]

【0054】[0054]

【表5】 [Table 5]

【0055】[0055]

【表6】 [Table 6]

【0056】[0056]

【表7】 [Table 7]

【0057】[0057]

【表8】 [Table 8]

【0058】[0058]

【表9】 [Table 9]

【0059】[0059]

【表10】 [Table 10]

【0060】[0060]

【発明の効果】この発明によれば、従来から製造困難と
されてきたセンダスト薄板を冷間圧延によって製造する
ことが可能となり、極めて薄いセンダスト板が容易に量
産できる。また、溶製材と同等の優れた磁気特性を有す
るセンダスト薄板が得られる。従って、今後トランスや
ヨーク材等、広範囲にわたってその用途は飛躍的に拡大
する。
According to the present invention, it is possible to manufacture a sendust thin plate which has been conventionally difficult to manufacture by cold rolling, and an extremely thin sendust plate can be easily mass-produced. Also, a sendust thin plate having excellent magnetic properties equivalent to that of the ingot material can be obtained. Therefore, its applications will be dramatically expanded in a wide range such as transformers and yoke materials in the future.

【0061】また、この発明によるセンダスト薄板は、圧延
後の珪素鋼板が切断、打抜等の加工が可能であり、各種
用途に応じて種々の形状のセンダスト薄板の製品が作製
できるので、低コストで高特性、高寸法精度のセンダス
ト薄板の作製が可能である。
Further, the sendust thin plate according to the present invention is capable of processing such as cutting and punching of a rolled silicon steel sheet, and can produce products of sendust thin plate of various shapes according to various uses, thereby reducing costs. It is possible to produce sendust thin plate with high characteristics and high dimensional accuracy.

フロントページの続き (72)発明者 能見 正夫 大阪府三島郡島本町江川2丁目15−17 住 友特殊金属株式会社山崎製作所内 (72)発明者 西郷 恒和 大阪府三島郡島本町江川2丁目15−17 住 友特殊金属株式会社山崎製作所内 Fターム(参考) 4K018 AA26 CA12 CA30 FA02 FA08 FA35 Continued on the front page (72) Inventor Masao Nomi 2--15-17 Egawa, Shimamoto-cho, Mishima-gun, Osaka Sumitomo Special Metals Co., Ltd. Yamazaki Works (72) Inventor Tsunekazu Saigo 2--15, Egawa, Shimamoto-cho, Mishima-gun, Osaka −17 Sumitomo Special Metals Co., Ltd. Yamazaki Works F-term (reference) 4K018 AA26 CA12 CA30 FA02 FA08 FA35

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 Feリッチな相とSiリッチなFe‐Si固溶体
相を有する焼結体を得る工程、前記焼結体素材を冷間圧
延する工程、冷間圧延材にAlを含浸させる工程、前記Al
含浸材を焼き鈍しする工程を含むセンダスト薄板の製造
方法。
A step of obtaining a sintered body having a Fe-rich phase and a Si-rich Fe-Si solid solution phase, a step of cold-rolling the sintered body material, a step of impregnating a cold-rolled material with Al, The Al
A method for producing a sendust sheet including a step of annealing an impregnating material.
【請求項2】 焼結体中のSi含有量が8.3〜11.7wt%であ
る請求項1に記載のセンダスト薄板の製造方法。
2. The method for producing a sendust thin plate according to claim 1, wherein the content of Si in the sintered body is 8.3 to 11.7 wt%.
【請求項3】 焼結体中のSi含有量が8.3〜11.7wt%、Al
含有量が0〜2.0wt%である請求項1に記載のセンダスト薄
板の製造方法。
3. The sintered body has a Si content of 8.3 to 11.7 wt%, Al
The method for producing a sendust thin plate according to claim 1, wherein the content is 0 to 2.0 wt%.
【請求項4】 得られたセンダスト薄板の成分は、Si:8
〜11wt%、Al:2〜6wt%、残部Fe及び不可避的不純物であ
る請求項1に記載のセンダスト薄板の製造方法。
4. The composition of the obtained sendust sheet is Si: 8
2. The method for producing a sendust thin plate according to claim 1, wherein the Al is 2 to 6 wt%, the balance being Fe and unavoidable impurities.
【請求項5】 焼結体の厚みが5mm以下である請求項1に
記載のセンダスト薄板の製造方法。
5. The method for producing a sendust thin plate according to claim 1, wherein the thickness of the sintered body is 5 mm or less.
【請求項6】 粉末射出成形、圧粉成形、スリップキャ
スト法により成形して焼結する粉末冶金法、またはホッ
トプレスやプラズマ焼結等の熱間成形法にて作製し、焼
結体中にFeリッチな相を残存させた焼結体である請求項
5に記載のセンダスト薄板の製造方法。
6. A powder metallurgy method of molding and sintering by powder injection molding, compaction molding, slip casting, or a hot compacting method such as hot pressing or plasma sintering. A sintered body with a Fe-rich phase remaining
6. The method for producing a sendust thin plate according to 5.
【請求項7】 冷間圧延材の両面にAlを被着または成膜
した後、熱処理によりAlを含浸させる請求項1に記載の
センダスト薄板の製造方法。
7. The method for producing a sendust thin plate according to claim 1, wherein Al is deposited or formed on both surfaces of the cold-rolled material and then impregnated with Al by heat treatment.
JP11150784A 1999-05-28 1999-05-28 Production of sendust thin sheet Pending JP2000345240A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11150784A JP2000345240A (en) 1999-05-28 1999-05-28 Production of sendust thin sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11150784A JP2000345240A (en) 1999-05-28 1999-05-28 Production of sendust thin sheet

Publications (1)

Publication Number Publication Date
JP2000345240A true JP2000345240A (en) 2000-12-12

Family

ID=15504368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11150784A Pending JP2000345240A (en) 1999-05-28 1999-05-28 Production of sendust thin sheet

Country Status (1)

Country Link
JP (1) JP2000345240A (en)

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