JP2000315863A - Manufacture of multilayer printed wiring board - Google Patents

Manufacture of multilayer printed wiring board

Info

Publication number
JP2000315863A
JP2000315863A JP12415499A JP12415499A JP2000315863A JP 2000315863 A JP2000315863 A JP 2000315863A JP 12415499 A JP12415499 A JP 12415499A JP 12415499 A JP12415499 A JP 12415499A JP 2000315863 A JP2000315863 A JP 2000315863A
Authority
JP
Japan
Prior art keywords
copper foil
substrate
conductive paste
wiring board
resin substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12415499A
Other languages
Japanese (ja)
Inventor
Tatsuo Suzuki
龍雄 鈴木
Hideki Mori
秀樹 森
Kinya Ishiguro
欽也 石黒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP12415499A priority Critical patent/JP2000315863A/en
Publication of JP2000315863A publication Critical patent/JP2000315863A/en
Pending legal-status Critical Current

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  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of a multilayer printed wiring board which can surely realize interlayer connection of wiring layers, when a multilayer printed wiring board of IVH structure is formed, and is superior in alignment accuracy. SOLUTION: A film 3 is stuck on a resin substrate 1 of a resin substrate 11 with a copper foil, and an aperture part is formed in the film 3 and the resin substrate 1 by laser working, using the copper foil 2 as a stopper. The sidewall surface of an aperture part 4 and the copper foil surface are subjected to cleaning treatment, the aperture part 4 is filled with a conductive paste, the film 3 is peeled and removed, and an outer layer substrate 10 is formed in which a semicured conductive paste conductor 5, having protruding parts on the resin substrate 11 with a copper foil, is formed. An outer layer substrate 20 is formed by a similar process. An inner layer substrate 30, in which a wiring layer 22 and a wiring layer 23 are formed, is made a core. The outer layer substrate 10 and the outer layer substrate 20 are laminated on both sides of the core. A multilayer printed wiring board is formed by heating and pressing with pressure.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は各種電子機器の高密
度実装基板として使用される多層プリント配線板に関
し、各配線層間の電気的接続が確実に得られる多層プリ
ント配線板の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multilayer printed wiring board used as a high-density mounting board for various electronic devices, and more particularly to a method for manufacturing a multilayer printed wiring board capable of reliably obtaining electrical connection between wiring layers.

【0002】[0002]

【従来の技術】最近電子機器の小型軽量化に伴い、これ
らを構成する実装基板もより高密度、高信頼性のものが
要求されている。多層配線板の小型化、高密度化の一手
法としてインナー・バイア・ホール(以下IVHと称
す)構造を有する多層配線板が使用されている。この多
層配線板は任意の層間にIVHを形成できるため、部品
配置を自由に設定でき、配線長を従来のスルーホール構
造に比べて短くできることから、高周波、高速化対応の
小型、高密度多層配線板として広く利用されている。
2. Description of the Related Art In recent years, as electronic devices have become smaller and lighter, mounting boards constituting them have been required to have higher density and higher reliability. 2. Description of the Related Art A multilayer wiring board having an inner via hole (hereinafter, referred to as IVH) structure has been used as one method of reducing the size and increasing the density of a multilayer wiring board. In this multilayer wiring board, since the IVH can be formed between any layers, the component arrangement can be freely set, and the wiring length can be shortened as compared with the conventional through-hole structure. Widely used as a board.

【0003】従来のIVH構造の多層配線板の製造工程
の一例を図2(a)〜(h)に示す。以下、IVH構造
の多層配線板の製造方法について図面を用いて説明す
る。まず、アラミド不織布にエポキシ樹脂を含浸させた
プリプレグ樹脂基板61に炭酸ガスレーザー等のレーザ
ー加工により穴空け加工を行い開口部62を形成する
(図2(a)、(b)参照)。
FIGS. 2 (a) to 2 (h) show an example of a conventional process of manufacturing a multilayer wiring board having an IVH structure. Hereinafter, a method for manufacturing a multilayer wiring board having an IVH structure will be described with reference to the drawings. First, a prepreg resin substrate 61 in which an aramid nonwoven fabric is impregnated with an epoxy resin is perforated by laser processing such as carbon dioxide gas laser to form an opening 62 (see FIGS. 2A and 2B).

【0004】次に、開口部62に導電性ペーストを充填
し、予備乾燥して半硬化状態の導電ペースト導電体63
を形成する。プリプレグ樹脂基板61の両面に銅箔64
及び65を加熱・加圧プレスして積層板を作製する(図
2(c)、(d)参照)。この加熱・加圧プレス工程で
プリプレグ樹脂基板61のエポキシ樹脂及び導電ペース
ト導電体63の樹脂が硬化して、銅箔64と銅箔65と
が導電ペースト導電体63にて電気的に接続される。次
に、銅箔64及び銅箔65をパターニング処理して配線
層64a及び配線層65aが形成された両面配線板60
を作製する(図2(e)参照)。
[0004] Next, a conductive paste is filled in the opening 62 and preliminarily dried to obtain a semi-cured conductive paste conductor 63.
To form Copper foil 64 on both sides of prepreg resin substrate 61
And 65 are heated and pressed to produce a laminate (see FIGS. 2C and 2D). In this heating and pressing step, the epoxy resin of the prepreg resin substrate 61 and the resin of the conductive paste conductor 63 are cured, and the copper foil 64 and the copper foil 65 are electrically connected by the conductive paste conductor 63. . Next, the copper foil 64 and the copper foil 65 are patterned to form the wiring layer 64a and the double-sided wiring board 60 on which the wiring layer 65a is formed.
(See FIG. 2E).

【0005】次に、両面配線板60をコアにして導電ペ
ースト導電体が形成されたプリプレグ71及びプリプレ
グ72と銅箔81及び銅箔82とを両面配線板60の両
面に積層する(図2(f)参照)。
Next, a prepreg 71 and a prepreg 72 on which a conductive paste conductor is formed with the double-sided wiring board 60 as a core, a copper foil 81 and a copper foil 82 are laminated on both surfaces of the double-sided wiring board 60 (FIG. f)).

【0006】次に、180〜200℃の温度で加熱・加
圧プレスして多層板90を作製する(図2(g)参
照)。この加熱・加圧プレス工程でプリプレグ71及び
プリプレグ72のエポキシ樹脂及び導電ペースト導電体
73及び導電ペースト導電体74の樹脂が硬化して、銅
箔81及び銅箔82が両面配線板60へ接着されると同
時に両面配線板60の配線層64a及び配線層65aと
銅箔81及び銅箔82とが導電ペースト導電体73及び
導電ペースト導電体74にて電気的に接続される。
Next, a multi-layer board 90 is produced by heating and pressing at a temperature of 180 to 200 ° C. (see FIG. 2 (g)). In this heating / pressing step, the epoxy resin of the prepreg 71 and the prepreg 72 and the resin of the conductive paste conductor 73 and the conductive paste conductor 74 are cured, and the copper foil 81 and the copper foil 82 are bonded to the double-sided wiring board 60. At the same time, the wiring layers 64a and 65a of the double-sided wiring board 60 are electrically connected to the copper foils 81 and 82 by the conductive paste conductors 73 and 74.

【0007】次に、多層板90の銅箔81及び銅箔82
をパターニング処理して配線層81a及び配線層82a
を形成して、層間の配線層がビア接続されたIVH構造
の多層配線板100を得ることができる(図2(h)参
照)。
Next, copper foil 81 and copper foil 82 of multilayer board 90
Are patterned to form a wiring layer 81a and a wiring layer 82a.
To form a multilayer wiring board 100 having an IVH structure in which wiring layers between layers are connected via (see FIG. 2 (h)).

【0008】上記のようなIVH構造の多層配線板で
は、導電ペーストを開口部に充填した後半硬化状態の導
電ペースト導電体を形成し、積層後加熱・加圧して導電
ペースト導電体にて配線層と銅箔との電気的接続を行う
が、この層間の電気的接続が不十分な箇所がある頻度で
発生するという問題がある。
In the multilayer wiring board having the IVH structure as described above, a conductive paste conductor in a second half cured state in which conductive paste is filled into openings is formed, and after lamination, heating and pressing are performed to form a wiring layer with the conductive paste conductor. Is electrically connected to the copper foil, but there is a problem that the electrical connection between the layers is insufficient at a certain frequency.

【0009】[0009]

【発明が解決しようとする課題】本発明は上記問題点に
鑑みなされたものであり、IVH構造の多層プリント配
線板を作製する際各配線層の層間接続を確実に行え、且
つ位置合わせ精度の優れた多層プリント配線板の製造方
法を提供することを目的とする。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and it has been found that the interlayer connection of each wiring layer can be reliably performed when a multilayer printed wiring board having an IVH structure is manufactured, and the alignment accuracy is improved. An object of the present invention is to provide an excellent method for manufacturing a multilayer printed wiring board.

【0010】[0010]

【課題を解決するための手段】本発明に於いて上記課題
を達成するために、以下の(a)〜(i)の工程を備え
ることを特徴とする多層プリント配線板の製造方法とし
たものである。 (a)樹脂基板1に銅箔2が形成された銅箔付樹脂基板
11の樹脂基板1上にフィルム3を貼着する工程。 (b)フィルム3側からレーザー等を照射し、銅箔2を
ストッパー層にして穴明け加工を行い、フィルム3と樹
脂基板1に開口部4を形成する工程。 (c)開口部4の側壁面及び銅箔面をクリーニング処理
する工程。 (d)開口部4に導電性ペーストを充填し、予備乾燥し
て半硬化状態の導電ペースト導電体5を形成する工程。 (e)フィルム3を除去して導電ペースト導電体5の突
起部5aがフィルム3の厚さ分だけ樹脂基板1より突き
出た外層基板10を形成する工程。 (f)(a)〜(e)の工程を繰り返して、別の外層基
板20を作製する工程。 (g)配線層22及び配線層23が形成された内層基板
30をコアにして外層基板10及び外層基板20の銅箔
2及び銅箔12面を外側にして積層する工程。 (h)加熱・加圧プレスして、内層基板30の配線層2
2及び配線層23と銅箔2及び銅箔12とが導電ペース
ト導電体5及び導電ペースト導電体15にて電気的に接
続された多層板40を作製する工程 (i)多層板40の両側の銅箔2及び銅箔12をパター
ニング処理して配線層2a及び配線層12aを形成し、
多層プリント配線板50を作製する工程。
According to the present invention, there is provided a method for producing a multilayer printed wiring board, comprising the following steps (a) to (i). It is. (A) A step of attaching a film 3 on the resin substrate 1 of the resin substrate 11 with copper foil in which the copper foil 2 is formed on the resin substrate 1. (B) a step of irradiating a laser or the like from the film 3 side to form a hole by using the copper foil 2 as a stopper layer to form an opening 4 in the film 3 and the resin substrate 1; (C) a step of cleaning the side wall surface and the copper foil surface of the opening 4; (D) a step of filling the opening 4 with a conductive paste and predrying to form a semi-cured conductive paste conductor 5; (E) a step of removing the film 3 and forming an outer layer substrate 10 in which the projections 5a of the conductive paste conductor 5 protrude from the resin substrate 1 by the thickness of the film 3; (F) a step of manufacturing another outer layer substrate 20 by repeating the steps (a) to (e). (G) A step of laminating the inner layer substrate 30 on which the wiring layers 22 and 23 are formed as a core, with the copper foil 2 and the copper foil 12 of the outer layer substrate 10 and the outer layer substrate 20 facing outward. (H) Pressing under heat and pressure to form the wiring layer 2 of the inner substrate 30
2 and wiring layer 23 and copper foil 2 and copper foil 12 are electrically connected by conductive paste conductor 5 and conductive paste conductor 15 to produce multilayer board 40 (i) on both sides of multilayer board 40 Patterning the copper foil 2 and the copper foil 12 to form a wiring layer 2a and a wiring layer 12a,
A step of producing the multilayer printed wiring board 50;

【0011】[0011]

【発明の実施の形態】以下本発明の実施の形態につき説
明する。本発明の多層プリント配線板は銅箔付樹脂基板
に突起部を有する半硬化状態の導電ペースト導電体を形
成した外層基板を作製し、配線層が形成された内層基板
をコアにして外層基板を両側に積層し、加熱・加圧プレ
スして銅箔付樹脂基板と導電ペースト導電体の樹脂を硬
化させ、導電ペースト導電体による配線層と銅箔の電気
的接続を同時に行って多層プリント配線板を作製するも
のである。このように銅箔付樹脂基板に突起部を有する
導電ペースト導電体を形成して、加熱・加圧プレスにて
多層プリント配線板を作製することにより、配線層と銅
箔の層間電気的接続が確実に行え、且つ外層基板と内層
基板の位置合わせ精度の優れた高密度多層プリント配線
板が得られるようになる。尚、銅箔付樹脂基板としては
樹脂基板に銅箔を貼り合わせたもの、或いは銅箔に樹脂
を塗工したものを用いることができる。また、内層基板
は両面板、多層板のいずれでも良く、例えばIVH構造
を有する多層配線板でも良い。
Embodiments of the present invention will be described below. The multilayer printed wiring board of the present invention prepares an outer layer substrate in which a semi-cured conductive paste conductor having a projection is formed on a resin substrate with a copper foil, and the outer layer substrate is formed by using the inner layer substrate on which the wiring layer is formed as a core. Laminate on both sides, press and heat / press to cure the resin board with copper foil and the resin of conductive paste conductor, and make electrical connection between wiring layer and copper foil by conductive paste conductor at the same time, multilayer printed wiring board Is made. By forming a conductive paste conductor having a projection on the resin substrate with copper foil and manufacturing a multilayer printed wiring board by heating / pressing, the interlayer electrical connection between the wiring layer and the copper foil is established. It is possible to obtain a high-density multilayer printed wiring board which can be performed reliably and has excellent alignment accuracy between the outer layer substrate and the inner layer substrate. Note that, as the resin substrate with copper foil, a resin substrate in which copper foil is bonded to a resin substrate, or a resin substrate in which copper foil is coated with resin can be used. The inner substrate may be either a double-sided board or a multilayer board, for example, a multilayer wiring board having an IVH structure.

【0012】以下、本発明の多層プリント配線板の製造
方法について説明する。図1(a)〜(g)に多層プリ
ント配線板の製造工程の一実施例を工程順に示す部分断
面図を示す。
Hereinafter, a method for manufacturing a multilayer printed wiring board according to the present invention will be described. 1A to 1G are partial cross-sectional views showing one embodiment of a manufacturing process of a multilayer printed wiring board in the order of processes.

【0013】まず、未硬化状態の熱硬化性樹脂であるエ
ポキシ系樹脂からなる樹脂基板1上に12μm厚の銅箔
2が積層された銅箔付樹脂基板11の樹脂基板1上にポ
リエステルフイルムからなるフィルム3を貼り合わせる
(図1(a)参照)。ここで、銅箔付樹脂基板としては
(APL−B(商品名):住友ベークライト製)、MC
F−6000(商品名):日立化成製)等が使用でき、
樹脂基板1の厚さは60〜100μm、銅箔2の厚さは
4〜35μmの範囲のものが好都合である。フィルム3
は後述の導電ペースト導電体の突起部の高さを決定する
もので、厚さ20μm前後のフィルムが使用される。さ
らに、フィルム3は樹脂基板1に対して適度の接着性を
持っていれば良く、軽接着の粘着加工を施したものが好
適である。
First, a polyester film is formed on a resin substrate 1 of a copper-foiled resin substrate 11 in which a copper foil 2 having a thickness of 12 μm is laminated on a resin substrate 1 made of an epoxy resin which is an uncured thermosetting resin. (See FIG. 1A). Here, as the resin substrate with copper foil (APL-B (trade name): manufactured by Sumitomo Bakelite), MC
F-6000 (trade name: manufactured by Hitachi Chemical) or the like can be used.
It is convenient that the thickness of the resin substrate 1 is in the range of 60 to 100 μm and the thickness of the copper foil 2 is in the range of 4 to 35 μm. Film 3
Is used to determine the height of a projection of a conductive paste conductor described later, and a film having a thickness of about 20 μm is used. Further, the film 3 only needs to have an appropriate adhesiveness to the resin substrate 1, and it is preferable that the film 3 has been subjected to a light adhesive bonding process.

【0014】次に、フィルム3側からレーザー(炭酸ガ
スレーザー、UVレーザー、YAGレーザー等)を照射
し、銅箔2をストッパー層にして穴明け加工を行い、フ
ィルム3及び樹脂基板1に開口部4を形成する(図1
(b)参照)。
Next, a laser (a carbon dioxide gas laser, a UV laser, a YAG laser, etc.) is irradiated from the film 3 side, a hole is formed using the copper foil 2 as a stopper layer, and an opening is formed in the film 3 and the resin substrate 1. 4 (FIG. 1)
(B)).

【0015】次に、開口部4の銅箔面をクリーニング処
理する方法としては過マンガン酸処理、プラズマ処理、
塗粒吹きつけ等のいずれかの方法が好ましい。この処理
を行うことにより開口部4の側壁面及び開口部4の底部
にあたる銅箔面が清浄化され、導電ペーストが確実に充
填され、導電ペースト導電体を形成する際導電ペースト
導電体と銅箔との電気的接続が確実に行われる。特に、
開口部4の底部の銅箔面が清浄化されることにより、導
電ペースト導電体と銅箔との電気的接続信頼性が向上す
る。
Next, as a method of cleaning the copper foil surface of the opening 4, there are permanganate treatment, plasma treatment,
Any method such as spraying of the coating particles is preferable. By performing this process, the side wall surface of the opening 4 and the copper foil surface corresponding to the bottom of the opening 4 are cleaned, and the conductive paste is reliably filled. The electrical connection with the device is reliably performed. In particular,
By cleaning the copper foil surface at the bottom of the opening 4, the electrical connection reliability between the conductive paste conductor and the copper foil is improved.

【0016】次に、開口部4に導電ペーストをスクリー
ン印刷にて充填し、予備乾燥して半硬化状態の導電ペー
スト導電体5を形成する(図1(c)参照)。ここで、
導電ペーストとしては銅ペースト、銀ペースト、銅ペー
スト・カーボン入りペーストが使用できる。
Next, the opening 4 is filled with a conductive paste by screen printing and preliminarily dried to form a semi-cured conductive paste conductor 5 (see FIG. 1C). here,
Copper paste, silver paste, copper paste and carbon-containing paste can be used as the conductive paste.

【0017】次に、フィルム3を剥離・除去して、フィ
ルム3の分だけ樹脂基板1より突き出た突起部5aが形
成された導電ペースト導電体5を有する外層基板10を
形成する(図1(d)参照)。
Next, the film 3 is peeled off and removed to form an outer layer substrate 10 having the conductive paste conductor 5 on which the protrusions 5a protruding from the resin substrate 1 by the amount of the film 3 are formed (FIG. 1 ( d)).

【0018】次に、上記の工程を繰り返して、樹脂基板
11上に銅箔12が貼り付けられた銅箔付樹脂基板に突
起部15aを有する導電ペースト導電体15を有する外
層基板20を作製する。
Next, the above steps are repeated to produce an outer layer substrate 20 having a conductive paste conductor 15 having a projection 15a on a resin substrate with a copper foil having a copper foil 12 adhered on a resin substrate 11. .

【0019】次に、絶縁基板21に配線層22及び配線
層23が形成された内層基板30をコアにして両側に銅
箔2及び銅箔12面を外側にした外層基板10及び外層
基板20を積層する(図1(e)参照)。ここで、内層
基板30は両面配線板の事例を示したが、これに限定さ
れるものではなく、2層以上の多層配線板を適宜使用で
きるものである。
Next, the outer substrate 10 and the outer substrate 20 having the copper foil 2 and the copper foil 12 on the outside on both sides with the inner substrate 30 having the wiring layer 22 and the wiring layer 23 formed on the insulating substrate 21 as a core, The layers are stacked (see FIG. 1E). Here, the example of the inner layer substrate 30 is a double-sided wiring board. However, the present invention is not limited to this, and a multilayer wiring board having two or more layers can be used as appropriate.

【0020】次に、170〜180℃の温度で加熱・加
圧プレスして多層板40を作成する(図1(f)参
照)。この加熱・加圧プレス工程で樹脂基板1、樹脂基
板11、導電ペースト導電体5及び導電ペースト導電体
15の樹脂が硬化すると同時に導電ペースト導電体5及
び導電ペースト導電体15により内層基板30の配線層
22及び配線層23と外層基板の銅箔2及び銅箔12と
が電気的に接続される。
Next, a multilayer board 40 is prepared by heating and pressing at a temperature of 170 to 180 ° C. (see FIG. 1F). In the heating / pressing step, the resin of the resin substrate 1, the resin substrate 11, the conductive paste conductor 5 and the conductive paste conductor 15 is hardened, and at the same time, the wiring of the inner layer substrate 30 is formed by the conductive paste conductor 5 and the conductive paste conductor 15. The layer 22 and the wiring layer 23 are electrically connected to the copper foil 2 and the copper foil 12 of the outer layer substrate.

【0021】次に、多層板40の銅箔2及び銅箔12を
パターニング処理して配線層2a及び配線層12aを形
成して多層プリント配線板50を得る(図1(g)参
照)。ここで、導電ペースト導電体5及び15の上部に
ある配線層2a及び配線層12aはレーザで穴明け加工
され、導電ペーストが充填され、硬化しているため、窪
みが生じない。
Next, the copper foil 2 and the copper foil 12 of the multilayer board 40 are patterned to form the wiring layer 2a and the wiring layer 12a, thereby obtaining a multilayer printed wiring board 50 (see FIG. 1 (g)). Here, the wiring layer 2a and the wiring layer 12a above the conductive paste conductors 5 and 15 are drilled by a laser, filled with the conductive paste, and hardened, so that no dent is generated.

【0022】[0022]

【発明の効果】上記したように、本発明の製造法によれ
ば、銅箔付樹脂基板に突起部を有する導電ペースト導電
体を形成して外層基板とし、内層基板と積層して多層プ
リント配線板とするため、外層基板の導電ペースト導電
体と内層基板の配線層との位置合わせ精度に優れ、且つ
各配線層の層間接続が全箇所に於いて良好な電気的接続
が得られる。また、外層基板の導電ペースト導電体の上
部の配線層に窪みを生じないため、その配線層部分をラ
ンドとしても使用できる。そのため配線密度を向上でき
る。さらに、温度サイクル試験等の信頼性試験において
も極めて高い層間接続信頼性が得られる。従って、良好
な電気的接続と極めて高い層間接続信頼性を有する多層
プリント配線板を製造することができる。
As described above, according to the production method of the present invention, a conductive paste conductor having a projection is formed on a resin substrate with a copper foil to form an outer layer substrate, and is laminated with an inner layer substrate to form a multilayer printed wiring. Since it is a plate, the positioning accuracy between the conductive paste conductor of the outer layer substrate and the wiring layer of the inner layer substrate is excellent, and good electrical connection can be obtained in all the interlayer connections of each wiring layer. Further, since no dent is formed in the wiring layer above the conductive paste conductor of the outer layer substrate, the wiring layer portion can be used as a land. Therefore, the wiring density can be improved. Further, even in a reliability test such as a temperature cycle test, extremely high interlayer connection reliability can be obtained. Therefore, a multilayer printed wiring board having good electrical connection and extremely high interlayer connection reliability can be manufactured.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)〜(g)は、本発明の多層プリント配線
板の製造方法の一実施例を示す部分断面図である。
FIGS. 1A to 1G are partial cross-sectional views showing one embodiment of a method for manufacturing a multilayer printed wiring board according to the present invention.

【図2】(a)〜(h)は、従来のIVH構造の多層プ
リント配線板の製造工程の一例を示す部分断面図であ
る。
FIGS. 2A to 2H are partial cross-sectional views illustrating an example of a manufacturing process of a conventional multilayer printed wiring board having an IVH structure.

【符号の説明】[Explanation of symbols]

1……樹脂基板 2、12、64、65、81、82……銅箔 2a、12a、22、23、64a、65a、81a、
82a……配線層 3……フィルム 4、62……開口部 5、15、63、73、74……導電ペースト導電体 5a、15a……突起部 10、20……外層基板 11……銅箔付樹脂基板 21……絶縁基板 30……内層基板 40……多層板 50……多層プリント配線板 60……両面配線板 61……プリプレグ樹脂基板 71、72……導電ペースト導電体が形成されたプリプ
レグ樹脂基板 90……多層板 100……多層配線板
1. Resin substrate 2, 12, 64, 65, 81, 82 Copper foil 2a, 12a, 22, 23, 64a, 65a, 81a,
82a ... wiring layer 3 ... film 4, 62 ... opening 5, 15, 63, 73, 74 ... conductive paste conductor 5a, 15a ... projection 10, 20 ... outer substrate 11 ... copper foil Resin substrate 21 ... Insulating substrate 30 ... Inner layer substrate 40 ... Multilayer board 50 ... Multilayer printed wiring board 60 ... Double-sided wiring board 61 ... Prepreg resin board 71, 72 ... Conductive paste conductor is formed Prepreg resin substrate 90 Multilayer board 100 Multilayer wiring board

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 5E346 AA43 CC08 CC32 CC39 DD45 EE06 EE07 EE09 EE13 EE18 FF24 GG08 GG09 GG15 HH07 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 5E346 AA43 CC08 CC32 CC39 DD45 EE06 EE07 EE09 EE13 EE18 FF24 GG08 GG09 GG15 HH07

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】以下の(a)〜(i)の工程を備えること
を特徴とする多層プリント配線板の製造方法。 (a)樹脂基板(1)に銅箔(2)が形成された銅箔付
樹脂基板(11)の樹脂基板(1)上にフィルム(3)
を貼着する工程。 (b)フィルム(3)側からレーザー等を照射し、銅箔
(2)をストッパー層にして穴明け加工を行い、フィル
ム(3)と樹脂基板(1)に開口部(4)を形成する工
程。 (c)開口部(4)の側壁面及び銅箔面をクリーニング
処理する工程。 (d)開口部(4)に導電性ペーストを充填し、予備乾
燥して半硬化状態の導電ペースト導電体(5)を形成す
る工程。 (e)フィルム(3)を除去して導電ペースト導電体
(5)の突起部(5a)がフィルム(3)の厚さ分だけ
樹脂基板(1)より突き出た外層基板(10)を形成す
る工程。 (f)(a)〜(e)の工程を繰り返して、別の外層基
板(20)を作製する工程。 (g)配線層(22)及び配線層(23)が形成された
内層基板(30)をコアにして外層基板(10)及び外
層基板(20)の銅箔(2)及び銅箔(12)面を外側
にして積層する工程。 (h)加熱・加圧プレスして、内層基板(30)の配線
層(22)及び配線層(23)と銅箔(2)及び銅箔
(12)とが導電ペースト導電体(5)及び導電ペース
ト導電体(15)にて電気的に接続された多層板(4
0)を作製する工程。 (i)多層板(40)の両側の銅箔(2)及び銅箔(1
2)をパターニング処理して配線層(2a)及び配線層
(12a)を形成し、多層プリント配線板(50)を作
製する工程。
1. A method of manufacturing a multilayer printed wiring board, comprising the following steps (a) to (i). (A) A film (3) on a resin substrate (1) of a resin substrate with copper foil (11) in which a copper foil (2) is formed on a resin substrate (1).
A step of sticking. (B) Irradiating a laser or the like from the film (3) side, making a hole using the copper foil (2) as a stopper layer, and forming an opening (4) in the film (3) and the resin substrate (1). Process. (C) a step of cleaning the side wall surface and the copper foil surface of the opening (4). (D) A step of filling the opening (4) with a conductive paste and preliminarily drying to form a semi-cured conductive paste conductor (5). (E) The film (3) is removed to form an outer layer substrate (10) in which the protrusion (5a) of the conductive paste conductor (5) protrudes from the resin substrate (1) by the thickness of the film (3). Process. (F) a step of producing another outer layer substrate (20) by repeating the steps (a) to (e). (G) Copper foil (2) and copper foil (12) of outer layer substrate (10) and outer layer substrate (20) with inner layer substrate (30) having wiring layer (22) and wiring layer (23) formed as a core A step of laminating with the surface outside. (H) By pressing under heat and pressure, the wiring layer (22) and the wiring layer (23) of the inner layer substrate (30) and the copper foil (2) and the copper foil (12) are electrically conductive paste conductor (5) and The multilayer board (4) electrically connected by the conductive paste conductor (15)
Step 0). (I) Copper foil (2) and copper foil (1) on both sides of multilayer board (40)
2) a step of forming a wiring layer (2a) and a wiring layer (12a) by patterning to form a multilayer printed wiring board (50).
JP12415499A 1999-04-30 1999-04-30 Manufacture of multilayer printed wiring board Pending JP2000315863A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12415499A JP2000315863A (en) 1999-04-30 1999-04-30 Manufacture of multilayer printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12415499A JP2000315863A (en) 1999-04-30 1999-04-30 Manufacture of multilayer printed wiring board

Publications (1)

Publication Number Publication Date
JP2000315863A true JP2000315863A (en) 2000-11-14

Family

ID=14878289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12415499A Pending JP2000315863A (en) 1999-04-30 1999-04-30 Manufacture of multilayer printed wiring board

Country Status (1)

Country Link
JP (1) JP2000315863A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002158446A (en) * 2000-11-22 2002-05-31 Sony Chem Corp Flexible board element and multilayer flexible wiring board
WO2009113602A1 (en) * 2008-03-13 2009-09-17 株式会社村田製作所 Method for manufacturing a resin substrate and a resin substrate
KR100975258B1 (en) 2002-02-22 2010-08-11 가부시키가이샤후지쿠라 Multilayer wiring board, base for multilayer wiring board, printed wiring board, and its manufacturing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002158446A (en) * 2000-11-22 2002-05-31 Sony Chem Corp Flexible board element and multilayer flexible wiring board
KR100975258B1 (en) 2002-02-22 2010-08-11 가부시키가이샤후지쿠라 Multilayer wiring board, base for multilayer wiring board, printed wiring board, and its manufacturing method
WO2009113602A1 (en) * 2008-03-13 2009-09-17 株式会社村田製作所 Method for manufacturing a resin substrate and a resin substrate

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