JP2000284178A5 - - Google Patents

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Publication number
JP2000284178A5
JP2000284178A5 JP1999086435A JP8643599A JP2000284178A5 JP 2000284178 A5 JP2000284178 A5 JP 2000284178A5 JP 1999086435 A JP1999086435 A JP 1999086435A JP 8643599 A JP8643599 A JP 8643599A JP 2000284178 A5 JP2000284178 A5 JP 2000284178A5
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JP
Japan
Prior art keywords
optical system
optical element
reflecting surface
projection
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1999086435A
Other languages
English (en)
Japanese (ja)
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JP2000284178A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP11086435A priority Critical patent/JP2000284178A/ja
Priority claimed from JP11086435A external-priority patent/JP2000284178A/ja
Publication of JP2000284178A publication Critical patent/JP2000284178A/ja
Publication of JP2000284178A5 publication Critical patent/JP2000284178A5/ja
Withdrawn legal-status Critical Current

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JP11086435A 1999-03-29 1999-03-29 投影光学系及び該投影光学系を備える投影露光装置 Withdrawn JP2000284178A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11086435A JP2000284178A (ja) 1999-03-29 1999-03-29 投影光学系及び該投影光学系を備える投影露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11086435A JP2000284178A (ja) 1999-03-29 1999-03-29 投影光学系及び該投影光学系を備える投影露光装置

Publications (2)

Publication Number Publication Date
JP2000284178A JP2000284178A (ja) 2000-10-13
JP2000284178A5 true JP2000284178A5 (enrdf_load_stackoverflow) 2006-06-29

Family

ID=13886847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11086435A Withdrawn JP2000284178A (ja) 1999-03-29 1999-03-29 投影光学系及び該投影光学系を備える投影露光装置

Country Status (1)

Country Link
JP (1) JP2000284178A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005015316A2 (en) * 2003-08-12 2005-02-17 Carl Zeiss Smt Ag Projection objective for microlithography
CN115113366B (zh) * 2022-05-23 2023-12-15 江西欧菲光学有限公司 光学系统、镜头模组和电子设备

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