JP2000260698A5 - - Google Patents

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Publication number
JP2000260698A5
JP2000260698A5 JP1999062003A JP6200399A JP2000260698A5 JP 2000260698 A5 JP2000260698 A5 JP 2000260698A5 JP 1999062003 A JP1999062003 A JP 1999062003A JP 6200399 A JP6200399 A JP 6200399A JP 2000260698 A5 JP2000260698 A5 JP 2000260698A5
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JP
Japan
Prior art keywords
light source
distribution
effective light
optical system
projection optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999062003A
Other languages
English (en)
Japanese (ja)
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JP2000260698A (ja
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Publication date
Application filed filed Critical
Priority to JP11062003A priority Critical patent/JP2000260698A/ja
Priority claimed from JP11062003A external-priority patent/JP2000260698A/ja
Publication of JP2000260698A publication Critical patent/JP2000260698A/ja
Publication of JP2000260698A5 publication Critical patent/JP2000260698A5/ja
Pending legal-status Critical Current

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JP11062003A 1999-03-09 1999-03-09 投影露光装置およびそれを用いた半導体デバイスの製造方法 Pending JP2000260698A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11062003A JP2000260698A (ja) 1999-03-09 1999-03-09 投影露光装置およびそれを用いた半導体デバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11062003A JP2000260698A (ja) 1999-03-09 1999-03-09 投影露光装置およびそれを用いた半導体デバイスの製造方法

Publications (2)

Publication Number Publication Date
JP2000260698A JP2000260698A (ja) 2000-09-22
JP2000260698A5 true JP2000260698A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2006-04-20

Family

ID=13187555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11062003A Pending JP2000260698A (ja) 1999-03-09 1999-03-09 投影露光装置およびそれを用いた半導体デバイスの製造方法

Country Status (1)

Country Link
JP (1) JP2000260698A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4541571B2 (ja) * 2001-01-23 2010-09-08 キヤノン株式会社 半導体製造装置
JP4585697B2 (ja) * 2001-01-26 2010-11-24 キヤノン株式会社 露光装置及び光源の位置調整方法
JP2002267937A (ja) * 2001-03-08 2002-09-18 Olympus Optical Co Ltd 測定光学系補正装置及び分光測光装置
US6868223B2 (en) 2001-05-11 2005-03-15 Canon Kabushiki Kaisha Illumination apparatus, exposure apparatus using the same and device fabrication method
JP3826047B2 (ja) 2002-02-13 2006-09-27 キヤノン株式会社 露光装置、露光方法、及びそれを用いたデバイス製造方法
JP4497949B2 (ja) * 2004-02-12 2010-07-07 キヤノン株式会社 露光装置
JP4697426B2 (ja) * 2005-11-18 2011-06-08 株式会社ニコン 光強度分布の評価方法、照明光学装置およびその調整方法、露光装置、および露光方法
JP2011242563A (ja) * 2010-05-18 2011-12-01 Hitachi High-Technologies Corp 露光装置、露光装置のランプ位置調整方法、及び表示用パネル基板の製造方法

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