JP2003185597A5 - - Google Patents

Download PDF

Info

Publication number
JP2003185597A5
JP2003185597A5 JP2001385035A JP2001385035A JP2003185597A5 JP 2003185597 A5 JP2003185597 A5 JP 2003185597A5 JP 2001385035 A JP2001385035 A JP 2001385035A JP 2001385035 A JP2001385035 A JP 2001385035A JP 2003185597 A5 JP2003185597 A5 JP 2003185597A5
Authority
JP
Japan
Prior art keywords
optical axis
light receiving
receiving device
capillary array
array sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001385035A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003185597A (ja
JP4002097B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001385035A priority Critical patent/JP4002097B2/ja
Priority claimed from JP2001385035A external-priority patent/JP4002097B2/ja
Publication of JP2003185597A publication Critical patent/JP2003185597A/ja
Publication of JP2003185597A5 publication Critical patent/JP2003185597A5/ja
Application granted granted Critical
Publication of JP4002097B2 publication Critical patent/JP4002097B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001385035A 2001-12-18 2001-12-18 キャピラリー・アレイ・シートの検査装置及び検査方法 Expired - Fee Related JP4002097B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001385035A JP4002097B2 (ja) 2001-12-18 2001-12-18 キャピラリー・アレイ・シートの検査装置及び検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001385035A JP4002097B2 (ja) 2001-12-18 2001-12-18 キャピラリー・アレイ・シートの検査装置及び検査方法

Publications (3)

Publication Number Publication Date
JP2003185597A JP2003185597A (ja) 2003-07-03
JP2003185597A5 true JP2003185597A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2005-07-28
JP4002097B2 JP4002097B2 (ja) 2007-10-31

Family

ID=27594610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001385035A Expired - Fee Related JP4002097B2 (ja) 2001-12-18 2001-12-18 キャピラリー・アレイ・シートの検査装置及び検査方法

Country Status (1)

Country Link
JP (1) JP4002097B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008076223A (ja) * 2006-09-21 2008-04-03 Matsushita Electric Ind Co Ltd 円筒状透明体の検査方法とそれに用いる検査装置
JP5198820B2 (ja) * 2006-09-26 2013-05-15 三菱レイヨン株式会社 キャピラリー・アレイ・シート検査装置及び検査方法
JP5845601B2 (ja) * 2011-03-15 2016-01-20 三菱レイヨン株式会社 ゲル濃度測定用チップ、ゲルの濃度を測定する方法、およびゲル濃度測定装置
CN105548179A (zh) * 2015-12-04 2016-05-04 深圳市赛尔生物技术有限公司 一种基于透射光或自发光测定生物芯片的方法及系统
CN110095491B (zh) * 2019-05-09 2021-08-20 上海华力微电子有限公司 一种缺陷检测系统、检测方法及电子束扫描机台

Similar Documents

Publication Publication Date Title
US6523985B2 (en) Illuminating device
JP2008527627A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
ATE540424T1 (de) Optisches beleuchtungsgerät, belichtungsgerät und belichtungsverfahren
JP2007225591A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2007524975A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE60315606D1 (de) Optische lichtleitervorrichtung
DK1319942T3 (da) Apparat for generering af data til bestemmelse af en egenskab af en ædelsten og metoder og computerprogrammer til bestemmelse af en egenskab af en ædelsten
JP2006268878A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EA201170517A1 (ru) Устройство анализа поверхности подложки
WO2006068264A3 (en) Optical device and light source
ATE359540T1 (de) Beleuchtungsvorrichtung
EP1788447A3 (en) Exposure apparatus and device manufacturing method
JP2008519257A (ja) 板ガラスの表面及び内部の欠陥を識別するための検査装置及び方法
RU2009116927A (ru) Устройство и способ для наблюдения поверхности образца
JP2020170070A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2003185597A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2002236307A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
ATE397748T1 (de) Mikroskopeinrichtung mit thermischer linse
ATE334031T1 (de) Lichtsignal
JP2005243904A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE60310349D1 (de) Mechanische Materialprüfung
JP2007333672A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2004526969A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP4112064B2 (ja) 光路調整部材及びそれを備えた照明装置
ATE398791T1 (de) Auflagefläche eines geräts zur optischen aufnahme von objekten