JP2000258441A5 - - Google Patents
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- Publication number
- JP2000258441A5 JP2000258441A5 JP1999059541A JP5954199A JP2000258441A5 JP 2000258441 A5 JP2000258441 A5 JP 2000258441A5 JP 1999059541 A JP1999059541 A JP 1999059541A JP 5954199 A JP5954199 A JP 5954199A JP 2000258441 A5 JP2000258441 A5 JP 2000258441A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- optical device
- elastic body
- light source
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 230000003287 optical effect Effects 0.000 claims 23
- 239000010409 thin film Substances 0.000 claims 17
- 239000000758 substrate Substances 0.000 claims 8
- 239000002346 layers by function Substances 0.000 claims 7
- 239000004065 semiconductor Substances 0.000 claims 6
- 239000010410 layer Substances 0.000 claims 4
- 239000000463 material Substances 0.000 claims 4
- 238000005530 etching Methods 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 3
- 238000002347 injection Methods 0.000 claims 2
- 239000007924 injection Substances 0.000 claims 2
- 229910002704 AlGaN Inorganic materials 0.000 claims 1
- 238000005253 cladding Methods 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- 238000009429 electrical wiring Methods 0.000 claims 1
Images
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP05954199A JP3937639B2 (ja) | 1999-03-08 | 1999-03-08 | 近視野光学系用光源装置、その製造方法、その使用方法、及びそれを用いた装置 |
US09/519,672 US6852968B1 (en) | 1999-03-08 | 2000-03-06 | Surface-type optical apparatus |
US10/995,363 US6974712B2 (en) | 1999-03-08 | 2004-11-24 | Method of fabricating a surface-type optical apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP05954199A JP3937639B2 (ja) | 1999-03-08 | 1999-03-08 | 近視野光学系用光源装置、その製造方法、その使用方法、及びそれを用いた装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2000258441A JP2000258441A (ja) | 2000-09-22 |
JP2000258441A5 true JP2000258441A5 (enrdf_load_stackoverflow) | 2005-04-28 |
JP3937639B2 JP3937639B2 (ja) | 2007-06-27 |
Family
ID=13116237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP05954199A Expired - Fee Related JP3937639B2 (ja) | 1999-03-08 | 1999-03-08 | 近視野光学系用光源装置、その製造方法、その使用方法、及びそれを用いた装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3937639B2 (enrdf_load_stackoverflow) |
-
1999
- 1999-03-08 JP JP05954199A patent/JP3937639B2/ja not_active Expired - Fee Related
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