JP2000223714A5 - - Google Patents
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- Publication number
- JP2000223714A5 JP2000223714A5 JP1999331794A JP33179499A JP2000223714A5 JP 2000223714 A5 JP2000223714 A5 JP 2000223714A5 JP 1999331794 A JP1999331794 A JP 1999331794A JP 33179499 A JP33179499 A JP 33179499A JP 2000223714 A5 JP2000223714 A5 JP 2000223714A5
- Authority
- JP
- Japan
- Prior art keywords
- impurity region
- thin film
- film transistor
- conductive layer
- gate electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012535 impurity Substances 0.000 description 108
- 239000004065 semiconductor Substances 0.000 description 60
- 239000010409 thin film Substances 0.000 description 54
- 239000010408 film Substances 0.000 description 16
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33179499A JP4159713B2 (ja) | 1998-11-25 | 1999-11-22 | 半導体装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33366598 | 1998-11-25 | ||
JP10-333665 | 1998-11-25 | ||
JP33179499A JP4159713B2 (ja) | 1998-11-25 | 1999-11-22 | 半導体装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005301223A Division JP4160072B2 (ja) | 1998-11-25 | 2005-10-17 | 半導体装置の作製方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2000223714A JP2000223714A (ja) | 2000-08-11 |
JP2000223714A5 true JP2000223714A5 (de) | 2005-12-02 |
JP4159713B2 JP4159713B2 (ja) | 2008-10-01 |
Family
ID=26573968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP33179499A Expired - Fee Related JP4159713B2 (ja) | 1998-11-25 | 1999-11-22 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4159713B2 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1049167A3 (de) | 1999-04-30 | 2007-10-24 | Sel Semiconductor Energy Laboratory Co., Ltd. | Halbleiterbauelement und dessen Herstellungsverfahren |
JP4850328B2 (ja) * | 2000-08-29 | 2012-01-11 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP5046452B2 (ja) * | 2000-10-26 | 2012-10-10 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2002151698A (ja) * | 2000-11-14 | 2002-05-24 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
TW525216B (en) | 2000-12-11 | 2003-03-21 | Semiconductor Energy Lab | Semiconductor device, and manufacturing method thereof |
JP4737828B2 (ja) * | 2000-12-21 | 2011-08-03 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP4926321B2 (ja) * | 2001-01-24 | 2012-05-09 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP4801262B2 (ja) * | 2001-01-30 | 2011-10-26 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP4939690B2 (ja) * | 2001-01-30 | 2012-05-30 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP4693257B2 (ja) * | 2001-02-21 | 2011-06-01 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
SG117406A1 (en) | 2001-03-19 | 2005-12-29 | Miconductor Energy Lab Co Ltd | Method of manufacturing a semiconductor device |
JP4926329B2 (ja) * | 2001-03-27 | 2012-05-09 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法、電気器具 |
JP4338934B2 (ja) * | 2001-03-27 | 2009-10-07 | 株式会社半導体エネルギー研究所 | 配線の作製方法 |
SG116443A1 (en) | 2001-03-27 | 2005-11-28 | Semiconductor Energy Lab | Wiring and method of manufacturing the same, and wiring board and method of manufacturing the same. |
KR100983525B1 (ko) | 2003-12-26 | 2010-09-24 | 삼성전자주식회사 | 상보형 박막트랜지스터 형성방법과 이에 의한 상보형박막트랜지스터 |
JP2006003493A (ja) * | 2004-06-16 | 2006-01-05 | Nikon Corp | 形状転写方法 |
CN101981676B (zh) | 2008-04-02 | 2013-05-08 | Nlt科技股份有限公司 | 半导体器件、半导体器件制造方法、液晶显示装置和电子设备 |
JP5520911B2 (ja) * | 2011-10-12 | 2014-06-11 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US9786793B2 (en) * | 2012-03-29 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor layer including regions with different concentrations of resistance-reducing elements |
-
1999
- 1999-11-22 JP JP33179499A patent/JP4159713B2/ja not_active Expired - Fee Related
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