JP2000216038A - Manufacture for laminated electronic part - Google Patents

Manufacture for laminated electronic part

Info

Publication number
JP2000216038A
JP2000216038A JP1676099A JP1676099A JP2000216038A JP 2000216038 A JP2000216038 A JP 2000216038A JP 1676099 A JP1676099 A JP 1676099A JP 1676099 A JP1676099 A JP 1676099A JP 2000216038 A JP2000216038 A JP 2000216038A
Authority
JP
Japan
Prior art keywords
conductor
sheet
pressure
manufacturing
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1676099A
Other languages
Japanese (ja)
Inventor
Hironobu Chiba
博伸 千葉
Tomoyuki Washisaki
智幸 鷲▲崎▼
Kazuo Oishi
一夫 大石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1676099A priority Critical patent/JP2000216038A/en
Publication of JP2000216038A publication Critical patent/JP2000216038A/en
Pending legal-status Critical Current

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  • Press-Shaping Or Shaping Using Conveyers (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PROBLEM TO BE SOLVED: To make it possible to obtain the same density of laminated element as a conventional one in a short time when a sheet of temporarily bonded one-body laminated element made up of a conductor and a green sheet is pressed permanently. SOLUTION: A manufacturing method includes a forming step for forming a green sheet, a step for manufacturing a conductor, a step for putting the conductor between the green sheets and bonding temporality by press to form a sheet of one-body laminated element, and a main pressing step for pressing the temporarily bonded laminated element permanently under pressure larger than that of the temporarily bonded laminated element. The main pressing steps are carried out several times.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、小型デジタル電子
機器やOA機器等の電気製品に広く用いられている積層
インダクタ部品やセラミック複合部品等の積層電子部品
の製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multilayer electronic component such as a multilayer inductor component or a ceramic composite component, which is widely used in electrical products such as small digital electronic devices and OA devices.

【0002】[0002]

【従来の技術】近年、デジタル電子機器等の小型・薄型
化に伴う高密度実装化が進んでいる。電子部品分野にお
いては1.0×0.5mmサイズのチップ部品が実用化
されている。
2. Description of the Related Art In recent years, high-density mounting has been progressing along with miniaturization and thinning of digital electronic devices and the like. In the field of electronic components, chip components having a size of 1.0 × 0.5 mm have been put to practical use.

【0003】ノイズ対策部品分野においても、デジタル
電子機器の小型・薄型化に伴い積層インダクタ部品やL
C複合部品等の小型化への要求が強まっている。
In the field of noise suppression components, as digital electronic devices become smaller and thinner, multilayer inductor components and L
There is an increasing demand for miniaturization of C composite parts and the like.

【0004】以下、従来の積層インダクタ部品の製造方
法について図面を参照しながら説明する。
Hereinafter, a conventional method for manufacturing a multilayer inductor component will be described with reference to the drawings.

【0005】図7は従来の積層インダクタ部品の製造方
法を示す工程図である。図8は同積層インダクタ部品に
おける積層体の分解斜視図である。図7、図8におい
て、まず、グリーンシート成形工程として、磁性体粉に
バインダーを加えて混練し、スラリーを作製した後、こ
のスラリーを離型性のフィルム上にドクターブレード法
等により塗布し、かつ乾燥させてセラミックグリーンシ
ートを作製する。
FIG. 7 is a process chart showing a conventional method for manufacturing a laminated inductor component. FIG. 8 is an exploded perspective view of a laminated body in the laminated inductor component. 7 and 8, first, as a green sheet forming step, a binder is added to the magnetic substance powder and kneaded to prepare a slurry. Then, the slurry is applied on a release film by a doctor blade method or the like. And, it is dried to produce a ceramic green sheet.

【0006】次に、このセラミックグリーンシートを用
いて、図8に示すように、所定の大きさに切り出した複
数枚のベタ膜状セラミックグリーンシート1と、前記ベ
タ膜状セラミックグリーンシート1を用いて所定の位置
にパンチングマシーンあるいは穴開け金型等により導体
埋め込みスルーホール2a,3aを形成した数種類のセ
ラミックグリーンシート2,3の導体埋め込みスルーホ
ール2a,3a部に、導体パターンの端部が位置するよ
うにAgペーストで数種類の導体パターン4a,4b,
4c,4dをスルーホール印刷およびパターン印刷した
数種類のパターン形成グリーンシート5a,5b,5
c,5dを用意する。
Next, as shown in FIG. 8, a plurality of solid film-shaped ceramic green sheets 1 cut out to a predetermined size using the ceramic green sheets, and the solid film-shaped ceramic green sheets 1 are used. The end of the conductor pattern is located at the conductor-embedded through-holes 2a, 3a of the ceramic green sheets 2, 3 in which the conductor-embedded through-holes 2a, 3a are formed at predetermined positions by a punching machine or a punching die. Several kinds of conductor patterns 4a, 4b,
Several kinds of pattern forming green sheets 5a, 5b, 5 obtained by through-hole printing and pattern printing of 4c, 4d
Prepare c and 5d.

【0007】このようにして用意された複数枚のベタ膜
状セラミックグリーンシート1を所定の厚みになるまで
仮圧着し、そしてこの仮圧着された積層体の上部に前記
数種類のパターン形成グリーンシート5a,5b,5
c,5dを、導体埋め込みスルーホール2a,3aと数
種類の導体パターン4a,4b,4c,4dの端部が接
続されるように仮圧着しながら、積層方向に螺旋状のコ
イル形状となるように所定のターン数が得られるまで積
層し、さらにその上部に複数枚のベタ膜状セラミックグ
リーンシート1を所定の厚みになるまで仮圧着してシー
ト状の一体積層物を得る。
[0007] The plurality of solid film-like ceramic green sheets 1 prepared as described above are temporarily press-bonded to a predetermined thickness, and the above-mentioned several kinds of pattern-formed green sheets 5a are placed on the temporarily pressed laminate. , 5b, 5
While temporarily compressing the conductors c and 5d so that the conductor-embedded through holes 2a and 3a are connected to the ends of the conductor patterns 4a, 4b, 4c and 4d, a spiral coil shape is formed in the laminating direction. The layers are laminated until a predetermined number of turns is obtained, and a plurality of solid film-like ceramic green sheets 1 are temporarily pressed thereon to a predetermined thickness to obtain a sheet-like integrated laminate.

【0008】次に、このシート状の一体積層物の層間に
溜まった空気を抜いて積層体密度を上げ、焼成時に焼結
密度が上がるようにするために、前記仮圧着時の圧力よ
りも大きい圧力で加圧(以下、本加圧と称す)する。こ
の場合の本加圧は多段階で徐々に圧力を上げながら圧力
を加えるものである。
Next, in order to increase the density of the laminated body by removing air accumulated between the layers of the sheet-like integrated laminate and to increase the sintering density at the time of firing, the pressure is higher than the pressure at the time of the preliminary press-bonding. It is pressurized by pressure (hereinafter referred to as main pressurization). In this case, the main pressure is applied while gradually increasing the pressure in multiple stages.

【0009】次に図9(a)に示すように、前記本加圧
されたシート状の一体積層物を所定の形状に切断して個
片6とし、これを焼成する。
Next, as shown in FIG. 9 (a), the above-mentioned fully-pressed sheet-like integrated laminate is cut into a predetermined shape into individual pieces 6, which are fired.

【0010】次に図9(b)に示すように、個片6の対
向する側面に端面電極7を形成して製品化するようにし
ていた。
Next, as shown in FIG. 9B, end electrodes 7 are formed on the opposing side surfaces of the individual piece 6 to produce a product.

【0011】[0011]

【発明が解決しようとする課題】しかしながら、上記し
た従来の積層インダクタ部品の製造方法においては、シ
ート状の一体積層物の層間に溜まった空気を抜くため
に、本加圧は多段階で徐々に圧力を上げながら圧力を加
えなければならないため、時間がかかり過ぎて生産性を
低下させるという製造面での問題点を有していた。
However, in the above-described conventional method for manufacturing a multilayer inductor component, the main pressurization is gradually performed in multiple stages in order to remove air trapped between layers of the sheet-like integrated laminate. Since the pressure must be applied while increasing the pressure, it takes too much time to reduce the productivity, which has a problem in manufacturing.

【0012】本発明は上記従来の問題点を解決するもの
で、仮圧着された導体とグリーンシートからなるシート
状の一体積層物を本加圧する際に、短時間で従来と同等
の積層体密度を得ることができる積層電子部品の製造方
法を提供することを目的とするものである。
The present invention solves the above-mentioned conventional problems. When a sheet-like integrated laminate composed of a preliminarily-bonded conductor and a green sheet is fully pressurized, the same laminate density as in the past can be obtained in a short time. It is an object of the present invention to provide a method for manufacturing a laminated electronic component capable of obtaining the following.

【0013】[0013]

【課題を解決するための手段】上記課題を解決するため
に本発明の積層電子部品の製造方法は、グリーンシート
を成形するグリーンシート成形工程と、導体を作製する
導体作製工程と、前記導体をグリーンシート間に介在さ
せ、かつこれらを仮圧着してシート状の一体積層物を得
る仮圧着工程と、前記仮圧着されたシート状の一体積層
物を前記仮圧着時の圧力よりも大きい圧力で本加圧する
本加圧工程とを有し、前記本加圧工程を複数回行うよう
にしたもので、この製造方法によれば、仮圧着された導
体とグリーンシートからなるシート状の一体積層物を本
加圧する際に、短時間で従来と同等の積層体密度を得る
ことができるものである。
In order to solve the above-mentioned problems, a method of manufacturing a laminated electronic component according to the present invention comprises a green sheet forming step of forming a green sheet, a conductor forming step of forming a conductor, and a method of forming the conductor. A temporary pressing step of interposing between the green sheets and temporarily pressing them to obtain a sheet-like integrated laminate, and applying a pressure greater than the pressure at the time of the temporary pressing to the temporarily pressed sheet-like integrated laminate. A main pressurizing step of performing a main pressurization, wherein the main pressurizing step is performed a plurality of times. According to this manufacturing method, a sheet-like integrated laminate of a temporarily press-bonded conductor and a green sheet is provided. When the main pressure is applied, a laminate density equivalent to the conventional one can be obtained in a short time.

【0014】[0014]

【発明の実施の形態】本発明の請求項1に記載の発明
は、グリーンシートを成形するグリーンシート成形工程
と、導体を作製する導体作製工程と、前記導体をグリー
ンシート間に介在させ、かつこれらを仮圧着してシート
状の一体積層物を得る仮圧着工程と、前記仮圧着された
シート状の一体積層物を前記仮圧着時の圧力よりも大き
い圧力で本加圧する本加圧工程とを有し、前記本加圧工
程を複数回行うようにしたもので、この製造方法によれ
ば、仮圧着された導体とグリーンシートからなるシート
状の一体積層物を前記仮圧着時の圧力よりも大きい圧力
で本加圧する本加圧工程を複数回行うようにしているた
め、従来のような多段階で徐々に圧力を上げながら圧力
を加える本加圧に比べて、短時間で従来と同等の積層体
密度を得ることができ、これにより、生産性を向上させ
ることができ、またシート状の一体積層物の層間に溜ま
った空気も複数回の本加圧により効果的に逃がすことが
できるため、焼成時に起きる層間剥離もなくなって、不
良率を低減させることができるという作用を有するもの
である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claim 1 of the present invention provides a green sheet forming step of forming a green sheet, a conductor forming step of forming a conductor, a step of interposing the conductor between the green sheets, and A temporary pressing step of temporarily pressing these to obtain a sheet-like integrated laminate, and a main pressing step of final pressing the temporarily pressed sheet-like integrated laminate with a pressure larger than the pressure at the time of the temporary pressing. According to this manufacturing method, the sheet-like integrated laminate composed of the conductor and the green sheet that have been temporarily compressed is subjected to the pressure during the temporary compression. The main pressurization process, in which the main pressurization is performed at a large pressure, is performed multiple times, so that compared to the conventional pressurization that applies pressure while gradually increasing the pressure in multiple stages as in the past, it is the same as the conventional in a short time Layer density of Thereby, productivity can be improved, and air accumulated between layers of the sheet-like integrated laminate can be effectively released by a plurality of main pressurizations, so that delamination occurring during firing is also eliminated. Therefore, it has an effect that the defective rate can be reduced.

【0015】(実施の形態1)以下、本発明の実施の形
態1における積層インダクタ部品について、図面を参照
しながら説明する。
Embodiment 1 Hereinafter, a multilayer inductor component according to Embodiment 1 of the present invention will be described with reference to the drawings.

【0016】図1は本発明の実施の形態1における積層
インダクタ部品の製造方法を示す工程図である。図2は
同積層インダクタ部品における積層体の分解斜視図であ
る。
FIG. 1 is a process chart showing a method for manufacturing a multilayer inductor component according to Embodiment 1 of the present invention. FIG. 2 is an exploded perspective view of a laminated body in the laminated inductor component.

【0017】図1、図2にもとづいて、本発明の実施の
形態1における積層インダクタ部品の製造方法について
説明する。
A method for manufacturing a multilayer inductor component according to the first embodiment of the present invention will be described with reference to FIGS.

【0018】まず、初めに磁性体の原料として、Ni
O、ZnO、CuOおよびFe23の粒径が0.1〜
1.0μmの粉末を用意し、そしてそれぞれ所定の量を
秤量し、ボールミルで所定時間湿式混合させて乾燥した
後、これを仮焼成し、かつ粉砕して粉末状にした後、ボ
ールミルにより湿式粉砕する。この後、スプレードライ
ヤーで乾燥し、磁性体粉を作製する。
First, as a raw material of the magnetic material, Ni
O, ZnO, CuO and Fe 2 O 3 have a particle size of 0.1 to
A 1.0 μm powder was prepared, weighed in a predetermined amount, wet-mixed in a ball mill for a predetermined period of time, dried, temporarily calcined and pulverized into a powder, and then wet-pulverized in a ball mill. I do. Then, it is dried with a spray drier to produce a magnetic powder.

【0019】次に、これらの磁性体粉に、ポリビニルブ
チラール樹脂を主成分とするバインダーと有機溶剤とを
混練することにより磁性体のスラリーを作製する。
Next, a slurry of a magnetic material is prepared by kneading a binder containing polyvinyl butyral resin as a main component and an organic solvent with the magnetic material powder.

【0020】そして、図1に示すように、まず、初めに
グリーンシート成形工程として、グリーンシートの支持
体となる片面に離型処理を施したキャリアフィルム上に
前記磁性体のスラリーをドクターブレード法等により塗
布し、かつ乾燥させて磁性体グリーンシートを作製す
る。
As shown in FIG. 1, first, as a green sheet forming step, a slurry of the magnetic substance is applied to a carrier film, which has been subjected to a release treatment on one side serving as a green sheet support, by a doctor blade method. And then dried to produce a magnetic green sheet.

【0021】次に、この磁性体グリーンシートを用い
て、図2に示すように、所定の大きさに切り出した複数
枚のベタ膜状磁性体グリーンシート11と、前記ベタ膜
状磁性体グリーンシート11を用いて所定の位置にパン
チングマシーンあるいは穴開け金型等により導体埋め込
みスルーホール12a,13aを形成した数種類の磁性
体グリーンシート12,13の導体埋め込みスルーホー
ル12a,13a部に、導体パターンの端部が位置する
ようにAgペーストで数種類の導体パターン14a,1
4b,14c,14dをスルーホール印刷およびパター
ン印刷した数種類のパターン形成グリーンシート15
a,15b,15c,15dを用意する。
Next, as shown in FIG. 2, a plurality of solid film-like magnetic green sheets 11 cut into a predetermined size using the magnetic green sheets, 11, conductor-embedded through-holes 12 a and 13 a are formed at predetermined positions by a punching machine or a punching die. Several types of conductive patterns 14a, 1 are made of Ag paste so that the ends are located.
Several types of pattern-formed green sheets 15 formed by through-hole printing and pattern printing of 4b, 14c, and 14d
a, 15b, 15c, and 15d are prepared.

【0022】このようにして用意された複数枚のベタ膜
状磁性体グリーンシート11を所定の厚みになるまで7
0kg/cm2、100℃の圧力で仮圧着し、そしてこの仮
圧着された積層体の上部に前記数種類のパターン形成グ
リーンシート15a,15b,15c,15dを、導体
埋め込みスルーホール12a,13aと数種類の導体パ
ターン14a,14b,14c,14dの端部が接続さ
れるように前記と同様の圧力で仮圧着しながら、積層方
向に螺旋状のコイル形状となるように所定のターン数が
得られるまで積層し、さらにその上部に複数枚のベタ膜
状磁性体グリーンシート11を所定の厚みになるまで仮
圧着してシート状の一体積層物を得る。
The plurality of solid film-like magnetic green sheets 11 prepared as described above are removed until a predetermined thickness is reached.
Temporarily press-bonded at a pressure of 100 ° C. and 0 kg / cm 2 , and the above-mentioned pattern-forming green sheets 15a, 15b, 15c, and 15d and conductor-embedded through-holes 12a and 13a were formed on the temporarily-pressed laminate. While temporarily crimping with the same pressure as described above so that the ends of the conductor patterns 14a, 14b, 14c, and 14d are connected, until a predetermined number of turns is obtained so as to form a spiral coil shape in the laminating direction. The sheets are laminated, and a plurality of solid film-like magnetic green sheets 11 are temporarily pressed thereon to a predetermined thickness to obtain a sheet-like integrated laminate.

【0023】次に、このシート状の一体積層物に、前記
仮圧着時の圧力よりも大きい500kg/cm2の圧力で3
回本加圧を行い、次に図3(a)に示すように、前記本
加圧を行ったシート状の一体積層物を所定の大きさに切
断して個片16とし、約900℃で焼成し、次に図3
(b)に示すように、個片16の対向する側面に個片1
6の内部導体17の取り出し用電極と接続されるように
端面電極18を形成し、積層インダクタ部品を得るもの
である。
Next, a pressure of 500 kg / cm 2 , which is higher than the pressure at the time of the preliminary press-bonding, is applied to the sheet-like integrated laminate by a pressure of 3 kg / cm 2.
3 (a), the sheet-like integrated laminate subjected to the main pressure is cut into a predetermined size to form individual pieces 16 at about 900 ° C. Firing, then Figure 3
(B) As shown in FIG.
The end face electrode 18 is formed so as to be connected to the extraction electrode of the inner conductor 17 of No. 6 to obtain a multilayer inductor component.

【0024】図4は本発明の実施の形態1における本加
圧を複数回行った時間に対する積層体密度と、従来例に
おける多段階で徐々に圧力を上げながら圧力を加える本
加圧を1回行った時間に対する積層体密度を比較した結
果を示したものである。
FIG. 4 shows the density of the laminate with respect to the time during which the main press is performed a plurality of times in the first embodiment of the present invention, and the main press is applied once while gradually increasing the pressure in multiple steps in the conventional example. It is a figure which showed the result of having compared the laminated body density with respect to the time performed.

【0025】この図4から明らかなように、本発明の実
施の形態1においては、本加圧を10秒ずつ3回行うだ
けで、従来のように本加圧を1回だけ90秒間行ったも
のと同等の積層体密度を得ることができた。また本加圧
を10秒ずつ5回行った場合においても、従来のように
本加圧を1回だけ90秒間行ったものとほぼ同等の積層
体密度を得ることができた。
As is clear from FIG. 4, in the first embodiment of the present invention, the main pressurization is performed only three times every 10 seconds, and the main pressurization is performed once only for 90 seconds as in the related art. It was possible to obtain a laminate density equivalent to that of the laminate. In addition, even when the main press was performed five times for 10 seconds each, it was possible to obtain a laminate density substantially equal to that obtained by performing the main press only once for 90 seconds as in the conventional case.

【0026】(実施の形態2)図5は本発明の実施の形
態2における積層インダクタ部品の積層体を示す分解斜
視図である。
(Embodiment 2) FIG. 5 is an exploded perspective view showing a multilayer body of a multilayer inductor component according to Embodiment 2 of the present invention.

【0027】本発明の実施の形態2は、所定の大きさに
切り出した複数枚のベタ膜状磁性体グリーンシート21
と、前記ベタ膜状磁性体グリーンシート21を用いて所
定の位置にパンチングマシーンあるいは穴開け金型等に
より導体埋め込みスルーホール22aを形成した磁性体
グリーンシート22の導体埋め込みスルーホール22a
部に、導体パターンの端部が位置するようにAgペース
トで数種類の導体パターン23をスルーホール印刷およ
びパターン印刷したパターン形成グリーンシート24を
用意し、そしてこの用意された複数枚のベタ膜状磁性体
グリーンシート21と、パターン形成グリーンシート2
4を、上記した本発明の実施の形態1と同様に仮圧着し
てシート状の一体積層物を得た後、このシート状の一体
積層物に3回本加圧を行うようにしたものである。
In the second embodiment of the present invention, a plurality of solid film-like magnetic green sheets 21 cut into a predetermined size are used.
And a conductor buried through hole 22a of a magnetic green sheet 22 in which a conductor buried through hole 22a is formed at a predetermined position using the solid film-like magnetic green sheet 21 by a punching machine or a punching die or the like.
A plurality of conductive patterns 23 are printed with through holes and printed with Ag paste so that the ends of the conductive patterns are positioned at the portions, and a patterned green sheet 24 is prepared. Body green sheet 21 and pattern forming green sheet 2
4, a temporary press-bonding is performed in the same manner as in the first embodiment of the present invention to obtain a sheet-like integrated laminate, and then the sheet-like integrated laminate is subjected to three times of final pressing. is there.

【0028】(実施の形態3)図6は本発明の実施の形
態3における積層インダクタ部品の積層体を示す分解斜
視図である。
(Embodiment 3) FIG. 6 is an exploded perspective view showing a laminated body of a multilayer inductor component according to Embodiment 3 of the present invention.

【0029】本発明の実施の形態3は、所定の大きさに
切り出した複数枚のベタ膜状磁性体グリーンシート31
と、金属線導体32を用意し、そしてこの用意された複
数枚のベタ膜状磁性体グリーンシート31と、金属線導
体32を、上記した本発明の実施の形態1と同様に仮圧
着してシート状の一体積層物を得た後、このシート状の
一体積層物に3回本加圧を行うようにしたものである。
In the third embodiment of the present invention, a plurality of solid film-like magnetic green sheets 31 cut to a predetermined size are used.
And a metal wire conductor 32 are prepared, and the prepared solid film-like magnetic green sheets 31 and the metal wire conductor 32 are temporarily press-bonded in the same manner as in the first embodiment of the present invention. After the sheet-like integrated laminate is obtained, the sheet-like integrated laminate is subjected to main pressure three times.

【0030】なお、上記本発明の実施の形態1,2にお
いては、導体をスルーホール印刷およびパターン印刷に
より形成するとともに、本発明の実施の形態3において
は、金属線により導体を形成したものについて説明した
が、これ以外のスクリーン印刷、めっき膜、金属箔、凹
版印刷により導体を形成しても良く、また導体パターン
形状は渦巻きパターン、1/2ターンパターン、3/4
ターンパターン、蛇行パターン、スルーパターンのいず
れでも良いものである。
In the first and second embodiments of the present invention, the conductor is formed by through-hole printing and pattern printing. In the third embodiment of the present invention, the conductor is formed by a metal wire. Although described, the conductor may be formed by other screen printing, plating film, metal foil, intaglio printing, and the conductor pattern may be a spiral pattern, a 1/2 turn pattern, or a 3/4 pattern.
Any of a turn pattern, a meandering pattern, and a through pattern may be used.

【0031】また本発明の実施の形態1,2,3におい
ては、積層インダクタ部品について適用したものについ
て説明したが、これ以外のセラミック複合部品やLC複
合部品等にも適用できるものである。
In the first, second and third embodiments of the present invention, the description has been given of the case where the present invention is applied to a multilayer inductor component. However, the present invention can be applied to other ceramic composite components and LC composite components.

【0032】[0032]

【発明の効果】以上のように本発明の積層電子部品の製
造方法は、グリーンシートを成形するグリーンシート成
形工程と、導体を作製する導体作製工程と、前記導体を
グリーンシート間に介在させ、かつこれらを仮圧着して
シート状の一体積層物を得る仮圧着工程と、前記仮圧着
されたシート状の一体積層物を前記仮圧着時の圧力より
も大きい圧力で本加圧する本加圧工程とを有し、前記本
加圧工程を複数回行うようにしたもので、この製造方法
によれば、仮圧着された導体とグリーンシートからなる
シート状の一体積層物を前記仮圧着時の圧力よりも大き
い圧力で本加圧する本加圧工程を複数回行うようにして
いるため、従来のような多段階で徐々に圧力を上げなが
ら圧力を加える本加圧に比べて、短時間で従来と同等の
積層体密度を得ることができ、これにより、生産性を向
上させることができ、またシート状の一体積層物の層間
に溜まった空気も複数回の本加圧により効果的に逃がす
ことができるため、焼成時に起きる層間剥離もなくなっ
て、不良率を低減させることができるというすぐれた効
果を有するものである。
As described above, the method for manufacturing a laminated electronic component of the present invention comprises a green sheet forming step of forming a green sheet, a conductor forming step of forming a conductor, and the conductor interposed between the green sheets. And a temporary pressing step of temporarily pressing them to obtain a sheet-like integrated laminate, and a main pressing step of final pressing the temporarily-pressed sheet-like integrated laminate with a pressure greater than the pressure at the time of the temporary pressing. According to this manufacturing method, the sheet-like integrated laminate including the temporarily-pressed conductor and the green sheet is subjected to the pressure during the temporary pressing. Because the main pressurization step of performing main pressurization with a pressure higher than that is performed multiple times, compared to the conventional pressurization that applies pressure while gradually increasing the pressure in multiple stages as in the past, Obtain equivalent laminate density This makes it possible to improve the productivity and to effectively release air accumulated between the layers of the sheet-like integrated laminate by a plurality of main pressurizations. This has an excellent effect that the peeling does not occur and the defective rate can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の形態1における積層インダクタ
部品の製造方法を示す工程図
FIG. 1 is a process chart showing a method for manufacturing a multilayer inductor component according to a first embodiment of the present invention.

【図2】同積層インダクタ部品における積層体の分解斜
視図
FIG. 2 is an exploded perspective view of a multilayer body in the multilayer inductor component.

【図3】(a)(b)同積層インダクタ部品の製造方法
を示す工程図
FIGS. 3A and 3B are process diagrams showing a method for manufacturing the multilayer inductor component. FIGS.

【図4】本発明の実施の形態1における本加圧を複数回
行った時間に対する積層体密度と、従来例における多段
階で徐々に圧力を上げながら圧力を加える本加圧を1回
行った時間に対する積層体密度を比較した結果を示す特
性図
FIG. 4 shows the density of the laminate with respect to the time during which the main press is performed a plurality of times in the first embodiment of the present invention, and the main press is applied once while gradually increasing the pressure in multiple stages in the conventional example. Characteristic diagram showing the result of comparing the stack density with time

【図5】本発明の実施の形態2における積層インダクタ
部品の積層体を示す分解斜視図
FIG. 5 is an exploded perspective view showing a multilayer body of the multilayer inductor component according to the second embodiment of the present invention.

【図6】本発明の実施の形態3における積層インダクタ
部品の積層体を示す分解斜視図
FIG. 6 is an exploded perspective view showing a multilayer body of the multilayer inductor component according to the third embodiment of the present invention.

【図7】従来の積層インダクタ部品の製造方法を示す工
程図
FIG. 7 is a process chart showing a conventional method for manufacturing a multilayer inductor component.

【図8】同積層インダクタ部品における積層体の分解斜
視図
FIG. 8 is an exploded perspective view of a multilayer body in the multilayer inductor component.

【図9】(a)(b)同積層インダクタ部品の製造方法
を示す工程図
FIGS. 9A and 9B are process diagrams showing a method for manufacturing the multilayer inductor component.

【符号の説明】[Explanation of symbols]

11,21,31 ベタ膜状磁性体グリーンシート 12,13,22 磁性体グリーンシート 14a,14b,14c,14d,23 導体パターン 15a,15b,15c,15d,24 パターン形成
グリーンシート 32 金属線導体
11, 21, 31 Solid film-like magnetic green sheet 12, 13, 22 Magnetic green sheet 14a, 14b, 14c, 14d, 23 Conductor pattern 15a, 15b, 15c, 15d, 24 Pattern forming green sheet 32 Metal wire conductor

フロントページの続き (72)発明者 大石 一夫 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 Fターム(参考) 4G054 AA05 AB01 AC00 BA03 BA62 DA01 DA02 5E062 FF01 5E346 AA12 AA15 BB01 CC17 DD02 DD13 DD34 EE24 EE25 EE29 FF18 GG06 GG08 GG09 HH33Continued on the front page (72) Inventor Kazuo Oishi 1006 Kazuma Kadoma, Kadoma City, Osaka Prefecture F-term (reference) 4G054 AA05 AB01 AC00 BA03 BA62 DA01 DA02 5E062 FF01 5E346 AA12 AA15 BB01 CC17 DD02 DD13 DD34 EE24 EE25 EE29 FF18 GG06 GG08 GG09 HH33

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 グリーンシートを成形するグリーンシー
ト成形工程と、導体を作製する導体作製工程と、前記導
体をグリーンシート間に介在させ、かつこれらを仮圧着
してシート状の一体積層物を得る仮圧着工程と、前記仮
圧着されたシート状の一体積層物を前記仮圧着時の圧力
よりも大きい圧力で本加圧する本加圧工程とを有し、前
記本加圧工程を複数回行うようにしたことを特徴とする
積層電子部品の製造方法。
1. A green sheet forming step of forming a green sheet, a conductor forming step of forming a conductor, interposing the conductor between the green sheets, and temporarily compressing these to obtain a sheet-like integrated laminate. A temporary pressing step and a main pressing step of main pressing the sheet-like integrally laminated body subjected to the temporary pressing with a pressure larger than the pressure at the time of the temporary pressing, and performing the main pressing step a plurality of times. A method for manufacturing a laminated electronic component, characterized in that:
JP1676099A 1999-01-26 1999-01-26 Manufacture for laminated electronic part Pending JP2000216038A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1676099A JP2000216038A (en) 1999-01-26 1999-01-26 Manufacture for laminated electronic part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1676099A JP2000216038A (en) 1999-01-26 1999-01-26 Manufacture for laminated electronic part

Publications (1)

Publication Number Publication Date
JP2000216038A true JP2000216038A (en) 2000-08-04

Family

ID=11925199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1676099A Pending JP2000216038A (en) 1999-01-26 1999-01-26 Manufacture for laminated electronic part

Country Status (1)

Country Link
JP (1) JP2000216038A (en)

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