JPH11300727A - Preparation of green sheet and electronic part - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for preparing a green sheet by which a product with good operability on lamination and releasing, stable quality and high reliability can be obtd. even in a laminated body using very thin films and an electronic part using the method. SOLUTION: When an inner electrode layer 2 with a specified pattern is formed on a carrier film 1 and a dielectric layer 4 covering the whole face is formed, at the same time when the specified pattern of the initial inner electrode layer 2 is printed, a positioning mark 3 is printed on an arbitrary site on the carrier film 1 on which the next dielectric layer 4 is not formed. Then, a dielectric layer 4 is formed uniformly on the whole face of the inner electrode layer 2 except a part of the above described positioning mark 3 thereon by using the positioning mark as a reference. In addition, in the second printing and film-forming of a pattern of the inner electrode layer 2, the positioning mark 3 is detected and printing and film-forming are performed to fit the position and film forming is repeated in advance to a specified thickness to prepare a laminated green sheet.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic powder paste layer, a conductor powder paste layer, and the like used for a laminated electronic component, which are formed on a carrier film which is used as a material of a compact for an electronic component. The present invention relates to a method for manufacturing a green sheet and an electronic component using the method.

[0002]

2. Description of the Related Art In accordance with demands for miniaturization and high performance, electronic components are thinned, miniaturized, and further multilayered, and each functional element is integrally compounded.
It has become highly functional. In particular, ceramic multilayer electronic components in which ceramic layers and conductor layers are laminated are actively used in multilayer capacitors, multilayer inductors, multilayer resistors, multilayer noise filters, and electronic components having a combination of these functions. Used.

[0003] In these products, a paste containing a raw material powder of a basic ceramic is formed into a film, and a paste containing a raw material powder for forming a conductive film or the like, or a direct conductive material is formed in a predetermined pattern. And a laminated green sheet (unfired film) or a single-layer green sheet (unfired film) formed solely of the paste of the raw material described above is prepared according to a predetermined requirement. An electronic component is manufactured by sequentially laminating according to the function, producing an intermediate powder laminate, pressing the laminate with a hot press, and firing.

[0004] The production of a green sheet, which is a material for producing the intermediate powder compact, is an important material that determines the cost and quality of the product. The production of the green sheet used for the ceramic laminated electronic component will be described below using an example of a ceramic capacitor.

FIG. 3 is an explanatory view of a laminating process of a conventional laminate using a green sheet. FIG. 4 is a perspective view of the carrier film wound up in a roll shape. FIG.
It is a side sectional view of a layered product using a conventional green sheet.

First, a ceramic or conductive green sheet as a raw material is generally placed on a carrier film wound into a roll as shown in FIG. 4 on a carrier film as shown in FIG. 3 and FIG. A ceramic paste of a dielectric layer 4 (a magnetic layer, an insulator layer, etc. in other parts) is formed by a doctor blade method or the like, and an internal electrode layer 2 (a coil conductor layer in other parts) is formed thereon. , Resistor layer, etc.)
The conductor paste is manufactured by forming a film by a printing method or the like.

As shown in FIG. 5, the green sheets are laminated in a predetermined order by an apparatus in which respective patterns are aligned to form a green compact, which is dried, sintered, and cut. Various types of finishing processes such as electrode and electrode processing were performed to form a multilayer ceramic capacitor.

[0008] Multilayer ceramic electronic components such as inductors, resistors, varistors, noise filters, and composite electronic components have also been manufactured. Smaller and higher performance electronic components,
High functionality also affects the structure of the green sheet,
Ceramic layers such as dielectric layers, magnetic layers, and insulator layers,
It has become necessary for the conductor layers forming the electrodes, conductors, etc., to be very thin.

[0009]

When forming a laminate, it is necessary to peel off the green sheet from the carrier sheet and laminate only the green sheet. There is a problem that it is very difficult to peel off the green sheet. Also, since the thickness of the green sheet itself is thin, even if peeling is successful, wrinkles are likely to be generated in the green sheet, and when this is laminated, voids are formed in the laminate or the thickness varies, and the product There is a problem that accuracy is reduced.

Further, as shown in FIG. 5, since there is little difference in thickness between the dielectric layer 4 and the internal electrode layer 2, a step 6 is generated, and the ratio thereof is large. However, it is difficult to sufficiently eliminate the step, and when a product is manufactured, there is a problem that delamination and variations in characteristics are caused, which adversely affects quality. Furthermore, since the alignment at the time of lamination is also insufficient, the overlapping area of the internal electrodes is reduced, the thickness of the layers varies, and the characteristics cannot be sufficiently exhibited, and the variation increases.

Therefore, an object of the present invention is to provide a laminate using a very thin film with good operability at the time of lamination and peeling.
It is an object of the present invention to provide a method for manufacturing a green sheet, in which the quality of a product using the laminate is stable and a highly reliable product can be obtained, and an electronic component using the method.

[0012]

Means for Solving the Problems The inventors of the present invention have been studying to solve the above-mentioned problems and have formed a multi-layer film suitable for the purpose as a green sheet on a carrier film in advance, and adapted the multi-layer film to the purpose. It has been found that the problem can be solved by stacking and using. In addition, a method of processing positioning marks on a carrier film at the time of the first film formation and performing subsequent film formation using the marks so that high performance can be realized by accurately positioning and stacking the green sheets. Was found.

That is, according to the present invention, a ceramic layer such as a dielectric layer, an insulator layer or a magnetic layer, or a conductor layer such as an internal electrode layer or a conductor layer is formed on a long carrier film. In a method for producing a green sheet containing each material powder used for a green compact which is an intermediate of a laminated electronic component made by laminating the above, a layer of a predetermined pattern on the carrier film, Layers of other patterns are sequentially and repeatedly formed and laminated by a film forming method using a printing technique or a film forming method using a knife edge or a roll, and a film-shaped material powder is formed on the carrier film. A green sheet is formed by laminating layers, and at the time of this first film formation, a positioning mark used for positioning the next and subsequent film formation patterns is formed on a portion of the carrier film where the next layer is not formed, and a second layer is formed. Later Positioning of the layer, by forming the positioning mark as a reference, a green sheet manufacturing method of making a laminated green sheet.

Further, the present invention is an electronic component using the method for producing a green sheet.

[0015]

Embodiments of the present invention will be described with reference to the drawings.

FIG. 1 shows a manufacturing process of the green sheet of the present invention, and shows a perspective view of each stage and a cross-sectional view of the green sheet on a film. The internal electrode layer 2 having a predetermined pattern is formed on the long carrier film 1 wound in a roll shape.
An example in which the step of forming the dielectric layer 4 and the step of forming the dielectric layer 4 covering the entire surface are sequentially and repeatedly performed will be described.

In the first printing film forming step, at the same time as printing for forming a predetermined pattern of the internal electrode layer 2, the positioning mark 3 is formed on the carrier film 1 on which the next dielectric layer 4 is not formed. Print on any part above. Next, a dielectric layer 4 is uniformly formed on the entire surface of the internal electrode layer 2 excluding the positioning mark 3 with reference to the positioning mark. Further, the second printing of the internal electrode layer 2 [the uppermost layer in FIG.
The positioning mark 3 is detected, and a print film is formed in accordance with the position.

As described above, the subsequent lamination of the film is performed based on the positioning mark, and the film is repeatedly laminated until the green sheet on the carrier film has a film thickness sufficient for handling such as peeling lamination. A green sheet having a predetermined thickness is completed. As a result, peeling from the carrier film and laminating work are facilitated when a green compact is produced using this green sheet. Further, generation of wrinkles on the green sheet peeled off from the carrier film can be prevented, lamination accuracy can be improved, and a highly reliable electronic component free from variations in characteristics and free from delamination can be obtained.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described by way of examples with reference to the drawings. In this embodiment, a description will be given using a multilayer ceramic capacitor. In this example, a conductor layer serving as an internal electrode layer is laminated between dielectric layers. It is also an example of a green sheet having a pattern including a plurality of capacitor elements in one block on one film.

FIG. 1 is an explanatory view for explaining the manufacturing process of the green sheet of the present invention. FIG. 1A is a perspective view of the green sheet after the first internal electrode pattern has been printed and formed. FIG. 1B is a sectional view taken along line AA of FIG.
FIG. 1C is a perspective view in which a dielectric layer is formed, and FIG.
FIG. 1C is a cross-sectional view taken along line BB, FIG. 1E is a perspective view in which a second internal electrode layer is printed and laminated, and FIG.
1E is a cross-sectional view taken along the line CC, FIG. 1G is a perspective view showing a second dielectric layer formed, and FIG.
It is D sectional drawing.

FIG. 2 is a side sectional view of a green compact using the green sheets of the embodiment before hot pressing. As shown in FIG. 1, the electrode layer and the dielectric layer are repeatedly formed, the film formation and lamination are advanced, and the green sheet is formed and laminated to a thickness that facilitates the next lamination work and the peeling work from the film. Make a green sheet. The green sheets are laminated and compressed by a hot press to produce a green laminate.

That is, in the conventional manufacturing process, film formation, printing, and lamination are performed in this order.
Print -...- Print-Film formation-Lamination manufacturing process.

By using the green sheet produced by the method for producing a green sheet of the present invention, layers of materials having individual functions (dielectric layer, conductor layer, etc.) can be produced sufficiently thin, and the carrier The green sheet produced on the film can maintain a sufficient film thickness for handling.

In addition, it is possible to prevent variations in the thickness of the internal electrodes due to misalignment or the like occurring when printing the pattern of the internal electrodes after the second time, and the occurrence of the step 6 generated in the conventional laminated body as shown in FIG. , As shown in FIG. 1 (h) and FIG.
It is possible to form a shape in which the internal electrode is inserted in the dielectric layer, and it is possible to laminate without any voids.

The green sheets produced as described above were laminated and subjected to steps such as hot pressing, cutting, drying, firing, and electrode processing to complete a laminated ceramic capacitor.
As a result, in the multilayer ceramic capacitor, the laminating operation was easy, the operation time and man-hour were reduced, the peeling from the carrier film was easy, the wrinkles did not occur, and the laminating was performed accurately. No delamination occurred in the capacitor, and the variation in characteristics was reduced. Therefore, the product yield was also improved.

In addition, since the green sheets were laminated with high precision in the manufacturing process, the effective area of the internal electrodes was large, and a capacitor having a small variation and a high capacitance was obtained.

In particular, when a green sheet in which an internal electrode layer is first formed on a carrier film and laminated is used as in this example, the next dielectric layer is formed without any gap between the patterns of the internal electrode layer. Since the film is formed, there is no step between the dielectric layers, and there is no step in the next laminating operation, so that a homogeneous green compact can be obtained and the quality and reliability of the product after sintering can be improved. did it.

Although the present embodiment has been described with reference to the example of a ceramic capacitor, an inductor, a resistor, a varistor, and other electronic components are also effective as long as they are made by lamination.

[0029]

As described above, according to the present invention, in the production of a dust laminate used in the production of a laminated electronic component, the laminating operation of the green sheet and the exfoliation operation from the film are easy, and wrinkles are reduced. A green sheet without generation is obtained,
As a result, there is no peeling (delamination) in the green compact or the product using the same, the characteristic variation can be reduced, and a method for manufacturing a green sheet capable of obtaining a product with high productivity and reliability can be used. Electronic components can be provided.

[Brief description of the drawings]

FIG. 1 is an explanatory view for explaining a manufacturing process of a green sheet of the present invention. FIG. 1 (a) is a perspective view of a green sheet after a first film formation of a pattern of an internal electrode is completed.
1B is a cross-sectional view taken along the line AA in FIG. 1A, and FIG.
FIG. 1D is a perspective view in which a dielectric layer is formed, and FIG.
1 (e) is a perspective view in which a second internal electrode layer is printed and laminated, and FIG. 1 (f) is a sectional view taken on line C-B of FIG. 1 (e).
1G is a perspective view in which a second dielectric layer is formed, and FIG. 1H is a DD sectional view in FIG. 1G.

FIG. 2 is a side cross-sectional view of a green compact using a green sheet of an example before hot pressing.

FIG. 3 is an explanatory diagram of a laminating step of a conventional green compact using a green sheet.

FIG. 4 is a perspective view of a carrier film wound up in a roll shape.

FIG. 5 is a side cross-sectional view of a green compact using a conventional green sheet before hot pressing.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Carrier film 2 Internal electrode layer 3 Positioning mark 4 Dielectric layer 5 Protective film layer of laminated body 6 Step (generated by the thickness of internal electrode layer)

Claims (2)

[Claims] A ceramic layer such as a dielectric layer, an insulator layer, and a magnetic layer, or a conductor layer such as an internal electrode layer and a conductor layer is formed on a long carrier film and laminated. In a method for producing a green sheet containing each material powder used for a green compact which is an intermediate of a laminated electronic component to be made, the carrier film has a predetermined pattern layer and another pattern. The layers were sequentially and repeatedly laminated by a film forming method using a printing technique or a film forming method using a knife edge or a roll, and a layer of each material powder in a film form was laminated on the carrier film. A green sheet is formed, and at the time of this first film formation, a positioning mark used for positioning the next and subsequent film formation patterns is formed on a portion of the carrier film where the next layer is not formed, and a film is formed on the second and subsequent layers. Layer positioning Forming a film on the basis of the positioning mark to form a laminated green sheet. 2. An electronic component using the method for producing a green sheet according to claim 1.