JPH03105905A - Manufacture of laminated ceramic capacitor - Google Patents

Manufacture of laminated ceramic capacitor

Info

Publication number
JPH03105905A
JPH03105905A JP24442289A JP24442289A JPH03105905A JP H03105905 A JPH03105905 A JP H03105905A JP 24442289 A JP24442289 A JP 24442289A JP 24442289 A JP24442289 A JP 24442289A JP H03105905 A JPH03105905 A JP H03105905A
Authority
JP
Japan
Prior art keywords
ceramic
printed
film
paste
printing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24442289A
Other languages
Japanese (ja)
Inventor
Naoto Yonetake
米竹 直人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP24442289A priority Critical patent/JPH03105905A/en
Publication of JPH03105905A publication Critical patent/JPH03105905A/en
Pending legal-status Critical Current

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  • Producing Shaped Articles From Materials (AREA)
  • Ceramic Capacitors (AREA)

Abstract

PURPOSE:To obtain a homogeneous green sheet having a uniform thickness for the title capacitor by printing a ceramic film having the same thickness as that printed electrode films have between the electrode films and forming a ceramic layer after making the front thickness of the green sheet uniform. CONSTITUTION:Paste for continuously forming internal electrodes 1 on a rolled substrate film 3 is screen printed. Then ceramic paste 2 for forming a dielectric layer between internal electrode 1 patterns by the same printing method so that used for the internal electrode 1 patterns is printed on the part of the roll, where the internal electrodes 1 are not printed, after accurate positioning is made by using the guide hole of the film 3. After printing the paste 2, a film is formed on the printed surface from ceramic slurry 8. Thereafter, the sheet is cut into pieces after the sheet is dried and subject to punching, overlapping, and thermocompression fixing and external electrodes are formed for each piece. Then each piece is calcined through a binder removing end calcining processes, and thus, the laminated ceramic capacitor of this invention is obtained.

Description

【発明の詳細な説明】 イ.発明の目的 〔産業上の利用分野〕 本発明は、積層セラミックコンデンサの製造方法に関わ
り、特に内部電極を印刷したセラミック層のグリーンシ
ートの製造方法に関するものである。
[Detailed description of the invention] a. Object of the Invention [Field of Industrial Application] The present invention relates to a method for manufacturing a multilayer ceramic capacitor, and particularly to a method for manufacturing a green sheet of ceramic layers on which internal electrodes are printed.

〔従来の技術〕[Conventional technology]

従来、積層セラミックコンデンサに使用されるグリーン
シートの製造方法は、グリーンシート上に電極膜を印刷
して使用しているが、電極層の場所による厚み差が生じ
るため、グリーンシートを打ち抜き、積層し、電極単位
に切離し、焼結した時、層間剥離、又はそれを内在した
状態の不良が発生しやすく、又、対向電極間でのショー
ト不良の原因となることが多い。これらの欠点を防ぐた
め、予め基材フィルムに電極印刷を施した後、セラミッ
クスラリーを成膜する転写法などの工法も検討されてい
るが、成膜時に電極端部の段差の影響で平坦で均一な成
膜が出来ないという欠点がある。更に誘電体層を薄くし
、高容量小型化を求めようとする場合、これらの欠点は
致命的となっている。
Conventionally, the manufacturing method for green sheets used in multilayer ceramic capacitors is to print electrode films on green sheets. However, because the thickness of the electrode layers varies depending on the location, green sheets are punched out and laminated. When the electrodes are separated and sintered, delamination or defects containing such delamination are likely to occur, and short circuits between opposing electrodes are often caused. In order to prevent these drawbacks, methods such as the transfer method, in which electrodes are printed on a base film in advance and then ceramic slurry is deposited, are being considered; The drawback is that uniform film formation cannot be achieved. These drawbacks are fatal when attempting to further reduce the thickness of the dielectric layer to achieve high capacity and miniaturization.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

本発明は、前述の欠点を除去し、積層セラミックコンデ
ンサ用のグリーンシートの製造において、電極膜の厚み
がセラミック層の成膜時に影響を与えないように、印刷
された電極膜の間に該電極膜と同じ厚みのセラミック膜
を印刷し、グリーンシート部全面の厚みを一様にした後
、セラミック層を成膜することにより、均質で厚みの一
様なグリーンシートを提供し、高容量用の薄い膜でも信
頼性の高い積層セラミックコンデンサの製造方法を提供
しようとするものである。
The present invention eliminates the above-mentioned drawbacks, and in the production of green sheets for multilayer ceramic capacitors, the electrodes are placed between the printed electrode films so that the thickness of the electrode film does not affect the formation of the ceramic layer. By printing a ceramic film with the same thickness as the film to make the thickness uniform over the entire green sheet part, and then forming a ceramic layer, we can provide a homogeneous green sheet with a uniform thickness. The present invention aims to provide a method for manufacturing a highly reliable multilayer ceramic capacitor even with a thin film.

ロ.発明の構成 〔課題を解決するための手段〕 本発明は、積層セラミックコンデンサの製造工程のグリ
ーンシートの製造において、基材フィルムに内部電極と
なる導電膜用ペーストを印刷した後、該内部電極用印刷
膜の厚みと同じ程度の厚みになる条件にて、基材フイル
ム上の内部電極用印刷膜以外の部分にセラミックペース
トにて印刷を施し、その後厚膜成膜法にてセラミック層
を形成することにより電極部の厚み差の生じない内部電
極加工済グリーンシートが製造出来、該グリーンシート
を使用して積層セラミックコンデンサを製造することに
より極めて信頼性が高く、コンデンサの薄型化、大容量
化に対応出来る積層セラミックコンデンサの製造方法を
提供するものである。
B. Structure of the Invention [Means for Solving the Problems] The present invention provides a method for manufacturing a green sheet in the manufacturing process of a multilayer ceramic capacitor, after printing a paste for a conductive film that will become an internal electrode on a base film. Print with ceramic paste on the parts of the base film other than the printed film for internal electrodes under conditions that the thickness is about the same as the thickness of the printed film, and then form the ceramic layer using the thick film deposition method. As a result, it is possible to manufacture a green sheet with processed internal electrodes that does not cause any difference in the thickness of the electrode part, and by manufacturing a multilayer ceramic capacitor using this green sheet, it is extremely reliable and can be used to make capacitors thinner and larger in capacity. The present invention provides a method for manufacturing multilayer ceramic capacitors that can be used in various ways.

即ち本発明は、積層セラミックコンデンサの製造方法に
おいて、セラミックコンデンサの一層を構威するセラミ
ック層のグリーンシートの製造の際、基材となるポリエ
ステルフイルム上に内部電極を形成するための導電膜用
ペーストを所定の内部電極パターンに印刷した後、前記
導電膜用ぺ−ストとほぼ同厚のセラミックペーストを内
部電極のパターン以外の部分に印刷し、その後、前記印
刷部分の上にセラミックスラリーによる厚膜成膜を行う
ことにより、積層セラミックコンデンサ用グリーンシー
トを製造することを特徴とした積層セラミックコンデン
サの製造方法を提供するものである。
That is, the present invention provides a conductive film paste for forming internal electrodes on a polyester film as a base material when manufacturing a green sheet of a ceramic layer that constitutes one layer of a ceramic capacitor in a method for manufacturing a multilayer ceramic capacitor. After printing on a predetermined internal electrode pattern, a ceramic paste with approximately the same thickness as the conductive film paste is printed on areas other than the internal electrode pattern, and then a thick film of ceramic slurry is applied on the printed area. The present invention provides a method for manufacturing a multilayer ceramic capacitor characterized by manufacturing a green sheet for a multilayer ceramic capacitor by forming a film.

〔作用〕[Effect]

積層セラミックコンデンサ用の電極膜を加工したグリー
ンシートを均質、且つ厚みの一様な状態に製造するため
、予め基材フィルムに印刷法で内部電極膜を加工し、そ
の間隙を印刷法によりセラミックペースト膜で埋め、平
坦な層を形成した後、全面にセラミック層を成膜させ、
平坦で均質なグリーンシートを作成し積層することによ
り層間剥離や絶縁不良の少ない信頼性の高い積層セラミ
ックコンデンサが製造出来る。
In order to manufacture green sheets processed with electrode films for multilayer ceramic capacitors in a homogeneous state with uniform thickness, the internal electrode films are processed on the base film in advance by a printing method, and the gaps are filled with ceramic paste using a printing method. After filling with a film and forming a flat layer, a ceramic layer is deposited on the entire surface.
By creating and laminating flat, homogeneous green sheets, highly reliable multilayer ceramic capacitors with less delamination and insulation defects can be manufactured.

〔実施例〕〔Example〕

本発明の実施例について、図面を用いて説明する。 Embodiments of the present invention will be described using the drawings.

第1図から第3図は積層セラミックコンデンサに使用す
るセラミック層のグリーンシートの製造手順を説明する
外観斜視図、及び断面図である。
1 to 3 are an external perspective view and a cross-sectional view illustrating the manufacturing procedure of a green sheet of a ceramic layer used in a multilayer ceramic capacitor.

本実施例においては、電極用ペーストの印刷とセラミッ
クペーストの印刷との位置精度を得ることが量産性を考
えると必要であり、ここでは基材となるポリエステルフ
ィルムを従来より厚い平均の厚みが100μ層ないし2
50μ波のものを用い、又、フィルム端部に印刷位置決
め用の案内孔7を設けてある。
In this example, it is necessary to obtain positional accuracy between the printing of the electrode paste and the printing of the ceramic paste from the viewpoint of mass production. layer or 2
A 50μ wave is used, and a guide hole 7 for printing positioning is provided at the edge of the film.

第1図に示すようにロール状に巻かれた上記基材フィル
ム3上に連続して内部電極1を形成するための導電膜用
ペーストをスクリーン印刷してゆく。基材フィルム3は
、印刷後連続的に乾燥機6の熱風での乾燥を受け、ロー
ル状に巻き取られる。
As shown in FIG. 1, a conductive film paste for forming internal electrodes 1 is continuously screen printed on the base film 3 wound into a roll. After printing, the base film 3 is continuously dried with hot air from a dryer 6 and wound up into a roll.

この印刷時には基材フィルムに設けられている位置決め
用の案内孔7を利用し、基材フィルム3を正確に位置決
めし印刷した。
During printing, the positioning guide hole 7 provided in the base film was used to accurately position the base film 3 for printing.

次に、このロールを第2図に示すように、内部電極1パ
ターンの間に誘電体層を形或するためのセラミックペー
スト2を内部電極パターンと同じ印刷方法により、内部
電極1の印刷されてない部分に、基材フィルム3の案内
孔を用いて正確に位置決めした上で印刷した,案内孔を
用いて印刷位置を決定することで、内部電極の印刷され
ていない所に精度よくセラミックペーストを印刷するこ
とが出来るため、内部電極パターンのないところに隙間
なく、又重なり合うことなく印刷することが出来る。印
刷後は、内部電極パターンと同様に連続乾燥させた後、
ロール状に巻き取る。
Next, as shown in FIG. 2, this roll is printed with ceramic paste 2 for forming a dielectric layer between the patterns of the internal electrodes 1 using the same printing method as the pattern of the internal electrodes. By using the guide holes in the base film 3 to accurately position and print on the areas where the internal electrodes are not printed, the ceramic paste can be accurately applied to the areas where the internal electrodes are not printed. Since it can be printed, it can be printed without any gaps or overlaps in areas where there is no internal electrode pattern. After printing, it is continuously dried in the same way as the internal electrode pattern, and then
Wind up into a roll.

続いて第3図に示すようにこの印刷面の上にセラミック
スラリ−8を10μ道ないし50μ回の厚みで或摸する
。実施例ではドクターブレード法により約14μ■のセ
ラミック層5を形成したグリーンシートを作成した。一
般の積層セラミックコンデンサと同様にこのシートを乾
燥後、打ち抜き、重ね合わせ、熱圧着を加え、個々に切
断した後、脱バインダ、焼成の工程を経て外部電極を形
成、焼付けし、製品とした。このようにして製造された
積層セラミックコンデンサと従来法により製造された積
層セラミックコンデンサについて寿命試験、及び内部観
察を行った結果を第1表に示す。
Subsequently, as shown in FIG. 3, ceramic slurry 8 is spread over the printed surface to a thickness of 10 to 50 microns. In the example, a green sheet on which a ceramic layer 5 of about 14 .mu.m was formed was prepared by a doctor blade method. As with general multilayer ceramic capacitors, this sheet was dried, punched, stacked, thermo-compressed, cut into individual pieces, removed from the binder, and fired to form external electrodes and baked to create a product. Table 1 shows the results of life tests and internal observations of the multilayer ceramic capacitors manufactured in this way and the multilayer ceramic capacitors manufactured by the conventional method.

以下余白 第1表 第l表よりわかるように本発明による信頼性向上の効果
が確認された。本発明の製造方法によれば層間剥離不良
、及び絶縁不良は大巾に改善され、信頼性が向上した。
As can be seen from Table 1 in the margin below, the reliability improvement effect of the present invention was confirmed. According to the manufacturing method of the present invention, delamination defects and insulation defects are greatly improved, and reliability is improved.

ハ.発明の効果 〔発明の効果〕 以上述べたごとく本発明によれば内部電極間距離の非常
に狭い高容量小型構造でも層間剥離を生じにくく、信頼
性の高い積層セラミックコンデンサの提供が可能となっ
た。
C. Effects of the Invention [Effects of the Invention] As described above, according to the present invention, it is possible to provide a highly reliable multilayer ceramic capacitor that is less prone to delamination even in a high-capacity compact structure with a very narrow distance between internal electrodes. .

【図面の簡単な説明】[Brief explanation of drawings]

第工図は、本発明の実施例を説明する外観斜視図で基材
フィルム上に案内孔を用いて内部電極用ペーストの印刷
により定位置に内部電極を形成している状態を示す。 第2図は、第1図に示す印刷された内部電極の間隙にセ
ラミックペーストを印刷法により埋め込んだ状態の基材
フィルムの断面図6 第3図は、第2図で示す内部電極間を印刷によりセラミ
ックペーストで平坦に埋め込まれた基材フィルム上にセ
ラミック層をドクタブレード法により形成している状態
を説明する断面図。 1・・・内部電極、2・・・セラミックペースト、3・
・・基材フィルム、4・・・ブレード、5・・・セラミ
ック層、6・・・乾燥機、7・・・案内孔、8・・・セ
ラミックスラリー第1図 6
Fig. 1 is an external perspective view for explaining an embodiment of the present invention, and shows a state in which internal electrodes are formed in fixed positions by printing internal electrode paste on a base film using guide holes. Figure 2 is a cross-sectional view of the base film with ceramic paste embedded in the gaps between the printed internal electrodes shown in Figure 1 using a printing method.6 Figure 3 is a cross-sectional view of the printed internal electrodes shown in Figure 2. FIG. 2 is a cross-sectional view illustrating a state in which a ceramic layer is formed by a doctor blade method on a base film flatly embedded with ceramic paste. 1... Internal electrode, 2... Ceramic paste, 3...
... Base film, 4... Blade, 5... Ceramic layer, 6... Dryer, 7... Guide hole, 8... Ceramic slurry Fig. 1 6

Claims (1)

【特許請求の範囲】[Claims] 1.積層セラミックコンデンサの製造方法において、セ
ラミックコンデンサの一層を構成するセラミック層のグ
リーンシートの製造の際、基材となるポリエステルフィ
ルム上に内部電極を形成するための導電膜用ペーストを
所定の内部電極パターンに印刷した後、前記導電膜用ペ
ーストとほぼ同厚のセラミックペーストを内部電極のパ
ターン以外の部分に印刷し、その後、前記印刷部分の上
にセラミックスラリーによる厚膜成膜を行うことにより
、積層セラミックコンデンサ用グリーンシートを製造す
ることを特徴とした積層セラミックコンデンサの製造方
法。
1. In a manufacturing method for a multilayer ceramic capacitor, when manufacturing a green sheet for a ceramic layer that constitutes one layer of a ceramic capacitor, a conductive film paste for forming internal electrodes is applied to a polyester film as a base material in a predetermined internal electrode pattern. After printing, a ceramic paste with approximately the same thickness as the conductive film paste is printed on areas other than the internal electrode pattern, and then a thick film is formed using ceramic slurry on the printed area to form a laminated layer. A method for manufacturing a multilayer ceramic capacitor, characterized by manufacturing a green sheet for a ceramic capacitor.
JP24442289A 1989-09-19 1989-09-19 Manufacture of laminated ceramic capacitor Pending JPH03105905A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24442289A JPH03105905A (en) 1989-09-19 1989-09-19 Manufacture of laminated ceramic capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24442289A JPH03105905A (en) 1989-09-19 1989-09-19 Manufacture of laminated ceramic capacitor

Publications (1)

Publication Number Publication Date
JPH03105905A true JPH03105905A (en) 1991-05-02

Family

ID=17118422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24442289A Pending JPH03105905A (en) 1989-09-19 1989-09-19 Manufacture of laminated ceramic capacitor

Country Status (1)

Country Link
JP (1) JPH03105905A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5700548A (en) * 1993-10-06 1997-12-23 U.S. Philips Corporation Multilayer film, multicolour screen-printing process for the manufacture of said multilayer film and the use of same
GB2347383A (en) * 1999-02-23 2000-09-06 Murata Manufacturing Co Manufacturing electronic component of laminated ceramics
US6805763B2 (en) * 2001-12-06 2004-10-19 Denso Corporation Stacked ceramic body and production method thereof
US7089659B2 (en) 2001-05-25 2006-08-15 Kyocera Corporation Method of producing ceramic laminates
US7503993B2 (en) 2001-12-14 2009-03-17 Murata Manufacturing Co., Ltd. Method for manufacturing multilayer ceramic electronic element

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5700548A (en) * 1993-10-06 1997-12-23 U.S. Philips Corporation Multilayer film, multicolour screen-printing process for the manufacture of said multilayer film and the use of same
GB2347383A (en) * 1999-02-23 2000-09-06 Murata Manufacturing Co Manufacturing electronic component of laminated ceramics
GB2347383B (en) * 1999-02-23 2001-05-09 Murata Manufacturing Co Method for manufacturing electronic component of laminated ceramics
US6475317B1 (en) 1999-02-23 2002-11-05 Murata Manufacturing Co., Ltd. Method for manufacturing electronic component of laminated ceramics
US7089659B2 (en) 2001-05-25 2006-08-15 Kyocera Corporation Method of producing ceramic laminates
US6805763B2 (en) * 2001-12-06 2004-10-19 Denso Corporation Stacked ceramic body and production method thereof
US7503993B2 (en) 2001-12-14 2009-03-17 Murata Manufacturing Co., Ltd. Method for manufacturing multilayer ceramic electronic element
US7547370B2 (en) 2001-12-14 2009-06-16 Murata Manufacturing Co., Ltd. Method for manufacturing multilayer ceramic electronic element

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