JP2000202986A - Vacuum printing device and vacuum printing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To remove the mixed presence of air bubbles and shorten time required for printing and at the same time, perform a printing operation economically. SOLUTION: This printing device prints on matters to be printed 1, 2, 3 in a vacuum condition. In this case, a printing chamber 20 which supplies resin to the matters 1, 2, 3 by printing under vacuum an a conveyance chamber 10 which is separated or opened through the printing chamber 20 and a first switching door 14 and at the same time, is separated or opened through an outer part and a second switching door 13.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum printing apparatus and a vacuum printing method, and more particularly, to filling holes in a printed wiring board used for various electronic devices, various electronic components mounted on the wiring board, and semiconductor elements. TECHNICAL FIELD The present invention relates to a vacuum printing apparatus and a vacuum printing method for performing sealing.

[0002]

2. Description of the Related Art Conventionally, various methods have been devised for filling holes in printed wiring boards and for sealing semiconductor elements mounted on a substrate. Among these methods, a method of performing printing using a stencil and performing filling and sealing is often used because the sealing shape can be stabilized, and mass production and the economical efficiency of the apparatus are excellent. However, the printing method using a stencil is
Since the operation is performed under normal atmospheric pressure, air bubbles remain in the resin or between the substrate or the component and the resin, and when the resin is cured as it is, the air bubbles remain, causing a quality defect. .

[0003] Therefore, in order to solve these problems, a defoaming step of removing these residual air bubbles by using a vacuum or pressure reducing means after printing has been required. However, when this defoaming step is added, a defect such as a shape defect or exposure of an object to be coated may occur.

In order to solve these problems, the present inventors have invented an invention in which a semiconductor element mounted on a substrate is sealed with a resin without leaving air bubbles by using a stencil printing means under vacuum. For details of the present invention, refer to JP-B-6-6-6.
See No. 6350. However, in the present invention, it is necessary to adjust the vacuum and atmospheric pressure each time the printing material enters and exits the casing in the confidential casing, and requires a considerable amount of time for the pressure adjustment depending on the volume in the confidential casing. It was found that mass productivity was relatively poor.

Japanese Patent Application Laid-Open No. 2-103399 discloses a method of manufacturing a printed wiring board, in which a paste or ink-like insulator is printed on a screen by using a screen to remove air when a film is formed on a conductor pattern. A method of forming in an atmosphere is shown.

[0006]

SUMMARY OF THE INVENTION Incidentally, Japanese Patent Laid-Open No.
In the invention described in Japanese Patent No. 103993, the small chamber in which the printing machine is installed is maintained in an atmosphere close to vacuum, and the front and rear small chambers are maintained in an atmosphere close to semi-vacuum,
Each is continuously degassed by a vacuum pump or the like. Also,
The loading and unloading of substrates from the outside to the small chamber are performed by rollers, and each small chamber is not completely shut off from the outside air. At one time, the degree of vacuum is constantly increasing, and each chamber cannot maintain a stable predetermined degree of vacuum. Further, if a certain degree of vacuum is to be maintained, the vacuum pump must be kept operating at all times, which is very economically disadvantageous.

When a paste or ink is applied on a printed circuit board by screen printing, the coating film is usually as thin as about several tens of μm, and the viscosity of the paste or ink is as low as about several hundred poise. Bubbles can be removed at relatively low vacuum or reduced pressure. However, in filling a through hole of a substrate with an insulating resin or a conductive resin, or sealing a semiconductor element mounted on the substrate with a resin or supplying an underfill material, the thickness is several tens μm to several hundreds. μm, and in some cases, a thickness of several mm are required, and the viscosity of the resin used is required to be several hundred to several thousand poise, and in some cases, 10,000 to several thousand poise. In such a case, in order to remove air bubbles from the resin and eliminate unfilled portions after printing, it is necessary that the degree of vacuum at the time of printing be at least 10 torr or less.

[0008] The present invention has been made in view of the above circumstances, and a vacuum printing apparatus and a vacuum printing apparatus capable of removing air bubbles, shortening the time required for printing, and performing printing economically. The aim is to provide a method.

[0009]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, a vacuum printing apparatus according to the present invention is a vacuum printing apparatus for printing a substrate under vacuum, and printing a resin on the substrate under vacuum. A printing chamber to be supplied, and a transfer chamber that is separated or opened from the printing chamber via a first opening / closing door and separated or opened from the outside via a second opening / closing door. I do. Further, the vacuum printing apparatus according to the present invention, wherein the printing room includes a printing machine that prints a resin with a squeegee using a stencil, and the two squeegees are provided,
It is characterized in that printing is performed using different squeegees when performing forward printing and when performing backward printing. Further, the vacuum printing apparatus according to the present invention includes a resin supply device for supplying the resin in a moving direction of one of the squeegees used for printing. Further, in the vacuum printing apparatus according to the present invention, the printing room has a pressure of 0.1 torr.
Can maintain the degree of vacuum up to about 0.1 torr from atmospheric pressure
An arbitrary degree of vacuum is set between the degrees of vacuum up to about r. Further, the vacuum printing method according to the present invention is a vacuum printing method for performing forward printing and backward printing of a printing object under vacuum, and includes: during forward printing, from the end of forward printing to the start of backward printing, and backward printing. It is characterized by having a step of setting and holding an arbitrary degree of vacuum at each time. Further, the vacuum printing apparatus according to the present invention is a vacuum printing method applied to the vacuum printing apparatus, wherein the first door is closed, and the second door is opened to print the object. Loading the transfer chamber, closing the second door, and setting the degree of vacuum in the transfer chamber to be substantially the same as the degree of vacuum in the printing chamber, and opening the first door. Carrying out the printing to the printing room in the printing room as a state, and performing printing. Further, the vacuum printing apparatus according to the present invention, a step of transporting the printed material after printing to the transport chamber,
Closing the first opening / closing door, setting the pressure in the transfer chamber to atmospheric pressure, and opening the second opening / closing door to carry out the printing target to the outside. Features.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a vacuum printing apparatus and a vacuum printing method according to an embodiment of the present invention will be described in detail with reference to the drawings. [First Embodiment] FIG. 1 is a side view schematically showing the configuration of a vacuum printing apparatus according to a first embodiment of the present invention to which the vacuum printing method according to the first embodiment of the present invention is applied. However, in order to facilitate understanding, cross-sectional views are interlaced.

As shown in FIG. 1, a vacuum printing apparatus according to a first embodiment of the present invention includes a loading chamber 10 for loading a printing material, a printing chamber 20 for printing a printing material, and a printed printing material 20. And an unloading chamber 30 for unloading. Loading room 10
Is provided with a carrying port 11 for carrying in the printing material from outside, and a carrying port 12 for carrying out the carried printing material to the printing room. The inside of the carry-in room 10 and the inside of the printing room 20 penetrate through the carrying port 12. Further, the carry-out chamber 30 includes a transport port 31 for carrying in the printing material from the printing room 20 and a transport port 32 for carrying out the printing material to the outside. Unloading room 3 by carrying port 31
0 and the inside of the printing room 20 penetrate.

An opening / closing door 13 for shutting off (separating) or opening the outside and the loading room 10 is provided in the transport opening 11.
The transport opening 12 is provided with an opening / closing door 14 for shutting off (separating) or opening the carry-in room 10 and the printing room 20. In addition, an opening / closing door 33 for shutting off (separating) or opening the printing room 20 and the unloading room 30 is provided in the transport opening 31, and the opening 30 is shut off (separating) between the unloading 30 and the outside in the transport opening 32. An opening / closing door 34 for opening is provided. Door 13,1
4, 33, 34 have a structure that can withstand the pressure difference between the inside and outside. For example, sealing that can maintain airtightness is provided. When the doors 13, 14, 33, 34 are in the closed state, the carry-in room 10, the printing room 20, and the carry-out room 30 are sealed, and airtightness can be maintained. If the degree of vacuum is about 0.1 torr or more, the pressure resistance structure of the apparatus itself needs to be strengthened, and the apparatus becomes expensive. In addition, some resins have components that boil, evaporate, and evaporate, and the resins used are limited. Therefore, any device that can maintain such a degree of vacuum can achieve the object.

Belt conveyors 40, 41, 42, 43, and 44 for transporting a printing material are arranged in a straight line in the carry-in room 10, the printing room 20, and the carry-out room 30, and outside the apparatus. The substrates 1, 2, 3 are conveyed. still,
The above-mentioned 1, 2 and 3 are not the print material itself, but may be, for example, a jig plate on which the print material is placed. In addition, the belt conveyors 40, 41, 42, 43, 44 may be, for example, a feeder provided with a roller rotation mechanism.

Here, the printing substrate will be described in detail. Examples of the substrate include a substrate having a hole filled with resin, a substrate on which a semiconductor sealed with resin is mounted, and an electronic component sealed with resin. FIGS. 2 and 3 are cross-sectional views illustrating a substrate having a hole filled with resin as a printing material. As shown in FIG. 2 (a) or FIG. 3 (a), the substrate having the hole filled with the resin basically includes the circuits 72a to 72p formed on the front and back surfaces of the double-sided circuit board 70.
Holes (through holes) 71a to 71 for connecting
d is formed.

In the example shown in FIG. 2, the circuits 72a to 72h and the circuit 7 formed on the surface of the double-sided circuit board 70 by plating the through holes 71a to 71d.
2i to 72p, and circuits 73a to 73h
It is what it was. In the present embodiment, FIG.
Alternatively, printing is performed using the one shown in FIG.

To proceed with the description, in the case of the example shown in FIG. 2B, the plated through holes 71a to 71a
The insulating resin 7 is printed on 1d by printing shown in the present embodiment.
4a to 74d (FIG. 2 (c)), and after the printing is completed, a laminating press or build-up is performed to remove the insulating base material 75 from FIG.
Arranged around the substrate shown in (c), and further, a copper foil 76 is attached to the upper and lower surfaces of the insulating base material 75.

In the example shown in FIG. 3, the through holes 71a to 71d of the substrate shown in FIG. 3A are filled with conductive resins 77a to 77d by printing shown in this embodiment (FIG. 3A). (B)) After the printing is completed, a laminating press or build-up is performed, and the insulating base material 75 is arranged around the substrate shown in FIG. Attach. Although the final substrate is formed by the above steps, the printing substrate used in the vacuum printing apparatus and the vacuum printing method according to the present embodiment is the substrate shown in FIG. 2B or the substrate shown in FIG. The substrate shown in FIG.

Next, a substrate on which a semiconductor sealed with the above-described resin is mounted will be described. FIG. 4 is a diagram illustrating an example of a substrate on which a semiconductor sealed with a resin is mounted. In the example shown in FIG. 4A, a semiconductor element 81 is adhered on a substrate 80, and electric circuits 82a and 82 formed on the substrate 80 are formed.
b and the electric circuit formed on the semiconductor element 81
3a and 83b. FIG.
In the example shown in (b), a semiconductor element 81 is arranged in a recess formed in a substrate 84, and electric circuits 82a and 82b formed in the substrate 80 and an electric circuit formed in the semiconductor element 81 are connected to a wire 83a. , 83b.

Further, the example shown in FIG.
And the circuit formed on the semiconductor element 86 is electrically connected by bumps 87. In the example shown in FIG. 4C, the semiconductor element 86 is arranged in a concave portion formed on the substrate 88, and the electric circuit formed on the substrate 88 and the electric circuit formed on the semiconductor element 86 are connected by bumps 87. It is formed by electrical connection.

In this embodiment, the semiconductor element 81 and the wires 83a and 83b shown in FIGS.
The semiconductor element 86 and the bump 87 shown in (c) and (d) are sealed with a liquid sealing material. The electronic components sealed with resin are a coil, a capacitor, a resistor, a transformer, and a diode, and these may be used alone or in plurals including a semiconductor element.

Returning to FIG. 1, description of the vacuum printing apparatus of the present embodiment will be continued. The above-described carry-in room 10, printing room 20, and carry-out room 30 are provided with an intake pipe 50 having a valve 53, an intake pipe 51 having a valve 54, and an intake pipe 52 having a valve 55, respectively. Loading room 1
When the vacuum chamber 0, the printing chamber 20, and the unloading chamber 30 are in a vacuum state, the pressures in the loading chamber 10, the printing chamber 20, and the unloading chamber 30 are set to the atmospheric pressure by opening the valves 53, 54, and 55. can do.

The carry-in room 10, the printing room 20, and the carry-out room 30 are provided with valves 57, 58, and 59, and a pipe 56 connected to a vacuum pump 60 is connected thereto. Therefore, when the vacuum pump 60 is operating, the valve 5
By setting 7, 58, 59 to the open state, each of the carry-in room 10, the printing room 20, and the carry-out room 30 can be in a vacuum state. Therefore, the valves 53, 54, 55, 57, 5
The carry-in room 10 and the printing room 2 are adjusted by adjusting the opening degree of 8,59.
0 and the degree of vacuum in the carry-out chamber 30 can be arbitrarily set. In FIG. 1, the vacuum pump 60 is connected to the valve 57,
Although they are directly connected to the carry-in room 10, the print room 20, and the carry-out room 30 via the 58 and 59, the carry-in room 1
A tank may be provided between the vacuum pump 60 and the printing chamber 20 and the unloading chamber 30 to shorten the time required to reach a predetermined degree of vacuum.

Next, the inside of the printing room 20 will be described in detail. In FIG. 1, reference numeral 21 denotes a table 22 described later.
It is a table elevating device for raising and lowering and stopping the table, and may have a function of stopping at an elevating speed and an arbitrary position for an arbitrary time if necessary. Also, the table elevating device 21
It is also possible to use a device for raising and lowering the printing stencil instead of. In this case, the above mechanism can be provided.

Reference numeral 22 denotes a table of the printing press, which is not particularly required when the printing material 2 is mounted on a jig plate or when the printing material itself is transported. Further, a heater (not shown) may be built-in so as to heat the print substrate 2 as necessary, or a heater may be provided on the upper surface of the table.
Reference numeral 23 denotes a stencil plate for printing, in which holes having a size and a shape corresponding to the supply dimensions are provided at positions corresponding to the resin supply portion of the print substrate 2 in a number corresponding to the supply unit. In FIG. 1, holes 23a, 23b and 23c are provided.

Reference numeral 24 denotes a squeegee moving device,
It is configured to be able to reciprocate in the direction indicated by reference numeral H1 or in the direction indicated by reference numeral H2 along the moving rail 25 horizontally installed in the squeegee, and the reference numerals H1 are applied to the squeegees 26a and 26b. Reciprocating in the direction indicated by H2 or in the direction indicated by the symbol H2. In addition, the squeegee moving device 24 reciprocates the squeegees 26a and 26b in the direction indicated by the reference sign V1 or in the direction indicated by the reference sign V2.
The vertical position of the squeegee 26b is adjusted.
The adjustment of the distance between the a and 26b and the stencil 23 and the adjustment of the contact pressure are performed.

FIG. 5 shows the squeegees 26a and 26b and the stencil 2
FIG. 3 is a diagram for explaining a relationship with No. 3; Squeegee 26
It is preferable that the contact angle θ between the a and 26b and the stencil 23 be smaller than 90 ° so that the resin is pressed into the hole of the printing material and filled. That is, as shown in FIG. 5A, the tips of the squeegees 26a and 26b are not acute angles but 90
If it is close to °, it is necessary to tilt the squeegees 26a and 26b themselves to make the contact angle θ 90 ° or less.

As shown in FIG. 5B, when the tips of the squeegees 26a and 26b are acute angles, the contact angle θ is 90 ° or less even if the squeegees 26a and 26b are vertically arranged. Become. In the present embodiment, printing is performed in both the case where the squeegee moving device 24 moves in the direction indicated by reference numeral H1 and the case where the squeegee moving device 24 moves in the direction indicated by reference numeral H2. Squeegee 26a,
26b are provided facing each other.

Reference numeral 27 denotes a resin supply device for appropriately supplying resin onto the stencil 23 in the printing room 20.
, The resin is supplied to the resin supply device outside. This device may be equipped with a heating device (not shown) so that the resin can be heated if necessary. Further, the resin supply device 27 is provided outside the printing room 20, but it is necessary to supply the resin to the stencil in the printing room due to its structure. This is because it is necessary to supply a resin that is replenished outside the printing room and fed into the printing room 20. Reference numeral 28 denotes a resin supply nozzle connected to the resin supply device 27, which is a portion for discharging the resin onto the stencil 23 from the resin supply device 27, and is configured to be able to heat the resin as necessary. Good.

Incidentally, the resin supply nozzle 28 is
A plurality may be provided between the squeegee 26a and the squeegee 26b. Further, the resin supply nozzle 28 may be configured to be movable. In this case, before the squeegees 26a and 26b move in the direction indicated by reference numeral H1 in the drawing and return to their original positions, the resin supply nozzle 28 moves from outside the movement range of the squeegees 26a and 26b, and After the resin is discharged onto the stencil 23 located on the front surface, the squeegees 26a, 26
It returns to the original position outside the movement range of b. FIG.
The middle 29 is the resin discharged from the resin supply nozzle 28 onto the stencil 23. The discharging position is the squeegee 26 which moves forward.
a, 6b on the stencil 23 located in front of the stencil 23.

Next, a vacuum printing method applied to the vacuum printing apparatus according to the first embodiment of the present invention will be described in detail with reference to FIG. First, regarding the loading room 10, the opening and closing door 14 is closed, and the opening and closing door 13 is opened. Also,
Regarding the carry-out room 30, the open / close door 34 is closed and the open / close door 33 is open. Further, the vacuum pump 60 is operated,
The valves 53, 58, 59 are opened, and the valves 54, 5
5, 57 are closed. By doing so, the pressure in the carry-in chamber 10 is set to the atmospheric pressure, and the printing room 20 and the carry-out room 3
0 is adjusted to a predetermined degree of vacuum.

In this state, the belt conveyors 40 and 41 are operated, and the printing material 1 is carried into the carry-in room 10 through the carrying port 11. When the printing medium 1 is loaded into the loading chamber 10, the open / close door 13 is closed, the valve 53 is closed, and the valve 57 is opened, and the internal pressure of the loading chamber 10 is reduced by operating the vacuum pump 60. To the internal pressure of

After the internal pressure of the loading chamber 10 becomes equal to the internal pressure of the printing chamber 20, the opening / closing door 14 is opened, and the belt conveyors 41 and 42 are driven to move the printing object 1 into the printing chamber 2.
0. When the printing object 1 is moved by the belt conveyor 42 and reaches a predetermined position on the table elevating device 21, the table elevating device 21 raises the table 22 and moves the printing object 1 to a predetermined position, that is, the upper surface of the printing material 2 is printed. It is raised to a position where it comes into contact with the back surface of the stencil 23.
In FIG. 1, the reference numeral 2 is given to the printed material after ascending.

When the substrate 2 rises to the predetermined position, the resin supply position 27 discharges the resin 29 in front of the squeegee 26b on the stencil 23, that is, in the direction indicated by the symbol H1 for the squeegee 26b. When the resin 29 is discharged,
The squeegee moving device 24 lowers the squeegee 26b until it contacts the stencil 23, and after the squeegee 26b contacts the stencil 23, moves in the direction indicated by reference numeral H1 in the figure, and starts printing. As the squeegee 26b moves,
The resin 29 is filled in the holes 23 a to 23 c formed in the stencil 23.

Forward printing (the squeegee 26b is denoted by reference numeral H1 in the drawing).
In the printing room 20 after the end of the return pass printing (printing in the case where the squeegee 26a is moved in the direction indicated by the symbol H2 in the figure) after the end of the printing when the printing is performed in the direction marked with. The vacuum degree is 30 torr higher than the vacuum degree during forward printing.
At least r, the pressure is lowered to a predetermined degree of vacuum. In addition, 10to
When printing with a degree of vacuum higher than about rr or a degree of vacuum less than 10 torr, air bubbles in the resin may not be completely removed, for example, a resin unfilled portion remains in a hole, an element periphery, a coil line, and the like. These bubbles and unfilled parts are 10 torr
This is the remaining portion of the air having a degree of vacuum less than that, and even after the vacuum is released (after returning to the normal pressure), a gap of about several millimeters of air remains. In this sense, the degree of vacuum is preferably higher than 5 torr, particularly preferably about 1 torr. Thereafter, the degree of vacuum in the printing chamber 20 is adjusted and maintained at a predetermined degree of vacuum that does not exceed the degree of vacuum during forward printing. This is adjusted by opening and closing the valve 54. During the adjustment of the degree of vacuum, the squeegee 26b is raised and the squeegee 26a is lowered.

Subsequently, the backward printing is performed using the squeegee 26a. After printing on the return path is completed, the table 22 is lowered by the table elevating device 21, and the printing material 2 is separated from the stencil 23. At this time, the lowering speed of the table 22 or the resting time at an arbitrary position is adjusted in order to prevent a shape defect due to a resin break.

Next, the door 33 is opened. Then, when the table 22 is lowered and the printing material 2 is placed on the belt conveyor 42, the belt conveyors 42 and 43 are driven, and the printing material 1 is carried from the printing room 20 to the carry-out room 30. When the loading into the unloading chamber 30 is completed, the opening / closing door 33 is closed, the valve 59 is closed, and the valve 55 is opened to set the pressure in the unloading chamber 30 to atmospheric pressure.

When the pressure in the carry-out chamber 30 reaches the atmospheric pressure, the door 34 is opened, and the belt conveyors 43 and 44 are driven to carry out the printing material 3 to the outside. Thereafter, by repeating the series of operations described above, printing can be performed extremely efficiently and the quality can be stabilized.

[Second Embodiment] FIG. 6 is a top view schematically showing the configuration of a vacuum printing apparatus according to a first embodiment of the present invention to which a vacuum printing method according to a second embodiment of the present invention is applied. However, in order to facilitate understanding, cross-sectional views are interlaced. In FIG. 6, reference numeral 90 denotes a loading / unloading chamber for loading and unloading a substrate to be printed, and has a pressure-resistant structure capable of maintaining airtightness. This loading / unloading room 90
Are provided with an opening / closing door 91 for carrying in the printing material from the outside and an opening / closing door 92 for carrying out the printing material to the outside, and for carrying in / out the printing material with a printing room 130 described later. An opening / closing door 93 is provided. These doors 91, 92, and 93 have the same structure and sealing as the doors shown in the first embodiment.

Belt conveyors 110, 111, 112 and 113 are arranged on a straight line passing through the doors 91 and 92. Further, belt conveyors 120 and 121 are arranged on a straight line passing through the door 93 and orthogonal to the belt conveyors 110, 111, 112 and 113. 6, 100, 101, 102, 103, 10
4 is a belt conveyor 110, 111, 112, 113
This is the printing material placed on the top.

Next, the inside of the printing room 130 will be described. The printing room 130 is a printing room in which a printing device is provided, and has a pressure-resistant structure capable of maintaining airtightness. 13
Reference numeral 1 denotes a squeegee moving device, which is similar to the squeegee moving device 24 in FIG. This squeegee moving device 1
Reference numeral 31 is movable in directions indicated by reference numerals H10 and H11 in the drawing along a moving rail 132 horizontally arranged in the printing room 130.

The squeegees 133a and 133b are similar to the squeegees 26a and 26b described in the first embodiment. 134 is a stencil similar to the stencil 23 described in the first embodiment, and 135 is a hole formed in the stencil 134. 136 is a resin supply device, and 137 is a resin supply nozzle. These are the same as the resin supply device 27 and the resin supply 28 described in the first embodiment. However,
The resin supply nozzle 137 includes squeegees 133a and 133b.
The resin can be supplied to a predetermined position on the stencil 134 in accordance with the movement of the squeegees 133a and 133b.

The carry-in / out chamber 90 and the printing chamber 130 are provided with an intake pipe 141 provided with a valve 152 and an intake pipe 140 provided with a valve 151, respectively. When the loading / unloading chamber 10 and the printing room 20 are in a vacuum state, the pressure inside the loading / unloading room 90 and the printing room 130 can be set to the atmospheric pressure by opening the valves 152 and 151.

In the loading room 90 and the printing room 130,
Valves 171 and 172 are provided and connected to a pipe 160 connected to a vacuum pump 180. Therefore, when the vacuum pump 160 is operating, the valves 172, 17
1 to the open state, the loading / unloading chamber 90 and the printing room 1
30 can be in a vacuum state. Therefore, the degree of vacuum in the loading / unloading chamber 90 and the printing chamber 130 can be arbitrarily set by adjusting the opening degrees of the valves 151, 152, 171, and 172. In FIG. 6, the vacuum pump 160 is directly connected to the loading / unloading chamber 90 and the printing chamber 130 via the valves 171 and 172. However, if necessary, the loading / unloading chamber 90 and the printing chamber 130 and the vacuum pump 160
And a tank may be provided between them to shorten the time required to reach a predetermined degree of vacuum.

Next, the operation of the vacuum printing apparatus having the above-described configuration according to the second embodiment of the present invention will be described. First, the opening / closing door 93 is closed, the valve 152 is opened, and the pressure inside the loading / unloading chamber 90 is set to the atmospheric pressure. In this state, although not shown in the drawing, the printing medium is arranged in the printing room 130. Next, the open / close door 92 is opened, and the belt conveyors 113 and 112 are driven to carry the printing material 104 into the carry-in / carry-out room 90. At this time, the printing object 101 on which printing has been performed is opened with the opening / closing door 91 on the carry-out side of the carry-in / carry-out room 90 in an open state.
1,110 is driven and conveyed outside.

Next, the opening / closing door 9 on the loading side of the loading / unloading chamber 90.
2 and the door 91 on the carry-out side are closed, and the valve 152 is closed.
Is closed, the valve 172 is opened, and the vacuum pump 180 is operated to make the degree of vacuum in the loading / unloading chamber 90 equal to the degree of vacuum in the printing chamber 130. During this operation, a printing operation similar to the printing operation described in the first embodiment is performed in the printing room 130.

When the printing operation is completed, the opening / closing door 93 of the loading / unloading chamber 90 is opened, and the print-completed material is driven by the belt conveyors 121 and 120 so that the printing chamber 13 is driven.
0 to the carry-in / carry-out room 90. As a result, the printing medium carried out of the printing room 130 is denoted by reference numeral 102 in FIG.
To the position marked with, followed by the belt conveyor 11
1 and 112, the printing material moves to the position denoted by reference numeral 101, and the printing material at the position denoted by reference numeral 103 moves to the position denoted by reference numeral 102 and prints by driving the belt conveyors 120 and 121. It is carried into the chamber 130.

Thereafter, the production is performed efficiently by repeating the above-mentioned operations. In addition, a mechanism (not shown) for wrapping around the back of the stencil as needed to wipe off the resin is provided, so that the back surface of the stencil is washed after the printing material is detached after printing and before contact with the next printing material. Just do it. Further, it is also possible to connect a device in another process before and after the device and form a production line in conjunction with the device. For example, the pre-process is a circuit board manufacturing process or a semiconductor mounting and connection process, and the post-process is a resin curing and inspection process.

Although the number of chambers for transporting substrates is one if it is configured as in the second embodiment, it is usually simpler to configure the apparatus as in the first embodiment to simplify the apparatus. in this case,
It is also possible to provide a plurality of chambers so that the pressure can be raised and lowered stepwise as a transfer chamber.

[0049]

As described above, according to the present invention, by performing printing under vacuum, the presence of air bubbles in the resin is eliminated, and problems caused by the presence of air bubbles during moisture absorption and thermal shock are eliminated. There is an effect that. In addition, the resin can be filled in the minute gaps, and there is an effect that the reliability is not reduced due to the penetration of moisture. In addition, since printing is performed under a continuous vacuum, there is no time loss required for transporting the printing material, and production can be performed in substantially the same time as a normal (atmospheric pressure) printing and sealing system. Further, there is an effect that the sealing shape is stable and no shape defect occurs.
Further, there is an effect that it is economical because a large change in the degree of vacuum in the printing room is not required.

[Brief description of the drawings]

FIG. 1 is a side view schematically showing a configuration of a vacuum printing apparatus according to a first embodiment of the present invention to which a vacuum printing method according to the first embodiment of the present invention is applied.

FIG. 2 is a cross-sectional view illustrating a substrate having a hole to be filled with a resin to be printed.

FIG. 3 is a cross-sectional view illustrating a substrate having a hole to be filled with a resin as a printing substrate.

FIG. 4 is a diagram showing an example of a substrate on which a semiconductor sealed with a resin is mounted.

FIG. 5 is a diagram for explaining the relationship between the squeegees 26a and 26b and the stencil 23.

FIG. 6 is a top view schematically showing a configuration of a vacuum printing apparatus according to a first embodiment of the present invention to which a vacuum printing method according to a second embodiment of the present invention is applied.

[Explanation of symbols]

 DESCRIPTION OF REFERENCE NUMERALS 10 carry-in room (transfer room) 13 door (second door) 14 door (first door) 20 printing room 23 stencil 26a, 26b squeegee 27 resin supply device 30 carry-out room (transfer room) 33 door (First open / close door) 34 Open / close door (second open / close door) 90 Loading / unloading room (transfer chamber) 91 Open / close door (first open / close door) 92 Open / close door (second open / close door) 93 Open / close door (No. 2) 130 printing room 133a, 133b squeegee 134 stencil 136 resin supply device

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[Procedure amendment]

[Submission date] March 23, 2000 (200.3.2.
3)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

2. The vacuum printing apparatus according to claim 1 , further comprising a resin supply device for supplying the resin in a moving direction of one of the squeegees used for printing.

3. The printing room can maintain a degree of vacuum up to about 0.1 torr, and is set to an arbitrary degree of vacuum between atmospheric pressure and about 0.1 torr. The vacuum printing apparatus according to claim 1, wherein

4. The vacuum printing method applied to the vacuum printing apparatus according to claim 1, wherein the first opening / closing door is closed, and the second opening / closing door is open, and the printing medium is conveyed. Loading the second opening / closing door into a closed state, and setting the degree of vacuum in the transfer chamber to be substantially equal to the degree of vacuum in the printing chamber; and opening the first opening / closing door Carrying out the printing object into the printing room and performing printing.

5. A process for conveying a printing medium after printing in the conveying chamber, the first door is closed, the pressure in the transfer chamber with the atmospheric pressure, the second door 5. The vacuum printing method according to claim 4 , further comprising, as an open state, a step of carrying out the printing medium to the outside.

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction contents]

[0009]

In order to solve the above-mentioned problems, a vacuum printing apparatus according to the present invention provides a method for printing a tree on a printing substrate.
A vacuum printing apparatus for printing fat under a vacuum, comprising two
A squeegee is provided, and the squeegee reciprocates on the stencil
By printing the resin on the substrate under vacuum
Comprising a printing chamber having a printing machine, while being separated or opened via the pressroom and first door, and a transfer chamber that is separated or opened via the external and the second door, said indicia
The printing room is between the end of the forward printing and the start of the return printing.
Vacuum is lower than vacuum during forward printing and return printing
It is characterized in that it is set to a value that has been set . In addition, the present invention
Vacuum printing equipment is used before any one used for printing.
A resin supply for supplying the resin in the forward direction of the squeegee.
It is characterized by having a feeding device. Further, according to the present invention,
Vacuum printing apparatus, wherein the printing room is about 0.1 torr.
To about 0.1 torr from atmospheric pressure
Set the desired degree of vacuum between the degrees of vacuum
It is characterized by being performed. Also, the vacuum printing method according to the present invention
The method is a vacuum printing method applied to the above vacuum printing apparatus.
The first opening / closing door is closed, and the second opening / closing
A step of carrying the printing material into the transfer chamber with the door opened.
Closing the second opening / closing door,
The degree of vacuum in the transfer chamber is set to be substantially equal to the degree of vacuum in the printing chamber.
And the step of opening the first opening / closing door to open the substrate.
Carrying in the printing room and performing printing.
It is characterized by the following. Also, the vacuum printing method according to the present invention
Transporting the printed substrate to the transport chamber after printing,
The first opening / closing door is closed, and the pressure in the transfer chamber is reduced.
Atmospheric pressure and open the second door
And carrying out the printing medium to the outside.
It is characterized by that.

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2C035 AA06 FA23 FC04 FC07 FD00 FD01 FD15 FD19 FD29 FD31 2H113 AA01 AA05 BA10 BA14 BB22 BC12 CA17 FA10 FA54 5E314 AA24 CC07 EE02 FF01 GG01 GG09 GG26 5F061A01

Claims (7)

[Claims] 1. A vacuum printing apparatus for printing a printing material under vacuum, comprising: a printing room for supplying resin to the printing material under vacuum; and a printing room separated from the printing room via a first opening / closing door. A vacuum printing apparatus comprising: a transfer chamber that is opened and is separated or opened from the outside through a second opening / closing door. 2. The printing room is provided with a printing machine for printing a resin by a squeegee using a stencil, and two squeegees are provided, and printing is performed using different squeegees when performing forward printing and returning printing. The vacuum printing apparatus according to claim 1, wherein: 3. The vacuum printing apparatus according to claim 2, further comprising a resin supply device for supplying the resin in a moving direction of one of the squeegees used for printing. 4. The printing chamber can maintain a degree of vacuum up to about 0.1 torr, and is set to an arbitrary degree of vacuum between atmospheric pressure and about 0.1 torr. The vacuum printing apparatus according to claim 1, wherein 5. A vacuum printing method for performing forward printing and backward printing of an object to be printed under vacuum, wherein an arbitrary number of times are set at the time of forward printing, between the end of forward printing and the start of backward printing, and at the time of backward printing. A vacuum printing method comprising a step of setting and holding a degree of vacuum and performing the step. 6. The vacuum printing method applied to the vacuum printing apparatus according to claim 1, wherein the first opening / closing door is closed, and the second opening / closing door is open, and the printing medium is conveyed. Loading the second opening / closing door into a closed state, and setting the degree of vacuum in the transfer chamber to be substantially equal to the degree of vacuum in the printing chamber; and opening the first opening / closing door Carrying out the printing object into the printing room and performing printing. 7. A step of transporting the printed material to the transport chamber after printing, closing the first open / close door, setting the pressure in the transport chamber to atmospheric pressure, and closing the second open / close door. 7. The vacuum printing method according to claim 6, further comprising, as an open state, a step of carrying out the printing medium to the outside.