JP2000198831A - Epoxy resin composition and sealing of lsi using the composition - Google Patents

Epoxy resin composition and sealing of lsi using the composition

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Publication number
JP2000198831A
JP2000198831A JP10373778A JP37377898A JP2000198831A JP 2000198831 A JP2000198831 A JP 2000198831A JP 10373778 A JP10373778 A JP 10373778A JP 37377898 A JP37377898 A JP 37377898A JP 2000198831 A JP2000198831 A JP 2000198831A
Authority
JP
Japan
Prior art keywords
epoxy resin
resin composition
acid anhydride
lsi
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10373778A
Other languages
Japanese (ja)
Other versions
JP4577536B2 (en
Inventor
Kenji Kaneharu
憲司 金治
Hirofumi Nishida
裕文 西田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NAGASE CHIBA KK
Original Assignee
NAGASE CHIBA KK
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Filing date
Publication date
Application filed by NAGASE CHIBA KK filed Critical NAGASE CHIBA KK
Priority to JP37377898A priority Critical patent/JP4577536B2/en
Publication of JP2000198831A publication Critical patent/JP2000198831A/en
Application granted granted Critical
Publication of JP4577536B2 publication Critical patent/JP4577536B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To obtain an epoxy resin composition causing suppressed foaming at high temperature and useful as a resin composition for LSI sealing by using a specific acid anhydride as a curing agent and a specific cure accelerator. SOLUTION: The objective composition contains (A) an epoxy resin (e.g. naphthalene-type epoxy resin), (B) one or more kinds of acid anhydrides selected from an acid anhydride expressed by formula (R1 to R3 are each H or a 1-6C hydrocarbon group), an acid anhydride of formula wherein the carbon-carbon double bond in the anhydride is hydrogenated and pyromellitic anhydride, (C) a latent cure accelerator (e.g. an adduct of an imidazole compound and an epoxy resin) and preferably further (D) a filler (e.g. fused silica). Preferably, the amount of the component B is 0.8-1.1 equivalent based on 1 equivalent of epoxy group of the component A, the active component of the component C is 2-15 pts.wt. based on 100 pts.wt. of the component A and the amount of the component D is 30-65% of the total composition.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、エポキシ樹脂組成
物、該エポキシ樹脂組成物からなるLSI封止用樹脂組
成物および該LSI封止用樹脂組成物を用い、LSIを
封止する方法に関する。
The present invention relates to an epoxy resin composition, an LSI sealing resin composition comprising the epoxy resin composition, and a method for sealing an LSI using the LSI sealing resin composition.

【0002】[0002]

【従来の技術および発明が解決しようとする課題】エポ
キシ樹脂組成物は、電子部品用封止剤や接着剤など様々
な用途に使用されている。なかでも一定レベルの保存安
定性を有し、液状(ペースト状を含む)のものは、その
取り扱いやすさ(作業性のよさ)からLSIなどの半導
体製品に多用されている。これらの分野では、生産性向
上による製品の製造コストの低減などの点から、封止剤
をできるだけ短時間で加熱硬化させることが好ましい。
2. Description of the Related Art Epoxy resin compositions are used in various applications such as sealants and adhesives for electronic parts. Above all, those having a certain level of storage stability and being liquid (including paste) are frequently used in semiconductor products such as LSIs because of their easy handling (high workability). In these fields, it is preferable to heat and cure the encapsulant in as short a time as possible from the viewpoint of reducing the production cost of the product by improving the productivity.

【0003】エポキシ樹脂組成物の硬化速度をあげる手
段としては、エポキシ樹脂組成物の反応性をアップさ
せる方法、加熱温度を高くする方法があげられる。
[0003] Means for increasing the curing rate of the epoxy resin composition include a method of increasing the reactivity of the epoxy resin composition and a method of increasing the heating temperature.

【0004】の方法としては、たとえばエポキシ樹脂
の硬化剤としてイミダゾール系化合物を用い、その添加
量を増量する方法などがあげられるが、イミダゾール系
化合物を増量して用いた場合には、硬化剤として酸無水
物系化合物などの他の硬化剤を用いた場合に比べて粘度
が高くなり、作業性が低下するなどの問題がある。
[0004] As a method, for example, a method of using an imidazole compound as a curing agent for an epoxy resin and increasing the amount of addition is cited. When an imidazole compound is used in an increased amount, the curing agent is used as a curing agent. There is a problem that the viscosity is higher than in the case where another curing agent such as an acid anhydride compound is used, and the workability is reduced.

【0005】の方法としては、加熱温度を高温、たと
えば200℃以上にあげる方法があげられるが、このよ
うな方法では硬化時に組成物が発泡し、硬化物の物性が
低下するなどの問題がある。
As a method of (1), there is a method in which the heating temperature is raised to a high temperature, for example, 200 ° C. or higher. However, such a method has problems such as foaming of the composition at the time of curing and deterioration of physical properties of the cured product. .

【0006】[0006]

【課題を解決するための手段】本発明者らは、前記問題
を解決すべく鋭意検討を重ねた結果、エポキシ樹脂の硬
化剤として特定の酸無水物を使用し、かつ、特定の硬化
促進剤を使用することにより200℃以上の高温下での
発泡を抑えることができることを見出し、本発明を完成
するに至った。
Means for Solving the Problems As a result of intensive studies to solve the above problems, the present inventors have used a specific acid anhydride as a curing agent for an epoxy resin and a specific curing accelerator. It has been found that foaming at a high temperature of 200 ° C. or higher can be suppressed by using, and the present invention has been completed.

【0007】すなわち、本発明は、(A)エポキシ樹
脂、(B)一般式(1):
That is, the present invention provides (A) an epoxy resin, (B) a general formula (1):

【0008】[0008]

【化2】 Embedded image

【0009】(式中、R1、R2、R3は、それぞれ水素
原子または炭素数1〜6の炭化水素基を示し、R1
2、R3は同じでも異なっていてもよい、ただし、
1、R2およびR3の少なくとも1つは水素原子ではな
い)で表わされる酸無水物、一般式(1)で表わされる
酸無水物中の炭素−炭素2重結合が水素添加された酸無
水物およびピロメリット酸無水物のうちの1種以上、お
よび(C)潜在性硬化促進剤からなるエポキシ樹脂組成
物(請求項1)、さらに、フィラーを含有する請求項1
記載のエポキシ樹脂組成物(請求項2)、請求項1また
は2記載のエポキシ樹脂組成物を用いたLSI封止用樹
脂組成物(請求項3)および請求項3記載のLSI封止
用樹脂組成物を用い、高温・短時間圧接によりLSIを
封止する方法(請求項4)に関する。
[0009] (wherein, R 1, R 2, R 3 each represent a hydrogen atom or a hydrocarbon group having 1 to 6 carbon atoms, R 1,
R 2 and R 3 may be the same or different, provided that
At least one of R 1 , R 2 and R 3 is not a hydrogen atom), or an acid anhydride represented by the general formula (1) wherein a carbon-carbon double bond is hydrogenated. An epoxy resin composition comprising at least one of anhydrides and pyromellitic anhydrides, and (C) a latent curing accelerator (Claim 1), and further comprising a filler.
The epoxy resin composition described in claim 2 (claim 2), the resin composition for sealing LSI using the epoxy resin composition described in claim 1 or 2, and the resin composition for LSI sealing described in claim 3. The present invention relates to a method (claim 4) for sealing an LSI by using a material and pressing at a high temperature for a short time.

【0010】[0010]

【発明の実施の形態】本発明のエポキシ樹脂組成物に
は、(A)成分であるエポキシ樹脂(以下、エポキシ樹
脂(A)ともいう)が主剤として使用される。
DESCRIPTION OF THE PREFERRED EMBODIMENTS In the epoxy resin composition of the present invention, an epoxy resin as component (A) (hereinafter also referred to as epoxy resin (A)) is used as a main component.

【0011】エポキシ樹脂(A)としては、一般に液状
(ペースト状を含む)のエポキシ樹脂組成物に用いられ
るものであればとくに限定なく使用することができる
が、分子中に含まれるエポキシ基の数が2個以上のもの
が、200℃以上の高温下での発泡を抑えるのに適す
る、充分な耐熱性を発揮し得る架橋構造を形成すること
ができるなどの点から好ましい。また、4個以下、さら
には3個以下のものが低粘度の樹脂組成物を得ることが
できるなどの点から好ましい。分子中に含まれるエポキ
シ基の数が少なすぎると、硬化物の耐熱性が低くなる、
強度が弱くなるなどの傾向が生じやすくなり、多すぎる
と、組成物の粘度が高くなる、硬化収縮が大きくなるな
どの傾向が生じやすくなる。
The epoxy resin (A) can be used without particular limitation as long as it is generally used for a liquid (including paste-like) epoxy resin composition, and the number of epoxy groups contained in a molecule is not limited. Are preferred because they are suitable for suppressing foaming at a high temperature of 200 ° C. or higher and can form a crosslinked structure capable of exhibiting sufficient heat resistance. Further, four or less, and more preferably three or less are preferable in that a low-viscosity resin composition can be obtained. If the number of epoxy groups contained in the molecule is too small, the heat resistance of the cured product decreases,
If the strength is too high, the viscosity tends to be high, and the curing shrinkage tends to be high.

【0012】エポキシ樹脂(A)の数平均分子量は、2
20〜700、さらには280〜500であるのが、2
00℃以上の高温下での発泡を抑えるのに適し、低粘度
の組成物を得ることができる、物性のバランスがよいな
どの点から好ましい。数平均分子量が小さすぎると、高
温下での発泡を抑えにくくなる、硬化物の強度が弱くな
る、耐湿性が低くなるなどの傾向が生じやすくなり、大
きすぎると、組成物の粘度が高くなるなどの傾向が生じ
やすくなる。
The number average molecular weight of the epoxy resin (A) is 2
20-700 and 280-500 are 2
It is suitable for suppressing foaming at a high temperature of 00 ° C. or higher, is preferable in that a low-viscosity composition can be obtained, and the balance of physical properties is good. If the number average molecular weight is too small, it becomes difficult to suppress foaming at high temperature, the strength of the cured product becomes weak, and the tendency that moisture resistance becomes low tends to occur.If it is too large, the viscosity of the composition becomes high. Tend to occur.

【0013】エポキシ樹脂(A)の具体例としては、た
とえばビスフェノールA型エポキシ樹脂、ビスフェノー
ルF型エポキシ樹脂、ビスフェノールAD型エポキシ樹
脂、ナフタレン型エポキシ樹脂、ビフェニル型エポキシ
樹脂、グリシジルアミン型エポキシ樹脂、脂環式エポキ
シ樹脂、ジシクロペンタジエン型エポキシ樹脂、ノボラ
ック型エポキシ樹脂、ポリエーテル変性エポキシ樹脂、
シリコーン変性エポキシ樹脂のような他のポリマーとの
共重合体、ゴム粒子分散型エポキシ樹脂、ジアリールス
ルフィド型エポキシ樹脂、ジアリールエーテル型エポキ
シ樹脂などがあげられる。これらは単独で用いてもよ
く、2種以上を組み合わせて用いてもよい。これらのう
ちでは、ナフタレン型エポキシ樹脂、ビスフェノールA
型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビ
スフェノールAD型エポキシ樹脂などが、比較的低粘度
である、耐熱性や耐湿性にすぐれるなどの点から好まし
い。その中でもとくに、ナフタレン型エポキシ樹脂が、
反応性が高いため短時間硬化性にすぐれる点から好まし
い。
Specific examples of the epoxy resin (A) include, for example, bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol AD type epoxy resin, naphthalene type epoxy resin, biphenyl type epoxy resin, glycidylamine type epoxy resin, and fat. Cyclic epoxy resin, dicyclopentadiene type epoxy resin, novolak type epoxy resin, polyether modified epoxy resin,
Copolymers with other polymers such as silicone-modified epoxy resins, rubber particle-dispersed epoxy resins, diaryl sulfide-type epoxy resins, diaryl ether-type epoxy resins, and the like. These may be used alone or in combination of two or more. Among these, naphthalene type epoxy resin, bisphenol A
Type epoxy resin, bisphenol F type epoxy resin, bisphenol AD type epoxy resin and the like are preferable from the viewpoint of relatively low viscosity, excellent heat resistance and moisture resistance. Especially, naphthalene type epoxy resin,
It is preferred because it has high reactivity and is excellent in short-time curability.

【0014】エポキシ樹脂(A)は、本発明の効果を損
わない範囲で、その一部をエポキシ系反応性希釈剤にお
きかえてもよい。
Part of the epoxy resin (A) may be replaced with an epoxy-based reactive diluent as long as the effects of the present invention are not impaired.

【0015】前記エポキシ系反応性希釈剤としては、た
とえばレゾルシンジグリシジルエーテル、tert−ブ
チルフェニルグリシジルエーテル、シクロヘキサンジメ
タノールジグリシジルエーテル(分子量254):
Examples of the epoxy reactive diluent include resorcin diglycidyl ether, tert-butylphenyl glycidyl ether and cyclohexane dimethanol diglycidyl ether (molecular weight: 254):

【0016】[0016]

【化3】 Embedded image

【0017】などがあげられる。これらは単独で用いて
もよく、2種以上を組み合わせて用いてもよい。これら
のうちでは希釈効果が大きい、分子量がある程度大きい
などの点からシクロヘキサンジメタノールジグリシジル
エーテルが好ましい。
And the like. These may be used alone or in combination of two or more. Of these, cyclohexanedimethanol diglycidyl ether is preferred from the viewpoints of a large dilution effect and a relatively large molecular weight.

【0018】前記エポキシ系反応性希釈剤は、多く用い
ると200℃以上での発泡を抑えることが困難になりや
すく、また、硬化物の耐湿性や耐熱性もわるくなりやす
いので、エポキシ樹脂(A)の20重量%(以下、%と
いう)以下、さらには10%以下にするのが好ましい。
また、使用することによる効果を得るためには、1%以
上、さらには5%以上とするのが好ましい。
If the epoxy-based reactive diluent is used in a large amount, it is difficult to suppress foaming at 200 ° C. or higher, and the cured product tends to deteriorate in moisture resistance and heat resistance. ) Is preferably not more than 20% by weight (hereinafter referred to as%), more preferably not more than 10%.
In addition, in order to obtain the effect by using, it is preferable that the content is 1% or more, more preferably 5% or more.

【0019】本発明のエポキシ樹脂組成物には、エポキ
シ樹脂の硬化剤として(B)成分である一般式(1):
The epoxy resin composition of the present invention has a general formula (1) as component (B) as a curing agent for the epoxy resin:

【0020】[0020]

【化4】 Embedded image

【0021】(式中、R1、R2およびR3は、それぞれ
水素原子または炭素数1〜6の炭化水素基を示し、
1、R2およびR3は同じでも異なっていてもよい、た
だし、R1、R2およびR3の少なくとも1つは水素原子
ではない)で表わされる酸無水物、一般式(1)で表わ
される酸無水物中の炭素−炭素2重結合が水素添加され
た酸無水物およびピロメリット酸無水物(以下、酸無水
物(B)ともいう)が用いられる。
(Wherein R 1 , R 2 and R 3 each represent a hydrogen atom or a hydrocarbon group having 1 to 6 carbon atoms;
R 1 , R 2 and R 3 may be the same or different, provided that at least one of R 1 , R 2 and R 3 is not a hydrogen atom); An acid anhydride and a pyromellitic anhydride (hereinafter also referred to as an acid anhydride (B)) in which a carbon-carbon double bond in the acid anhydride is hydrogenated are used.

【0022】酸無水物(B)は、蒸気圧が低いため、2
00℃以上の高温でも発泡しにくい組成物を得ることが
でき、かつ高耐熱性の硬化物を与える組成物を得ること
ができる。
The acid anhydride (B) has a low vapor pressure,
A composition that does not easily foam even at a high temperature of 00 ° C. or higher can be obtained, and a composition that gives a cured product having high heat resistance can be obtained.

【0023】なお、酸無水物(B)のうちでは、液状で
貯蔵安定性が良好で硬化物が低吸水率になる点から、一
般式(1)で表わされる酸無水物(以下、酸無水物
(1)ともいう)および、一般式(1)で表わされる酸
無水物中の炭素−炭素2重結合が水素添加された酸無水
物(以下、水添酸無水物(1)ともいう)が好ましく、
さらに、水添酸無水物(1)が硬化物の透明性がよくな
る点から好ましい。
Among the acid anhydrides (B), acid anhydrides represented by the general formula (1) (hereinafter referred to as acid anhydrides) are preferable because they are liquid, have good storage stability, and have low water absorption. Product (1)) and an acid anhydride represented by the general formula (1) in which a carbon-carbon double bond is hydrogenated (hereinafter also referred to as hydrogenated anhydride (1)) Is preferred,
Further, hydrogenated anhydride (1) is preferable because the transparency of the cured product is improved.

【0024】酸無水物(1)および水添酸無水物(1)
の分子量としては、低粘度、高耐熱性、低蒸気圧、疎水
性付与の点から、208〜376、さらには222〜3
08のものが好ましい。前記分子量は、低分子量の方が
好ましい低粘度、高耐熱性と、高分子量の方が好ましい
低蒸気圧、疎水性付与とのバランスがよくなるように決
められる。
Acid anhydride (1) and hydrogenated anhydride (1)
Has a molecular weight of from 208 to 376, further from 222 to 3 from the viewpoints of low viscosity, high heat resistance, low vapor pressure, and imparting hydrophobicity.
08 is preferred. The molecular weight is determined so as to achieve a good balance between low viscosity and high heat resistance, which is preferably low, and low vapor pressure and hydrophobicity, which are preferably high.

【0025】一般式(1)中のR1、R2およびR3は、
前記分子量の点から、それぞれ水素原子または炭素数1
〜6の炭化水素基である。ただし、R1、R2およびR3
のうち少なくとも1つは水素原子でないのが好ましく、
1、R2およびR3の合計炭素原子数が3〜15、さら
には4〜10、とくには6であるのが好ましい。
R 1 , R 2 and R 3 in the general formula (1) are
From the viewpoint of the molecular weight, a hydrogen atom or carbon number 1
To 6 hydrocarbon groups. Provided that R 1 , R 2 and R 3
Preferably, at least one of is not a hydrogen atom,
The total number of carbon atoms of R 1 , R 2 and R 3 is preferably 3 to 15, more preferably 4 to 10, and particularly preferably 6.

【0026】酸無水物(1)の好ましい具体例として
は、たとえば
Preferred specific examples of the acid anhydride (1) include, for example,

【0027】[0027]

【化5】 Embedded image

【0028】などがあげられる。また、水添酸無水物
(1)の好ましい具体例としては、酸無水物(1)の好
ましい具体例中の2個の炭素−炭素2重結合を水素添加
した化合物などがあげられる。
And the like. Preferred specific examples of the hydrogenated anhydride (1) include compounds obtained by hydrogenating two carbon-carbon double bonds in the preferred specific examples of the acid anhydride (1).

【0029】酸無水物(B)の使用量は、エポキシ樹脂
(A)のエポキシ基1当量あたり、酸無水物(B)が
0.8〜1.1当量、さらには0.9〜1.0当量であ
るのが好ましい。酸無水物(B)が0.8当量未満にな
ると、架橋密度低下により耐熱性が低下する傾向が生じ
やすく、1.1当量をこえると、過剰に酸無水物が残留
することにより耐湿性が低下する傾向が生じやすくな
る。
The amount of the acid anhydride (B) used is 0.8 to 1.1 equivalents of the acid anhydride (B) per 1 equivalent of the epoxy group of the epoxy resin (A), and more preferably 0.9 to 1. It is preferably 0 equivalent. When the amount of the acid anhydride (B) is less than 0.8 equivalent, the heat resistance tends to decrease due to a decrease in the crosslinking density, and when the amount exceeds 1.1 equivalent, the acid anhydride remains excessively and the moisture resistance becomes poor. The tendency to decrease tends to occur.

【0030】本発明のエポキシ樹脂組成物には、(C)
成分である潜在性硬化促進剤(以下、促進剤(C)とも
いう)が含有される。
The epoxy resin composition of the present invention comprises (C)
A latent curing accelerator (hereinafter also referred to as an accelerator (C)) as a component is contained.

【0031】促進剤(C)は、120〜250℃でエポ
キシ樹脂(A)と酸無水物(B)との硬化反応を促進す
る成分であり、80℃以下、さらには40℃以下では促
進効果がほとんどなく安定なエポキシ樹脂組成物を得る
ことができる。また、本発明のエポキシ樹脂組成物の硬
化促進剤として促進剤(C)を使用するため、高温では
極めて短時間で硬化を完了する。
The accelerator (C) is a component for accelerating the curing reaction between the epoxy resin (A) and the acid anhydride (B) at 120 to 250 ° C., and has an accelerating effect at 80 ° C. or lower, further at 40 ° C. or lower. And a stable epoxy resin composition can be obtained. Further, since the accelerator (C) is used as a curing accelerator for the epoxy resin composition of the present invention, the curing is completed in a very short time at a high temperature.

【0032】促進剤(C)としては、一般にエポキシ樹
脂組成物に用いられるものであればとくに限定なく使用
することができるが、とくに一液型のエポキシ樹脂組成
物の促進剤として使用されるものが好ましい。
The accelerator (C) can be used without any particular limitation as long as it is generally used for an epoxy resin composition. In particular, those used as an accelerator for a one-pack type epoxy resin composition can be used. Is preferred.

【0033】一液型のエポキシ樹脂組成物に使用し得る
促進剤(C)の具体例としては、たとえばイミダゾール
系化合物とエポキシ樹脂とのアダクトからなるノバキュ
アHX3088(商品名)(旭チバ(株)製)、ノバキ
ュアHX3921HP(商品名)(旭チバ(株)製)、
ノバキュアHX3941HP(商品名)(旭チバ(株)
製)、アミキュアMY24(商品名)(味の素(株)
製)、イミダゾール系マイクロゲル型促進剤であるTQ
530(チバ・スペシャルティ・ケミカルズ社製)など
があげられる。これらは単独で用いてもよく、2種以上
を組み合わせて用いてもよい。これらのうちでは貯蔵安
定性と速硬化性の両立の点からノバキュアHX308
8、ノバキュアHX3941HPなどが好ましい。
Specific examples of the accelerator (C) that can be used in the one-pack type epoxy resin composition include, for example, Novacure HX3088 (trade name) comprising an adduct of an imidazole compound and an epoxy resin (Asahi Chiba Corporation) Novacure HX3921HP (trade name) (made by Asahi Ciba Co., Ltd.),
NOVACURE HX3941HP (trade name) (Asahi Chiba Co., Ltd.)
Amicure MY24 (trade name) (Ajinomoto Co., Ltd.)
TQ, an imidazole-based microgel-type accelerator
530 (manufactured by Ciba Specialty Chemicals). These may be used alone or in combination of two or more. Among these, Novacur HX308 is used from the viewpoint of compatibility between storage stability and rapid curing.
8, Novacure HX3941HP and the like are preferable.

【0034】促進剤(C)の使用量は、エポキシ樹脂
(A)100部に対し、有効成分(たとえばイミダゾー
ルなどの有効成分が樹脂やマイクロゲルに分散されてい
る促進剤の場合は、該樹脂やマイクロゲルを除いた成
分)が2〜15部、さらには3〜10部であるのが好ま
しい。15部をこえて使用しても促進効果の向上はな
く、かえって貯蔵安定性がわるくなるなどの好ましくな
い傾向が生じやすくなり、2部より少ないと、充分な促
進効果が得られなくなるなどの傾向が生じやすくなる。
The amount of the accelerator (C) used is based on 100 parts of the epoxy resin (A) and the amount of the active ingredient (for example, in the case of an accelerator in which the active ingredient such as imidazole is dispersed in a resin or microgel, And 2 to 15 parts, and more preferably 3 to 10 parts. Use of more than 15 parts does not improve the accelerating effect, but rather tends to cause undesirable tendencies such as poor storage stability. If the amount is less than 2 parts, the sufficient accelerating effect may not be obtained. Is more likely to occur.

【0035】エポキシ樹脂(A)、酸無水物(B)およ
び促進剤(C)からなるエポキシ樹脂組成物の粘度は、
使用するエポキシ樹脂や酸無水物(B)の種類などによ
り異なるが、従来から使用されている範囲のものであれ
ばよい。
The viscosity of the epoxy resin composition comprising the epoxy resin (A), the acid anhydride (B) and the accelerator (C) is as follows:
Although it depends on the type of the epoxy resin and the acid anhydride (B) to be used, it may be in the range conventionally used.

【0036】前記エポキシ樹脂組成物には、硬化物の熱
膨張係数を小さくする、強度を強くするなどのために、
さらにフィラーを含有させることができる。
The epoxy resin composition contains, in order to reduce the coefficient of thermal expansion of the cured product and to increase the strength,
Further, a filler can be contained.

【0037】前記フィラーとしては、一般にエポキシ樹
脂組成物に使用されるものであればとくに限定なく使用
することができる。
As the filler, any filler that is generally used in an epoxy resin composition can be used without particular limitation.

【0038】前記フィラーの具体例としては、たとえば
溶融シリカ粉末、石英ガラス粉末、結晶シリカ粉末、ガ
ラス繊維、アルミナ粉末、タルクなどがあげられる。こ
れらは単独で用いてもよく、2種以上を組み合わせて用
いてもよい。
Specific examples of the filler include fused silica powder, quartz glass powder, crystalline silica powder, glass fiber, alumina powder, and talc. These may be used alone or in combination of two or more.

【0039】前記フィラーを使用する場合のフィラーの
使用量としては、たとえばLSI封止用樹脂組成物を得
る場合にはなるべく多い方が好ましいが、通常は、組成
物全体中30〜65%、さらには45〜55%である。
When the filler is used, the amount of the filler used is preferably as large as possible when, for example, obtaining a resin composition for LSI encapsulation. Is 45-55%.

【0040】また、本発明のエポキシ樹脂組成物には、
必要に応じて、各種カップリング剤、消泡剤、レベリン
グ剤、低応力化剤、顔料などの添加剤を配合することも
できる。
Further, the epoxy resin composition of the present invention includes:
If necessary, additives such as various coupling agents, defoaming agents, leveling agents, low-stressing agents, and pigments can also be blended.

【0041】前記エポキシ樹脂組成物は、硬化剤として
酸無水物(B)を含有し、硬化促進剤として促進剤
(C)を含有する組成物であるため、200℃以上の高
温下での発泡を抑え、短時間で硬化させることができる
液状の組成物であり、そのままでまたはフィラーなどを
加えることにより、LSI封止用樹脂組成物として好適
に使用することができる。なかでも、生産性向上による
製品の製造コストの低減などの点から、発泡を抑え、短
時間で硬化させることのできる組成物がとくに強く望ま
れているフリップチップなどの実装方法において、とく
に好適に使用することができる。
Since the epoxy resin composition is a composition containing an acid anhydride (B) as a curing agent and an accelerator (C) as a curing accelerator, foaming at a high temperature of 200 ° C. or more is performed. It is a liquid composition which can be cured in a short time, and can be suitably used as it is or by adding a filler or the like as a resin composition for LSI encapsulation. Among them, from the viewpoint of reducing the production cost of products by improving productivity, a composition capable of suppressing foaming and curing in a short time is particularly suitable for a mounting method such as a flip chip in which a strong demand is particularly strong. Can be used.

【0042】以下に、フリップチップ実装を例にとっ
て、本発明エポキシ樹脂組成物をLSIの封止に用いる
場合について説明するが、フリップチップ以外の実装に
も本発明のエポキシ樹脂組成物を使用することができる
ことはいうまでもない。
Hereinafter, the case where the epoxy resin composition of the present invention is used for encapsulating an LSI will be described by taking flip chip mounting as an example. However, the epoxy resin composition of the present invention is also used for mounting other than flip chips. It goes without saying that you can do it.

【0043】本発明のエポキシ樹脂組成物によりLSI
を封止する方法においては、高温・短時間で圧接により
LSIが封止される。そのため生産性があがり、低コス
ト化できる。
An LSI using the epoxy resin composition of the present invention
In the method of sealing the LSI, the LSI is sealed by pressure contact at a high temperature for a short time. Therefore, productivity is increased and cost can be reduced.

【0044】なお、フリップチップ実装では、回路が形
成されている側に端子のあるシリコンチップの該端子に
ハンダ接合部が設けられ、基板上の端子と前記接合部と
が接合され、該接合部と回路がLSI封止用樹脂組成物
で封止される。
In flip-chip mounting, a solder joint is provided at a terminal of a silicon chip having a terminal on the side where a circuit is formed, and the terminal on the substrate is joined to the joint. And the circuit are sealed with the LSI sealing resin composition.

【0045】前記封止用樹脂組成物は、まず、前記基板
上の端子側の面に印刷、ノズルからのディスペンスなど
の方法により、適量が塗布される。前記適量とは、封止
されるLSIの大きさなどにより異なるが、封止を要す
る部分が完全に封止用樹脂組成物で封止され得る最小限
の量でよい。
First, an appropriate amount of the sealing resin composition is applied to the terminal side surface of the substrate by printing, dispensing from a nozzle, or the like. The appropriate amount depends on the size of the LSI to be sealed and the like, but may be the minimum amount that can completely seal the portion requiring sealing with the sealing resin composition.

【0046】前記高温・短時間で圧接するとは、前記封
止用樹脂の塗布された面と被接着(接合)面とを両者が
平行になるように保持したまま接触させ、10〜600
kg/cm2、さらには20〜100kg/cm2の圧力
で、150〜300℃、さらには180〜250℃、と
くには220〜250℃の高温に加熱しながら1〜10
秒、さらには2〜5秒の時間で硬化に至らしめることを
いう。このとき、同時にハンダを溶融させて実装を完了
させてもよい。
The above-mentioned pressing at a high temperature and in a short time means that the surface on which the sealing resin is applied and the surface to be bonded (joined) are brought into contact with each other while keeping them parallel to each other.
While heating to a high temperature of 150 to 300 ° C., further 180 to 250 ° C., particularly 220 to 250 ° C. at a pressure of 20 to 100 kg / cm 2 , more preferably 1 to 10
It means that curing is achieved in seconds, and further in 2 to 5 seconds. At this time, the solder may be melted at the same time to complete the mounting.

【0047】前記加熱の方法としては、とくに限定はな
く、一般に行なわれている加熱方法でよい。たとえば加
圧できるヒーターツールで加熱すればよい。
The heating method is not particularly limited, and a generally used heating method may be used. For example, heating may be performed by a pressurizable heater tool.

【0048】[0048]

【実施例】つぎに、本発明を実施例に基づいてより具体
的に説明するが、本発明はこれらに限定されるものでは
ない。
EXAMPLES Next, the present invention will be described more specifically based on examples, but the present invention is not limited to these examples.

【0049】なお、以下の実施例および比較例で用いた
原料および評価方法を以下にまとめて示す。
The raw materials and evaluation methods used in the following Examples and Comparative Examples are summarized below.

【0050】(エポキシ樹脂) RE310S :ビスフェノールA型エポキシ樹脂
(日本化薬(株)製) EPC830LVP:ビスフェノールF型エポキシ樹脂
(大日本インキ化学工業(株)製) (酸無水物) YH306 :酸無水物(1)(油化シェルエポ
キシ(株)製)。
(Epoxy resin) RE310S: Bisphenol A type epoxy resin (manufactured by Nippon Kayaku Co., Ltd.) EPC830LVP: Bisphenol F type epoxy resin (manufactured by Dainippon Ink and Chemicals, Inc.) (acid anhydride) YH306: acid anhydride Product (1) (manufactured by Yuka Shell Epoxy Co., Ltd.).

【0051】YH307 :酸無水物(1)(油
化シェルエポキシ(株)製)。
YH307: acid anhydride (1) (manufactured by Yuka Shell Epoxy).

【0052】PMDA :ピロメリット酸二無
水物。
PMDA: pyromellitic dianhydride

【0053】EPC B4400:5−(2,5−ジオ
キソテトラヒドロフリル)−3−メチル−3−シクロヘ
キセン−1,2−ジカルボン酸無水物(大日本インキ化
学工業(株)製)。
EPC B4400: 5- (2,5-dioxotetrahydrofuryl) -3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride (manufactured by Dainippon Ink and Chemicals, Inc.).

【0054】HN5500 :無水メチルヘキサヒ
ドロフタル酸(日立化成工業(株)製)。
HN5500: methyl hexahydrophthalic anhydride (manufactured by Hitachi Chemical Co., Ltd.).

【0055】MHAC−P :無水メチルハイミッ
ク酸(日立化成工業(株)製)。
MHAC-P: methylhymic anhydride (manufactured by Hitachi Chemical Co., Ltd.).

【0056】(潜在性硬化促進剤) HX3088 :マイクロカプセル型イミダゾール
系硬化促進剤、有効成分33%(旭チバ(株)製のノバ
キュアHX3088)。
(Latent curing accelerator) HX3088: Microcapsule type imidazole-based curing accelerator, active ingredient 33% (Novacure HX3088 manufactured by Asahi Ciba Co., Ltd.).

【0057】HX3921HP :マイクロカプセル型
イミダゾール系硬化促進剤、有効成分33%(旭チバ
(株)製のノバキュアHX3921HP)。
HX3921HP: Microcapsule type imidazole-based curing accelerator, active ingredient 33% (Novacure HX3921HP manufactured by Asahi Ciba Co., Ltd.).

【0058】HX3941HP :マイクロカプセル型
イミダゾール系硬化促進剤、有効成分33%(旭チバ
(株)製のノバキュアHX3941HP)。
HX3941HP: Microcapsule type imidazole-based curing accelerator, active ingredient 33% (Novacure HX3941HP manufactured by Asahi Ciba Co., Ltd.).

【0059】PN23 :イミダゾールアダク
ト系潜在性硬化剤、有効成分100%(味の素(株)
製)。
PN23: imidazole adduct latent curing agent, active ingredient 100% (Ajinomoto Co., Inc.)
Made).

【0060】(発泡性)所定の組成物を透明なガラス板
(15mm×15mm)上に約10mgはかり取り、所
定の温度に加熱された熱板上に樹脂側を接触させ、目視
でガラスを通して組成物の状態を観察し、発泡の有無を
チェックし、発泡のないものを○、発泡があるものを×
とする。
(Expandability) About 10 mg of the prescribed composition is weighed on a transparent glass plate (15 mm × 15 mm), the resin side is brought into contact with a hot plate heated to a prescribed temperature, and the composition is visually passed through the glass. Observe the condition of the object and check for the presence or absence of foaming.
And

【0061】(硬化時間)前記発泡性の評価を行なう際
に、ガラス板が熱板に固定されるまでの時間を測定す
る。
(Curing time) When the foaming property is evaluated, the time until the glass plate is fixed to the hot plate is measured.

【0062】実施例1〜5および比較例1〜7 表1に示す組成になるように表1記載の原料を配合し、
撹拌機にて均一に混合した。得られた各組成物を真空下
(1〜10mmHg)で充分に脱泡(10分間)したの
ち、発泡性および硬化時間を評価した。
Examples 1 to 5 and Comparative Examples 1 to 7 The raw materials shown in Table 1 were blended so that the compositions shown in Table 1 were obtained.
The mixture was uniformly mixed with a stirrer. After sufficiently defoaming (10 minutes) the obtained compositions under vacuum (1 to 10 mmHg), the foaming property and the curing time were evaluated.

【0063】結果を表2に示す。Table 2 shows the results.

【0064】[0064]

【表1】 [Table 1]

【0065】[0065]

【表2】 [Table 2]

【0066】[0066]

【発明の効果】本発明によれば、200℃以上の高温下
での発泡を抑えることにより、反応速度をあげることが
可能となるエポキシ樹脂組成物を得ることができる。こ
のため従来は不可能であった200℃以上の高温下で短
時間で無発泡の硬化物を得ることができ、LSI封止
用、とくに高温圧接によるLSI封止用樹脂組成物とし
て好適である。
According to the present invention, an epoxy resin composition capable of increasing the reaction rate by suppressing foaming at a high temperature of 200 ° C. or higher can be obtained. For this reason, a non-foamed cured product can be obtained in a short time at a high temperature of 200 ° C. or higher, which was impossible in the past, and is suitable as a resin composition for LSI sealing, particularly for LSI sealing by high-temperature pressure welding. .

フロントページの続き Fターム(参考) 4J002 CD001 CD022 EL136 FD018 FD146 FD157 GQ00 4J036 AA01 AB07 AB09 DA10 DB20 DB21 FA01 HA12 JA07 4M109 AA01 BA04 CA05 CA12 EA02 EA06 EB02 EB04 EB06 EB07 EB08 EB09 EB12 EB13 EB19 EC01 EC05 EC14 EC20 Continued on the front page F term (reference) 4J002 CD001 CD022 EL136 FD018 FD146 FD157 GQ00 4J036 AA01 AB07 AB09 DA10 DB20 DB21 FA01 HA12 JA07 4M109 AA01 BA04 CA05 CA12 EA02 EA06 EB02 EB04 EB06 EB07 EB08 EC05 EB19 EC05

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 (A)エポキシ樹脂、(B)一般式
(1): 【化1】 (式中、R1、R2、R3は、それぞれ水素原子または炭
素数1〜6の炭化水素基を示し、R1、R2、R3は同じ
でも異なっていてもよい、ただし、R1、R2およびR3
の少なくとも1つは水素原子ではない)で表わされる酸
無水物、一般式(1)で表わされる酸無水物中の炭素−
炭素2重結合が水素添加された酸無水物およびピロメリ
ット酸無水物のうちの1種以上および(C)潜在性硬化
促進剤からなるエポキシ樹脂組成物。
(A) an epoxy resin, (B) a general formula (1): (In the formula, R 1 , R 2 , and R 3 each represent a hydrogen atom or a hydrocarbon group having 1 to 6 carbon atoms, and R 1 , R 2 , and R 3 may be the same or different; 1 , R 2 and R 3
At least one of which is not a hydrogen atom), a carbon in the acid anhydride represented by the general formula (1)
An epoxy resin composition comprising one or more of an acid anhydride and a pyromellitic anhydride in which a carbon double bond is hydrogenated and (C) a latent curing accelerator.
【請求項2】 さらに、フィラーを含有する請求項1記
載のエポキシ樹脂組成物。
2. The epoxy resin composition according to claim 1, further comprising a filler.
【請求項3】 請求項1または2記載のエポキシ樹脂組
成物からなるLSI封止用樹脂組成物。
3. An LSI sealing resin composition comprising the epoxy resin composition according to claim 1.
【請求項4】 請求項3記載のLSI封止用樹脂組成物
を用い、高温・短時間圧接によりLSIを封止する方
法。
4. A method for sealing an LSI by using the resin composition for sealing an LSI according to claim 3 by high-temperature and short-time pressure welding.
JP37377898A 1998-12-28 1998-12-28 Epoxy resin composition and method for sealing LSI using the same Expired - Lifetime JP4577536B2 (en)

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