JP2000164743A - High-frequency circuit package - Google Patents

High-frequency circuit package

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Publication number
JP2000164743A
JP2000164743A JP10334654A JP33465498A JP2000164743A JP 2000164743 A JP2000164743 A JP 2000164743A JP 10334654 A JP10334654 A JP 10334654A JP 33465498 A JP33465498 A JP 33465498A JP 2000164743 A JP2000164743 A JP 2000164743A
Authority
JP
Japan
Prior art keywords
conductor
line conductor
frequency circuit
side wall
dielectric substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10334654A
Other languages
Japanese (ja)
Inventor
Katsuyuki Yoshida
克亨 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP10334654A priority Critical patent/JP2000164743A/en
Publication of JP2000164743A publication Critical patent/JP2000164743A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a surface-mount high-frequency circuit package which is equipped with a sidewall line conductor as a signal input/output on the side of a dielectric board and low in reflection and high in transmission properties to high-frequency signals. SOLUTION: A high-frequency circuit package is composed of a dielectric board 1, equipped with a ground conductor layer 2 formed on its underside or inside it and a mounting region 1a, where a high-frequency circuit part 6 is mounted and a line conductor 3 is provided, extending from around the mounting region 1a to the periphery, a dielectric frame 4 jointed to the top surface of the dielectric board 1, and a sidewall line conductor 5 formed on the side of the dielectric board 1 extending continuously from the line conductor 3, where the sidewall line conductor 5 is formed 1/4 or below as long as the wavelength of high-frequency signals. A high-frequency circuit package of this constitution can be lessened in reflection properties and enhanced in transmission properties restraining the sidewall line conductor 5 from increasing in impedance.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、マイクロ波帯また
はミリ波帯の高周波回路部品を搭載して収納するための
高周波回路用パッケージに関し、特に外部電気回路基板
への表面実装に好適な高周波回路用パッケージに関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high frequency circuit package for mounting and housing high frequency circuit components in a microwave band or a millimeter wave band, and more particularly to a high frequency circuit suitable for surface mounting on an external electric circuit board. It is related to a package for use.

【0002】[0002]

【従来の技術】MHz帯やGHz帯の高周波信号を用い
る無線通信機器等の高周波回路あるいは高周波用半導体
素子を収容する高周波回路用パッケージにおいては、パ
ッケージ内部に高周波回路や高周波用半導体素子が収納
されて気密封止され、それら内部の回路や素子と外部の
回路とを電気的に接続して高周波信号の良好な伝送特性
を得るために、線路導体を用いた配線を使用した信号入
出力部が形成される。
2. Description of the Related Art In a high-frequency circuit package for accommodating a high-frequency circuit or a high-frequency semiconductor element such as a wireless communication device using a high-frequency signal in a MHz band or a GHz band, the high-frequency circuit or the high-frequency semiconductor element is accommodated inside the package. In order to obtain good transmission characteristics for high-frequency signals by electrically connecting internal circuits and elements to external circuits, signal input / output units using wiring using line conductors It is formed.

【0003】そのような高周波回路用パッケージにおい
ては、従来は、下面または内部に接地導体層が形成さ
れ、上面に高周波用半導体素子等の高周波回路部品を搭
載する搭載部とこの搭載部近傍から外周に至る高周波信
号伝送用の線路導体とが形成さた誘電体基板と、この誘
電体基板の上面に搭載部を囲むとともに線路導体の一部
を挟んでいわゆるハーメチックシール部を構成するよう
に接合された誘電体枠体とから成り、誘電体基板の側面
に誘電体基板と誘電体枠体との間を通って外周まで形成
された線路導体と連続的に形成されて接続された表面実
装用の側壁線路導体を形成して信号入出力部が構成され
ていた。そして、この高周波回路用パッケージを外部電
気回路に実装し、側壁線路導体を外部電気回路の接続用
導体と電気的に接続することにより、パッケージ内部の
高周波回路部品と外部電気回路とが電気的に接続されて
いた。
Conventionally, in such a package for a high-frequency circuit, a grounding conductor layer is formed on the lower surface or inside, and a mounting portion for mounting a high-frequency circuit component such as a high-frequency semiconductor element on the upper surface and an outer peripheral portion near the mounting portion. A dielectric substrate on which a line conductor for high-frequency signal transmission leading to is formed, is joined to the upper surface of the dielectric substrate so as to surround a mounting portion and form a so-called hermetic seal portion with a part of the line conductor interposed therebetween. For the surface mounting, which is continuously formed and connected to the line conductor formed up to the outer periphery through the dielectric substrate and the dielectric frame on the side surface of the dielectric substrate. A signal input / output unit is formed by forming a side wall line conductor. Then, the high-frequency circuit package is mounted on an external electric circuit, and the side wall line conductor is electrically connected to the connection conductor of the external electric circuit, so that the high-frequency circuit components inside the package and the external electric circuit are electrically connected. Was connected.

【0004】また、側壁線路導体を誘電体基板の側面の
下まで形成し、さらに誘電体基板の下面にこの側壁線路
導体と連続的に同様の線路導体により実装用端子導体を
形成し、実装信頼性を高めることも行なわれていた。
Further, a side wall line conductor is formed up to the side of the dielectric substrate, and a mounting terminal conductor is formed on the lower surface of the dielectric substrate by a line conductor similar to the side wall line conductor. It was also used to enhance sex.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上記の
ような従来の高周波回路用パッケージにおいては、搭載
部近傍から誘電体基板の外周に至る線路導体の先端に、
パッケージの外壁すなわち誘電体枠体の外側で誘電体基
板の側壁において側壁線路導体を接続しているため、こ
れら線路導体と側壁線路導体とによる高周波信号伝送用
の伝送線路において、側壁線路導体の存在によってキャ
パシタンス成分の減少やインダクタンス成分の増大が生
じ、そのために伝送線路が高インピーダンスとなって高
周波信号の反射が増大することとなり、高周波信号の伝
送特性が低下してしまうという問題点があった。特に、
側壁線路導体の長さが長くなった場合にはインピーダン
スの増加が顕著となり、高周波信号の伝送特性が大きく
低下してしまうという問題点があった。
However, in the above-mentioned conventional high-frequency circuit package, the tip of the line conductor extending from the vicinity of the mounting portion to the outer periphery of the dielectric substrate is provided with
Since the side wall line conductor is connected to the outer wall of the package, that is, outside the dielectric frame, on the side wall of the dielectric substrate, the existence of the side wall line conductor in the transmission line for high-frequency signal transmission by these line conductors and the side wall line conductors As a result, a capacitance component is reduced and an inductance component is increased. As a result, the transmission line has a high impedance, and the reflection of a high-frequency signal is increased. As a result, the transmission characteristics of the high-frequency signal are reduced. In particular,
When the length of the side wall line conductor is increased, the impedance is remarkably increased, and there is a problem that the transmission characteristics of a high-frequency signal are significantly reduced.

【0006】本発明は上記従来技術の問題点に鑑みて案
出されたものであり、その目的は、誘電体基板の側面に
表面実装用の信号入出力部として側壁線路導体を有する
表面実装型の高周波回路用パッケージにおいて、高周波
信号に対して低反射特性を有する伝送特性が良好な高周
波回路用パッケージを提供することにある。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and has as its object to provide a surface mount type having a side wall line conductor as a signal input / output unit for surface mount on a side surface of a dielectric substrate. Another object of the present invention is to provide a high-frequency circuit package having low reflection characteristics for high-frequency signals and good transmission characteristics.

【0007】[0007]

【課題を解決するための手段】本発明の高周波回路用パ
ッケージは、下面または内部に接地導体層が形成され、
上面に高周波回路部品を搭載する搭載部とこの搭載部近
傍から外周に至る線路導体とが形成された誘電体基板
と、この誘電体基板の上面に前記搭載部を囲むとともに
前記線路導体の一部を挟んで接合された誘電体枠体と、
前記誘電体基板の側面に前記線路導体と連続的に形成さ
れた側壁線路導体とから成り、この側壁線路導体は、そ
の長さが前記線路導体により伝送される高周波信号の波
長の4分の1以下であることを特徴とするものである。
According to the high frequency circuit package of the present invention, a ground conductor layer is formed on the lower surface or inside thereof.
A dielectric substrate having an upper surface on which a mounting portion for mounting high-frequency circuit components and a line conductor extending from the vicinity of the mounting portion to the outer periphery; and a portion of the line conductor surrounding the mounting portion on the upper surface of the dielectric substrate A dielectric frame joined across the
The liner conductor is formed on a side surface of the dielectric substrate and a side wall line conductor formed continuously, and the length of the side wall line conductor is a quarter of the wavelength of a high frequency signal transmitted by the line conductor. It is characterized by the following.

【0008】また、本発明の高周波回路用パッケージ
は、上記構成において、前記線路導体の両側の前記側壁
線路導体から前記高周波信号の波長の2分の1以下の距
離の位置に、前記誘電体基板の上面から少なくとも前記
接地導体層にかけて接地貫通導体を形成したことを特徴
とするものである。
Further, in the package for a high-frequency circuit according to the present invention, in the above-mentioned structure, the dielectric substrate is located at a distance of not more than half the wavelength of the high-frequency signal from the side wall line conductor on both sides of the line conductor. Wherein a ground through conductor is formed at least from the upper surface to the ground conductor layer.

【0009】さらに、本発明の高周波回路用パッケージ
は、上記各構成において、前記誘電体基板の下面に、実
装用端子導体を前記側壁線路導体と連続的に形成したこ
とを特徴とするものである。
Further, the package for a high-frequency circuit according to the present invention is characterized in that in each of the above structures, a mounting terminal conductor is formed continuously with the side wall line conductor on a lower surface of the dielectric substrate. .

【0010】本発明の高周波回路用パッケージによれ
ば、側壁線路導体は、その長さが高周波回路部品が使用
され線路導体により伝送される高周波信号の波長の4分
の1以下であることから、伝送線路の長さによる損失を
最小限に抑えることが可能であるため、この側壁線路導
体により高周波特性上で問題となるキャパシタンス成分
の減少やインダクタンス成分の増大が生じることがな
く、そのために伝送線路が高インピーダンスとなって高
周波信号の反射が増大して高周波信号の伝送特性が低下
してしまうことがなくなる。
According to the high-frequency circuit package of the present invention, the length of the side-wall line conductor is less than one-fourth of the wavelength of the high-frequency signal transmitted by the line conductor using the high-frequency circuit component. Since the loss due to the length of the transmission line can be minimized, the side wall conductor does not cause a decrease in the capacitance component or an increase in the inductance component, which is a problem in high-frequency characteristics. Does not become high impedance and the reflection of the high-frequency signal increases, so that the transmission characteristic of the high-frequency signal does not deteriorate.

【0011】また、線路導体の両側の側壁線路導体から
高周波信号の波長の2分の1以下の距離の位置に、誘電
体基板の上面から少なくとも接地導体層にかけて接地貫
通導体を形成した場合には、線路導体と接地貫通導体と
の間に適切な容量を持たせることが可能であるため、パ
ッケージの側壁線路導体におけるインピーダンスの不整
合を防ぐことができる。
Further, in the case where the ground through conductor is formed from the upper surface of the dielectric substrate to at least the ground conductor layer at a distance of not more than half the wavelength of the high frequency signal from the side wall line conductor on both sides of the line conductor. Since an appropriate capacitance can be provided between the line conductor and the ground through conductor, impedance mismatch in the side wall line conductor of the package can be prevented.

【0012】さらに、誘電体基板の下面に実装用端子導
体を側壁線路導体と連続的に形成した場合には、外部電
気回路への接続強度を増して実装信頼性を向上させるこ
とができる。
Further, when the mounting terminal conductor is formed continuously with the side wall line conductor on the lower surface of the dielectric substrate, the connection strength to an external electric circuit can be increased and the mounting reliability can be improved.

【0013】[0013]

【発明の実施の形態】以下、本発明の高周波回路用パッ
ケージを図面に基づいて説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS A high-frequency circuit package according to the present invention will be described below with reference to the drawings.

【0014】図1(a)および(b)は、それぞれ本発
明の高周波回路用パッケージの実施の形態の一例を示す
要部断面図および要部平面図である。図1において、1
は誘電体基板、1aはその上面に形成された搭載部、2
は誘電体基板1の内部に形成された接地導体層である。
なお、この例では誘電体基板1の上面中央部に凹部を形
成してその凹部に搭載部1aを設けているが、誘電体基
板1を平板状としてその上面に搭載部1aを形成しても
よい。
FIGS. 1A and 1B are a sectional view and a plan view, respectively, showing an example of an embodiment of a high-frequency circuit package according to the present invention. In FIG. 1, 1
Is a dielectric substrate, 1a is a mounting portion formed on the upper surface thereof, 2a
Is a ground conductor layer formed inside the dielectric substrate 1.
In this example, a concave portion is formed in the center of the upper surface of the dielectric substrate 1 and the mounting portion 1a is provided in the concave portion. However, the mounting portion 1a may be formed on the upper surface of the dielectric substrate 1 in a flat plate shape. Good.

【0015】3は誘電体基板1の上面に搭載部1a近傍
から外周に至るように形成された高周波信号伝送用の線
路導体であり、必要に応じて複数本あるいは誘電体基板
1の種々の方向に向けて形成される。このような線路導
体3と誘電体基板1・接地導体層2とにより、マイクロ
ストリップ線路構造の伝送線路が構成される。また、線
路導体3の両側に同一面接地導体を設けて、コプレーナ
線路構造の伝送線路としてもよい。
Reference numeral 3 denotes a line conductor for high-frequency signal transmission formed on the upper surface of the dielectric substrate 1 from the vicinity of the mounting portion 1a to the outer periphery, and a plurality of line conductors or various directions of the dielectric substrate 1 as necessary. Formed toward. Such a line conductor 3, the dielectric substrate 1 and the ground conductor layer 2 constitute a transmission line having a microstrip line structure. Further, a coplanar line transmission line may be provided by providing ground conductors on the same plane on both sides of the line conductor 3.

【0016】4は誘電体基板1の上面に搭載部1aを囲
むとともに線路導体3の一部を挟んで接合された誘電体
枠体であり、この誘電体枠体4と誘電体基板1とにより
パッケージ本体の容器が構成され、この上面に蓋体(図
示せず)を接合することにより内部が気密に封止され
る。また、これにより信号入出力部としてのいわゆるハ
ーメチックシール部が構成されることとなる。なお、高
周波回路用パッケージの仕様によっては、蓋体を使用せ
ず封止樹脂により高周波回路部品6を封止してもよい。
Reference numeral 4 denotes a dielectric frame which is mounted on the upper surface of the dielectric substrate 1 and surrounds the mounting portion 1a and is joined with a part of the line conductor 3 interposed between the dielectric frame 4 and the dielectric substrate 1. A container of the package body is formed, and the inside is hermetically sealed by joining a lid (not shown) to the upper surface. In addition, a so-called hermetic seal portion as a signal input / output portion is formed. Note that, depending on the specifications of the high-frequency circuit package, the high-frequency circuit component 6 may be sealed with a sealing resin without using the lid.

【0017】5は誘電体基板1の側面に線路導体3と連
続的に形成された側壁線路導体であり、外部電気回路
(図示せず)の接続用用導体と電気的に接続することに
より、パッケージ内部の高周波回路部品6と外部電気回
路とが電気的に接続される。
Reference numeral 5 denotes a side wall line conductor formed continuously on the side surface of the dielectric substrate 1 with the line conductor 3, and is electrically connected to a connection conductor of an external electric circuit (not shown). The high-frequency circuit component 6 inside the package and the external electric circuit are electrically connected.

【0018】6は搭載部1aに搭載される高周波用半導
体素子や高周波回路等の高周波回路部品であり、線路導
体3とは図示しないワイヤボンディングやリボンボンデ
ィングあるいはいわゆるバンプ接続により電気的に接続
される。
Reference numeral 6 denotes a high-frequency circuit component such as a high-frequency semiconductor element or a high-frequency circuit mounted on the mounting portion 1a, and is electrically connected to the line conductor 3 by wire bonding or ribbon bonding (not shown) or so-called bump connection. .

【0019】7は誘電体基板1の下面に側壁線路導体5
と連続的に形成された実装用端子導体であり、主に実装
信頼性を高める目的でパッケージの仕様に基づき必要に
応じて形成される。なお、このように実装用端子導体7
を形成する場合には接地導体層2は誘電体基板1の内部
に形成されることとなるが、実装用端子導体7を形成し
ない場合には接地導体層2は誘電体基板1の下面に被着
形成してもよい。また、接地導体層2と側壁線路導体5
および実装用端子導体7との間は、電気的な絶縁が確保
でき、高周波特性に悪影響を与えない距離が設けられて
いればよい。
Reference numeral 7 denotes a side wall line conductor 5 on the lower surface of the dielectric substrate 1.
The mounting terminal conductor is formed continuously as described above, and is formed as necessary based on the specifications of the package, mainly for the purpose of improving mounting reliability. Note that, as described above, the mounting terminal conductor 7 is used.
When the terminal conductor 7 is formed, the ground conductor layer 2 is formed inside the dielectric substrate 1. However, when the mounting terminal conductor 7 is not formed, the ground conductor layer 2 is covered on the lower surface of the dielectric substrate 1. It may be formed. Also, the ground conductor layer 2 and the side wall line conductor 5
It is sufficient that electrical insulation is provided between the mounting terminal conductor 7 and a distance that does not adversely affect high-frequency characteristics.

【0020】なお、線路導体3および実装用端子導体7
は、それぞれ誘電体基板1の比誘電率εr の値に応じ
て、特性インピーダンスZ0 を所望の値とするようにそ
の幅や長さが設定される。実装用端子導体7の形状は、
線路導体3と同じ形状に限られず、実装用端子として好
適な種々の形状、例えば誘電体基板1上のメタライズの
みならず、リードやワイヤ等の媒体とすることもでき
る。
The line conductor 3 and the mounting terminal conductor 7
The width and length are set so that the characteristic impedance Z 0 has a desired value according to the value of the relative dielectric constant ε r of the dielectric substrate 1. The shape of the mounting terminal conductor 7 is
The shape is not limited to the same shape as the line conductor 3 and may be various shapes suitable for mounting terminals, for example, not only metallization on the dielectric substrate 1 but also media such as leads and wires.

【0021】そして、本発明の高周波回路用パッケージ
においては、側壁線路導体5の長さを、高周波回路部品
6が使用され線路導体3により伝送される高周波信号の
波長の4分の1以下としたことが特徴である。これによ
り、伝送線路の長さによる損失を最小限に抑えることが
可能であるため、この側壁線路導体により高周波特性上
で問題となるキャパシタンス成分の減少やインダクタン
ス成分の増大が生じることがなく、そのために伝送線路
が高インピーダンスとなって高周波信号の反射が増大し
て高周波信号の伝送特性が低下してしまうことがなくな
る。このような作用効果は、特に高周波信号の周波数が
10GHz以上の場合に特に効果的なものである。中で
も、周波数が30GHz以上の高周波信号に対しては、側
壁線路導体5の長さをその高周波信号の波長の8分の1
以下とすることにより、そのようなより高周波の領域に
おいてもインピーダンスの増加を有効に抑制することが
でき、低反射特性を有する良好な高周波特性の高周波回
路用パッケージとなる。
In the high-frequency circuit package according to the present invention, the length of the side wall line conductor 5 is set to not more than の of the wavelength of the high-frequency signal transmitted by the line conductor 3 using the high-frequency circuit component 6. It is characteristic. As a result, it is possible to minimize the loss due to the length of the transmission line, so that the sidewall component does not cause a decrease in the capacitance component or an increase in the inductance component, which is a problem in the high-frequency characteristics. In addition, it is possible to prevent the transmission line from becoming high impedance, increasing the reflection of the high-frequency signal and deteriorating the transmission characteristics of the high-frequency signal. This effect is particularly noticeable when the frequency of the high-frequency signal is
This is particularly effective when the frequency is 10 GHz or higher. In particular, for a high-frequency signal having a frequency of 30 GHz or more, the length of the side wall line conductor 5 is set to 8 of the wavelength of the high-frequency signal.
By the following, an increase in impedance can be effectively suppressed even in such a higher frequency region, and a high-frequency circuit package having good high-frequency characteristics and low reflection characteristics can be obtained.

【0022】このような側壁線路導体5は、通常は誘電
体基板1の側面の長さ(側壁の高さ)とほぼ同じ長さに
設定されることとなるが、実装用端子導体7を形成しな
い場合には、誘電体基板1の側面の長さより短いものと
して誘電体基板1の側面に形成してもよい。これによ
り、誘電体基板1に必要な強度と高周波信号伝送用の伝
送線路に必要な高周波特性とをともに確保して、信頼性
に優れた高周波回路用パッケージとすることができる。
Such a side wall line conductor 5 is usually set to a length substantially equal to the length of the side surface (the height of the side wall) of the dielectric substrate 1, but the mounting terminal conductor 7 is formed. Otherwise, it may be formed on the side surface of the dielectric substrate 1 as shorter than the length of the side surface of the dielectric substrate 1. Thereby, both the strength required for the dielectric substrate 1 and the high-frequency characteristics required for the transmission line for transmitting a high-frequency signal are ensured, and a highly reliable high-frequency circuit package can be obtained.

【0023】次に、本発明の高周波回路用パッケージの
実施の形態の他の例を図2(a)および(b)に図1と
同様の要部断面図および要部平面図で示す。
Next, another embodiment of the high-frequency circuit package according to the present invention will be described with reference to FIGS. 2A and 2B which are a cross-sectional view and a plan view of a main part similar to FIG.

【0024】図2において図1と同様の箇所には同じ符
号を付してあり、8は、線路導体3の両側の側壁線路導
体5から高周波信号の波長の2分の1以下の距離の位置
に、誘電体基板1の上面から少なくとも接地導体層2に
かけて形成した接地貫通導体である。この接地貫通導体
8は、図2に示すように、接地導体層2が誘電体基板1
の内部に形成されている場合にはその接地導体層2から
誘電体基板1の上面にかけて形成しておけばよいが、同
図(a)中に破線で示すように誘電体基板1の下面にま
で延長しておいてもよい。接地導体層2が誘電体基板1
の下面に形成されている場合には、接地貫通導体8は誘
電体基板1を下面から上面まで貫通して設けられること
となる。
In FIG. 2, the same parts as those in FIG. 1 are denoted by the same reference numerals, and 8 is a position at a distance of not more than half the wavelength of the high frequency signal from the side wall line conductor 5 on both sides of the line conductor 3. A ground through conductor formed from the upper surface of the dielectric substrate 1 to at least the ground conductor layer 2. As shown in FIG. 2, the ground through conductor 8 has a structure in which the ground conductor layer 2 is formed on the dielectric substrate 1.
Is formed from the ground conductor layer 2 to the upper surface of the dielectric substrate 1, but is formed on the lower surface of the dielectric substrate 1 as shown by a broken line in FIG. It may be extended to. Ground conductor layer 2 is a dielectric substrate 1
Is formed on the lower surface of the dielectric substrate 1, the ground through conductor 8 is provided to penetrate the dielectric substrate 1 from the lower surface to the upper surface.

【0025】また、接地貫通導体8と線路導体3との距
離は、側壁線路導体5から図2(b)中に一点鎖線で示
す高周波信号の波長の2分の1以下の距離の範囲内で、
線路導体3に対して高周波特性に悪影響を与えず、かつ
特性インピーダンスZ0 が不整合にならない位置に設定
すればよい。
The distance between the ground through conductor 8 and the line conductor 3 is within a range of a half or less of the wavelength of the high-frequency signal indicated by a dashed line in FIG. ,
What is necessary is just to set it to the position which does not adversely affect the high-frequency characteristics to the line conductor 3 and does not cause the characteristic impedance Z 0 to be mismatched.

【0026】さらに、接地貫通導体8は線路導体3の両
側にそれぞれ複数本形成してもよく、誘電体基板1の上
面において線路導体3の両側にいわゆるコプレーナ線路
構造を構成するように同一面接地導体を設けておき、こ
れらと接地貫通導体8とを接続するようにしてもよい。
Further, a plurality of ground through conductors 8 may be formed on both sides of the line conductor 3, respectively, and the same plane grounding may be formed on both sides of the line conductor 3 on the upper surface of the dielectric substrate 1 so as to form a so-called coplanar line structure. Conductors may be provided, and these may be connected to the ground through conductor 8.

【0027】このような接地貫通導体8を形成すること
により、高インピーダンスの側壁線路導体5に対して容
量成分を補うことが可能であるため、パッケージの側壁
線路導体におけるインピーダンスの不整合を防ぐことが
できる。その結果、高周波回路部品6と外部電気回路と
の間の電気的接続におけるインピーダンスのミスマッチ
ングを効果的に抑えて高周波信号の伝送特性の劣化を抑
えることができ、さらに低反射損失の高周波回路用パッ
ケージとすることができる。
By forming such a grounding through conductor 8, it is possible to supplement a capacitance component to the high impedance side wall line conductor 5, so that impedance mismatch in the side wall line conductor of the package can be prevented. Can be. As a result, it is possible to effectively suppress the impedance mismatching in the electrical connection between the high-frequency circuit component 6 and the external electric circuit, to suppress the deterioration of the transmission characteristics of the high-frequency signal, and to reduce the reflection loss of the high-frequency circuit. Can be packaged.

【0028】この接地貫通導体8はスルーホール導体や
ビア導体等により形成すればよく、その位置は、線路導
体3に対して平行に、高周波信号の波長の4分の1以下
の間隔を保って設定すればよい。
The ground through conductor 8 may be formed of a through-hole conductor, a via conductor, or the like. The position of the through conductor 8 is parallel to the line conductor 3 and is spaced from the line conductor 3 by a quarter or less of the wavelength of the high-frequency signal. Just set it.

【0029】本発明の高周波回路用パッケージにおける
誘電体基板1には、例えばアルミナセラミックスや窒化
アルミニウムセラミックス等のセラミックス材料あるい
はガラスセラミックス等の無機系材料、またはPTFE
(ポリテトラフルオロエチレン)・ガラスエポキシ・ポ
リイミド等の樹脂系材料等を用いればよい。例えばガラ
スセラミックスから成る場合であれば、ガラスセラミッ
クスのグリーンシートに必要に応じて凹部や貫通導体と
なる貫通孔を形成し、所定の箇所に接地導体層2・線路
導体3・側壁線路導体5や実装用端子導体7・接地貫通
導体8となる金属ペーストを印刷塗布・充填して、これ
らのグリーンシートを上下に積層して約1000℃で一体焼
成することにより製作すればよい。
The dielectric substrate 1 in the high-frequency circuit package according to the present invention is made of, for example, a ceramic material such as alumina ceramics or aluminum nitride ceramics, an inorganic material such as glass ceramics, or PTFE.
A resin material such as (polytetrafluoroethylene), glass epoxy, or polyimide may be used. For example, in the case of a glass ceramic, a concave portion or a through hole serving as a through conductor is formed in a green sheet of the glass ceramic as needed, and a ground conductor layer 2, a line conductor 3, a side wall line conductor 5, It may be manufactured by printing and filling a metal paste to become the mounting terminal conductor 7 and the ground through conductor 8, laminating these green sheets up and down, and integrally firing at about 1000 ° C.

【0030】あるいは、焼成された誘電体基板1の上面
・側面・下面に種々の薄膜法や印刷・焼成法により所定
パターンの接地導体層2・線路導体3・側壁線路導体5
・実装用端子導体7を形成し、接地貫通導体8を形成し
てもよい。
Alternatively, the ground conductor layer 2, the line conductor 3, and the side wall line conductor 5 having a predetermined pattern are formed on the upper surface, side surfaces, and lower surface of the fired dielectric substrate 1 by various thin film methods or printing and firing methods.
The mounting terminal conductor 7 may be formed, and the ground through conductor 8 may be formed.

【0031】接地導体層2・線路導体3・側壁線路導体
5・実装用端子導体7および接地貫通導体8を形成する
ための導体としては、タングステンや銅・ニッケル・金
・クロム・ニクロム・窒化タンタル・チタン・パラジウ
ムおよびこれらの合金等を用いればよく、その形成は、
種々の薄膜法や薄膜法とフォトリソグラフィ法との組合
せ、あるいは印刷・焼成法等によればよい。
The conductor for forming the ground conductor layer 2, the line conductor 3, the side wall line conductor 5, the mounting terminal conductor 7, and the ground through conductor 8 is tungsten, copper, nickel, gold, chrome, nichrome, tantalum nitride.・ Titanium / palladium and their alloys may be used, and their formation is
Various thin film methods, a combination of a thin film method and a photolithography method, or a printing / firing method may be used.

【0032】[0032]

【実施例】〔例1〕図1に示した本発明の高周波回路用
パッケージとして、内部に接地導体層2を形成した比誘
電率εr が9の誘電体基板1の上面に、搭載部1a近傍
から誘電体枠体4の手前までで線路幅が150 μm・同一
面接地導体との間隔が100 μmであり、誘電体基板1と
εr が9で高さが300 μmの誘電体枠体4との間で線路
幅が80μm・同一面接地導体との間隔が135 μmである
コプレーナ線路構造の線路導体3を形成した。また、誘
電体基板1の側面に線路幅が150 μmの側壁線路導体5
を誘電体基板1の外周において線路導体3と連続的に、
その長さを変えたものをいくつか作製した。
EXAMPLE 1 As a high-frequency circuit package of the present invention shown in FIG. 1, a mounting portion 1a is formed on an upper surface of a dielectric substrate 1 having a grounding conductor layer 2 formed therein and having a relative dielectric constant .di- elect cons. A dielectric frame having a line width of 150 μm, a distance of 100 μm from the ground conductor on the same plane, a dielectric substrate 1 and ε r of 9 and a height of 300 μm from the vicinity to the front of the dielectric frame 4. A line conductor 3 having a coplanar line structure having a line width of 80 μm and an interval of 135 μm with the ground conductor on the same plane was formed between the line conductors 3 and 4. Also, a side wall line conductor 5 having a line width of 150 μm is formed on the side surface of the dielectric substrate 1.
Is continuously formed on the outer periphery of the dielectric substrate 1 with the line conductor 3,
Several different lengths were made.

【0033】そして、側壁線路導体5の長さを変えたと
きの30GHzの高周波信号に対する反射特性を解析した
ところ、図3に示すような結果を得た。図3は側壁線路
導体5の長さに対する高周波信号の反射損失の変化を示
す線図であり、横軸は側壁線路導体5の長さを、縦軸は
反射損失の大きさ(単位:dB)を表わし、図中の白丸
は解析値を、実線は特性曲線を示している。
Then, when the reflection characteristics for a high frequency signal of 30 GHz when the length of the side wall line conductor 5 was changed were analyzed, the results shown in FIG. 3 were obtained. FIG. 3 is a diagram showing a change in the reflection loss of the high-frequency signal with respect to the length of the side wall line conductor 5. The horizontal axis represents the length of the side wall line conductor 5, and the vertical axis represents the magnitude of the reflection loss (unit: dB). In the figure, open circles indicate analysis values, and solid lines indicate characteristic curves.

【0034】図3から分かるように、側壁線路導体5の
長さをλ/4以下とすることにより、反射損失は高周波
回路用パッケージとして実用的な−10dB以下の小さな
値に抑えられる。特に、側壁線路導体5の長さをλ/8
以下とすることにより、反射損失は−15dBを下回る非
常に小さな値に抑えられ、良好な反射特性を有すること
が分かる。
As can be seen from FIG. 3, by setting the length of the side wall line conductor 5 to λ / 4 or less, the reflection loss can be suppressed to a small value of -10 dB or less which is practical for a high-frequency circuit package. In particular, the length of the side wall line conductor 5 is set to λ / 8.
By setting the values as follows, it is understood that the reflection loss is suppressed to a very small value of less than -15 dB, and that good reflection characteristics are obtained.

【0035】〔例2〕〔例1〕と同様の高周波回路用パ
ッケージにおいて、図2に示した本発明の高周波回路用
パッケージとして、誘電体基板1にεr が9.9 ・8.6 お
よび5.7 のものを用い、線路導体3の両側の側壁線路導
体5から高周波信号の波長の2分の1以下の距離の位置
に、直径が0.2 mmの接地貫通導体8の位置を変えて形
成したものをいくつか作製した。
Example 2 In the same high-frequency circuit package as in [Example 1], the dielectric substrate 1 having ε r of 9.9 · 8.6 and 5.7 as the high-frequency circuit package of the present invention shown in FIG. Several grounding conductors 8 each having a diameter of 0.2 mm were formed at a distance of less than half the wavelength of the high-frequency signal from the side wall line conductors 5 on both sides of the line conductors 3. did.

【0036】そして、それらについて接地貫通導体8の
位置による側壁線路導体5の特性インピーダンスの変化
を解析したところ、図4に示すような結果を得た。図4
は側壁線路導体5からの接地貫通導体8の距離に対する
側壁線路導体5の特性インピーダンスの変化を示す線図
であり、横軸は側壁線路導体5からの接地貫通導体8の
距離(単位:mm)を、縦軸は特性インピーダンス(単
位:Ω)を表わし、図中の特性曲線は、一点鎖線・破線
および実線がそれぞれεr が9.9 ・8.6 および5.7 の誘
電体基板1における結果を示している。なお、これらの
側壁線路導体5と接地貫通導体8との距離は0.4 mmか
ら1.0 mmの間で変えており、この距離は、60GHz程
度の信号の伝送波長の2分の1以下に相当する。
Then, when a change in the characteristic impedance of the side wall line conductor 5 depending on the position of the ground through conductor 8 was analyzed, a result as shown in FIG. 4 was obtained. FIG.
Is a diagram showing the change of the characteristic impedance of the side wall line conductor 5 with respect to the distance of the ground line conductor 5 from the side wall line conductor 5, and the horizontal axis is the distance (unit: mm) of the ground line conductor 5 from the side wall line conductor 5. The vertical axis represents the characteristic impedance (unit: Ω), and the characteristic curve in the figure shows the results for the dielectric substrate 1 with ε r of 9.9 · 8.6 and 5.7, respectively, with the dashed line, the broken line, and the solid line. Note that the distance between the side wall line conductor 5 and the ground through conductor 8 is changed between 0.4 mm and 1.0 mm, and this distance corresponds to a half or less of the transmission wavelength of a signal of about 60 GHz.

【0037】図4から分かるように、側壁線路導体5か
ら高周波信号の波長の2分の1以下の距離に接地貫通導
体8を設けることで、インピーダンスの不整合を防ぎ、
また、不連続部分に発生する高次モードを抑えることが
できた。
As can be seen from FIG. 4, by providing the ground through conductor 8 at a distance of one half or less of the wavelength of the high frequency signal from the side wall line conductor 5, impedance mismatch can be prevented.
In addition, higher-order modes generated in discontinuous portions could be suppressed.

【0038】〔例3〕〔例1〕と同様の高周波回路用パ
ッケージにおいて、誘電体基板1の厚みを600 μmとす
ることで、側壁線路導体5の長さを30GHzにおける高
周波信号の波長の4分の1以下にし、また、側壁線路導
体5の端から1mmの距離で2本の接地貫通導体8を配
置した。これにより、本発明の高周波回路用パッケージ
の試料Aを得た。
Example 3 In the same high-frequency circuit package as in Example 1, by setting the thickness of the dielectric substrate 1 to 600 μm, the length of the side wall line conductor 5 was set to 4 times the wavelength of the high-frequency signal at 30 GHz. Two ground through conductors 8 were arranged at a distance of 1 mm from the end of the side wall line conductor 5. Thus, a sample A of the high-frequency circuit package of the present invention was obtained.

【0039】また、試料Aに対して2本の接地貫通導体
8を除いたパッケージを作製することにより、比較例と
しての従来の高周波回路用パッケージの試料Bを得た。
Further, a package was prepared by removing the two ground through conductors 8 from the sample A, thereby obtaining a conventional high frequency circuit package sample B as a comparative example.

【0040】これら試料A・Bについて、3次元構造解
析シミュレータ(HFSS)により、Sパラメータの周
波数特性を得た。
For these samples A and B, frequency characteristics of S parameters were obtained by a three-dimensional structural analysis simulator (HFSS).

【0041】その結果を図5に示す。図5はSパラメー
タの周波数特性を示す線図であり、横軸は周波数(単
位:GHz)を、縦軸は反射係数または透過係数(単
位:dB)を表わし、図中の実線はそれぞれ試料A・B
のS11についての特性曲線を、破線はそれぞれ試料A・
BのS12についての特性曲線を示している。
FIG. 5 shows the result. FIG. 5 is a graph showing the frequency characteristics of the S parameter. The horizontal axis represents the frequency (unit: GHz), the vertical axis represents the reflection coefficient or the transmission coefficient (unit: dB), and the solid lines in the figure represent the sample A, respectively.・ B
The characteristic curve for the S 11, dashed line sample A · respectively
Shows the characteristic curve for S 12 of B.

【0042】図5より分かるように、試料Aにおいて
は、側壁線路導体5から高周波信号の波長の2分の1以
下の距離の位置に接地貫通導体8を設けたため、側壁線
路導体5のインピーダンスの不整合を防ぐことができ、
試料Bと比べて良好な伝送特性になった。
As can be seen from FIG. 5, in the sample A, the ground through conductor 8 was provided at a distance of less than half the wavelength of the high frequency signal from the side wall line conductor 5, so that the impedance of the side wall line conductor 5 was reduced. Can prevent inconsistencies,
Good transmission characteristics were obtained as compared with Sample B.

【0043】以上の結果より、本発明の高周波回路用パ
ッケージによれば、誘電体基板の側面に表面実装用の信
号入出力部として側壁線路導体を有する表面実装型の高
周波回路用パッケージにおいて、高周波帯においても低
反射な良好な伝送特性を有するものであることが確認で
きた。
From the above results, according to the high-frequency circuit package of the present invention, in the surface-mount type high-frequency circuit package having the side wall conductor as the surface-mount signal input / output portion on the side surface of the dielectric substrate, It was confirmed that the band also had good transmission characteristics with low reflection in the band.

【0044】なお、本発明は以上の例に限定されるもの
ではなく、本発明の要旨を逸脱しない範囲で種々の変更
・改良を加えることは何ら差し支えない。
It should be noted that the present invention is not limited to the above examples, and various changes and improvements can be made without departing from the spirit of the present invention.

【0045】[0045]

【発明の効果】本発明の高周波回路用パッケージによれ
ば、誘電体基板の側面に表面実装用の信号入出力部とし
て側壁線路導体を有する表面実装型の高周波回路用パッ
ケージにおいて、側壁線路導体の長さを高周波回路部品
が使用され線路導体により伝送される高周波信号の波長
の4分の1以下としたことから、この側壁線路導体によ
り高周波特性上で問題となるキャパシタンス成分の減少
やインダクタンス成分の増大が生じることがなく、その
結果、伝送線路が高インピーダンスとなって高周波信号
の反射が増大して高周波信号の伝送特性が低下すること
を抑えることができる。
According to the high-frequency circuit package of the present invention, in a surface-mount type high-frequency circuit package having a side-wall line conductor as a surface-mounting signal input / output portion on the side surface of the dielectric substrate, Since the length is less than one-fourth of the wavelength of the high-frequency signal transmitted by the line conductor using the high-frequency circuit component, the side-wall line conductor reduces the capacitance component and the inductance component that are problematic in the high-frequency characteristics. The increase does not occur, and as a result, it is possible to suppress the transmission line from becoming high impedance, increasing the reflection of the high-frequency signal and reducing the transmission characteristics of the high-frequency signal.

【0046】また、線路導体の両側の側壁線路導体から
高周波信号の波長の2分の1以下の距離の位置に、誘電
体基板の上面から少なくとも接地導体層にかけて接地貫
通導体を形成した場合には、パッケージの側壁線路導体
におけるインピーダンスの不整合を防ぐことができ、高
周波回路部品と外部電気回路との間の電気的接続におけ
るインピーダンスのミスマッチングを効果的に抑えて高
周波信号の伝送特性の劣化を抑えることができ、さらに
低反射損失の高周波回路用パッケージとすることができ
る。
Further, in the case where the ground through conductor is formed from the upper surface of the dielectric substrate to at least the ground conductor layer at a distance of not more than half the wavelength of the high frequency signal from the side wall conductor on both sides of the line conductor. In addition, it is possible to prevent the impedance mismatch in the side wall conductor of the package, effectively suppress the impedance mismatch in the electrical connection between the high-frequency circuit component and the external electric circuit, and reduce the deterioration of the transmission characteristic of the high-frequency signal. Thus, a high-frequency circuit package with low reflection loss can be obtained.

【0047】さらに、誘電体基板の下面に実装用端子導
体を側壁線路導体と連続的に形成した場合には、外部電
気回路への接続強度を増して実装信頼性を向上させるこ
とができる。
Further, when the mounting terminal conductor is formed continuously on the lower surface of the dielectric substrate and the side wall line conductor, the connection strength to the external electric circuit can be increased, and the mounting reliability can be improved.

【0048】以上のように、本発明によれば、誘電体基
板の側面に表面実装用の信号入出力部として側壁線路導
体を有する表面実装型の高周波回路用パッケージにおい
て、高周波信号に対して低反射特性を有する伝送特性が
良好な高周波回路用パッケージを提供することができ
た。
As described above, according to the present invention, in a surface mount type high frequency circuit package having side wall conductors as signal input / output portions for surface mount on the side surfaces of a dielectric substrate, a low level against a high frequency signal is obtained. It was possible to provide a high-frequency circuit package having reflection characteristics and good transmission characteristics.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)および(b)は、それぞれ本発明の高周
波回路用パッケージの実施の形態の一例を示す要部断面
図および要部平面図である。
FIGS. 1 (a) and 1 (b) are a cross-sectional view and a plan view, respectively, showing an example of an embodiment of a high-frequency circuit package according to the present invention.

【図2】(a)および(b)は、それぞれ本発明の高周
波回路用パッケージの実施の形態の他の例を示す要部断
面図および要部平面図である。
FIGS. 2 (a) and 2 (b) are a cross-sectional view and a plan view, respectively, showing another example of a high-frequency circuit package according to another embodiment of the present invention.

【図3】本発明の高周波回路用パッケージにおける側壁
線路導体の長さに対する高周波信号の反射損失の変化を
示す線図である。
FIG. 3 is a diagram showing a change in reflection loss of a high-frequency signal with respect to the length of a side wall line conductor in the high-frequency circuit package of the present invention.

【図4】本発明の高周波回路用パッケージにおける接地
貫通導体の位置に対する側壁線路導体の特性インピーダ
ンスの変化を示す線図である。
FIG. 4 is a diagram showing a change in characteristic impedance of a side wall line conductor with respect to a position of a ground through conductor in a high-frequency circuit package of the present invention.

【図5】高周波回路用パッケージにおけるSパラメータ
の周波数特性を示す線図である。
FIG. 5 is a diagram showing frequency characteristics of S parameters in a high-frequency circuit package.

【符号の説明】 1・・・・・誘電体基板 1a・・・・搭載部 2・・・・・接地導体層 3・・・・・線路導体 4・・・・・誘電体枠体 5・・・・・側壁線路導体 6・・・・・高周波回路部品 7・・・・・実装用端子導体 8・・・・・接地貫通導体[Description of Signs] 1 ... Dielectric substrate 1a ... Mounting part 2 ... Ground conductor layer 3 ... Line conductor 4 ... Dielectric frame 5 ... ····· Side-wall line conductor 6 ···· High-frequency circuit components 7 ···· Terminal conductor for mounting 8 ···· Ground-through conductor

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 下面または内部に接地導体層が形成さ
れ、上面に高周波回路部品を搭載する搭載部と該搭載部
近傍から外周に至る線路導体とが形成された誘電体基板
と、該誘電体基板の上面に前記搭載部を囲むとともに前
記線路導体の一部を挟んで接合された誘電体枠体と、前
記誘電体基板の側面に前記線路導体と連続的に形成され
た側壁線路導体とから成り、該側壁線路導体は、その長
さが前記線路導体により伝送される高周波信号の波長の
4分の1以下であることを特徴とする高周波回路用パッ
ケージ。
A dielectric substrate having a ground conductor layer formed on a lower surface or inside thereof, a mounting portion for mounting a high-frequency circuit component on an upper surface, and a line conductor extending from the vicinity of the mounting portion to the outer periphery; A dielectric frame body surrounding the mounting portion on the upper surface of the substrate and joined with a part of the line conductor sandwiched therebetween, and a side wall line conductor formed continuously with the line conductor on a side surface of the dielectric substrate. The side wall line conductor has a length that is equal to or less than a quarter of the wavelength of a high frequency signal transmitted by the line conductor.
【請求項2】 前記線路導体の両側の前記側壁線路導体
から前記高周波信号の波長の2分の1以下の距離の位置
に、前記誘電体基板の上面から少なくとも前記接地導体
層にかけて接地貫通導体を形成したことを特徴とする請
求項1記載の高周波回路用パッケージ。
2. A ground through conductor extending from the upper surface of the dielectric substrate to at least the ground conductor layer at a distance of not more than half the wavelength of the high frequency signal from the side wall line conductor on both sides of the line conductor. The high frequency circuit package according to claim 1, wherein the package is formed.
【請求項3】 前記誘電体基板の下面に、実装用端子導
体を前記側壁線路導体と連続的に形成したことを特徴と
する請求項1または請求項2記載の高周波回路用パッケ
ージ。
3. The high-frequency circuit package according to claim 1, wherein a mounting terminal conductor is formed continuously with the side wall line conductor on a lower surface of the dielectric substrate.
JP10334654A 1998-11-25 1998-11-25 High-frequency circuit package Pending JP2000164743A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10334654A JP2000164743A (en) 1998-11-25 1998-11-25 High-frequency circuit package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10334654A JP2000164743A (en) 1998-11-25 1998-11-25 High-frequency circuit package

Publications (1)

Publication Number Publication Date
JP2000164743A true JP2000164743A (en) 2000-06-16

Family

ID=18279783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10334654A Pending JP2000164743A (en) 1998-11-25 1998-11-25 High-frequency circuit package

Country Status (1)

Country Link
JP (1) JP2000164743A (en)

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