JP2000162134A5 - - Google Patents

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Publication number
JP2000162134A5
JP2000162134A5 JP1998341505A JP34150598A JP2000162134A5 JP 2000162134 A5 JP2000162134 A5 JP 2000162134A5 JP 1998341505 A JP1998341505 A JP 1998341505A JP 34150598 A JP34150598 A JP 34150598A JP 2000162134 A5 JP2000162134 A5 JP 2000162134A5
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JP
Japan
Prior art keywords
image
illumination light
illumination
generating
switching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1998341505A
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English (en)
Japanese (ja)
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JP2000162134A (ja
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Publication date
Application filed filed Critical
Priority to JP10341505A priority Critical patent/JP2000162134A/ja
Priority claimed from JP10341505A external-priority patent/JP2000162134A/ja
Publication of JP2000162134A publication Critical patent/JP2000162134A/ja
Publication of JP2000162134A5 publication Critical patent/JP2000162134A5/ja
Withdrawn legal-status Critical Current

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JP10341505A 1998-12-01 1998-12-01 表面検査装置 Withdrawn JP2000162134A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10341505A JP2000162134A (ja) 1998-12-01 1998-12-01 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10341505A JP2000162134A (ja) 1998-12-01 1998-12-01 表面検査装置

Publications (2)

Publication Number Publication Date
JP2000162134A JP2000162134A (ja) 2000-06-16
JP2000162134A5 true JP2000162134A5 (enExample) 2006-03-23

Family

ID=18346588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10341505A Withdrawn JP2000162134A (ja) 1998-12-01 1998-12-01 表面検査装置

Country Status (1)

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JP (1) JP2000162134A (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002310939A (ja) * 2001-04-18 2002-10-23 Nec Corp 気泡検査装置
DE10239548A1 (de) * 2002-08-23 2004-03-04 Leica Microsystems Semiconductor Gmbh Vorrichtung und Verfahren zur Inspektion eines Objekts
JP2007327896A (ja) * 2006-06-09 2007-12-20 Canon Inc 検査装置
CN104458760B (zh) * 2013-09-13 2018-04-27 楚天科技股份有限公司 自动灯检机异物检测装置
WO2015181956A1 (ja) * 2014-05-30 2015-12-03 富士電機株式会社 多成分用レーザ式ガス分析計
KR102316146B1 (ko) 2014-08-13 2021-10-22 삼성전자주식회사 표면 검사용 광학 모듈 및 이를 포함하는 표면 검사 장치
CN105043982A (zh) * 2015-07-02 2015-11-11 武汉中导光电设备有限公司 一种自动光学检测系统
JP2017227512A (ja) * 2016-06-21 2017-12-28 株式会社島津製作所 偏光測定装置
JP6989392B2 (ja) * 2018-01-04 2022-01-05 株式会社ディスコ 板状物の加工方法
US11294162B2 (en) 2019-02-07 2022-04-05 Nanotronics Imaging, Inc. Fluorescence microscopy inspection systems, apparatus and methods with darkfield channel

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