JP2000154843A5 - - Google Patents

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Publication number
JP2000154843A5
JP2000154843A5 JP1998343638A JP34363898A JP2000154843A5 JP 2000154843 A5 JP2000154843 A5 JP 2000154843A5 JP 1998343638 A JP1998343638 A JP 1998343638A JP 34363898 A JP34363898 A JP 34363898A JP 2000154843 A5 JP2000154843 A5 JP 2000154843A5
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JP
Japan
Prior art keywords
displacement
pressure
compensator
vibration
output signal
Prior art date
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Application number
JP1998343638A
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English (en)
Japanese (ja)
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JP4165844B2 (ja
JP2000154843A (ja
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Priority to JP34363898A priority Critical patent/JP4165844B2/ja
Priority claimed from JP34363898A external-priority patent/JP4165844B2/ja
Publication of JP2000154843A publication Critical patent/JP2000154843A/ja
Publication of JP2000154843A5 publication Critical patent/JP2000154843A5/ja
Application granted granted Critical
Publication of JP4165844B2 publication Critical patent/JP4165844B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP34363898A 1998-11-18 1998-11-18 除振装置 Expired - Fee Related JP4165844B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34363898A JP4165844B2 (ja) 1998-11-18 1998-11-18 除振装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34363898A JP4165844B2 (ja) 1998-11-18 1998-11-18 除振装置

Publications (3)

Publication Number Publication Date
JP2000154843A JP2000154843A (ja) 2000-06-06
JP2000154843A5 true JP2000154843A5 (enExample) 2008-04-10
JP4165844B2 JP4165844B2 (ja) 2008-10-15

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ID=18363083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34363898A Expired - Fee Related JP4165844B2 (ja) 1998-11-18 1998-11-18 除振装置

Country Status (1)

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JP (1) JP4165844B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6731372B2 (en) * 2001-03-27 2004-05-04 Nikon Corporation Multiple chamber fluid mount
JP2003202051A (ja) * 2002-01-04 2003-07-18 Canon Inc 除振装置
WO2005085671A1 (ja) * 2004-03-08 2005-09-15 Nikon Corporation 防振装置、露光装置、及び防振方法
JP2006250291A (ja) * 2005-03-11 2006-09-21 Tokyo Univ Of Agriculture & Technology 防振装置
JP5002759B2 (ja) * 2005-10-13 2012-08-15 国立大学法人東京工業大学 除振装置および除振方法
JP4113960B2 (ja) * 2006-04-28 2008-07-09 国立大学法人東京工業大学 気体バネ式除振装置及び該装置の制御方法
DE102009009562A1 (de) * 2009-02-19 2010-09-09 Integrated Dynamics Engineering Gmbh Kombinierter Bewegungssensor zum Einsatz in Feedback-Regelsystemen zur Schwingungsisolation
CN101818777B (zh) * 2010-05-07 2011-08-10 华中科技大学 一种自适应变阻尼超精密减振器
JP6278676B2 (ja) * 2013-11-29 2018-02-14 キヤノン株式会社 振動低減装置、リソグラフィ装置、および物品の製造方法
CN108425378A (zh) * 2018-04-08 2018-08-21 北京航天希尔测试技术有限公司 一种大型气浮减振地基
CN112197927A (zh) * 2020-10-10 2021-01-08 北京航宇振控科技有限责任公司 一种应用于振动模拟装置的自动气浮支撑系统

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