JP2000149851A - Electron probe microanalyzer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To carry out highly precise analysis in spite of a low retrieval frequency of a coordinate value and carry out highly precise analysis without any divergence of control even when an extent of a height directional change is greatly increased in an electron prove microanalyzer. SOLUTION: In electron probe microanalyzer 1 carrying out elementary analysis on a sample surface on the basis of a characteristic X-ray emitted from a sample by electron beam radiation, a computing function forming an isoline of a Z-axis coordinate value from a measured coordinate value within an analysis range and finding the range of the Z-axis correction value divided by the isoline is provided, and Z-axis directional position control of the sample is carried out according to the Z-axis correction value so that the sample surface satisfies an analysis condition height. A computing function finding a height correction value on a straight line passing the central position of a height distribution of the sample and using the height correction value for finding a three-dimensional correction value using a center position of the height distribution as a rotation center is provided, and Z-axis directional position control of the sample is carried out on the basis of the Z-axial correction value obtained from the three-dimensional correction value so that the sample surface satisfies the analysis condition height.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to an electron probe microanalyzer, and more particularly, to position control of a sample in a Z-axis direction.

[0002]

2. Description of the Related Art In an electron probe microanalyzer (EPMA) using a wavelength dispersive spectroscope, a sample, a dispersive crystal, a detection crystal, and a detector are set as light-collecting conditions for detecting characteristic X-rays emitted from the sample by electron beam irradiation. It is required that the X-ray spectrometer of the instrument be accurately arranged on the circumference of the Rowland circle. Usually, the focusing condition of the X-ray spectroscope is performed by adjusting the height of the sample surface.

[0003] In the analysis using an electron probe microanalyzer, a point analysis for analyzing one point on a sample surface or an X-ray signal is detected by changing an analysis position on the sample surface one by one each time. There are line analysis and mapping analysis to obtain one-dimensional or two-dimensional distribution. In order to accurately perform point analysis, line analysis, and mapping analysis on an uneven sample surface, the sample should always be sampled so that the height of the sample surface at each analysis position satisfies the X-ray spectrometer focusing conditions. It is necessary to control the height direction of the stage.

Conventionally, positioning of the electron probe microanalyzer in the height direction (Z-axis direction) is performed by (a) acquiring the current height information of the sample surface for each analysis point and returning the information to the sample stage, Feedback control to adjust the height position of the sample stage so that the upper analysis point satisfies the focusing condition, and (b) dividing the sample surface into minimum unit areas,
The coordinate value at the intersection of each unit area is obtained in advance, the height information of the analysis point in the unit area is approximately calculated from the coordinate value, and the height position of the sample stage is calculated based on the obtained height information. Adjustment control is performed.

[0005]

When point analysis, line analysis, and mapping analysis are performed with a conventional electron probe microanalyzer, positioning in the height direction can be performed with high accuracy by controlling the above (a) and (b). In order to perform this, it is necessary to acquire coordinate values for each analysis point, or to increase the number of divisions of regions and the number of acquisitions of coordinate values, which requires a large number of data and a long processing time. There is. In particular, the number of acquisitions of coordinate values when performing line analysis or mapping analysis is enormous.

In the line analysis and the mapping analysis, it is necessary to control the position in the height direction while moving the analysis point. In the feedback control (a), the amount of fluctuation in the height direction per unit time is large. In such a case, the response speed of the position control cannot catch up with the fluctuation speed, so that the control diverges, and there is a problem that the possibility of deviating from the following state increases. Further, in the case of performing the control using the divided regions in the above (b) in the line analysis and the mapping analysis, there is no fear of divergence occurring when the feedback control is performed sequentially as in the case of (a). However, since the obtained height information does not accurately represent the sample shape, it is necessary to perform the height correction on the sample surface where there are some places where the change in undulation is dense. Has to be subdivided in accordance with the area where is the most dense, the number of divisions of the area and the number of acquisitions of coordinate values increase, and the number of data and the processing time increase.

When performing line analysis and mapping analysis on a sample whose surface is concentrically symmetrical about one axis, if the control by the divided area shown in (b) is applied, the same height information is obtained in the circumferential direction. However, there is a problem that the number of divisions of a huge area and the number of times of acquiring coordinate values are required even though it is known that

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve the above-mentioned conventional problems and to perform high-accuracy analysis with a small number of acquisitions of coordinate values in an electronic probe microanalyzer. It is another object of the present invention to perform a highly accurate analysis without diverging the control even when the degree of change in the height direction is large.

[0009]

Means for Solving the Problems The first invention of the present application is:
In an electron probe microanalyzer that performs elemental analysis on the surface of a sample using characteristic X-rays emitted from the sample by irradiation with an electron beam, an isoline of a Z-axis coordinate value is formed from measured coordinate values within an analysis range, A calculation function for obtaining a region of the Z-axis correction value divided by the formula, and performing a position control of the sample in the Z-axis direction based on the Z-axis correction value so that the sample surface satisfies the analysis condition height. is there.

According to the first invention, in order to control the position of the sample in the Z-axis direction, a region of the Z-axis correction value divided by an isoline of the Z-axis coordinate value is used. A Z-axis correction value is determined for each area delimited by the contour line of the Z-axis coordinate value, and an analysis point existing in the area is determined in the Z-axis direction using the Z-axis correction value determined in the area. Perform position control. The contour line of the Z-axis coordinate value is determined by measuring the Z-coordinate value with respect to the X and Y coordinate values within the analysis range, and connecting the equal Z-axis coordinate values in the Z-axis direction using the measured coordinate values. The Z-axis coordinate value of an area formed by a range delimited by the contour line of the Z-axis coordinate value is within a range of a predetermined width. In order to analyze the analysis points in this area, the position of the sample in the Z-axis direction is controlled using the value set in the area as the Z-axis correction value.

In the first mode of the Z-axis correction value, one value is set for an area delimited by isolines, and in the second mode, X,
It is set with a Z-axis correction function value that continuously changes along the moving direction of the Y coordinate axis. In the line analysis and the mapping analysis, the position control can be performed by either the first Z-axis correction value or the second Z-axis correction function value.

According to the first aspect of the present invention, since the Z-axis correction value for adjusting the height satisfying the analysis condition of the sample surface is provided over the entire analysis range, the divergence of the control can be prevented. In addition, the acquisition position and the acquisition point of the Z-axis coordinate value can be selected according to the shape of the sample surface, such as increasing or decreasing the number of acquisition points of the Z-axis coordinate value according to the density of the undulation change of the sample surface. High-accuracy position control can be performed with a small number of acquisitions.

According to a second aspect of the present invention, there is provided an electron probe microanalyzer for performing elemental analysis of a sample surface by characteristic X-rays emitted from the sample by irradiation with an electron beam, wherein a straight line passing through the center of the height distribution of the sample is provided. An arithmetic function for obtaining the above-mentioned height correction value and obtaining a three-dimensional correction value with the center position of the height distribution being the rotation center using the height correction value;
The configuration is such that the position of the sample in the Z-axis direction is controlled based on the Z-axis correction value obtained from the three-dimensional correction value so that the sample surface satisfies the analysis condition height.

According to a second aspect of the present invention, an analysis is performed on a sample having a shape characteristic whose height changes according to a distance from a certain point, and the center position of the height distribution is determined. A three-dimensional Z-axis correction value as a rotation center is used. 3
The dimensional Z-axis correction value is obtained by obtaining a height correction value on a straight line passing through the center position of the sample height distribution, and rotating the height correction value around the center position of the height distribution as a rotation center. Can be. The Z coordinate values corresponding to the X and Y coordinate values of the analysis point are corrected using a three-dimensional Z axis correction value, and the position control in the Z axis direction is performed.

Since the sample has a shape whose height changes in accordance with the distance from a certain point, the height correction value is obtained by calculating a height correction value on a straight line passing through the center of the height distribution of the sample. , A Z-axis correction value over the entire analysis range can be obtained. The three-dimensional Z-axis correction value over the entire area within the analysis range can be obtained by rotating the height correction value about the center position of the height distribution as the rotation center. To analyze an analysis point within the analysis range using the three-dimensional correction value, a Z-axis correction value corresponding to the X and Y coordinate values of the analysis point is obtained from the three-dimensional correction value, and the obtained Z-axis correction value is obtained. Position control of the sample in the Z-axis direction is performed as a correction value.

The height correction value on a straight line passing through the center position of the height distribution of the sample may be determined stepwise at predetermined intervals in the height direction, or may be determined continuously. Can also. When a three-dimensional correction value is used, when a stepwise height correction value is used, a cylindrical body whose height direction is the Z-axis correction value has a shape overlapping in the radial direction, and a continuous height correction value is obtained. When used, it becomes a cylindrical body whose height changes in the radial direction. To obtain a Z-axis correction value from a three-dimensional correction value, in the case of point analysis, a Z-coordinate value corresponding to the X and Y coordinate values of the analysis point is obtained from the three-dimensional correction value, and this Z-axis coordinate is obtained. The value is defined as a Z-axis correction value. In the case of line analysis or mapping analysis, a corresponding Z-coordinate value is determined along the moving direction of the X and Y coordinate axes from among the three-dimensional correction values, and the Z-axis coordinate value is obtained. Is a Z-axis correction value.

The straight line for obtaining the height correction value is as follows:
It can be one or a plurality. When a plurality of straight lines are used, a three-dimensional correction value can be divided and set in the circumferential direction in the vicinity of the straight line.

In the second invention, the three-dimensional correction value is tilted in accordance with the tilt of the analysis range, and the Z-axis correction value is obtained using the tilted three-dimensional correction value to determine the position of the sample in the Z-axis direction. Control can be performed. The inclination of the analysis range can be determined from the height on the sample surface within the analysis range.

According to the second aspect of the present invention, since the Z-axis correction value for adjusting the height satisfying the analysis condition of the sample surface is provided over the entire analysis range, the divergence of the control can be prevented. In addition, since the Z-axis correction value over the entire analysis range can be obtained by measuring the height on a straight line passing through the center position of the sample height distribution, high-precision position control can be performed with a small number of acquisitions of coordinate values. It can be carried out.

[0020]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a schematic block diagram of a configuration example of the electronic probe microanalyzer of the present invention. In the electron probe microanalyzer 1 shown in FIG. 1, an electron beam 12 generated from a filament 11 is applied to a sample S placed on a sample stage 17 via a condenser lens 13 and an objective lens 14. The X-rays emitted from the sample S are separated by a wavelength into a spectroscopic element 15 and a detector 16 that detects the split characteristic X-rays.
Is analyzed with an X-ray spectrometer containing

The sample stage 17 is controlled by the driver 4 having received a control pulse from the stage
It is movable in the Y and Z axis directions. The stage controller 3 sends X,
Positioning in the Y-axis direction and height adjustment in the Z-axis direction are performed. For observation of the sample S, an image reflected by the reflecting mirror 18 is captured by an imaging device 5 such as a CCD camera and displayed on the monitor 7 via the autofocus controller 5. The autofocus controller 6 returns the data in the Z-axis direction to the stage controller 3 and performs feedback control on the sample stage 17 to focus the image and to adjust the sample S
Get height data for Normally, the focus position on the sample S of the imaging device 5 by the autofocus controller 6 and
The analysis position that satisfies the light-collecting conditions on the sample S by the X-ray spectrometer is set so as to match. Can be combined. In a conventional electron probe microanalyzer, an optical image is observed for each analysis point, and the sample stage 17 is aligned in the Z-axis direction so that focus is achieved.

In the invention of the present application, the position of the sample stage 17 in the Z-axis direction is adjusted without observing an optical image for each analysis point by a function provided in the computer 2. Less than,
Regarding the functions and operations of the computer,
Will be described with reference to FIGS. 2 to 5, and the second example will be described with reference to FIGS. 6 to 10.

First, a first example will be described. FIG. 2 is a functional block diagram for explaining functions of the first example, FIG. 3 is a flowchart for explaining functions and operations of the first example, and FIGS. 4 and 5 are functions of the first example. FIG. 6 is a diagram showing Z-axis coordinate values and isolines for explaining the above, and a diagram showing Z-axis correction values. In the first example, a contour line of the Z-axis coordinate value is formed from the measured coordinate values within the analysis range, a region of the Z-axis correction value divided by the contour line is obtained, and the sample is determined based on the Z-axis correction value. The position of the sample is controlled in the Z-axis direction so that the surface satisfies the height of the analysis condition.

In FIG. 2, each block indicated by a dashed line indicates a functional block provided in the computer 2, a data storage block 20A for storing each data, an arithmetic function block 2G for obtaining an isoline, and a Z-axis correction value. , A calculation function block 2E for obtaining a Z-axis correction function.

The data storage block 20A stores the analysis range 2
Each data such as A, X, Y, and Z coordinate values 2B, contour map 2F, Z-axis correction value 2C, and Z-axis correction function value 2D are stored. The analysis range 2A is a range in which analysis is performed on the sample S, and is set by input means (not shown) while observing an optical image or the like displayed on the monitor 7. The X, Y, and Z coordinate values 2B are coordinate values of the sample surface within the analysis range, the X and Y coordinate values are the current position of the sample stage 17 from the stage controller 3, and the Z coordinate values are the auto focus controller 6 and the like. The height information of the sample surface obtained by the height detecting means is input.

The contour line calculation 2G is performed for X, Y,
It is determined by connecting equal Z-axis coordinate values using the coordinate data of the Z coordinate values. The interval between the contour lines can be set arbitrarily. The contour lines obtained by the contour line calculation 2G are stored in the contour diagram 2F. The contour map is confirmed on the monitor 7, and the acquisition of the X, Y, and Z coordinate values and the calculation of the contour can be repeated as necessary. The contour diagram shows the irregularities on the sample surface,
The figure shows the deviation in the Z-axis direction from the reference position of the sample stage.

The Z-axis correction value and Z-axis correction function calculation 2E is a calculation for obtaining a height adjustment amount required for the sample surface to satisfy the analysis conditions.
The axis correction value 2C and the Z-axis correction function value 2D are stored and sent to the stage controller 3 at the time of analysis to perform height control.
Adjust the focal position of the X-ray spectrometer.

The height detecting means for forming the unevenness of the sample S shown in the illustrated configuration example is an example formed by the autofocus controller 6, and the optical focus obtained by the feedback system shown by the broken line in the figure. It can be obtained by matching.

Next, the flowchart of FIG. 3 and FIGS.
The operation of the first example will be described with reference to FIG. Observe the optical image and SEM image of the sample S on the monitor 7 to set the analysis range,
It is stored in the analysis range 20A (step S1). In order to determine the surface shape of the sample S, the X and Y coordinates are set by the sample stage 17 and the Z coordinate value is determined by the autofocus controller 6 within the analysis range.
It is stored in the X, Y, Z coordinate values 2B. FIG. 4A shows the analysis range and the coordinate values obtained within the analysis range.
Represents coordinate values. The measurement points for obtaining the coordinate values can be set arbitrarily. For example, a portion where the shape change is sharp can be measured densely, and a portion where the shape change is slow can be roughly measured (step S2).

In the contour line calculation 2G, a contour line is obtained by using the measured X, Y, and Z coordinate values and displayed on the monitor 7. FIG.
(B) is an example in the contour diagram. Although the figure shows equal lines with the Z-direction interval being equal to 1, the intervals between the iso-value lines can be arbitrarily set or can be unequal. The obtained contours are stored in the contour map 2F (step S3). The obtained contour map is observed on a monitor, and if necessary, steps S2 and S3 are repeated to improve the accuracy of the contour map (step S4).

A Z-axis correction value is set in an area delimited by the contour lines. FIG. 5A shows a setting example of the Z-axis correction value, and a value of “1” to “8” is set in each region as the Z-axis correction value. One Z-axis correction value can be set in each region, or a Z-axis correction function that is continuous along the analysis direction in line analysis or mapping analysis.

When one value is set in the area, any value within the range of the Z-axis coordinate value can be used. FIG. 5A shows a case where the minimum value that determines the area is used (step S5).

When performing point analysis (step S6),
The X and Y coordinate values of the analysis point are determined within the analysis range. For the X and Y coordinate values of the determined analysis point, a corresponding Z-axis correction value is obtained from the Z-axis correction value 2C. For example, in FIG. 5A, when a point A (xa, ya) is determined as an analysis point, 3 can be obtained as a corresponding Z-axis correction value (step S7a). The Z-axis correction value is sent to the pulse motor driver via the stage controller 3 to control the height of the sample stage 17 in the Z-axis. Thereby, the height adjustment at the analysis point can be performed (Step S)
8a).

When performing line analysis and mapping analysis (step S6), an analysis line or an analysis range is determined within the analysis range. For the X and Y coordinate values of the determined analysis line or analysis range, the Z value corresponding to the Z axis correction value 2C is used.
Find the axis correction value. For example, in FIG. 5A, if a measurement line in the x-axis direction where the coordinate value of y is y0 is determined as the analysis line, the contour diagram of FIG.
The Z-axis correction value and the Z-axis correction function shown in (c) can be obtained (step S7b). The Z-axis correction value or the Z-axis correction value determined by the Z-axis correction function
A control signal is sent to the pulse motor driver via the controller to control the height of the sample stage 17 on the Z axis. by this,
Height adjustment at the analysis point can be performed (step S8b).

Next, a second example will be described. FIG. 6 is a functional block diagram for explaining functions of the second example, FIG. 7 is a flowchart for explaining functions and operations of the first example, and FIGS. 8 to 10 are functions of the second example. FIG. 9 is a diagram showing three-dimensional correction values for explaining the following. In the second example, analysis is performed on a sample having a shape characteristic in which the height changes according to a distance from a certain point, and the center position of the height distribution is defined as a rotation center. Do 3
A dimensional Z-axis correction value is used. The three-dimensional Z-axis correction value is obtained by obtaining a height correction value on a straight line passing through the center position of the sample height distribution, and rotating the height correction value around the center position of the height distribution as a rotation center. . The Z coordinate values corresponding to the X and Y coordinate values of the analysis point are corrected using a three-dimensional Z axis correction value, and the position control in the Z axis direction is performed.

In FIG. 6, each block indicated by a dashed line indicates a functional block provided in the computer 2, a data storage block 20a for storing each data, a functional block 2j for setting a straight line and a measurement point, and a center position. A function block 2k for calculating, a calculation function block 2m for performing a height correction operation, a function block 2n for an approximate function for obtaining an approximate function of a height correction value, a function block 2p for obtaining a three-dimensional function from the approximate function, and a sample. A function block 2q for calculating the inclination between the surface and the three-dimensional function, and a calculation function block 2e for calculating the Z-axis correction value and the Z-axis correction function are provided.

The data storage block 20a stores the analysis range 2
a, center position 2f, X, Y, Z coordinate values 2b, Z-axis coordinate value 2g of height correction value, three-dimensional function 2h, slope 2i, Z-axis correction value 2c, Z-axis correction function value 2d, etc. Is stored.

The analysis range 2a is a range in which analysis is performed on the sample S, and is set by input means (not shown) while observing an optical image and the like displayed on the monitor 7. X, Y, Z coordinate values 2b are coordinate values of the sample surface within the analysis range, and X, Y
The coordinate values are transferred from the stage controller 3 to the sample stage 17.
Is input, and as the Z coordinate value, height information of the sample surface obtained by height detecting means such as the auto focus controller 6 is input.

The sample to be analyzed has a feature that the height distribution changes according to the distance from a certain point, and the center position calculating block 2k uses the X, Y, and Z coordinate values to calculate the center. The position is calculated and stored in the center position 2f.

The straight line and measurement point setting block 2j determines a straight line in the radial direction from the center position and sets the measurement points on the straight line. The height correction value calculation block 2m calculates the Z-axis coordinate value of the height correction from the Z-axis coordinate value at the measurement point and stores it in 2g. The approximation function block 2n obtains a height-correction approximation function in the radial direction using the height-correction Z-axis coordinate values, and the three-dimensional function block 2p rotates the approximation function about the center position as a rotation center to obtain a cubic function. An original function is obtained and stored in block 2h. In addition, the inclination calculation block 2q calculates the inclination of the sample surface and stores the obtained inclination coefficient in 2i.

The Z-axis correction value and Z-axis correction function calculation 2e calculates the height adjustment amount required for the sample surface to satisfy the analysis conditions by using the three-dimensional function 2h or the data of the three-dimensional function 2h and the inclination 2i. Ask. The obtained Z-axis correction value and Z-axis correction function are stored in the Z-axis correction value 2C and the Z-axis correction function value 2D, and are sent to the stage controller 3 at the time of analysis so that the height is controlled. Adjust the position.

Next, the flowchart of FIG. 7 and FIGS.
The operation of the second example will be described using 0. The analysis range is set by observing the optical image, the SEM image, and the like of the sample S on the monitor 7 and stored in the analysis range 20a. A rectangle surrounded by a broken line in FIG. 8 indicates an example of the analysis range (step S11).

Since the sample S has a shape characteristic in which the height changes in accordance with the distance from a certain point, the shape of the sample surface is changed only from the center position in the radial direction. The shape of the entire sample is determined by measurement. Therefore, the coordinate value of the sample surface is obtained by the stage controller and the auto focus controller, the center position is calculated by the center position calculation 2k, and the storage block 2
f (step S12).

Further, a radial straight line (dashed line in FIG. 8) passing through the obtained center position is set (step S13),
Get coordinates on a straight line. The acquisition of the coordinate values can be performed by setting the X and Y coordinates by the sample stage 17 and obtaining the Z coordinate values by the autofocus controller 6 and storing them in the X, Y and Z coordinate values 2b. The measurement point for obtaining the coordinate value can be set arbitrarily on a straight line. For example, a portion where the shape change is sharp can be measured densely, and a portion where the shape change is slow can be roughly measured (step S14).

From the obtained coordinate values, the Z-axis coordinate value of the height correction value is obtained (step S15), and an approximate function for correcting the height of the sample in the radial direction is obtained. FIG. 8 shows an example of an approximate function of height correction (step S16). Rotate the approximation function of height correction with the center position as the center of rotation,
Find a three-dimensional function. This three-dimensional function represents the surface shape of the sample, and correction in the Z-axis direction can be performed using the coordinate values. FIG. 8 shows a three-dimensional function with a part cut out (step S17).

Although the three-dimensional function obtained in step S17 assumes that the sample S is not tilted, the sample S may actually be tilted with respect to the sample stage. In steps S18 and S19, for such a case, a Z-axis correction value is determined in consideration of the inclination of the sample. Therefore, after obtaining coordinate values for several points on the analysis range of the sample S (step S
18) A slope coefficient of the three-dimensional function is determined such that the three-dimensional function passes as close as possible to the determined coordinate value. By performing Z-axis correction using the tilt coefficient and the three-dimensional function, it is possible to perform height correction in consideration of the tilt of the sample surface. FIG. 9 shows the relationship between the inclination of the sample surface and the three-dimensional function. For the inclination of the analysis range indicated by oblique lines in FIG. 9, the three-dimensional function is changed by θx in the X-axis direction as shown in FIG. It is tilted by θy in the Y-axis direction (step S19).

Thereafter, steps S20 to S22
Thus, the height direction is corrected and the analysis is performed in the same manner as in steps S6 to S8. The processing in steps S20 to S22 can be performed using only the three-dimensional function obtained in step S17, or can be performed using the three-dimensional function obtained in step S17 and the gradient coefficient obtained in step S19. Hereinafter, a case where a three-dimensional function and a slope coefficient are used will be described.

When performing a point analysis (step S20), the X and Y coordinate values of the analysis point are determined within the analysis range. With respect to the X and Y coordinate values of the determined analysis point, a corresponding Z-axis correction value is obtained from the three-dimensional function and the inclination coefficient (step S21a). The Z-axis correction value is sent to the pulse motor driver via the stage controller 3 to control the height of the sample stage 17 in the Z-axis. Thereby, the height adjustment at the analysis point can be performed (step S22a).

When performing line analysis and mapping analysis (step S20), an analysis line or analysis range is determined within the analysis range. For the X and Y coordinate values of the determined analysis line or analysis range, a corresponding Z-axis correction function is obtained from the three-dimensional function and the inclination coefficient (step S21b).
The Z-axis correction value determined by this Z-axis correction function is sent to the pulse motor driver via the stage controller 3 to control the height of the sample stage 17 in the Z-axis. Thereby, the height adjustment at the analysis point can be performed (step S21b).

In the above example, a case is described in which a three-dimensional function is obtained using one approximation function. However, depending on the circumferential shape characteristics of the sample surface, a plurality of straight lines may be drawn radially from the center position. By calculating a plurality of approximation functions, a plurality of three-dimensional functions are obtained by rotating the approximation function by a predetermined angle in the circumferential direction, and a plurality of these three-dimensional functions are arranged in the circumferential direction to form a plurality of three-dimensional functions. Z of sample surface
Axis correction can be performed.

[0051]

As described above, according to the present invention,
With the electron probe microanalyzer, highly accurate analysis can be performed with a small number of acquisitions of coordinate values, and even when the degree of change in the height direction is large, high precision analysis can be performed without diverging control. It can be carried out.

[Brief description of the drawings]

FIG. 1 is a schematic block diagram of a configuration example of an electronic probe microanalyzer according to the present invention.

FIG. 2 is a functional block diagram for explaining functions of a first example of the present invention.

FIG. 3 is a flowchart for explaining functions and operations of the first example of the present invention.

FIG. 4 is a diagram showing Z-axis coordinate values and isolines for explaining the function of the first example of the present invention.

FIG. 5 is a diagram illustrating a Z-axis correction value for explaining a function of the first example of the present invention.

FIG. 6 is a functional block diagram for explaining a function of the second example of the present invention.

FIG. 7 is a flowchart for explaining functions and operations of the first example of the present invention.

FIG. 8 is a diagram illustrating three-dimensional correction values for explaining a function of the second example of the present invention.

FIG. 9 is a diagram showing three-dimensional correction values for explaining a function of the second example of the present invention.

FIG. 10 is a diagram for explaining the function of the second example of the present invention;
It is a figure showing a correction value of dimension.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Electron probe micro analyzer, 2 ... Computer, 3 ... Stage controller, 4 ... Driver, 5 ...
Imaging means, 6: autofocus controller, 7: monitor, 11: filament, 12: electron beam, 13: condenser lens, 14: objective lens, 15: spectral element, 1
Reference numeral 6: detector, 17: sample stage, 2A, 2a: analysis range, 2B, 2b: X, Y, Z coordinate values, 2C, 2c: Z axis correction value, 2D, 2d: Z axis correction function value, 2E, 2e ... Z
Axis correction value, Z-axis correction function calculation function block, 2F: iso-line diagram, 2f: center position, 2G: iso-line calculation function block, 2g: Z-axis coordinate value of height correction, 2h: three-dimensional function,
2i: slope, 2j: straight line, measurement point setting function block, 2
k: center position calculation function block, 2m: height correction function block, 2n: approximation function function block, 2p: three-dimensional function function block, 2q: inclination function block, 20A, 2
0a: data storage block, S: sample.

Claims (2)

[Claims] 1. An electron probe microanalyzer for performing elemental analysis of a sample surface using characteristic X-rays emitted from a sample by irradiation with an electron beam, forming an iso-line of Z-axis coordinate values from measured coordinate values within an analysis range. And a calculation function for obtaining a region of the Z-axis correction value divided by an iso-line.
An electron probe microanalyzer that controls the position of a sample in the Z-axis direction so that the surface of the sample satisfies the height of the analysis condition based on the axis correction value. 2. An electron probe microanalyzer for performing elemental analysis of a sample surface by characteristic X-rays emitted from the sample by irradiation of an electron beam, wherein a height correction value on a straight line passing through a center position of a height distribution of the sample is determined. And a calculation function for obtaining a three-dimensional correction value with the center position of the height distribution as a rotation center using the height correction value, and a sample is prepared based on the Z-axis correction value obtained from the three-dimensional correction value. An electron probe microanalyzer that controls the position of a sample in the Z-axis direction so that the surface satisfies the height of analysis conditions.