JP2000136844A5 - - Google Patents

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Publication number
JP2000136844A5
JP2000136844A5 JP1998324458A JP32445898A JP2000136844A5 JP 2000136844 A5 JP2000136844 A5 JP 2000136844A5 JP 1998324458 A JP1998324458 A JP 1998324458A JP 32445898 A JP32445898 A JP 32445898A JP 2000136844 A5 JP2000136844 A5 JP 2000136844A5
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JP
Japan
Prior art keywords
intermediate plate
actuator
displacement
insulation device
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1998324458A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000136844A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10324458A priority Critical patent/JP2000136844A/ja
Priority claimed from JP10324458A external-priority patent/JP2000136844A/ja
Priority to US09/413,471 priority patent/US6378672B1/en
Publication of JP2000136844A publication Critical patent/JP2000136844A/ja
Publication of JP2000136844A5 publication Critical patent/JP2000136844A5/ja
Withdrawn legal-status Critical Current

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JP10324458A 1998-10-13 1998-10-30 変位発生形アクチュエータ能動振動絶縁装置 Withdrawn JP2000136844A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10324458A JP2000136844A (ja) 1998-10-30 1998-10-30 変位発生形アクチュエータ能動振動絶縁装置
US09/413,471 US6378672B1 (en) 1998-10-13 1999-10-06 Active vibration isolation device and its control method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10324458A JP2000136844A (ja) 1998-10-30 1998-10-30 変位発生形アクチュエータ能動振動絶縁装置

Publications (2)

Publication Number Publication Date
JP2000136844A JP2000136844A (ja) 2000-05-16
JP2000136844A5 true JP2000136844A5 (cg-RX-API-DMAC10.html) 2007-03-15

Family

ID=18166046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10324458A Withdrawn JP2000136844A (ja) 1998-10-13 1998-10-30 変位発生形アクチュエータ能動振動絶縁装置

Country Status (1)

Country Link
JP (1) JP2000136844A (cg-RX-API-DMAC10.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001271868A (ja) 2000-03-24 2001-10-05 Canon Inc 除振装置
JP4649136B2 (ja) * 2003-07-31 2011-03-09 キヤノン株式会社 アクチュエータ、露光装置及びデバイス製造方法
US7726452B2 (en) * 2005-06-02 2010-06-01 Technical Manufacturing Corporation Systems and methods for active vibration damping
US7936443B2 (en) * 2006-05-09 2011-05-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP5199133B2 (ja) * 2009-01-14 2013-05-15 株式会社竹中工務店 載置台の支持装置
CN109268442B (zh) * 2018-10-30 2024-06-18 中国船舶重工集团公司第七一九研究所 一种一体化主动隔振作动器
CN111486293B (zh) * 2020-05-08 2025-05-09 浙江大学 一种用于管路主动减振的吸振器装置
CN115789170A (zh) * 2022-12-16 2023-03-14 亿嘉和科技股份有限公司 一种减振轴、主动减振装置及减振方法
CN119914646A (zh) * 2024-12-18 2025-05-02 杭州市北京航空航天大学国际创新研究院(北京航空航天大学国际创新学院) 一种主动减振样品台

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