JP2000136844A - 変位発生形アクチュエータ能動振動絶縁装置 - Google Patents

変位発生形アクチュエータ能動振動絶縁装置

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Publication number
JP2000136844A
JP2000136844A JP10324458A JP32445898A JP2000136844A JP 2000136844 A JP2000136844 A JP 2000136844A JP 10324458 A JP10324458 A JP 10324458A JP 32445898 A JP32445898 A JP 32445898A JP 2000136844 A JP2000136844 A JP 2000136844A
Authority
JP
Japan
Prior art keywords
vibration
actuator
displacement generating
intermediate plate
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP10324458A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000136844A5 (enExample
Inventor
Shinji Wakui
伸二 涌井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP10324458A priority Critical patent/JP2000136844A/ja
Priority to US09/413,471 priority patent/US6378672B1/en
Publication of JP2000136844A publication Critical patent/JP2000136844A/ja
Publication of JP2000136844A5 publication Critical patent/JP2000136844A5/ja
Withdrawn legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Vibration Prevention Devices (AREA)
JP10324458A 1998-10-13 1998-10-30 変位発生形アクチュエータ能動振動絶縁装置 Withdrawn JP2000136844A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10324458A JP2000136844A (ja) 1998-10-30 1998-10-30 変位発生形アクチュエータ能動振動絶縁装置
US09/413,471 US6378672B1 (en) 1998-10-13 1999-10-06 Active vibration isolation device and its control method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10324458A JP2000136844A (ja) 1998-10-30 1998-10-30 変位発生形アクチュエータ能動振動絶縁装置

Publications (2)

Publication Number Publication Date
JP2000136844A true JP2000136844A (ja) 2000-05-16
JP2000136844A5 JP2000136844A5 (enExample) 2007-03-15

Family

ID=18166046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10324458A Withdrawn JP2000136844A (ja) 1998-10-13 1998-10-30 変位発生形アクチュエータ能動振動絶縁装置

Country Status (1)

Country Link
JP (1) JP2000136844A (enExample)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6518721B2 (en) 2000-03-24 2003-02-11 Canon Kabushiki Kaisha Oscillation isolator
JP2005064474A (ja) * 2003-07-31 2005-03-10 Canon Inc 位置決め機構、露光装置及びデバイスの製造方法
JP2007318118A (ja) * 2006-05-09 2007-12-06 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
JP2009507359A (ja) * 2005-06-02 2009-02-19 テクニカル・マニュファクチャリング・コーポレイション 能動的に振動を減衰するためのシステムとその方法
JP2010164107A (ja) * 2009-01-14 2010-07-29 Takenaka Komuten Co Ltd 載置台の支持装置
CN109268442A (zh) * 2018-10-30 2019-01-25 中国船舶重工集团公司第七〇九研究所 一种一体化主动隔振作动器
CN111486293A (zh) * 2020-05-08 2020-08-04 浙江大学 一种用于管路主动减振的吸振器装置
CN115789170A (zh) * 2022-12-16 2023-03-14 亿嘉和科技股份有限公司 一种减振轴、主动减振装置及减振方法
CN119914646A (zh) * 2024-12-18 2025-05-02 杭州市北京航空航天大学国际创新研究院(北京航空航天大学国际创新学院) 一种主动减振样品台

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6518721B2 (en) 2000-03-24 2003-02-11 Canon Kabushiki Kaisha Oscillation isolator
JP2005064474A (ja) * 2003-07-31 2005-03-10 Canon Inc 位置決め機構、露光装置及びデバイスの製造方法
JP2009507359A (ja) * 2005-06-02 2009-02-19 テクニカル・マニュファクチャリング・コーポレイション 能動的に振動を減衰するためのシステムとその方法
JP2013080911A (ja) * 2005-06-02 2013-05-02 Technical Manufacturing Corp 能動的に振動を減衰するためのシステムとその方法
JP2007318118A (ja) * 2006-05-09 2007-12-06 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
JP2010164107A (ja) * 2009-01-14 2010-07-29 Takenaka Komuten Co Ltd 載置台の支持装置
CN109268442A (zh) * 2018-10-30 2019-01-25 中国船舶重工集团公司第七〇九研究所 一种一体化主动隔振作动器
CN111486293A (zh) * 2020-05-08 2020-08-04 浙江大学 一种用于管路主动减振的吸振器装置
CN115789170A (zh) * 2022-12-16 2023-03-14 亿嘉和科技股份有限公司 一种减振轴、主动减振装置及减振方法
CN119914646A (zh) * 2024-12-18 2025-05-02 杭州市北京航空航天大学国际创新研究院(北京航空航天大学国际创新学院) 一种主动减振样品台

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