JP2000133564A - 露光装置 - Google Patents

露光装置

Info

Publication number
JP2000133564A
JP2000133564A JP10300524A JP30052498A JP2000133564A JP 2000133564 A JP2000133564 A JP 2000133564A JP 10300524 A JP10300524 A JP 10300524A JP 30052498 A JP30052498 A JP 30052498A JP 2000133564 A JP2000133564 A JP 2000133564A
Authority
JP
Japan
Prior art keywords
exposure
wafer
pattern
reticle
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP10300524A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000133564A5 (enExample
Inventor
Gen Uchida
玄 内田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP10300524A priority Critical patent/JP2000133564A/ja
Publication of JP2000133564A publication Critical patent/JP2000133564A/ja
Publication of JP2000133564A5 publication Critical patent/JP2000133564A5/ja
Withdrawn legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP10300524A 1998-10-22 1998-10-22 露光装置 Withdrawn JP2000133564A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10300524A JP2000133564A (ja) 1998-10-22 1998-10-22 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10300524A JP2000133564A (ja) 1998-10-22 1998-10-22 露光装置

Publications (2)

Publication Number Publication Date
JP2000133564A true JP2000133564A (ja) 2000-05-12
JP2000133564A5 JP2000133564A5 (enExample) 2005-10-27

Family

ID=17885865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10300524A Withdrawn JP2000133564A (ja) 1998-10-22 1998-10-22 露光装置

Country Status (1)

Country Link
JP (1) JP2000133564A (enExample)

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