JP2000107716A - Ultraviolet washing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To miniaturize ultraviolet lamp units and decrease the number of the ultraviolet lamps to be used and lower the electric power consumption by installing a transporting means for transporting the ultraviolet lamp units parallel to and horizontally on the surface of an object matter to be washed supported by a supporting means. SOLUTION: A substrate 104, which is an object to be washed, transported by a transportation roller 106 is set still on a supporting stand 12, which is a supporting means in an ultraviolet washing apparatus 10. Ultraviolet lamp units 14 each of which comprises one ultraviolet lamp 110 are installed above the substrate 104 in the ultraviolet washing apparatus 10. The ultraviolet lamp units 14 are so installed as to be moved parallel to and horizontally (in the A direction) on a surface region S of the substrate 104 partitioned by the outer circumferential rim 104a by the operation of a motor 1, which is a transporting means. The ultraviolet lamp unit 14 is so set as to be movable from the position corresponding to the right side end part 104R of the substrate to the position corresponding to the left side end part 104L of the substrate.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultraviolet cleaning apparatus, and more particularly, to an ultraviolet cleaning apparatus utilizing, for example, a semiconductor substrate or a liquid crystal display substrate by utilizing oxidation energy and photon energy generated by irradiation of ultraviolet light. Attached to the surface of an object to be cleaned, such as various electronic component substrates (hereinafter, various electronic component substrates such as a semiconductor substrate or a substrate for a liquid crystal display are collectively referred to simply as a “substrate”). The present invention relates to an ultraviolet cleaning device for removing organic matter that has been removed.

[0002]

2. Description of the Related Art As a conventional ultraviolet cleaning apparatus, for example,
An ultraviolet cleaning apparatus disclosed in JP-A-5-224167 is known.

FIG. 1 is a schematic side view of a cleaning apparatus including an ultraviolet cleaning apparatus disclosed in Japanese Patent Application Laid-Open No. 5-224167, and FIG.
1 and 2 show a state in which a substrate is cleaned as an object to be cleaned.

A cleaning apparatus including an ultraviolet cleaning apparatus disclosed in Japanese Patent Application Laid-Open No. 5-224167 will be described with reference to FIGS. 1 and 2. The cleaning apparatus includes an ultraviolet cleaning apparatus 100 and a cleaning liquid cleaning apparatus. It is composed of a device 102. Then, the substrate 104 is placed on the transport roller 106 and is configured to be transported from the ultraviolet cleaning device 100 to the cleaning liquid cleaning device 102 by the rotation of the transport roller 106.

Here, the ultraviolet cleaning unit 100 is provided with an ultraviolet lamp unit 108 for irradiating the substrate 104 with ultraviolet light.
Reference numeral 08 includes five ultraviolet lamps 110.

[0006] The cleaning liquid cleaning apparatus 102 includes a substrate 1
A spray nozzle 112 for spraying a cleaning liquid onto the substrate 04, a shower nozzle 114 for spraying pure water onto the substrate 104,
An air knife 116 for drying the substrate 104 is provided.

In the above-described structure, in the ultraviolet cleaning apparatus, first, the substrate 1 is transported by the transport roller 106.
04 is transferred into the ultraviolet cleaning apparatus 100, the substrate 104 is irradiated with ultraviolet light by the five ultraviolet lamps 110 of the ultraviolet lamp unit 108, and the oxidation energy and photon energy generated by the irradiation of the ultraviolet light are used. Organic substances attached to the surface of the substrate 104 are removed.

After that, the substrate 104 is transferred into the cleaning liquid cleaning apparatus 102 by the transport roller 106, the cleaning liquid is sprayed from the spray nozzle 112, and the substrate 104 is cleaned with the cleaning liquid.
The cleaning liquid remaining on the surface of the substrate 104 is washed away by spraying pure water from the substrate 104. Further, the pure water remaining on the surface of the substrate 104 is drained by an air knife 116, and the substrate 104 is dried. It is to be transferred to.

By the way, in the above-mentioned conventional ultraviolet cleaning apparatus 100, the dimensions of the surface of the substrate 104, that is, the surface area S divided by the outer peripheral edge 104a of the substrate 104.
3 (see FIG. 3) or an ultraviolet lamp unit 108 having a size equal to or larger than the size of the surface area S is disposed on the substrate 104, and a process of irradiating the surface of the substrate 104 with ultraviolet light is performed. I have.

That is, in the conventional ultraviolet cleaning apparatus 100, the size of the surface area S defined by the ultraviolet lamp unit 108 by the outer peripheral edge 104a of the substrate 104 (see FIG. 3).
) Or larger than the size of the surface area S, so that the ultraviolet lamp unit 10
The size of 8 and thus the number of UV lamps 110 used in the UV lamp unit 108 depend on the size of the surface area S delimited by the outer peripheral edge 104a of the substrate 104 to be processed (see FIGS. 1 and 2). In the example shown, the number of the ultraviolet lamps 110 is five.) If the size of the surface area S delimited by the outer peripheral edge 104a of the substrate 104 to be processed becomes larger, the ultraviolet lamp unit 108 is naturally And the number of ultraviolet lamps 110 increases, and the power consumption also increases.

[0011]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and has as its object to reduce the size of the ultraviolet lamp unit and, consequently, the ultraviolet light. The number of UV lamps used in the lamp unit does not depend on the size of the surface area delimited by the outer peripheral edge of the object to be cleaned such as a substrate to be processed. It is an object of the present invention to provide an ultraviolet cleaning apparatus capable of reducing the size of the unit and, consequently, reducing the number of ultraviolet lamps used in the ultraviolet lamp unit to reduce power consumption.

[0012]

In order to achieve the above object, an ultraviolet cleaning apparatus according to the present invention utilizes an oxidizing energy and a photon energy generated by irradiation of ultraviolet light to adhere to a surface of an object to be cleaned. In the ultraviolet cleaning apparatus for removing organic matter, an ultraviolet lamp unit including at least one or more ultraviolet lamps and having an overall size smaller than a size of a surface of the object to be cleaned is provided at a position above the object to be cleaned. Ultraviolet light that is moved or rotated in parallel and horizontal with respect to the object to be cleaned, and is provided with at least one or more ultraviolet lamps, and whose overall size is smaller than the size of the surface of the object to be cleaned. Under the lamp unit, the board is moved horizontally or parallel to the ultraviolet lamp unit, or rotated. .

That is, according to the ultraviolet cleaning apparatus of the present invention, an ultraviolet lamp smaller than the surface of the object to be cleaned.
Using the unit, the surface of the object to be cleaned can be irradiated with ultraviolet light.

Therefore, even if the size of the surface of the object to be cleaned becomes large, a large-sized ultraviolet lamp unit is not required, and the number of ultraviolet lamps used in the ultraviolet lamp unit can be reduced. The power consumption can be reduced.

According to a first aspect of the present invention, there is provided an ultraviolet cleaning apparatus for removing organic substances attached to the surface of an object to be cleaned by utilizing oxidation energy and photon energy generated by irradiation of ultraviolet rays. An apparatus, comprising: support means for supporting an object to be cleaned in a stationary state; and at least one or more ultraviolet lamps. The apparatus is disposed above the support means and has a surface of the object to be cleaned supported by the support means. An ultraviolet lamp unit which is disposed so as to be movable in parallel and horizontally with respect to, and whose overall size is smaller than the size of the surface of the object to be cleaned supported by the support means, and Moving means for moving the object to be cleaned, which is supported by the supporting means, in parallel and horizontally with respect to the surface of the object to be cleaned.

According to a second aspect of the present invention, there is provided an ultraviolet cleaning apparatus for removing organic substances attached to the surface of an object to be cleaned by utilizing oxidation energy and photon energy generated by irradiation of ultraviolet rays. In the apparatus, supporting means for supporting the object to be cleaned in a stationary state, moving means for moving the supporting means parallel and horizontally to the surface of the object to be cleaned supported by the supporting means, at least one or more An ultraviolet lamp unit comprising an ultraviolet lamp, fixedly disposed above the support means, and having an overall size smaller than a size of a surface of the object to be cleaned supported by the support means. It was made.

According to a third aspect of the present invention, there is provided an ultraviolet cleaning apparatus for removing organic substances attached to the surface of an object to be cleaned by utilizing oxidation energy and photon energy generated by irradiation of ultraviolet rays. In the apparatus, a supporting means for supporting the object to be cleaned in a stationary state, a first moving means for moving the supporting means parallel and horizontally to a surface of the object to be cleaned supported by the supporting means, At least one ultraviolet lamp is provided, is disposed above the support means, is disposed so as to be movable in parallel and horizontal with respect to the surface of the object to be cleaned supported by the support means, and An ultraviolet lamp unit whose dimension is smaller than the dimension of the surface of the object to be cleaned supported by the support means, and the ultraviolet lamp unit on the surface of the object to be cleaned supported by the support means. Second moving parallel and horizontally in
And moving means.

According to a fourth aspect of the present invention, there is provided an ultraviolet cleaning apparatus for removing organic substances attached to the surface of an object to be cleaned by utilizing oxidation energy and photon energy generated by irradiation of ultraviolet rays. The apparatus comprises a support means for supporting the object to be cleaned in a stationary state, and at least one or more ultraviolet lamps. The apparatus is disposed above the support means and supported by the support means around a central portion. An ultraviolet lamp unit disposed so as to be rotatable in parallel and horizontal with respect to the surface of the object to be cleaned, and having an overall size smaller than the size of the surface of the object to be cleaned supported by the support means; And a rotating means for rotating the ultraviolet lamp unit in a direction parallel and horizontal to the surface of the object to be cleaned supported by the supporting means.

According to a fifth aspect of the present invention, there is provided an ultraviolet cleaning apparatus that removes organic substances attached to the surface of an object to be cleaned by utilizing oxidation energy and photon energy generated by irradiation of ultraviolet light. In the apparatus, a supporting means for supporting the object to be cleaned in a stationary state, and the supporting means, with the center of the supporting means as a center, parallel and horizontally to the surface of the object to be cleaned supported by the supporting means. A rotating means for rotating, and at least one or more ultraviolet lamps, which are fixedly disposed above the supporting means, and whose overall dimensions are smaller than the dimensions of the surface of the object to be cleaned supported by the supporting means. Also has a small ultraviolet lamp unit.

According to a sixth aspect of the present invention, there is provided an ultraviolet cleaning apparatus for removing organic substances attached to the surface of an object to be cleaned by utilizing oxidation energy and photon energy generated by irradiation of ultraviolet rays. In the apparatus, a supporting means for supporting the object to be cleaned in a stationary state, and the supporting means, with the center of the supporting means as a center, parallel and horizontally to the surface of the object to be cleaned supported by the supporting means. A first rotating means for rotating, and at least one or more ultraviolet lamps, are disposed above the supporting means, and are arranged on the surface of the object to be cleaned supported by the supporting means with a center portion as a center. An ultraviolet lamp unit disposed so as to be rotatable in parallel and horizontally with respect to the body, and having an overall size smaller than a size of a surface of the object to be cleaned supported by the support means; The pump unit is obtained so as to have a second rotating means for rotating parallel and horizontal to the surface of the object to be cleaned, which is supported by the support means.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an ultraviolet cleaning apparatus according to the present invention will be described below in detail with reference to the drawings.

In the following description of FIG. 4, the same or corresponding components as those in FIGS. 1 to 3 will be denoted by the same reference numerals as those in FIGS. 1 to 3. .

FIG. 4 is a conceptual side view schematically illustrating the structure of an ultraviolet light cleaning apparatus according to a first embodiment of the present invention, corresponding to FIG. 2. The transported substrate 104 to be cleaned is stopped on the support base 12 as support means in the ultraviolet cleaning apparatus 10.

The substrate 10 in the ultraviolet cleaning device 10
Above 4, an ultraviolet lamp unit 14 including one ultraviolet lamp 110 is provided.

The ultraviolet lamp unit 14 can be moved parallel and horizontal to the surface area S defined by the outer peripheral edge 104a of the substrate 104, that is, in the direction of arrow A in FIG. It is arranged in.

Here, the ultraviolet lamp unit 14 is
In FIG. 4, it is set so as to be movable from a position corresponding to the right end 104R of the substrate 104 to a position corresponding to the left end 104L (see the reference numeral 14 indicated by a dashed line in FIG. 4).

In this embodiment, a low-pressure mercury lamp is used as the ultraviolet lamp 110.

In the above configuration, in order to perform the ultraviolet cleaning process on the substrate 104 by the ultraviolet cleaning device 10, the substrate 104 is transported into the ultraviolet cleaning device 10 by the transport roller 106, and the substrate 104 is transferred into the ultraviolet cleaning device 10. After being stopped on the support table 12, the ultraviolet lamp 110 of the ultraviolet lamp unit 14 is turned on.

Then, the operation of the motor 16 causes the ultraviolet lamp unit 14 to be connected to the substrate 104 in FIG.
From the position corresponding to the right end 104R to the left end 104
The substrate is moved to a position corresponding to L, and the surface region S of the substrate 104 is irradiated with ultraviolet rays to perform cleaning.

At this time, the substrate 104 in FIG.
From the position corresponding to the right end 104R to the left end 104
The ultraviolet lamp 110 may be reciprocated to a position corresponding to L.

Next, a second embodiment of the ultraviolet ray cleaning apparatus according to the present invention will be described with reference to FIG.

FIG. 5 is a conceptual side view schematically illustrating the configuration of a second embodiment of the ultraviolet cleaning apparatus according to the present invention, corresponding to FIG. 2. In this ultraviolet cleaning apparatus 20, a conveying roller is used. The substrate 104, which is the object to be cleaned, transported by the substrate 106, is stopped on the support base 22 as support means in the ultraviolet cleaning apparatus 20.

The support base 22 is arranged so as to be parallel and horizontal to the surface area S defined by the outer peripheral edge 104a of the substrate 104 by the operation of the motor 24, that is, movable in the direction of the arrow B in FIG. I have.

Here, the moving range of the support base 22 is such that the right end 104R of the substrate 104 in FIG.
To the position corresponding to the right end 20R of the
4 is the left end portion 20L of the cleaning device 20.
(See FIG. 5, reference numerals 22, 104, 104R, and 104L indicated by dashed lines in FIG. 5).

Then, the substrate 10 in the ultraviolet cleaning device 20
Above 4, an ultraviolet lamp unit 26 composed of one ultraviolet lamp 110 is fixedly arranged.

Here, the ultraviolet lamp unit 26 is
In FIG. 5, it is preferable to be provided at a substantially upper central portion in the ultraviolet cleaning device 10.

In this embodiment, a low-pressure mercury lamp is used as the ultraviolet lamp 110.

In the above configuration, in order to perform the ultraviolet cleaning process on the substrate 104 by the ultraviolet cleaning device 20, the substrate 104 is transported into the ultraviolet cleaning device 20 by the transport roller 106, and the substrate 104 is transferred into the ultraviolet cleaning device 10. It rests on the support base 12.

Thereafter, the operation of the motor 24 causes the right end 104R of the substrate 104 to move to a position corresponding to the right end 20R of the cleaning device 20 in FIG. 20 left end 2
The support base 22 is moved in the direction indicated by the arrow B in FIG. 5 so as to move to the position corresponding to 0 L. At this time, the ultraviolet lamp 110 of the ultraviolet lamp unit 14 is turned on, and the substrate 104 is turned on.
The surface area S is irradiated with ultraviolet rays for cleaning.

The right end 104R of the substrate 104 moves to a position corresponding to the right end 20R of the cleaning device 20, and the left end 104L of the substrate 104 moves to a position corresponding to the left end 20L of the cleaning device 20. When the support base 22 is moved in the direction of the arrow B in FIG. 5 so as to move, it may be reciprocated in the direction of the arrow B in FIG.

Next, a third embodiment of the ultraviolet ray cleaning apparatus according to the present invention will be described with reference to FIG.

That is, FIG. 6 is a conceptual schematic top view showing the construction of a third embodiment of the ultraviolet ray cleaning device according to the present invention. The substrate 104, which is the object to be cleaned, is stopped on the support table 32 as a support means in the ultraviolet cleaning apparatus 10.

Then, the substrate 10 in the ultraviolet cleaning device 30 is
Above 4, an ultraviolet lamp unit 34 including one ultraviolet lamp 110 is provided.

The ultraviolet lamp unit 34 is operated by a motor 36 as a rotating means.
The unit 34 is arranged so as to be parallel and horizontal with respect to a surface area S delimited by the outer peripheral edge 104a of the substrate 104, that is, rotatable in the direction of the arrow C in FIG.

In this embodiment, a low-pressure mercury lamp is used as the ultraviolet lamp 110.

In the above configuration, in order to perform the ultraviolet cleaning process on the substrate 104 by the ultraviolet cleaning device 30, the substrate 104 is transported into the ultraviolet cleaning device 30 by the transport roller 106, and the substrate 104 is transferred into the ultraviolet cleaning device 30. After being stopped on the support 32, the ultraviolet lamp 110 of the ultraviolet lamp unit 34 is turned on.

Then, by the operation of the motor 36, the ultraviolet lamp unit 34 is rotated in the direction of arrow C in FIG. 6, and the surface area S of the substrate 104 is irradiated with ultraviolet light for cleaning.

Next, a fourth embodiment of the ultraviolet ray cleaning apparatus according to the present invention will be described with reference to FIG.

FIG. 7 is a schematic top view illustrating the construction of a fourth embodiment of an ultraviolet cleaning apparatus according to the present invention. In the ultraviolet cleaning apparatus 40, the apparatus is conveyed by conveying rollers 106. The substrate 104, which is the object to be cleaned, is stopped on the support base 42 as support means in the ultraviolet cleaning apparatus 40.

The support base 42 is driven by the motor 44 to move the substrate 1 around the center of the support base 42.
7 is rotatable in the direction of arrow D in FIG.

The substrate 10 in the ultraviolet cleaning device 40
Above 4, an ultraviolet lamp unit 46 composed of one ultraviolet lamp 110 is fixedly provided.

Here, the ultraviolet lamp unit 46 is
In FIG. 7, it is preferable to be provided at a substantially upper central portion in the ultraviolet cleaning device 40.

In this embodiment, a low-pressure mercury lamp is used as the ultraviolet lamp 110.

In the above configuration, in order to perform the ultraviolet cleaning process on the substrate 104 by the ultraviolet cleaning device 40, the substrate 104 is transported into the ultraviolet cleaning device 40 by the transport roller 106, and the substrate 104 is transported in the ultraviolet cleaning device 40. It rests on the support base 42.

Thereafter, the support base 42 is rotated in the direction of arrow D in FIG. 7 by the operation of the motor 44 in FIG.

When the support table 42 rotates in the direction indicated by the arrow D in FIG. 7, the ultraviolet lamp 110 of the ultraviolet lamp unit 46 is turned on, and the surface area S of the substrate 104 is irradiated with ultraviolet light for cleaning. .

Therefore, in each of the above-described first to fourth embodiments, the substrate 104 has a larger thickness than the conventional ultraviolet irradiation apparatus.
UV lamp units 14, 26, 34, smaller than the dimension of the surface area S delimited by the outer peripheral edge 104a of
With the use of 46, the entire surface region S delimited by the outer peripheral edge 104a of the substrate 104 can be irradiated with ultraviolet rays, and the ultraviolet lamp units 14, 26, 3
4 and 46 can be reduced in size, and the number of ultraviolet lamps 110 used in the ultraviolet lamp units 14, 26, 34 and 46 can be reduced as compared with the prior art (Japanese Unexamined Patent Publication No. Hei. In the ultraviolet cleaning apparatus disclosed in Japanese Patent Application Publication No.
5 are used, but in each of the first to fourth embodiments, the ultraviolet lamp 11 is used.
Only 0 is used. ), The power consumption can be reduced.

It should be noted that the first to fourth embodiments described above.
The embodiments may be appropriately combined with each other. For example, the first embodiment and the second embodiment may be combined to move both the ultraviolet lamp unit and the support, and the third embodiment and the fourth embodiment may be combined. In combination with the above embodiment, both the ultraviolet lamp unit and the support base may be rotated. Further, the first embodiment and the fourth embodiment are combined to move the ultraviolet lamp unit and rotate the support table, or to combine the second embodiment and the third embodiment. Combine with the form of
The support table may be moved while rotating the ultraviolet lamp unit.

[0059]

Since the present invention is constructed as described above, the size of the ultraviolet lamp unit and, consequently, the number of ultraviolet lamps used in the ultraviolet lamp unit are determined by the outer peripheral edge of the substrate to be processed. Irrespective of the size of the surface area delimited by the above, the size of the UV lamp unit can be reduced compared to the conventional UV cleaning device, and thus the number of UV lamps used in the UV lamp unit can be reduced. Thus, an excellent effect that power consumption can be reduced.

[Brief description of the drawings]

FIG. 1 is a schematic side view schematically illustrating the configuration of a cleaning apparatus including an ultraviolet cleaning apparatus disclosed in Japanese Patent Application Laid-Open No. 5-224167.

FIG. 2 is an enlarged view of the ultraviolet cleaning device shown in FIG.

FIG. 3 is a perspective view of a substrate.

FIG. 4 is a conceptual side view schematic configuration explanatory view corresponding to FIG. 2 and showing a first embodiment of the ultraviolet cleaning apparatus according to the present invention.

FIG. 5 is a conceptual side view schematic configuration explanatory view corresponding to FIG. 2 and showing a second embodiment of the ultraviolet cleaning apparatus according to the present invention.

FIG. 6 is a conceptual top schematic configuration view showing a third embodiment of the ultraviolet cleaning apparatus according to the present invention.

FIG. 7 is a schematic top schematic configuration view showing a fourth embodiment of the ultraviolet cleaning apparatus according to the present invention.

[Explanation of symbols]

10, 20, 30, 40 UV cleaning device 12, 22, 32, 42 Support 14, 26, 34, 46 UV lamp unit 16, 24, 36, 44 Motor 104 Substrate 110 UV lamp

Claims (6)

[Claims] 1. An ultraviolet cleaning apparatus for removing organic substances attached to a surface of an object to be cleaned by utilizing oxidation energy and photon energy generated by irradiation of ultraviolet light, wherein the apparatus supports the object to be cleaned in a stationary state. Means, at least one or more ultraviolet lamps, arranged above the supporting means, and arranged to be movable in parallel and horizontal with respect to the surface of the object to be cleaned supported by the supporting means. And an ultraviolet lamp unit whose overall size is smaller than the dimension of the surface of the object to be cleaned supported by the support means, and the ultraviolet lamp unit is mounted on the surface of the object to be cleaned supported by the support means. And a moving means for moving in parallel and horizontally. 2. An ultraviolet cleaning apparatus for removing organic substances attached to the surface of an object to be cleaned by utilizing oxidation energy and photon energy generated by irradiation of ultraviolet light, wherein the apparatus supports the object to be cleaned in a stationary state. Means, moving means for moving the supporting means in parallel and horizontal with respect to the surface of the object to be cleaned supported by the supporting means, and at least one or more ultraviolet lamps, An ultraviolet lamp unit fixedly disposed and having an ultraviolet lamp unit whose overall size is smaller than the size of the surface of the object to be cleaned supported by the support means; 3. An ultraviolet cleaning apparatus for removing organic substances adhered to a surface of an object to be cleaned by utilizing oxidation energy and photon energy generated by irradiation of ultraviolet light, wherein the apparatus supports the object to be cleaned in a stationary state. Means for moving the support means in parallel and horizontal with respect to the surface of the object to be cleaned supported by the support means; and at least one ultraviolet lamp; The object to be cleaned, which is arranged above and is movable parallel and horizontal to the surface of the object to be cleaned supported by the support means, and has an overall size supported by the support means. An ultraviolet lamp unit smaller than the size of the surface of the object; and a second movement for moving the ultraviolet lamp unit parallel and horizontally with respect to the surface of the object to be cleaned supported by the support means. Ultraviolet cleaning device having a means. 4. An ultraviolet cleaning apparatus for removing organic substances attached to the surface of an object to be cleaned by utilizing oxidation energy and photon energy generated by irradiation of ultraviolet light, wherein the apparatus supports the object to be cleaned in a stationary state. Means, at least one or more ultraviolet lamps, disposed above the support means, and parallel and horizontal with respect to the surface of the object to be cleaned supported by the support means, with a central portion as the center. An ultraviolet lamp unit rotatably disposed and having an overall size smaller than a dimension of a surface of the object to be cleaned supported by the support means; and an ultraviolet lamp unit supporting the ultraviolet lamp unit by the support means. A rotating means for rotating horizontally and parallel to the surface of the object to be cleaned; 5. An ultraviolet cleaning apparatus for removing organic substances attached to the surface of an object to be cleaned by utilizing oxidation energy and photon energy generated by irradiation of ultraviolet light, wherein the apparatus supports the object to be cleaned in a stationary state. Means, rotating means for rotating the supporting means parallel to and horizontally with respect to the surface of the object to be cleaned supported by the supporting means around a central portion of the supporting means; and at least one or more ultraviolet lamps. An ultraviolet lamp unit comprising: an ultraviolet lamp unit fixedly disposed above the support means and having an overall size smaller than a dimension of a surface of the object to be cleaned supported by the support means. 6. An ultraviolet cleaning apparatus for removing organic substances adhered to a surface of an object to be cleaned by utilizing oxidation energy and photon energy generated by irradiation of ultraviolet light, wherein the apparatus supports the object to be cleaned in a stationary state. Means, first rotating means for rotating the supporting means in parallel and horizontal to the surface of the object to be cleaned supported by the supporting means, about a central portion of the supporting means, at least one or more An ultraviolet lamp is provided, and is disposed above the support means, and is disposed so as to be rotatable in parallel and horizontal with respect to a surface of the object to be cleaned supported by the support means, with a center portion as a center, And an ultraviolet lamp unit whose overall size is smaller than the size of the surface of the object to be cleaned supported by the support means; and the ultraviolet lamp unit supported by the support means. Ultraviolet cleaning device and a second rotating means for rotating parallel and horizontal to the surface of the object to be cleaned was.