JP2000097864A5 - - Google Patents

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Publication number
JP2000097864A5
JP2000097864A5 JP1998266631A JP26663198A JP2000097864A5 JP 2000097864 A5 JP2000097864 A5 JP 2000097864A5 JP 1998266631 A JP1998266631 A JP 1998266631A JP 26663198 A JP26663198 A JP 26663198A JP 2000097864 A5 JP2000097864 A5 JP 2000097864A5
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JP
Japan
Prior art keywords
illumination light
light source
substrate
illumination
visual inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998266631A
Other languages
English (en)
Japanese (ja)
Other versions
JP4576006B2 (ja
JP2000097864A (ja
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Publication date
Application filed filed Critical
Priority to JP26663198A priority Critical patent/JP4576006B2/ja
Priority claimed from JP26663198A external-priority patent/JP4576006B2/ja
Publication of JP2000097864A publication Critical patent/JP2000097864A/ja
Publication of JP2000097864A5 publication Critical patent/JP2000097864A5/ja
Application granted granted Critical
Publication of JP4576006B2 publication Critical patent/JP4576006B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP26663198A 1998-09-21 1998-09-21 外観検査用投光装置 Expired - Fee Related JP4576006B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26663198A JP4576006B2 (ja) 1998-09-21 1998-09-21 外観検査用投光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26663198A JP4576006B2 (ja) 1998-09-21 1998-09-21 外観検査用投光装置

Publications (3)

Publication Number Publication Date
JP2000097864A JP2000097864A (ja) 2000-04-07
JP2000097864A5 true JP2000097864A5 (enExample) 2005-11-04
JP4576006B2 JP4576006B2 (ja) 2010-11-04

Family

ID=17433519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26663198A Expired - Fee Related JP4576006B2 (ja) 1998-09-21 1998-09-21 外観検査用投光装置

Country Status (1)

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JP (1) JP4576006B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4383047B2 (ja) * 2000-08-24 2009-12-16 オリンパス株式会社 外観検査用投光装置及び外観検査装置
JP3973659B2 (ja) * 2002-05-31 2007-09-12 オリンパス株式会社 マクロ照明装置
KR100622853B1 (ko) 2004-09-22 2006-09-19 주식회사 에이디피엔지니어링 기판 외관 검사 장치
KR100694531B1 (ko) * 2004-09-22 2007-03-13 주식회사 에이디피엔지니어링 기판 외관 검사 장치
JP4633499B2 (ja) * 2005-02-28 2011-02-16 オリンパス株式会社 外観検査装置及び外観検査方法
JP5006024B2 (ja) * 2006-12-27 2012-08-22 オリンパス株式会社 外観検査用投光装置
JP5006025B2 (ja) * 2006-12-27 2012-08-22 オリンパス株式会社 外観検査用投光装置
JP5740894B2 (ja) * 2010-09-30 2015-07-01 凸版印刷株式会社 表面光沢物の検査装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0358014A (ja) * 1989-07-27 1991-03-13 Omron Corp ビームスキャニング装置
JP3095855B2 (ja) * 1992-02-19 2000-10-10 オリンパス光学工業株式会社 外観検査用投光装置
JP3255709B2 (ja) * 1992-06-17 2002-02-12 オリンパス光学工業株式会社 基板外観検査装置
JPH08166350A (ja) * 1994-12-14 1996-06-25 Omron Corp 検査指示装置
JP3625953B2 (ja) * 1996-04-03 2005-03-02 オリンパス株式会社 外観検査用投光装置
JPH1062354A (ja) * 1996-08-20 1998-03-06 Nachi Fujikoshi Corp 透明板の欠陥検査装置及び欠陥検査方法

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