JP2000091416A5 - - Google Patents
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- Publication number
- JP2000091416A5 JP2000091416A5 JP1998255113A JP25511398A JP2000091416A5 JP 2000091416 A5 JP2000091416 A5 JP 2000091416A5 JP 1998255113 A JP1998255113 A JP 1998255113A JP 25511398 A JP25511398 A JP 25511398A JP 2000091416 A5 JP2000091416 A5 JP 2000091416A5
- Authority
- JP
- Japan
- Prior art keywords
- element isolation
- insulating film
- semiconductor layer
- recess
- isolation insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10255113A JP2000091416A (ja) | 1998-09-09 | 1998-09-09 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10255113A JP2000091416A (ja) | 1998-09-09 | 1998-09-09 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000091416A JP2000091416A (ja) | 2000-03-31 |
| JP2000091416A5 true JP2000091416A5 (enExample) | 2005-08-25 |
Family
ID=17274291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10255113A Withdrawn JP2000091416A (ja) | 1998-09-09 | 1998-09-09 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000091416A (enExample) |
-
1998
- 1998-09-09 JP JP10255113A patent/JP2000091416A/ja not_active Withdrawn
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