JP2000065753A - 画像取り込み装置 - Google Patents

画像取り込み装置

Info

Publication number
JP2000065753A
JP2000065753A JP10240185A JP24018598A JP2000065753A JP 2000065753 A JP2000065753 A JP 2000065753A JP 10240185 A JP10240185 A JP 10240185A JP 24018598 A JP24018598 A JP 24018598A JP 2000065753 A JP2000065753 A JP 2000065753A
Authority
JP
Japan
Prior art keywords
light
image
glass rod
illumination
rod lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10240185A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000065753A5 (https=
Inventor
Masaru Matsumoto
勝 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP10240185A priority Critical patent/JP2000065753A/ja
Publication of JP2000065753A publication Critical patent/JP2000065753A/ja
Publication of JP2000065753A5 publication Critical patent/JP2000065753A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP10240185A 1998-08-26 1998-08-26 画像取り込み装置 Pending JP2000065753A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10240185A JP2000065753A (ja) 1998-08-26 1998-08-26 画像取り込み装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10240185A JP2000065753A (ja) 1998-08-26 1998-08-26 画像取り込み装置

Publications (2)

Publication Number Publication Date
JP2000065753A true JP2000065753A (ja) 2000-03-03
JP2000065753A5 JP2000065753A5 (https=) 2005-10-27

Family

ID=17055738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10240185A Pending JP2000065753A (ja) 1998-08-26 1998-08-26 画像取り込み装置

Country Status (1)

Country Link
JP (1) JP2000065753A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002181730A (ja) * 2000-12-12 2002-06-26 Saki Corp:Kk 外観検査装置
JP2004333198A (ja) * 2003-05-01 2004-11-25 Olympus Corp 基板検査装置
CN114070977A (zh) * 2016-02-22 2022-02-18 东京毅力科创株式会社 基板拍摄装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002181730A (ja) * 2000-12-12 2002-06-26 Saki Corp:Kk 外観検査装置
JP2004333198A (ja) * 2003-05-01 2004-11-25 Olympus Corp 基板検査装置
CN114070977A (zh) * 2016-02-22 2022-02-18 东京毅力科创株式会社 基板拍摄装置
CN114071076A (zh) * 2016-02-22 2022-02-18 东京毅力科创株式会社 基板拍摄装置
CN114070977B (zh) * 2016-02-22 2024-10-15 东京毅力科创株式会社 基板拍摄装置
US12501004B2 (en) 2016-02-22 2025-12-16 Tokyo Electron Limited Substrate imaging apparatus

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