JP2000056281A - 光変調器とその製造方法 - Google Patents

光変調器とその製造方法

Info

Publication number
JP2000056281A
JP2000056281A JP10224241A JP22424198A JP2000056281A JP 2000056281 A JP2000056281 A JP 2000056281A JP 10224241 A JP10224241 A JP 10224241A JP 22424198 A JP22424198 A JP 22424198A JP 2000056281 A JP2000056281 A JP 2000056281A
Authority
JP
Japan
Prior art keywords
insulating film
bonding pad
forming
mesa
optical modulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10224241A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000056281A5 (enExample
Inventor
Hitoshi Tada
仁史 多田
Tomoko Kadowaki
朋子 門脇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10224241A priority Critical patent/JP2000056281A/ja
Priority to US09/245,838 priority patent/US6282009B1/en
Priority to DE19915898A priority patent/DE19915898B4/de
Publication of JP2000056281A publication Critical patent/JP2000056281A/ja
Priority to US09/839,120 priority patent/US6384955B2/en
Publication of JP2000056281A5 publication Critical patent/JP2000056281A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
    • G02F2201/066—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide channel; buried
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
    • G02F2201/122—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode having a particular pattern

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Semiconductor Lasers (AREA)
JP10224241A 1998-08-07 1998-08-07 光変調器とその製造方法 Pending JP2000056281A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10224241A JP2000056281A (ja) 1998-08-07 1998-08-07 光変調器とその製造方法
US09/245,838 US6282009B1 (en) 1998-08-07 1999-02-08 Light modulator and method of manufacturing the light modulator
DE19915898A DE19915898B4 (de) 1998-08-07 1999-04-08 Lichtmodulator und Verfahren zu dessen Herstellung
US09/839,120 US6384955B2 (en) 1998-08-07 2001-04-23 Light modulator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10224241A JP2000056281A (ja) 1998-08-07 1998-08-07 光変調器とその製造方法

Publications (2)

Publication Number Publication Date
JP2000056281A true JP2000056281A (ja) 2000-02-25
JP2000056281A5 JP2000056281A5 (enExample) 2004-12-16

Family

ID=16810711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10224241A Pending JP2000056281A (ja) 1998-08-07 1998-08-07 光変調器とその製造方法

Country Status (3)

Country Link
US (2) US6282009B1 (enExample)
JP (1) JP2000056281A (enExample)
DE (1) DE19915898B4 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000056281A (ja) * 1998-08-07 2000-02-25 Mitsubishi Electric Corp 光変調器とその製造方法
SG102589A1 (en) * 2000-08-16 2004-03-26 Inst Materials Research & Eng Buried hetero-structure opto-electronic device
US6580843B2 (en) 2001-04-05 2003-06-17 Fujitsu Limited Optical device
US7449354B2 (en) 2006-01-05 2008-11-11 Fairchild Semiconductor Corporation Trench-gated FET for power device with active gate trenches and gate runner trench utilizing one-mask etch
US7446374B2 (en) 2006-03-24 2008-11-04 Fairchild Semiconductor Corporation High density trench FET with integrated Schottky diode and method of manufacture
US20080070411A1 (en) * 2006-09-20 2008-03-20 John Ghekiere Methods for uniformly etching films on a semiconductor wafer
US8174067B2 (en) 2008-12-08 2012-05-08 Fairchild Semiconductor Corporation Trench-based power semiconductor devices with increased breakdown voltage characteristics
US8304829B2 (en) 2008-12-08 2012-11-06 Fairchild Semiconductor Corporation Trench-based power semiconductor devices with increased breakdown voltage characteristics
US8227855B2 (en) * 2009-02-09 2012-07-24 Fairchild Semiconductor Corporation Semiconductor devices with stable and controlled avalanche characteristics and methods of fabricating the same
US8148749B2 (en) * 2009-02-19 2012-04-03 Fairchild Semiconductor Corporation Trench-shielded semiconductor device
US8049276B2 (en) * 2009-06-12 2011-11-01 Fairchild Semiconductor Corporation Reduced process sensitivity of electrode-semiconductor rectifiers
TW201426151A (zh) * 2012-12-19 2014-07-01 Hon Hai Prec Ind Co Ltd 電光調製器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2710171B2 (ja) * 1991-02-28 1998-02-10 日本電気株式会社 面入出力光電融合素子
JP2754957B2 (ja) * 1991-07-10 1998-05-20 日本電気株式会社 半導体光制御素子およびその製造方法
JP3484543B2 (ja) * 1993-03-24 2004-01-06 富士通株式会社 光結合部材の製造方法及び光装置
US5543957A (en) * 1993-12-20 1996-08-06 Nec Corporation Optical modulator and method of producing the same
US5889913A (en) * 1995-03-15 1999-03-30 Kabushiki Kaisha Toshiba Optical semiconductor device and method of fabricating the same
JPH08316579A (ja) 1995-05-18 1996-11-29 Toshiba Corp 光半導体素子及びその製造方法
FR2748129B1 (fr) 1996-04-29 1998-06-12 Alsthom Cge Alcatel Modulateur electro-optique a puits quantiques
JPH1075009A (ja) * 1996-08-30 1998-03-17 Nec Corp 光半導体装置とその製造方法
JP2000056281A (ja) * 1998-08-07 2000-02-25 Mitsubishi Electric Corp 光変調器とその製造方法

Also Published As

Publication number Publication date
DE19915898B4 (de) 2008-04-10
US20010022681A1 (en) 2001-09-20
US6282009B1 (en) 2001-08-28
US6384955B2 (en) 2002-05-07
DE19915898A1 (de) 2000-02-17

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