JP2000021579A - Substrate for organic electroluminescence display element and its manufacture and organic electroluminescence display element using it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To use a large area substrate and to rotate the substrate by relaxing restriction of the evaporation material flying direction by arranging eaves and a skirt on second electrode line separating partition walls crossing first electrode lines formed as a film on the substrate. SOLUTION: A first electrode is formed as a film on a light transmissive insulating substrate 1 of an EL display element, and plural first electrode lines 2 are formed by photolithography. Next, plural second electrode line separating partition walls 7 are formed so as to cross the first electrode lines 2, Eaves and a skirt are formed on these partition walls 7. A lower skirt of the partition walls 7 is desirably longer in the parallel direction to the substrate than upper eaves. A tip angle of the lower skirt of the partition walls 7 is desirably formed in a gentle forward taper shape not more than 45 deg.. The partition walls 7 are desirably formed of a photosensitive resin by dispersing a UV absorber, a color material or both the UV absorber and the color material. Desirably, a height of the partition walls 7 is set to 0.2 to 100 μm, a width is set not less than 0.05 μm, and an eaves thickness is set to 0.05 to 10 μm.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic electroluminescence display device and a substrate for an organic electroluminescence display device which are light-emitting displays as home televisions and advanced information processing terminal displays.

[0002]

2. Description of the Related Art An organic electroluminescence display element (hereinafter, referred to as EL), which is one of flat panel displays, has a structure in which an organic light emitting medium is sandwiched between an anode and a cathode. Light emission occurs. As the luminous medium, a laminate of a plurality of organic luminous medium layers is usually used. Since it is a self-luminous type, it has features of high luminance, high viewing angle, and low voltage driving.

[0003] As an organic electroluminescent display element, a matrix structure in which a plurality of anode electrode lines and a plurality of cathode electrode lines intersect is used. A first electrode line is formed on a substrate, and at least a second electrode line is formed so as to intersect the first electrode line with a light emitting medium interposed therebetween. When the first electrode is an anode, the second electrode is a cathode, and when the first electrode is a cathode, the second electrode is an anode. In order to manufacture a large-capacity, high-definition display element, very fine patterning of electrode lines is required.

In general, there are a photolithography method and a mask evaporation method as a standard method for forming a fine pattern of a thin film.

[0005] However, when the second electrode layer is patterned by photolithography, invasion of the underlying organic luminescent medium layer such as a photoresist solvent or a developing solution cannot be avoided.
The device cannot be used because it causes destruction and deterioration of the device.

On the other hand, the mask vapor deposition method has a problem of adhesion between the vapor deposition mask and the substrate. In the case of poor adhesion, the deposition does not go up behind the deposition mask pattern and the resolution does not increase. If the vapor deposition mask is forcibly brought into contact with the substrate, there is a problem that the organic light emitting medium layer is damaged.

As a patterning method which does not damage the organic light emitting medium layer, Japanese Patent Application Laid-Open Nos.
No. 258860 discloses an oblique vapor deposition technique of an organic substance and a metal using a partition group (see FIG. 8). In this method, a partition wall is formed in a direction intersecting with the anode pattern, and then an organic luminescent medium layer and a cathode are deposited in this order from an oblique direction. In this method, the lamination and patterning of the organic luminescent medium and the cathode material are simultaneously performed. However, there are various problems with this technology. It is necessary to uniformly control the direction of the deposition beam over a large area, the substrate cannot be rotated for uniformity, and the pattern shape is limited to a straight line.

An improvement of the above-described barrier oblique deposition method is as follows.
This is the overhang partition method disclosed in JP-A-8-315981 and JP-A-9-102393. In this method, an inverted tapered partition (see FIG. 9A) and a laminated T-shaped partition (see FIG. 9B) are shown. According to these methods, by providing an overhang portion above the partition walls, patterning can be performed even by a deposition beam perpendicular to the substrate, and use of the substrate rotation is also possible. But,
In the case of the reverse taper partition method, when the incident angle is smaller than the taper angle, deposition occurs on the side wall and a short circuit occurs. On the other hand, the laminated T-shaped partition wall has a problem that the process is complicated and the yield is deteriorated.

Another problem is that the second electrode may be in direct contact with the first electrode without the organic light emitting medium layer due to a difference in the direction of the vapor deposition beam between the organic light emitting medium layer and the second electrode. (See FIG. 10). When this occurs, the second electrode and the first electrode are short-circuited and normal operation cannot be expected. Another problem is that even if there is no short circuit, an electric field concentrates on the thinly laminated organic luminescent medium near the second electrode end or on the edge of the second electrode end, causing dielectric breakdown or Joule heat. This means that deterioration is likely to occur. As a method of preventing these, there is a method of forming an insulating layer below the partition, but this is not preferable because the process becomes more complicated.
Another problem is that the end portion of the interface between the second electrode and the organic light emitting medium layer is exposed, so that the end portion easily deteriorates. The suppression was insufficient with only the sealing layer.

Another problem is that a gap exists between the partition and the cathode electrode, or that the partition transmits light, so that light from the back surface passes through the gap or inside the partition and exits to the display surface. This is to prevent the display (see FIG. 11).

[0011]

As described above, in the conventional partition structure, the direction of the vapor deposition beam is largely restricted, and it is not suitable for the rotation of the substrate or the enlargement of the area. Alternatively, the manufacturing process was complicated. Further, a short-circuit preventing insulating layer was required. In addition, deterioration was easy to occur. Further, there is a problem that the outside light is reflected at a portion other than the display portion and the light from the back surface is transmitted, so that the contrast is lowered and it is difficult to see.

SUMMARY OF THE INVENTION The present invention has been made to solve these problems, and has high tolerance to variations in the direction of a deposition beam, has no problem with substrate rotation, and is suitable for a large area. The process is simple, does not require an insulating layer for short circuit prevention, suppresses deterioration, suppresses external light reflection and light leakage at portions other than the display portion, and is easy to view, a substrate for an organic EL display element, a manufacturing method thereof, and an organic EL. A display element is provided.

[0013]

In order to solve the above-mentioned problems, the present invention has at least a plurality of first electrode lines and a plurality of partition walls extending in a direction intersecting the first electrode lines. An organic electroluminescent display element substrate, wherein the partition wall has an eave on an upper portion and a hem on a lower portion.

According to a second aspect of the present invention, there is provided a substrate for an organic electroluminescent display element, wherein a skirt at a lower portion of the partition is longer than an eave at an upper portion of the partition in a direction parallel to the substrate. That is, in FIG.
The skirt width e> the eave width d.

According to a third aspect of the present invention, there is provided a substrate for an organic electroluminescence display element, wherein a hem at a lower portion of the partition wall has a gentle forward taper having a tip angle of 45 ° or less. That is, in FIG. 6A, the skirt tip angle θ ≦ 45 °. Here, the tip angle is an angle formed by a straight line connecting the upper side of the hem and the hem tip of a portion close to the center by half the hem width from the hem tip and the substrate surface.

A fourth aspect of the present invention relates to the main body of the partition (FIG. 6).
A substrate for an organic electroluminescent display element, wherein an eave (see 2 in FIG. 6B) and an eave (see 3 in FIG. 6B) are made of the same material. is there.

According to a fifth aspect of the present invention, there is provided a substrate for an organic electroluminescence display element, wherein a width of a bottom of the partition is 0.1 to 10 times a height of the partition. That is, in FIG. 6A, a / 10 ≦ e ≦ 10
a.

According to a sixth aspect of the present invention, there is provided a substrate for an organic electroluminescent display element, wherein the partition walls are made of a UV absorbing material, a coloring material, or a photosensitive resin in which both the UV absorbing material and the coloring material are dispersed. .

According to a seventh aspect of the present invention, there is provided a substrate for an organic electroluminescent display device, wherein the UV absorbing material or the coloring material is single or plural.

According to an eighth aspect of the present invention, there is provided a substrate for an organic electroluminescent display element, wherein the partition is transparent or colored.

According to a ninth aspect of the present invention, there is provided a substrate for an organic electroluminescent display element, wherein when the partition is colored black, the partition becomes a light-absorbing partition also serving as a black stripe.

According to a tenth aspect, there is provided an organic electroluminescent display device, wherein a light emitting medium and a second electrode line are provided on the substrate for an organic electroluminescent display device.

According to an eleventh aspect of the present invention, both ends of the luminescent medium and the second electrode line extend to the upper part of the lower part of the partition so as not to contact the first electrode line. It is an organic electroluminescence display element.

According to a twelfth aspect of the present invention, there is provided an organic electroluminescent display device, wherein the second electrode line extends to the outside of the end of the light emitting medium and covers the light emitting medium.

According to a thirteenth aspect, in a method of manufacturing a substrate for an organic electroluminescent display element having at least a plurality of first electrode lines and a plurality of partition walls extending in a direction intersecting with the first electrode lines, the partition walls may be made of a UV-absorbing material. Negative-type photosensitive resin in which both materials and coloring materials are dispersed is formed by coating, exposing and developing,
A method for manufacturing a substrate for an organic electroluminescent display element, comprising performing post-baking after irradiating V.

[0026]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to FIGS. FIG. 6A shows terms indicating the shape of the partition wall in the present invention. Hereinafter, electroluminescence is described as EL.

First, the case where the first electrode is an anode and the second electrode is a cathode will be described. As the translucent insulating substrate 1 in the EL display element of the present invention, a quartz substrate, a glass substrate, a plastic substrate, or the like can be used.

Next, a first electrode is formed on the substrate, and a plurality of first electrode lines 2 are formed by photolithography or the like (see FIG. 2A).

In the present invention, the material of the anode is ITO.
Transparent electrode materials such as (indium tin composite oxide), indium zinc composite oxide, and zinc aluminum composite oxide can be used.

In order to reduce the resistance, a metal such as copper, chromium, aluminum and titanium or a laminate thereof can be partially provided as an auxiliary electrode on the transparent electrode. In addition, it is not necessary to form an insulating layer for preventing short circuit on the first electrode, but the invention is not limited to the absence of the insulating layer.

Next, a plurality of second electrode line separating partitions 7 are formed so as to cross the first electrode lines (FIGS. 1 and 2B).

Since the partition wall 7 of the present invention has the eaves and the skirt, the restriction on the direction in which the deposited material comes in can be greatly relaxed. This allows the use of a large-area substrate and the rotation of the substrate. In addition, not only a linear structure, but also a partition wall or a second electrode having a curved line or a broken line can be formed.

FIG. 6A shows a cross section of a typical partition wall. Partition height a is preferably 0.2 μm to 100 μm
And more preferably 1 μm to 30 μm. The partition width b is preferably 0.05 μm or more, and more preferably 1 μm or more. The eave thickness c is preferably 0.05 μm to 10 μm, and more preferably 0.1 μm to 5 μm. The eave width d is preferably 0.05 μm to 50 μm, and more preferably 0.5 μm to 10 μm. The skirt width e is preferably 0.1 μm to 100 μm, and more preferably 1 μm.
m to 30 μm.

The skirt width e is 0.1 times or more of the partition height a.
It is preferably 10 times, more preferably 0.5 times to 3 times. When the skirt width e is 10 times or more the partition height a, the processing accuracy is extremely deteriorated, which is not preferable.

The principle of forming the partition for separating the second electrode line according to the present invention will be described with reference to FIG. A UV-absorbing material, a coloring material, or a negative resist in which both the UV-absorbing material and the coloring material are dispersed is applied and dried, and UV exposure is performed using a stripe-shaped mask having an appropriate pitch (see FIG. 3A). Then, the resist is exposed up to a certain depth from the surface of the resist, but cannot reach the deep part because the UV light is absorbed, and the lower part remains unexposed. When development is performed in this state, the exposed portions of the surface layer remain without being dissolved, but the unexposed portions are removed (see FIG. 3B). Since the lower portion of the surface layer is an unexposed portion, the dissolution proceeds from the side to form a forward tapered skirt (see FIG. 3C). Further, if the conditions are selected, the skirt can be made longer than the eaves (see FIG. 3D). FIG. 4 is a cross-sectional photograph of the actually formed partition.
(A) and FIG. 4 (b). Since the exposed portion of the positive resist dissolves, processing like the above-described negative resist is impossible. Further, when post-baking is performed after irradiating the electron beam or UV to substantially the entire partition, almost no change is observed in the post-baking.

As a color material, a black color material or a mixed color material of three colors of RGB is preferable to serve also as a black stripe. However, if it is only for forming a partition, a single color material, a plurality of color materials, and a single UV absorbing material are used. A plurality of UV absorbers, a single UV absorber, or a combination of a plurality of colorants and a plurality of UV absorbers may be used. UV absorbers include benzophenone-based, phenylsalicylic-acid-based, cyanoacrylate-based, benzotriazole-based, oxalic anilide-based, and triazine-based organic substances, as well as carbon, glass, cerium oxide, titanium oxide,
Inorganic powders such as zinc oxide and iron oxide can also be used.

Thereafter, an organic luminescent medium and a second electrode are deposited. The organic luminescent medium and the second electrode are separately deposited by eaves and are automatically patterned. Most of the second electrode / luminous medium line is formed directly on the first electrode, but the end of the second electrode extends above the bottom of the partition and is formed at a position distant from the first electrode. Thereby, dielectric breakdown can be suppressed. This was made possible by making the hem a gentle forward taper having a tip angle of 45 ° or less. Further, since the skirt is longer than the eaves, it can be formed by vertical vapor deposition.

By devising the second electrode deposition conditions,
The structure in which the second electrode extends beyond the end of the light emitting medium to completely cover the light emitting medium can be obtained. As a result, exposure of the cathode / luminous medium interface was prevented, and deterioration was suppressed (FIG. 2C).
reference).

The organic luminescent medium of the present invention can be formed of a single-layer film containing a fluorescent substance or a multilayer film.

When the light-emitting medium is formed of a multilayer film, examples of the structure of the light-emitting medium include a hole injection / transport layer, an electron-transport light-emitting layer or a hole-transport light-emitting layer, and a two-layer structure including an electron transport layer.
There is a three-layer structure including a light emitting layer and an electron transport layer. Further, it is also possible to form a multi-layer, and each layer is sequentially formed on a substrate.

Examples of the hole injecting and transporting material include metal phthalocyanines such as copper phthalocyanine and tetra (t-butyl) copper phthalocyanine, and metal-free phthalocyanines, quinacridone compounds, 1,1-bis (4-di-p-tolyl). Aminophenyl) cyclohexane, N, N′-diphenyl-N, N′-bis (3-methylphenyl) -1,1′-
Biphenyl-4,4'-diamine, N, N'-di (1-
Naphthyl) -N, N'-diphenyl-1,1'-biphenyl-4,4'-diamine and other aromatic amine-based low-molecular-weight hole injection / transport materials, poly (para-phenylenevinylene),
It can be selected from polymeric hole transport materials such as polyaniline, polythiophene oligomer materials, and other existing hole transport materials.

Examples of the light emitting material include 9,10-diarylanthracene derivatives, pyrene, coronene, perylene, rubrene, 1,1,4,4-tetraphenylbutadiene, tris (8-quinolinolato) aluminum complex, tris (4 -Methyl-8-quinolinolate) aluminum complex, bis (8-quinolinolate) zinc complex, tris (4-methyl-5-trifluoromethyl-8-quinolinolate) aluminum complex, tris (4-methyl-
5-cyano-8-quinolinolate) aluminum complex,
Bis (2-methyl-5-trifluoromethyl-8-quinolinolate) [4- (4-cyanophenyl) phenolate] aluminum complex, bis (2-methyl-5-cyano-8-quinolinolate) [4- (4- Cyanophenyl)
Phenolate] aluminum complex, tris (8-quinolinolate) scandium complex, bis [8- (para-tosyl) aminoquinoline] zinc complex and cadmium complex,
1,2,3,4-tetraphenylcyclopentadiene,
Pentaphenylcyclopentadiene, poly-2,5-diheptyloxy-para-phenylenevinylene, coumarin-based phosphor, perylene-based phosphor, pyran-based phosphor, anthrone-based phosphor, porphyrin-based phosphor, quinacridone-based phosphor, N, N'-dialkyl-substituted quinacridone-based phosphors, naphthalimide-based phosphors, N, N'-diaryl-substituted pyrrolopyrrole-based phosphors, and the like can be used alone or in combination with other low molecular weight materials or polymer materials. They can be used in combination.

Examples of the organic electron transporting material include 2- (4
-Bifinylyl) -5- (4-t-butylphenyl)
-1,3,4-oxadiazole, 2,5-bis (1-
Naphthyl) -1,3,4-oxadiazole, oxadiazole derivatives synthesized by Hamada et al. (Journal of the Chemical Society of Japan, p. 1540, 1991) and bis (10-hydroxybenzo [h] quinolinolato) beryllium complex, The triazole compounds described in Japanese Unexamined Patent Publication No. Hei 7-90260 are exemplified.

The film can be formed by a vacuum evaporation method. The thickness of the luminescent medium is 1 μm or less even when it is formed by a single layer or a laminate,
１５０150 nm.

As the cathode material, a substance having a high electron injection efficiency is used. Specifically, a single metal such as Mg, Al, or Yb may be used, or Li or oxidized Li, L
Al and Cu having high stability and conductivity are stacked and used with a compound such as iF sandwiched by about 1 nm.

Alternatively, in order to achieve both electron injection efficiency and stability, low work functions of Li, Mg, Ca, Sr, La, C
one or more metals such as e, Er, Eu, Sc, Y, Yb;
An alloy system with a stable metal element such as Ag, Al, or Cu is used. Specifically, alloys such as MgAg, AlLi, and CuLi can be used.

As a method for forming the cathode, a resistance heating evaporation method, an electron beam evaporation method, a reactive evaporation method, an ion plating method, and a sputtering method can be used depending on the material. The thickness of the cathode is desirably about 10 nm to 1 μm.

Also, generally, a sealing layer is formed last,
The cathode and the luminescent medium are prevented from being deteriorated by moisture or oxygen (see FIG. 2D).

A color display is obtained by forming an RGB color filter layer below a transparent electrode and using a white light emitting medium. In the same manner, full color can be achieved by forming a red and green fluorescence conversion film below the transparent electrode and using a blue light emitting medium. Since the partition group is formed, the light emitting media of each color can be completely separated and stacked by using the mask vapor deposition method. This is because the mask does not come into contact with the organic light emitting medium layer and the light emitting medium does not diffuse.

It is needless to say that the same process can be performed when the first electrode is a cathode and the second electrode is an anode.

[0051]

[Example 1] First, an ITO layer was formed as a first electrode on a glass substrate 1 by sputtering. Further, in order to improve transparency and conductivity, a heat treatment was performed in air to crystallize the ITO.

Next, the first electrode line 2 was formed by patterning the ITO by photolithography and wet etching (see FIG. 2A).

A negative photosensitive resin 6 in which fine graphite black particles are dispersed is coated and pre-baked thereon,
A partition 7 having an eave and a skirt was formed by development and post-baking (see FIG. 2B), and the substrate for an organic EL display element of the present invention was completed. The actual shape of the partition is shown in FIG.
Shown in

Finally, copper phthalocyanine, N, N'-di (1-naphthyl) -N, N'-
Diphenyl-1,1′-biphenyl-4,4′-diamine and tris (8-quinolinolato) aluminum complex are sequentially vacuum-deposited in a thickness of 20 nm, 60 nm and 70 nm, and then Al is used as a second electrode 9 on a substrate. After vacuum evaporation while rotating (see FIG. 2 (c)), 1 μm of Ge oxide was ion-plated to form a sealing layer 10 to form the organic EL display element of the present invention (see FIG. 2 (d)). .

FIG. 5 shows a photograph after the luminous medium and the second electrode layer were deposited using the partition walls of the present invention. The luminescent medium and the second electrode layer are patterned into stripes between the partition walls,
Further, both end portions of the second electrode line extend to the lower part of the bottom of the light-absorbing partition wall and completely cover the luminescent medium. In the obtained organic EL display element, the second electrode line was completely separated, and there was no short circuit between the second electrodes. Also,
Even when the driving voltage was increased to 10 V or more, no element short circuit at the end of the second electrode line was observed.

Example 2 A first electrode line 2 was formed in the same process as in Example 1 (see FIG. 2A).

A negative photosensitive resin 6 in which a triazine-based UV absorbing material is dispersed is applied thereon, prebaked, and exposed, developed and postbaked to form a partition 7 having an eaves and a skirt.
Was formed (see FIG. 2B), and the substrate for an organic EL display element of the present invention was completed. The actual shape of the partition is shown in FIG.

Finally, the organic light-emitting medium layer 8, the second electrode 9, and the sealing layer 10 were formed in the same steps as in Example 1 to form the organic EL display element of the present invention (FIGS. 2C and 2C). d)).

Example 3 A first electrode line 2 was formed in the same process as in Example 1 (see FIG. 2A).

A negative photosensitive resin 6 in which a mixed colorant of anthraquino-based red and copper phthalocyanine-based green and blue three colors is dispersed is applied thereon, prebaked, and exposed, developed and postbaked to eaves. Was formed (see FIG. 2B), and the substrate for an organic EL display element of the present invention was completed.

Finally, the organic light emitting medium layer 8, the second electrode 9, and the sealing layer 10 were formed in the same steps as in Example 1 to form the organic EL display element of the present invention (FIGS. 2C and 2C). d)).

[Embodiment 4] An electron beam or UV was applied to almost the entire surface of the partition wall 7 manufactured in the same process as in Embodiment 1,
Post-baking was performed at 50 to 300 ° C. for 10 to 120 minutes to complete the organic EL display element substrate of the present invention. Further, an organic EL display element of the present invention was formed in the same steps as in Example 1. In the obtained organic EL display element, the second electrode line was completely separated, and there was no short circuit between the second electrodes. Also, even when the driving voltage was increased to 10 V or more, no element short circuit at the end of the second electrode line was observed.

[Comparative Example] The same procedure as in Example 1 was repeated except that the first electrode line 2 was formed, and then the partition was formed using a negative photosensitive resin in which no UV absorbing material or coloring material was dispersed. An organic EL display element was formed in the same manner as in Example 1. The partition wall of this organic EL display element had a tip angle of 45 ° or more, and the upper portion had a shape without eaves (see FIG. 7). There was a short circuit in a part between the second electrode lines due to deposition of the deposit on the side wall of the partition, and when the driving voltage was increased to 10 V or more, the second electrode line end was short-circuited with the first electrode line.

[Effects of Tip Angle] Next, samples having a septum tip angle of about 30 °, 45 °, and 60 ° were prepared and compared with a sample without a hem. For 30 ° and 45 ° samples,
No short circuit occurred when 10 V was applied between the first electrode and the second electrode.
%, And about 15% without a hem, a short circuit occurred.

[Effects of Bottom Width and Partition Height] Partition height 2.
In the sample of 5 μm and the hem width of 0.3 μm, no short circuit occurred when 10 V was applied.
A short circuit occurred in about 5% of the 096 pieces. Partition height 10μ
m, the hem width of the sample is about 50 μm,
A large variation of 100 μm occurred. No short circuit occurred when 10 V was applied, but variation was observed in the pixel shape. In the sample aiming at the hem width of 100 μm, a residual film was formed in the pixel portion.

[Embodiment 5] A case where the first electrode is a cathode and the second electrode is an anode will be described. An Al film was formed as a first electrode on a glass substrate, and processed into a stripe by a normal photoetching method. Next, partition walls were formed using a negative resist in which glass powder was dispersed. And Li
F, and tris (8-quinolinolato) aluminum, N, N′-di (1-naphthyl) -N, N′diphenyl-1,1′-biphenyl-
After 4,4′-diamine and copper phthalocyanine were sequentially deposited, an indium-zinc composite oxide was deposited as a second electrode. In this case, display is performed on the second electrode side. No short circuit was observed even when 10 V was applied.

[0067]

According to the first to ninth aspects of the present invention, the organic electroluminescent display element has a small limitation on the direction of the vapor deposition beam, is suitable for uniform vapor deposition with a large area, and does not require an insulating layer for preventing short circuit. Substrate can be provided. Further, it is possible to provide a substrate for an organic electroluminescent display element which suppresses transmitted light from the back surface and reflection of external light. Further, according to the tenth to twelfth aspects of the present invention, it is possible to provide an organic electroluminescent display element in which a short circuit due to dielectric breakdown does not easily occur and is hardly deteriorated. Furthermore, according to the invention of claim 13, such a substrate for an organic electroluminescence display element can be easily manufactured.

[0068]

[Brief description of the drawings]

FIG. 1 is a sectional view of a main part of an EL display element of the present invention.

FIG. 2 is an explanatory view showing a manufacturing process of the EL display element of the present invention.

FIG. 3 is an explanatory view showing the principle of forming a partition wall according to the present invention.

FIG. 4 is a cross-sectional SEM photograph of a partition wall of the present invention.

FIG. 5 is a cross-sectional SEM photograph after a light emitting medium and a second electrode layer are deposited using the barrier ribs of the present invention.

FIG. 6 is an explanatory diagram showing terms of a partition shape in the present invention.

FIG. 7 is an explanatory diagram showing a cross section near a partition wall of a comparative example.

FIG. 8 is an explanatory view showing a conventional partition wall slick evaporation method.

FIG. 9 is an explanatory view showing a conventional partition.

FIG. 10 is an explanatory diagram of a short-circuit phenomenon that tends to occur in the related art.

FIG. 11 is an explanatory view of the backside light transmission near the partition and the external light reflection at the partition, which occur conventionally.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Substrate 2 1st electrode line 3 Exposure light 4 Photomask 5 Photosensitive part 6 Negative photosensitive resin layer in which UV absorbing material or coloring material was dispersed 7 Partition wall 8 Light emitting medium 9 Second electrode line 10 Sealing layer 11 Deposit

Continuing from the front page (72) Inventor Mizunin Tani 1-5-1, Taito, Taito-ku, Tokyo Letterpress Printing Co., Ltd. (72) Inventor Takao Minato 1-5-1, Taito 1-5-1, Taito, Taito-ku, Tokyo Letterpress printing Inside (72) Inventor Yuichi Ito 1-5-1, Taito, Taito-ku, Tokyo Toppan Printing Co., Ltd. (72) Inventor Kai Teruhiko Kai 1-1-5, Taito, Taito-ku, Tokyo Toppan Printing Co., Ltd. (72) Inventor Katsuhiro Suzuki 1-5-1, Taito, Taito-ku, Tokyo Toppan Printing Co., Ltd.

Claims (13)

[Claims] 1. An organic electroluminescence display element substrate having at least a plurality of first electrode lines and a plurality of partition walls extending in a direction intersecting with the first electrode lines, wherein the partition walls have an upper eave and a lower hem. A substrate for an organic electroluminescent display element, characterized by comprising: 2. The substrate for an organic electroluminescent display device according to claim 1, wherein the skirt of the lower part of the partition is longer than the eaves of the upper part of the partition in a direction parallel to the substrate. 3. The organic electroluminescent device according to claim 1, wherein the skirt of the lower part of the partition wall has a gentle forward tapered shape having a tip angle of 45 ° or less. Substrate for luminescence display element. 4. The substrate for an organic electroluminescent display device according to claim 1, wherein the main body, the eaves, and the skirt of the partition wall are made of the same material. 5. The organic electroluminescent device according to claim 1, wherein the width of the bottom of the partition is 0.1 to 10 times the height of the partition. Substrate for luminescence display element. 6. The method according to claim 1, wherein the partition wall is made of a UV absorbing material, a coloring material, or a photosensitive resin in which both the UV absorbing material and the coloring material are dispersed. The substrate for an organic electroluminescence display element according to the above. 7. The substrate for an organic electroluminescent display device according to claim 6, wherein said UV absorbing material or coloring material is used alone or in plural. 8. The substrate for an organic electroluminescent display device according to claim 1, wherein the partition is transparent or colored. 9. The substrate for an organic electroluminescent display device according to claim 1, wherein when the partition is colored black, the partition becomes a light-absorbing partition also serving as a black stripe. . 10. An organic electroluminescent display device comprising a substrate for an organic electroluminescent display device according to claim 1 and a light emitting medium and a second electrode line provided on the substrate. 11. The device according to claim 10, wherein the end portions on both sides of the luminescent medium and the second electrode line extend above the bottom of the partition wall and are not in contact with the first electrode line. Organic electroluminescence display device. 12. The organic electroluminescent display according to claim 10, wherein the second electrode line extends to the outside of the end of the luminous medium and covers the luminous medium. element. 13. A method of manufacturing a substrate for an organic electroluminescence display element having at least a plurality of first electrode lines and a plurality of partitions extending in a direction intersecting the first electrode lines, wherein the partition is made of a UV absorbing material or a coloring material. Alternatively, a negative photosensitive resin in which both a UV absorbing material and a coloring material are dispersed is formed by applying, exposing, and developing steps, and then irradiating with an electron beam or UV and then performing post-baking, wherein the organic electroluminescent display is characterized in that A method for manufacturing an element substrate.