JP1732202S - 基板保持具 - Google Patents
基板保持具Info
- Publication number
- JP1732202S JP1732202S JP2022013426F JP2022013426F JP1732202S JP 1732202 S JP1732202 S JP 1732202S JP 2022013426 F JP2022013426 F JP 2022013426F JP 2022013426 F JP2022013426 F JP 2022013426F JP 1732202 S JP1732202 S JP 1732202S
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- article
- state
- board holder
- reattaching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 abstract 5
- 238000004140 cleaning Methods 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 239000003595 mist Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Abstract
本物品は、例えば半導体ウェーハ等の基板を保持するために用いられる基板保持具である。本物品を用いて基板を保持した状態を「使用状態を示す参考図」に表わす。本物品の意匠登録を受けようとする部分は、多数のテーパ面から構成されるため、処理時に基板上に流れる薬液や洗浄液が本物品に衝突した際、速やかに外方へ排出され、ミスト（液飛沫）が基板に再付着することを防止する。
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022013426F JP1732202S (ja) | 2022-06-22 | 2022-06-22 | 基板保持具 |
| TW111306116F TWD227462S (zh) | 2022-06-22 | 2022-12-06 | 基板保持具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022013426F JP1732202S (ja) | 2022-06-22 | 2022-06-22 | 基板保持具 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1732202S true JP1732202S (ja) | 2022-12-14 |
Family
ID=84418496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022013426F Active JP1732202S (ja) | 2022-06-22 | 2022-06-22 | 基板保持具 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP1732202S (ja) |
| TW (1) | TWD227462S (ja) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1651619S (ja) | 2019-07-11 | 2020-01-27 |
-
2022
- 2022-06-22 JP JP2022013426F patent/JP1732202S/ja active Active
- 2022-12-06 TW TW111306116F patent/TWD227462S/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TWD227462S (zh) | 2023-09-11 |
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