ITTO20020370A0 - Stadio di pompaggio per pompa da vuoto. - Google Patents

Stadio di pompaggio per pompa da vuoto.

Info

Publication number
ITTO20020370A0
ITTO20020370A0 IT2002TO000370A ITTO20020370A ITTO20020370A0 IT TO20020370 A0 ITTO20020370 A0 IT TO20020370A0 IT 2002TO000370 A IT2002TO000370 A IT 2002TO000370A IT TO20020370 A ITTO20020370 A IT TO20020370A IT TO20020370 A0 ITTO20020370 A0 IT TO20020370A0
Authority
IT
Italy
Prior art keywords
vacuum pump
pumping stage
pumping
stage
vacuum
Prior art date
Application number
IT2002TO000370A
Other languages
English (en)
Inventor
Roberto Cerruti
Silvio Giors
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Priority to IT2002TO000370A priority Critical patent/ITTO20020370A1/it
Publication of ITTO20020370A0 publication Critical patent/ITTO20020370A0/it
Priority to EP03003184A priority patent/EP1361366B1/en
Priority to DE60300515T priority patent/DE60300515T2/de
Priority to US10/429,811 priority patent/US6877949B2/en
Priority to JP2003128357A priority patent/JP2003322095A/ja
Publication of ITTO20020370A1 publication Critical patent/ITTO20020370A1/it

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
IT2002TO000370A 2002-05-06 2002-05-06 Stadio di pompaggio per pompa da vuoto. ITTO20020370A1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IT2002TO000370A ITTO20020370A1 (it) 2002-05-06 2002-05-06 Stadio di pompaggio per pompa da vuoto.
EP03003184A EP1361366B1 (en) 2002-05-06 2003-02-19 Pumping stage for a vacuum pump
DE60300515T DE60300515T2 (de) 2002-05-06 2003-02-19 Pumpstufe für eine Vakuumpumpe
US10/429,811 US6877949B2 (en) 2002-05-06 2003-05-05 Pumping stage for a vacuum pump
JP2003128357A JP2003322095A (ja) 2002-05-06 2003-05-06 真空ポンプ用ポンピングステージ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT2002TO000370A ITTO20020370A1 (it) 2002-05-06 2002-05-06 Stadio di pompaggio per pompa da vuoto.

Publications (2)

Publication Number Publication Date
ITTO20020370A0 true ITTO20020370A0 (it) 2002-05-06
ITTO20020370A1 ITTO20020370A1 (it) 2003-11-06

Family

ID=27639043

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2002TO000370A ITTO20020370A1 (it) 2002-05-06 2002-05-06 Stadio di pompaggio per pompa da vuoto.

Country Status (5)

Country Link
US (1) US6877949B2 (it)
EP (1) EP1361366B1 (it)
JP (1) JP2003322095A (it)
DE (1) DE60300515T2 (it)
IT (1) ITTO20020370A1 (it)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7223064B2 (en) * 2005-02-08 2007-05-29 Varian, Inc. Baffle configurations for molecular drag vacuum pumps
JP2007162483A (ja) * 2005-12-09 2007-06-28 Denso Corp 過流ポンプ
EP2027015A1 (en) * 2006-06-12 2009-02-25 Mag Aerospace Industries, Inc. Regenerative vacuum generator for aircraft and other vehicles
US20080056886A1 (en) * 2006-08-31 2008-03-06 Varian, S.P.A. Vacuum pumps with improved pumping channel cross sections
US7628577B2 (en) 2006-08-31 2009-12-08 Varian, S.P.A. Vacuum pumps with improved pumping channel configurations
KR101967001B1 (ko) * 2007-06-07 2019-04-08 데카 프로덕츠 리미티드 파트너쉽 증류 장치 및 압축기
US11884555B2 (en) 2007-06-07 2024-01-30 Deka Products Limited Partnership Water vapor distillation apparatus, method and system
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
WO2011025490A1 (en) * 2009-08-27 2011-03-03 Hewlett-Packard Development Company, L.P. Transmitting data from a computer to a plurality of devices
DE102010019940B4 (de) * 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
US10759676B2 (en) 2011-07-15 2020-09-01 Deka Products Limited Partnership Water vapor distillation apparatus, method and system
DE102022122860A1 (de) 2022-09-08 2022-11-03 Agilent Technologies, Inc. - A Delaware Corporation - Molekularpumpenstufe für Turbomolekularpumpe mit Diskontinuität in Kanal

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE876285C (de) * 1940-09-29 1953-05-11 Siemens Ag Ringverdichter
GB606127A (en) * 1944-10-30 1948-08-06 Bendix Aviat Corp Blowers
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
DE4242474A1 (de) * 1992-12-16 1994-06-23 Sel Alcatel Ag Vorrichtung zum Fördern eines gasförmigen Mediums
US5456575A (en) 1994-05-16 1995-10-10 Varian Associates, Inc. Non-centric improved pumping stage for turbomolecular pumps
DE19913950A1 (de) * 1999-03-26 2000-09-28 Rietschle Werner Gmbh & Co Kg Seitenkanalverdichter

Also Published As

Publication number Publication date
US20030219337A1 (en) 2003-11-27
DE60300515D1 (de) 2005-05-25
ITTO20020370A1 (it) 2003-11-06
DE60300515T2 (de) 2006-02-23
EP1361366A2 (en) 2003-11-12
EP1361366B1 (en) 2005-04-20
JP2003322095A (ja) 2003-11-14
US6877949B2 (en) 2005-04-12
EP1361366A3 (en) 2004-02-18

Similar Documents

Publication Publication Date Title
DE60226377D1 (de) Vakuumpumpe
DE60237942D1 (de) Vakuumpumpe
DE60234987D1 (de) Vakuumpumpe
DE50312630D1 (de) Turbomolekularvakuumpumpe
ITBO20030528A1 (it) Impianto di pompaggio utilizzante una pompa a palette
DE10393279D2 (de) Vakuumpumpe
DE60314930D1 (de) Vakuumpumpe
ITTO20020370A1 (it) Stadio di pompaggio per pompa da vuoto.
DE502004008709D1 (de) Mehrstufige reibungsvakuumpumpe
DE602004029470D1 (de) Vakuumpumpe
ITTO20030421A1 (it) Pompa da vuoto compatta
DE60228765D1 (de) Flügelzellenvakuumpumpe
DE50308541D1 (de) Vakuumpumpe
DE60233458D1 (de) Vakuumpumpe
ITRM20040062A1 (it) Apparecchiatura a pompa di calore.
ITTO20030392A1 (it) Sistema di pompaggio per vuoto.
DE50208630D1 (de) Vakuumpumpe
GB0322883D0 (en) Vacuum pump
DE60328652D1 (de) Mehrstufige Roots-Type-Vakuumpumpe
ITTO20020859A1 (it) Stadio di pompaggio vibrante per pompe da vuoto e pompa da vuoto a stadi di pompaggio vibranti.
DE60101368D1 (de) Vakuumpumpe
DE60300490D1 (de) Vakuumpumpe
DE602004030943D1 (de) Zweistufige scrollvakuumpumpe
DE50212916D1 (de) Vakuumpumpe
DE50305737D1 (de) Vakuumpumpe