DE602004030943D1 - Zweistufige scrollvakuumpumpe - Google Patents

Zweistufige scrollvakuumpumpe

Info

Publication number
DE602004030943D1
DE602004030943D1 DE602004030943T DE602004030943T DE602004030943D1 DE 602004030943 D1 DE602004030943 D1 DE 602004030943D1 DE 602004030943 T DE602004030943 T DE 602004030943T DE 602004030943 T DE602004030943 T DE 602004030943T DE 602004030943 D1 DE602004030943 D1 DE 602004030943D1
Authority
DE
Germany
Prior art keywords
vacuum pump
scroll vacuum
stage scroll
stage
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004030943T
Other languages
English (en)
Inventor
Anthony G Liepert
Jeffrey C Warren
Robert M Curry
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Inc filed Critical Varian Inc
Publication of DE602004030943D1 publication Critical patent/DE602004030943D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0269—Details concerning the involute wraps
    • F04C18/0276—Different wall heights
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253—Details concerning the base
    • F04C18/0261—Details of the ports, e.g. location, number, geometry
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F04C29/0035—Equalization of pressure pulses

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE602004030943T 2003-11-06 2004-11-02 Zweistufige scrollvakuumpumpe Active DE602004030943D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/703,852 US6764288B1 (en) 2003-11-06 2003-11-06 Two stage scroll vacuum pump
PCT/US2004/036369 WO2005047704A1 (en) 2003-11-06 2004-11-02 Two stage scroll vacuum pump

Publications (1)

Publication Number Publication Date
DE602004030943D1 true DE602004030943D1 (de) 2011-02-17

Family

ID=32682846

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004030943T Active DE602004030943D1 (de) 2003-11-06 2004-11-02 Zweistufige scrollvakuumpumpe

Country Status (4)

Country Link
US (1) US6764288B1 (de)
EP (1) EP1690007B1 (de)
DE (1) DE602004030943D1 (de)
WO (1) WO2005047704A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7261528B2 (en) * 2004-03-30 2007-08-28 Varian, Inc. Scroll pump with load bearing synchronization device
GB0426937D0 (en) * 2004-12-08 2005-01-12 Boc Group Plc Scroll-type apparatus
FR2881189A1 (fr) * 2005-01-21 2006-07-28 V G B Vulliez Gestion Brevets Pompe a vide a cycle de translation circulaire a plusieurs arbres
JP4709016B2 (ja) * 2006-01-12 2011-06-22 アネスト岩田株式会社 複合圧縮機
FR2927672B1 (fr) * 2008-02-19 2012-04-13 Danfoss Commercial Compressors Compresseur frigorifique a spirales
US9328730B2 (en) * 2013-04-05 2016-05-03 Agilent Technologies, Inc. Angular synchronization of stationary and orbiting plate scroll blades in a scroll pump using a metallic bellows
KR102060470B1 (ko) 2013-06-05 2019-12-30 엘지전자 주식회사 2단 압축기
JP6444786B2 (ja) * 2015-03-20 2018-12-26 三菱重工サーマルシステムズ株式会社 スクロール圧縮機
WO2017134481A1 (en) * 2016-02-02 2017-08-10 Monarch Power Technology (Hk) Ltd. A tapering spiral gas turbine for combined cooling, heating, power, pressure, work and water

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4141677A (en) * 1977-08-15 1979-02-27 Ingersoll-Rand Company Scroll-type two stage positive fluid-displacement apparatus with intercooler
US4389171A (en) 1981-01-15 1983-06-21 The Trane Company Gas compressor of the scroll type having reduced starting torque
JPS6037320B2 (ja) * 1981-10-12 1985-08-26 サンデン株式会社 スクロ−ル型圧縮機
US4477238A (en) 1983-02-23 1984-10-16 Sanden Corporation Scroll type compressor with wrap portions of different axial heights
US4497615A (en) 1983-07-25 1985-02-05 Copeland Corporation Scroll-type machine
JPS61152984A (ja) 1984-12-26 1986-07-11 Nippon Soken Inc スクロ−ル型圧縮機
JP2718295B2 (ja) 1991-08-30 1998-02-25 ダイキン工業株式会社 スクロール圧縮機
DE69623516T2 (de) * 1995-02-28 2003-05-15 Anest Iwata Corp Kontrollsystem für zweistufige Vakuumpumpe
US5616015A (en) 1995-06-07 1997-04-01 Varian Associates, Inc. High displacement rate, scroll-type, fluid handling apparatus
US5857844A (en) * 1996-12-09 1999-01-12 Carrier Corporation Scroll compressor with reduced height orbiting scroll wrap
EP0863313A1 (de) * 1997-03-04 1998-09-09 Anest Iwata Corporation Zweistufiger Spiralverdichter
DE19800711A1 (de) * 1998-01-10 1999-07-29 Hermann Dipl Ing Lang Trockene Schraubenspindel Vakuumpumpe mit innerer Vorverdichtung
US6050792A (en) 1999-01-11 2000-04-18 Air-Squared, Inc. Multi-stage scroll compressor
JP2002364561A (ja) * 2001-06-04 2002-12-18 Hitachi Ltd スクロール式流体機械

Also Published As

Publication number Publication date
EP1690007B1 (de) 2011-01-05
WO2005047704A1 (en) 2005-05-26
EP1690007A1 (de) 2006-08-16
US6764288B1 (en) 2004-07-20

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC., SANTA CLARA, CALIF, US