ITMI20070119A1 - Componente micromeccanica e relativo procedimento di fabbricazione - Google Patents

Componente micromeccanica e relativo procedimento di fabbricazione

Info

Publication number
ITMI20070119A1
ITMI20070119A1 IT000119A ITMI20070119A ITMI20070119A1 IT MI20070119 A1 ITMI20070119 A1 IT MI20070119A1 IT 000119 A IT000119 A IT 000119A IT MI20070119 A ITMI20070119 A IT MI20070119A IT MI20070119 A1 ITMI20070119 A1 IT MI20070119A1
Authority
IT
Italy
Prior art keywords
manufacturing procedure
micromechanical component
micromechanical
component
procedure
Prior art date
Application number
IT000119A
Other languages
English (en)
Inventor
Christoph Schelling
Heribert Weber
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20070119A1 publication Critical patent/ITMI20070119A1/it

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets
    • H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Micromachines (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
IT000119A 2006-01-31 2007-01-26 Componente micromeccanica e relativo procedimento di fabbricazione ITMI20070119A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006004287A DE102006004287A1 (de) 2006-01-31 2006-01-31 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren

Publications (1)

Publication Number Publication Date
ITMI20070119A1 true ITMI20070119A1 (it) 2007-08-01

Family

ID=38268198

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000119A ITMI20070119A1 (it) 2006-01-31 2007-01-26 Componente micromeccanica e relativo procedimento di fabbricazione

Country Status (5)

Country Link
US (1) US20070222006A1 (it)
JP (1) JP2007208986A (it)
DE (1) DE102006004287A1 (it)
FR (1) FR2896789A1 (it)
IT (1) ITMI20070119A1 (it)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005059905A1 (de) * 2005-12-15 2007-06-28 Robert Bosch Gmbh Mikromechanisches Bauelement und Herstellungsverfahren
US20090307594A1 (en) * 2006-05-12 2009-12-10 Timo Kosonen Adaptive User Interface
JP4946796B2 (ja) * 2007-10-29 2012-06-06 ヤマハ株式会社 振動トランスデューサおよび振動トランスデューサの製造方法
JP5006364B2 (ja) * 2008-07-28 2012-08-22 アオイ電子株式会社 指向性マイクロフォン
US8175293B2 (en) * 2009-04-16 2012-05-08 Nokia Corporation Apparatus, methods and computer programs for converting sound waves to electrical signals
CN201438743U (zh) * 2009-05-15 2010-04-14 瑞声声学科技(常州)有限公司 麦克风
DE102010062555B4 (de) 2010-12-08 2019-05-23 Robert Bosch Gmbh Mikromechanische Membranvorrichtung und entsprechendes Herstellungsverfahren sowie Membrananordnung
JP5872163B2 (ja) 2011-01-07 2016-03-01 オムロン株式会社 音響トランスデューサ、および該音響トランスデューサを利用したマイクロフォン
US9380380B2 (en) 2011-01-07 2016-06-28 Stmicroelectronics S.R.L. Acoustic transducer and interface circuit
US9167354B2 (en) 2011-03-09 2015-10-20 Sennheiser Electronic Gmbh & Co. Kg Electroacoustic sound transducer
DE102012203900A1 (de) * 2012-03-13 2013-09-19 Robert Bosch Gmbh Bauelement mit einer mikromechanischen Mikrofonstruktur
DE102012212112A1 (de) * 2012-07-11 2014-01-30 Robert Bosch Gmbh Bauelement mit einer mikromechanischen Mikrofonstruktur
CN103712601B (zh) * 2012-10-08 2016-06-01 硕英股份有限公司 液体多层电容倾斜微传感器
CN107786929B (zh) * 2016-08-26 2023-12-26 华景科技无锡有限公司 硅麦克风

Also Published As

Publication number Publication date
FR2896789A1 (fr) 2007-08-03
US20070222006A1 (en) 2007-09-27
JP2007208986A (ja) 2007-08-16
DE102006004287A1 (de) 2007-08-02

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