FR2908124B1 - Actionneur micromecanique - Google Patents
Actionneur micromecaniqueInfo
- Publication number
- FR2908124B1 FR2908124B1 FR0758774A FR0758774A FR2908124B1 FR 2908124 B1 FR2908124 B1 FR 2908124B1 FR 0758774 A FR0758774 A FR 0758774A FR 0758774 A FR0758774 A FR 0758774A FR 2908124 B1 FR2908124 B1 FR 2908124B1
- Authority
- FR
- France
- Prior art keywords
- micromechanical actuator
- micromechanical
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Materials For Medical Uses (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006052414.4A DE102006052414B4 (de) | 2006-11-07 | 2006-11-07 | Mikromechanischer Aktor mit einer Welle |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2908124A1 FR2908124A1 (fr) | 2008-05-09 |
FR2908124B1 true FR2908124B1 (fr) | 2013-03-22 |
Family
ID=39264938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0758774A Expired - Fee Related FR2908124B1 (fr) | 2006-11-07 | 2007-11-05 | Actionneur micromecanique |
Country Status (5)
Country | Link |
---|---|
US (1) | US8791620B2 (fr) |
JP (1) | JP2008118850A (fr) |
DE (1) | DE102006052414B4 (fr) |
FR (1) | FR2908124B1 (fr) |
IT (1) | ITMI20072119A1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006052414B4 (de) * | 2006-11-07 | 2015-10-01 | Robert Bosch Gmbh | Mikromechanischer Aktor mit einer Welle |
JP5783568B2 (ja) * | 2011-10-31 | 2015-09-24 | 国立大学法人九州大学 | マイクロスキャナ |
DE102012200943B4 (de) | 2012-01-24 | 2024-05-29 | Robert Bosch Gmbh | Gelenkvorrichtung für einen Sensor und Sensor |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3543917A (en) | 1968-06-06 | 1970-12-01 | Cochran Western Corp | Inclined elevator conveyor |
US6128122A (en) * | 1998-09-18 | 2000-10-03 | Seagate Technology, Inc. | Micromachined mirror with stretchable restoring force member |
US5999303A (en) * | 1997-03-24 | 1999-12-07 | Seagate Technology Inc. | Micro-machined mirror using tethered elements |
DE19728598C2 (de) * | 1997-07-04 | 2000-12-14 | Bosch Gmbh Robert | Mikromechanische Spiegeleinrichtung |
TW472402B (en) * | 2001-01-02 | 2002-01-11 | Hung-Yi Lin | Micro-mechanical driving device and its manufacturing method |
TW480346B (en) * | 2001-02-01 | 2002-03-21 | Walsin Lihwa Corp | Actuating mechanism for rotating micro-mirror |
US6480320B2 (en) * | 2001-02-07 | 2002-11-12 | Transparent Optical, Inc. | Microelectromechanical mirror and mirror array |
JP3827977B2 (ja) * | 2001-08-20 | 2006-09-27 | 富士通株式会社 | マイクロミラー素子の製造方法 |
JP4089215B2 (ja) * | 2001-09-17 | 2008-05-28 | 株式会社ニコン | マイクロアクチュエータ、並びに、これを用いたマイクロアクチュエータ装置、光スイッチ及び光スイッチアレー |
US6760144B2 (en) * | 2001-12-05 | 2004-07-06 | Jds Uniphase Corporation | Articulated MEMS electrostatic rotary actuator |
CN1620626A (zh) * | 2002-01-21 | 2005-05-25 | 松下电器产业株式会社 | 光学开关及其制造方法、使用该开关的信息传送装置 |
US6822370B2 (en) * | 2002-03-06 | 2004-11-23 | Analog Devices, Inc. | Parallel plate electrostatic actuation of MEMS mirrors |
US7085122B2 (en) * | 2003-05-21 | 2006-08-01 | The Regents Of The University Of California | MEMS tunable capacitor based on angular vertical comb drives |
JP2005092174A (ja) * | 2003-08-12 | 2005-04-07 | Fujitsu Ltd | マイクロ揺動素子 |
CA2536722A1 (fr) * | 2005-02-16 | 2006-08-16 | Jds Uniphase Inc. | Structures mems articulees |
JP4645227B2 (ja) * | 2005-02-28 | 2011-03-09 | セイコーエプソン株式会社 | 振動子構造体及びその製造方法 |
DE102006052414B4 (de) * | 2006-11-07 | 2015-10-01 | Robert Bosch Gmbh | Mikromechanischer Aktor mit einer Welle |
-
2006
- 2006-11-07 DE DE102006052414.4A patent/DE102006052414B4/de active Active
-
2007
- 2007-11-05 FR FR0758774A patent/FR2908124B1/fr not_active Expired - Fee Related
- 2007-11-05 JP JP2007287536A patent/JP2008118850A/ja active Pending
- 2007-11-06 IT IT002119A patent/ITMI20072119A1/it unknown
- 2007-11-06 US US11/983,176 patent/US8791620B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
DE102006052414A1 (de) | 2008-05-08 |
JP2008118850A (ja) | 2008-05-22 |
DE102006052414B4 (de) | 2015-10-01 |
ITMI20072119A1 (it) | 2008-05-08 |
US8791620B2 (en) | 2014-07-29 |
FR2908124A1 (fr) | 2008-05-09 |
US20080151342A1 (en) | 2008-06-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 9 |
|
PLFP | Fee payment |
Year of fee payment: 10 |
|
PLFP | Fee payment |
Year of fee payment: 11 |
|
PLFP | Fee payment |
Year of fee payment: 13 |
|
PLFP | Fee payment |
Year of fee payment: 14 |
|
PLFP | Fee payment |
Year of fee payment: 15 |
|
ST | Notification of lapse |
Effective date: 20230705 |