FI20065348A - Spektrometri ja inferferometrinen menetelmä - Google Patents

Spektrometri ja inferferometrinen menetelmä Download PDF

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Publication number
FI20065348A
FI20065348A FI20065348A FI20065348A FI20065348A FI 20065348 A FI20065348 A FI 20065348A FI 20065348 A FI20065348 A FI 20065348A FI 20065348 A FI20065348 A FI 20065348A FI 20065348 A FI20065348 A FI 20065348A
Authority
FI
Finland
Prior art keywords
spectrometer
interferometric
procedure
interferometric procedure
Prior art date
Application number
FI20065348A
Other languages
English (en)
Swedish (sv)
Other versions
FI119830B (fi
FI20065348A0 (fi
Inventor
Heikki Saari
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI20065348A priority Critical patent/FI119830B/fi
Publication of FI20065348A0 publication Critical patent/FI20065348A0/fi
Priority to EP07730777.5A priority patent/EP2021748B1/en
Priority to PCT/FI2007/050290 priority patent/WO2007135244A2/en
Priority to US12/302,013 priority patent/US8130380B2/en
Publication of FI20065348A publication Critical patent/FI20065348A/fi
Application granted granted Critical
Publication of FI119830B publication Critical patent/FI119830B/fi

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/10Arrangements of light sources specially adapted for spectrometry or colorimetry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/26Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/30Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36Investigating two or more bands of a spectrum by separate detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
FI20065348A 2006-05-24 2006-05-24 Spektrometri ja inferferometrinen menetelmä FI119830B (fi)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FI20065348A FI119830B (fi) 2006-05-24 2006-05-24 Spektrometri ja inferferometrinen menetelmä
EP07730777.5A EP2021748B1 (en) 2006-05-24 2007-05-22 Spectrometer and interferometric method
PCT/FI2007/050290 WO2007135244A2 (en) 2006-05-24 2007-05-22 Spectrometer and interferometric method
US12/302,013 US8130380B2 (en) 2006-05-24 2007-05-22 Spectrometer and interferometric method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20065348 2006-05-24
FI20065348A FI119830B (fi) 2006-05-24 2006-05-24 Spektrometri ja inferferometrinen menetelmä

Publications (3)

Publication Number Publication Date
FI20065348A0 FI20065348A0 (fi) 2006-05-24
FI20065348A true FI20065348A (fi) 2007-11-25
FI119830B FI119830B (fi) 2009-03-31

Family

ID=36540051

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20065348A FI119830B (fi) 2006-05-24 2006-05-24 Spektrometri ja inferferometrinen menetelmä

Country Status (4)

Country Link
US (1) US8130380B2 (fi)
EP (1) EP2021748B1 (fi)
FI (1) FI119830B (fi)
WO (1) WO2007135244A2 (fi)

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JP5633334B2 (ja) 2010-11-25 2014-12-03 セイコーエプソン株式会社 分光測定装置
WO2012098297A1 (en) * 2011-01-19 2012-07-26 Teknologian Tutkimuskeskus Vtt High speed chemical imaging based on fabry-perot interferometer
CN103608654A (zh) * 2011-06-21 2014-02-26 奥林巴斯株式会社 分光图像拍摄装置
US9255844B2 (en) 2012-09-12 2016-02-09 Teknologian Tutkimuskeskus Vtt System and method for optical measurement of a target at multiple positions
JP5987573B2 (ja) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
FI125762B (fi) * 2012-10-11 2016-02-15 Teknologian Tutkimuskeskus Vtt Oy Menetelmä spektrometrin kalibrointiparametrien määrittämiseksi
EP2746740B1 (en) * 2012-12-21 2019-05-08 IMEC vzw Spectral imaging device and method to calibrate the same
JP6194592B2 (ja) * 2013-02-22 2017-09-13 セイコーエプソン株式会社 分光カメラ
JP6452272B2 (ja) * 2013-02-22 2019-01-16 セイコーエプソン株式会社 分光カメラ、及び分光画像処理方法
JP6107254B2 (ja) * 2013-03-14 2017-04-05 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
JP6337467B2 (ja) * 2013-12-27 2018-06-06 セイコーエプソン株式会社 光学モジュール、電子機器、及び光学モジュールの駆動方法
JP6255992B2 (ja) * 2013-12-27 2018-01-10 セイコーエプソン株式会社 分光測定システム、分光モジュール、及び、位置ズレ検出方法
EP3161436B1 (en) * 2014-06-27 2024-03-20 Spectral Engines OY A method for determining the spectral scale of a spectrometer and apparatus
JP2016011932A (ja) 2014-06-30 2016-01-21 セイコーエプソン株式会社 分光画像撮像装置、分光画像撮像方法
JP6394189B2 (ja) * 2014-08-29 2018-09-26 セイコーエプソン株式会社 分光画像取得装置、及び分光画像取得方法
CN105424186B (zh) * 2015-11-04 2017-06-27 北京航空航天大学 一种光场成像光谱仪的光谱标定校正方法
US9927299B2 (en) * 2015-12-15 2018-03-27 Trutag Technologies, Inc. Spectral reading using synchronized LED sources
DE102016221383A1 (de) * 2016-10-31 2018-05-03 Robert Bosch Gmbh Verfahren und Steuergerät zum Betreiben eines Mikrospektrometers und Mikrospektrometersystem
US10323985B2 (en) * 2016-11-09 2019-06-18 Trutag Technologies, Inc. Signal processing for tunable Fabry-Perot interferometer based hyperspectral imaging
EP3444578B1 (en) * 2017-08-16 2023-08-02 Spectral Engines OY Method and system for analysing a chemical composition of a target
DE102018221522A1 (de) * 2018-12-12 2020-06-18 Robert Bosch Gmbh Spektrometervorrichtung und Verfahren zum Herstellen einer Spektrometervorrichtung
CN111380816A (zh) * 2018-12-27 2020-07-07 光谱引擎股份公司 用于分析目标物的化学成分的方法和系统
US11698303B2 (en) 2018-12-28 2023-07-11 Spectral Engines Oy Method and system for analysing a chemical composition of a target using a Fabry-Perot interferometer
CN113454469A (zh) * 2019-02-18 2021-09-28 尤尼斯拜特罗有限责任公司 包括微机电可调滤波器的设备及操作所述设备的方法
GB2596538A (en) * 2020-06-29 2022-01-05 Ams Senors Singapore Pte Ltd Multi-channel interferometer-based optical sensor
CN113281296B (zh) * 2021-06-04 2022-10-11 中国电子科技集团公司第四十一研究所 一种太赫兹探测器绝对光谱响应校准装置及校准方法
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Also Published As

Publication number Publication date
EP2021748A2 (en) 2009-02-11
US20100245832A1 (en) 2010-09-30
FI119830B (fi) 2009-03-31
EP2021748B1 (en) 2022-11-30
FI20065348A0 (fi) 2006-05-24
WO2007135244A2 (en) 2007-11-29
EP2021748A4 (en) 2012-12-05
WO2007135244A3 (en) 2008-04-03
US8130380B2 (en) 2012-03-06

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