IT974362B - Apparecchio di polverizzazione per rivestire oggetti - Google Patents

Apparecchio di polverizzazione per rivestire oggetti

Info

Publication number
IT974362B
IT974362B IT5508672A IT5508672A IT974362B IT 974362 B IT974362 B IT 974362B IT 5508672 A IT5508672 A IT 5508672A IT 5508672 A IT5508672 A IT 5508672A IT 974362 B IT974362 B IT 974362B
Authority
IT
Italy
Prior art keywords
polverization
coating objects
objects
coating
polverization apparatus
Prior art date
Application number
IT5508672A
Other languages
English (en)
Italian (it)
Original Assignee
Lucas Aerospace Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucas Aerospace Ltd filed Critical Lucas Aerospace Ltd
Application granted granted Critical
Publication of IT974362B publication Critical patent/IT974362B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)
IT5508672A 1971-12-29 1972-12-28 Apparecchio di polverizzazione per rivestire oggetti IT974362B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB6050371 1971-12-29

Publications (1)

Publication Number Publication Date
IT974362B true IT974362B (it) 1974-06-20

Family

ID=10485694

Family Applications (1)

Application Number Title Priority Date Filing Date
IT5508672A IT974362B (it) 1971-12-29 1972-12-28 Apparecchio di polverizzazione per rivestire oggetti

Country Status (4)

Country Link
JP (1) JPS4879181A (ko)
DE (1) DE2263784A1 (ko)
FR (1) FR2170572A5 (ko)
IT (1) IT974362B (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3466607B2 (ja) * 1989-09-13 2003-11-17 ソニー株式会社 スパッタリング装置

Also Published As

Publication number Publication date
FR2170572A5 (ko) 1973-09-14
JPS4879181A (ko) 1973-10-24
DE2263784A1 (de) 1973-07-12

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