FR2170572A5 - - Google Patents

Info

Publication number
FR2170572A5
FR2170572A5 FR7246311A FR7246311A FR2170572A5 FR 2170572 A5 FR2170572 A5 FR 2170572A5 FR 7246311 A FR7246311 A FR 7246311A FR 7246311 A FR7246311 A FR 7246311A FR 2170572 A5 FR2170572 A5 FR 2170572A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7246311A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Properties Ltd
Original Assignee
Lucas Aerospace Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucas Aerospace Ltd filed Critical Lucas Aerospace Ltd
Application granted granted Critical
Publication of FR2170572A5 publication Critical patent/FR2170572A5/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
FR7246311A 1971-12-29 1972-12-27 Expired FR2170572A5 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB6050371 1971-12-29

Publications (1)

Publication Number Publication Date
FR2170572A5 true FR2170572A5 (ko) 1973-09-14

Family

ID=10485694

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7246311A Expired FR2170572A5 (ko) 1971-12-29 1972-12-27

Country Status (4)

Country Link
JP (1) JPS4879181A (ko)
DE (1) DE2263784A1 (ko)
FR (1) FR2170572A5 (ko)
IT (1) IT974362B (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3466607B2 (ja) * 1989-09-13 2003-11-17 ソニー株式会社 スパッタリング装置

Also Published As

Publication number Publication date
IT974362B (it) 1974-06-20
JPS4879181A (ko) 1973-10-24
DE2263784A1 (de) 1973-07-12

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Legal Events

Date Code Title Description
CD Change of name or company name
TP Transmission of property
ST Notification of lapse