IT958468B - Composizioni fotosensibili del tipo a sviluppo del solvente - Google Patents

Composizioni fotosensibili del tipo a sviluppo del solvente

Info

Publication number
IT958468B
IT958468B IT5104372A IT5104372A IT958468B IT 958468 B IT958468 B IT 958468B IT 5104372 A IT5104372 A IT 5104372A IT 5104372 A IT5104372 A IT 5104372A IT 958468 B IT958468 B IT 958468B
Authority
IT
Italy
Prior art keywords
development type
photosensitive compositions
solvent development
solvent
photosensitive
Prior art date
Application number
IT5104372A
Other languages
English (en)
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP46044731A external-priority patent/JPS5011284B1/ja
Priority claimed from JP46044991A external-priority patent/JPS5011285B1/ja
Priority claimed from JP7685771A external-priority patent/JPS5010725B2/ja
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Application granted granted Critical
Publication of IT958468B publication Critical patent/IT958468B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08C—TREATMENT OR CHEMICAL MODIFICATION OF RUBBERS
    • C08C19/00—Chemical modification of rubber
    • C08C19/10—Isomerisation; Cyclisation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/008—Azides
    • G03F7/012—Macromolecular azides; Macromolecular additives, e.g. binders
    • G03F7/0125—Macromolecular azides; Macromolecular additives, e.g. binders characterised by the polymeric binder or the macromolecular additives other than the macromolecular azides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
IT5104372A 1971-06-21 1972-06-21 Composizioni fotosensibili del tipo a sviluppo del solvente IT958468B (it)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP46044731A JPS5011284B1 (it) 1971-06-21 1971-06-21
JP46044991A JPS5011285B1 (it) 1971-06-22 1971-06-22
JP7685771A JPS5010725B2 (it) 1971-10-01 1971-10-01

Publications (1)

Publication Number Publication Date
IT958468B true IT958468B (it) 1973-10-20

Family

ID=27292010

Family Applications (1)

Application Number Title Priority Date Filing Date
IT5104372A IT958468B (it) 1971-06-21 1972-06-21 Composizioni fotosensibili del tipo a sviluppo del solvente

Country Status (6)

Country Link
CH (1) CH571730A5 (it)
DE (1) DE2230969C3 (it)
FR (1) FR2143224B1 (it)
GB (1) GB1392236A (it)
IT (1) IT958468B (it)
NL (1) NL169234C (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6057584B2 (ja) * 1979-04-24 1985-12-16 ジェイエスアール株式会社 ホトレジスト組成物

Also Published As

Publication number Publication date
NL169234B (nl) 1982-01-18
FR2143224A1 (it) 1973-02-02
DE2230969A1 (de) 1972-12-28
GB1392236A (en) 1975-04-30
FR2143224B1 (it) 1978-03-03
DE2230969B2 (de) 1975-02-13
NL7208520A (it) 1972-12-27
NL169234C (nl) 1982-06-16
CH571730A5 (it) 1976-01-15
DE2230969C3 (de) 1975-09-25

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