IT8267137A0 - Sistema di controllo e di indicazione della coppia di pulitura - Google Patents
Sistema di controllo e di indicazione della coppia di pulituraInfo
- Publication number
- IT8267137A0 IT8267137A0 IT8267137A IT6713782A IT8267137A0 IT 8267137 A0 IT8267137 A0 IT 8267137A0 IT 8267137 A IT8267137 A IT 8267137A IT 6713782 A IT6713782 A IT 6713782A IT 8267137 A0 IT8267137 A0 IT 8267137A0
- Authority
- IT
- Italy
- Prior art keywords
- torque control
- indication system
- cleaning torque
- cleaning
- indication
- Prior art date
Links
- 238000004140 cleaning Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
- B23Q15/12—Adaptive control, i.e. adjusting itself to have a performance which is optimum according to a preassigned criterion
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Control Of Direct Current Motors (AREA)
- Brushes (AREA)
- Cleaning In General (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/235,512 US4382308A (en) | 1981-02-18 | 1981-02-18 | Scrubbing torque monitoring and control system |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8267137A0 true IT8267137A0 (it) | 1982-02-05 |
IT1155274B IT1155274B (it) | 1987-01-28 |
Family
ID=22885815
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT67137/82A IT1155274B (it) | 1981-02-18 | 1982-02-05 | Sistema di controllo e di indicazione della coppia di pulitura |
Country Status (6)
Country | Link |
---|---|
US (1) | US4382308A (it) |
JP (1) | JPS57154888A (it) |
DE (1) | DE3205398A1 (it) |
FR (2) | FR2499878B1 (it) |
GB (1) | GB2093234B (it) |
IT (1) | IT1155274B (it) |
Families Citing this family (60)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4741783A (en) * | 1986-12-31 | 1988-05-03 | Masonite Corporation | Apparatus and method for rotary buffing |
US4993096A (en) * | 1989-07-31 | 1991-02-19 | D.E.M. Controls Of Canada | Circuit board deburring system |
US4993097A (en) * | 1989-07-31 | 1991-02-19 | D.E.M. Controls Of Canada | Circuit board deburring system |
US5012526A (en) * | 1989-11-16 | 1991-05-07 | Deere & Company | Automatic tool compensator |
DE4040119A1 (de) * | 1990-12-13 | 1992-06-17 | Schering Ag | Verfahren zum durchfluten von bohrungen in plattenfoermigen werkstuecken, insbesondere leiterplatten, und vorrichtung hierfuer |
US5325027A (en) * | 1991-01-15 | 1994-06-28 | Outokumpu Mintec Oy | Method and apparatus for measuring the degree of fullness of a mill with lifting beams by monitoring variation in power consumption |
JPH07115293B2 (ja) * | 1992-01-17 | 1995-12-13 | 株式会社ホタニ | ブラシロール左右往復動型ブラシロール機 |
JPH05222624A (ja) * | 1992-02-12 | 1993-08-31 | Tsuzuki Boseki Kk | 原綿のクリーニング装置 |
US5428856A (en) * | 1993-11-29 | 1995-07-04 | Zips Card Playing System, Inc. | Playing card cleaning apparatus and adjustable rollers therefor |
JP3328426B2 (ja) * | 1994-05-12 | 2002-09-24 | 東京エレクトロン株式会社 | 洗浄装置 |
US5475889A (en) * | 1994-07-15 | 1995-12-19 | Ontrak Systems, Inc. | Automatically adjustable brush assembly for cleaning semiconductor wafers |
DE29604804U1 (de) * | 1996-03-15 | 1996-05-15 | Ertl GmbH, 53489 Sinzig | Vorrichtung zum Reinigen von Platten |
US5875507A (en) * | 1996-07-15 | 1999-03-02 | Oliver Design, Inc. | Wafer cleaning apparatus |
US6230753B1 (en) | 1996-07-15 | 2001-05-15 | Lam Research Corporation | Wafer cleaning apparatus |
US5901400A (en) * | 1997-04-09 | 1999-05-11 | Omni Technical Products, Inc. | Brushing apparatus |
ATE545469T1 (de) * | 1997-09-30 | 2012-03-15 | Tbs Eng Ltd | Batterieplattenzufuhrvorrichtung und vorrichtung zur handhabung |
US6095316A (en) * | 1997-09-30 | 2000-08-01 | Gelco International L.L.C. | Battery plate feeding and handling apparatus |
JP3949807B2 (ja) * | 1998-03-09 | 2007-07-25 | 沖電気工業株式会社 | 基板洗浄装置及び基板洗浄方法 |
JP3314032B2 (ja) * | 1998-04-28 | 2002-08-12 | 東京エレクトロン株式会社 | 処理装置 |
US6247197B1 (en) | 1998-07-09 | 2001-06-19 | Lam Research Corporation | Brush interflow distributor |
US6277203B1 (en) | 1998-09-29 | 2001-08-21 | Lam Research Corporation | Method and apparatus for cleaning low K dielectric and metal wafer surfaces |
US6269510B1 (en) * | 1999-01-04 | 2001-08-07 | International Business Machines Corporation | Post CMP clean brush with torque monitor |
US6352595B1 (en) | 1999-05-28 | 2002-03-05 | Lam Research Corporation | Method and system for cleaning a chemical mechanical polishing pad |
US6711775B2 (en) | 1999-06-10 | 2004-03-30 | Lam Research Corporation | System for cleaning a semiconductor wafer |
US6405399B1 (en) | 1999-06-25 | 2002-06-18 | Lam Research Corporation | Method and system of cleaning a wafer after chemical mechanical polishing or plasma processing |
US7456017B2 (en) * | 1999-10-01 | 2008-11-25 | University Of North Carolina At Chapel Hill | Processes for clonal growth of hepatic progenitor cells |
US20020187133A1 (en) | 1999-10-01 | 2002-12-12 | Hiroshi Kubota | Methods of isolating bipotent hepatic progenitor cells |
US6446296B1 (en) | 2000-03-06 | 2002-09-10 | Rite Track Equipment Services, Inc. | Substrate cleaning apparatus with brush force control and method |
US6614195B2 (en) | 2000-05-09 | 2003-09-02 | Tennant Company | Linear actuator control structure |
DE60033811T2 (de) * | 2000-09-08 | 2007-11-15 | Qimonda Dresden Gmbh & Co. Ohg | Wafer-Reinigungsvorrichtung |
US6800020B1 (en) | 2000-10-02 | 2004-10-05 | Lam Research Corporation | Web-style pad conditioning system and methods for implementing the same |
KR20020052835A (ko) * | 2000-12-26 | 2002-07-04 | 이구택 | 브러쉬 롤의 위치 조절장치 |
US6615433B2 (en) * | 2001-03-29 | 2003-09-09 | Agere Systems Inc. | Apparatus for detecting wetness of a semiconductor wafer cleaning brush |
DE10126791A1 (de) * | 2001-06-01 | 2003-01-09 | Zf Lenksysteme Gmbh | Verfahren zur Befestigung einer Drehmoment-Messeinrichtung |
US6986185B2 (en) | 2001-10-30 | 2006-01-17 | Applied Materials Inc. | Methods and apparatus for determining scrubber brush pressure |
EP1401010A1 (de) * | 2002-09-12 | 2004-03-24 | Niederberger Schleif- und Polierautomaten AG | Vorrichtung und Verfahren zur Messung und Kompensation der Abnutzung von Bürsten bei Bürstmaschinen |
CN1874854B (zh) * | 2003-10-28 | 2010-11-10 | 应用材料公司 | 刷洗机和刷洗机箱 |
US7081043B2 (en) * | 2004-01-14 | 2006-07-25 | 3M Innovative Properties Company | Molded abrasive brush and methods of using for manufacture of printed circuit boards |
EP1570925A1 (en) * | 2004-03-01 | 2005-09-07 | Chih-Hung Chen | Automated descaling machine |
US20070006405A1 (en) * | 2005-07-07 | 2007-01-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods for wafer cleaning |
US20070212983A1 (en) * | 2006-03-13 | 2007-09-13 | Applied Materials, Inc. | Apparatus and methods for conditioning a polishing pad |
DE102007047190A1 (de) * | 2007-10-02 | 2009-05-14 | Dürr Systems GmbH | Entstaubungsverfahren und entsprechende Entstaubungseinrichtung |
TWI372661B (en) * | 2007-11-21 | 2012-09-21 | Tokyo Electron Ltd | Cleaning apparatus and cleaning method |
DE102009010372A1 (de) | 2009-02-26 | 2010-09-02 | Schäfer, Dietmar | Bürstanordnung zur Bearbeitung von zu reinigenden Werkstücken |
US8185996B2 (en) * | 2009-03-13 | 2012-05-29 | Palo Alto Research Center Incorporated | System and method of solid ink removal for substrate re-use |
DE102009014006A1 (de) * | 2009-03-19 | 2010-09-23 | Sms Siemag Aktiengesellschaft | Verfahren und Vorrichtung zur Reinigung eines Metallbandes |
CN101823226B (zh) * | 2010-05-05 | 2014-12-03 | 张秀聪 | 高温圆钢锻压件去氧化层设备 |
WO2012127425A1 (en) | 2011-03-23 | 2012-09-27 | Basf Se | Process for the preparation of s-triazine compounds |
CN102847745B (zh) * | 2012-09-19 | 2015-04-08 | 江苏胜达科技有限公司 | 对钢丝进行抛光处理的装置 |
CN103029025A (zh) * | 2012-12-12 | 2013-04-10 | 大连恒喆木工机械制造有限公司 | 一种盘式抛光机 |
CN103230884B (zh) * | 2013-04-24 | 2016-06-08 | 清华大学 | 用于晶圆的刷洗装置 |
CN104002221A (zh) * | 2014-04-30 | 2014-08-27 | 六安市协诚车辆配件有限公司 | 一种金属除锈滚筒 |
CN104002222B (zh) * | 2014-04-30 | 2016-09-21 | 六安市协诚车辆配件有限公司 | 一种金属除锈滚筒装置 |
JP6443793B2 (ja) * | 2014-07-18 | 2018-12-26 | 石原ケミカル株式会社 | バフ研磨用電動式シングル回転ポリッシャーを用いたバフ研磨方法及びバフ研磨用電動式シングル回転ポリッシャー |
CN105013783B (zh) * | 2015-05-21 | 2018-01-26 | 安徽凤阳玻璃有限公司 | 一种可移动式玻璃清洗装置 |
DE102016211264A1 (de) * | 2016-06-23 | 2017-12-28 | Homag Gmbh | Vorrichtung zum Bearbeiten eines Werkstücks und Verfahren zum Bearbeiten eines Werkstücks |
CN106423949A (zh) * | 2016-11-04 | 2017-02-22 | 广东技术师范学院 | 一种带有高效清理装置的控制器 |
CN109731844B (zh) * | 2019-03-19 | 2021-10-01 | 江苏新安电器股份有限公司 | 一种可对不同尺寸的产品进行表面助焊剂清洗的设备 |
CN111604300A (zh) * | 2020-06-08 | 2020-09-01 | 安徽拔沃乎机电科技有限公司 | Pcb电路板的全自动清洗机 |
CN113732847B (zh) * | 2021-08-27 | 2022-07-08 | 信丰汇芯线路科技有限公司 | 一种线路板双面打磨装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB371019A (en) | 1930-01-13 | 1932-04-12 | British Thomson Houston Co Ltd | Improvements in and relating to electric regulating systems |
GB1141947A (en) | 1967-01-20 | 1969-02-05 | Avw Equip Ltd | Improvements in vehicle cleaning appliances |
US3583015A (en) * | 1969-07-07 | 1971-06-08 | Houdaille Industries Inc | Control circuit for automatic buffing equipment |
US3662418A (en) * | 1969-07-17 | 1972-05-16 | Toyo Enterprises Kk | Vehicle washing apparatus |
JPS4840860B1 (it) * | 1970-08-28 | 1973-12-03 | ||
DE2200932A1 (de) | 1971-01-11 | 1972-07-20 | Kone Lamminen Oy | Autowaschmaschine |
US3795931A (en) * | 1972-02-25 | 1974-03-12 | Chemut Corp | Quick-change brush mounting |
US3789279A (en) * | 1972-07-21 | 1974-01-29 | Concrete Cutting Equipment Inc | Work and feed control system for cutting machines |
US3819991A (en) * | 1972-08-29 | 1974-06-25 | G Weigele | Control device for a position selective motor-driven work brush |
US4052648A (en) * | 1976-07-19 | 1977-10-04 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Power factor control system for ac induction motors |
US4096436A (en) * | 1977-05-23 | 1978-06-20 | The Valeron Corporation | Power monitor |
US4249113A (en) * | 1977-07-25 | 1981-02-03 | Brandon And Clark Electric Company, Inc. | Load controller |
US4137677A (en) * | 1977-10-03 | 1979-02-06 | General Electric Company | Constant horsepower control for grinding wheel drives |
US4236112A (en) * | 1978-07-17 | 1980-11-25 | Conversational Systems, Inc. | Power measuring apparatus |
-
1981
- 1981-02-18 US US06/235,512 patent/US4382308A/en not_active Expired - Fee Related
-
1982
- 1982-02-05 IT IT67137/82A patent/IT1155274B/it active
- 1982-02-12 GB GB8204179A patent/GB2093234B/en not_active Expired
- 1982-02-16 DE DE19823205398 patent/DE3205398A1/de not_active Ceased
- 1982-02-16 JP JP57022170A patent/JPS57154888A/ja active Pending
- 1982-02-17 FR FR8202596A patent/FR2499878B1/fr not_active Expired
- 1982-06-30 FR FR8211497A patent/FR2508251A1/fr active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2508251A1 (fr) | 1982-12-24 |
DE3205398A1 (de) | 1982-10-07 |
JPS57154888A (en) | 1982-09-24 |
FR2499878A1 (fr) | 1982-08-20 |
US4382308A (en) | 1983-05-10 |
FR2499878B1 (fr) | 1987-02-13 |
IT1155274B (it) | 1987-01-28 |
GB2093234A (en) | 1982-08-25 |
GB2093234B (en) | 1985-10-09 |
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