IT1398433B1 - Apparato e procedimento per la lavorazione di un substrato - Google Patents
Apparato e procedimento per la lavorazione di un substratoInfo
- Publication number
- IT1398433B1 IT1398433B1 ITUD2009A000157A ITUD20090157A IT1398433B1 IT 1398433 B1 IT1398433 B1 IT 1398433B1 IT UD2009A000157 A ITUD2009A000157 A IT UD2009A000157A IT UD20090157 A ITUD20090157 A IT UD20090157A IT 1398433 B1 IT1398433 B1 IT 1398433B1
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- substrate
- processing
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67225—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one lithography chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F15/00—Screen printers
- B41F15/08—Machines
- B41F15/0863—Machines with a plurality of flat screens mounted on a turntable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F15/00—Screen printers
- B41F15/14—Details
- B41F15/16—Printing tables
- B41F15/18—Supports for workpieces
- B41F15/26—Supports for workpieces for articles with flat surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F33/00—Indicating, counting, warning, control or safety devices
- B41F33/0081—Devices for scanning register marks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/6723—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one plating chamber
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Screen Printers (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITUD2009A000157A IT1398433B1 (it) | 2009-09-03 | 2009-09-03 | Apparato e procedimento per la lavorazione di un substrato |
US13/394,126 US20120219725A1 (en) | 2009-09-03 | 2010-09-02 | Substrate Processing Apparatus And Method |
PCT/EP2010/062850 WO2011026885A1 (en) | 2009-09-03 | 2010-09-02 | Substrate processing apparatus and method |
TW099129736A TW201124325A (en) | 2009-09-03 | 2010-09-02 | Substrate processing apparatus and method |
EP10747868A EP2473351A1 (en) | 2009-09-03 | 2010-09-02 | Substrate processing apparatus and method |
CN2010800395519A CN102481776A (zh) | 2009-09-03 | 2010-09-02 | 处理基板的设备及方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITUD2009A000157A IT1398433B1 (it) | 2009-09-03 | 2009-09-03 | Apparato e procedimento per la lavorazione di un substrato |
Publications (2)
Publication Number | Publication Date |
---|---|
ITUD20090157A1 ITUD20090157A1 (it) | 2011-03-04 |
IT1398433B1 true IT1398433B1 (it) | 2013-02-22 |
Family
ID=41694584
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITUD2009A000157A IT1398433B1 (it) | 2009-09-03 | 2009-09-03 | Apparato e procedimento per la lavorazione di un substrato |
Country Status (6)
Country | Link |
---|---|
US (1) | US20120219725A1 (it) |
EP (1) | EP2473351A1 (it) |
CN (1) | CN102481776A (it) |
IT (1) | IT1398433B1 (it) |
TW (1) | TW201124325A (it) |
WO (1) | WO2011026885A1 (it) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090308860A1 (en) * | 2008-06-11 | 2009-12-17 | Applied Materials, Inc. | Short thermal profile oven useful for screen printing |
WO2014106333A1 (zh) * | 2013-01-05 | 2014-07-10 | 上海卓凯电子科技有限公司 | 电路板的去应力方法及电路板的去应力设备 |
CN103085447B (zh) * | 2013-01-18 | 2015-01-21 | 景德镇陶瓷学院 | 高速旋转式印花机及其旋转式印花方法 |
DE102013205731A1 (de) * | 2013-03-28 | 2014-10-02 | JRT Photovoltaics GmbH & Co. KG | Siebdruckanlage zum Bedrucken von flächigen Substraten, insbesondere Solarzellen und Verfahren zum Bedrucken von Substraten |
DE102013103837A1 (de) | 2013-04-16 | 2014-10-16 | Teamtechnik Maschinen Und Anlagen Gmbh | Aufbringen von Leitkleber auf Solarzellen |
US9833802B2 (en) * | 2014-06-27 | 2017-12-05 | Pulse Finland Oy | Methods and apparatus for conductive element deposition and formation |
CN105882121B (zh) * | 2016-06-30 | 2018-09-25 | 江苏美嘉包装有限公司 | 一种全自动丝印加工平台及其丝印工艺 |
CN107393850A (zh) * | 2017-08-16 | 2017-11-24 | 君泰创新(北京)科技有限公司 | 太阳能电池浆料的干燥方法及系统 |
EP3476600B1 (de) * | 2017-10-25 | 2021-05-12 | Angelo Schiestl | Druckvorrichtung |
JP7025992B2 (ja) * | 2018-05-22 | 2022-02-25 | 日立Astemo株式会社 | 表面検査装置及び表面検査方法 |
CN108674010B (zh) * | 2018-06-28 | 2024-06-28 | 无锡奥特维科技股份有限公司 | 丝网印刷设备、叠片机及丝网印刷方法 |
JP2020077804A (ja) * | 2018-11-09 | 2020-05-21 | Necプラットフォームズ株式会社 | 電子機器、基板保持部材、回路基板の出し入れ方法 |
JP7370233B2 (ja) | 2019-11-29 | 2023-10-27 | 東京エレクトロン株式会社 | 基板搬送装置及び基板処理システム |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01229628A (ja) * | 1988-03-11 | 1989-09-13 | Sony Corp | スクリーン印刷機 |
FR2689059B1 (fr) * | 1992-03-26 | 1994-06-10 | Dubuit Mach | Machine a imprimer a tete d'impression interchangeable. |
JP3157465B2 (ja) * | 1996-08-02 | 2001-04-16 | 三洋電機株式会社 | スクリーン印刷機及びその制御方法 |
JP2001062995A (ja) * | 1999-08-30 | 2001-03-13 | Minami Kk | スクリーン印刷機 |
AU2003219562A1 (en) * | 2002-04-04 | 2003-10-20 | Matsushita Electric Industrial Co., Ltd. | Vibration linear actuating device, method of driving the same device, and portable information apparatus using the same device |
JP2004153061A (ja) * | 2002-10-31 | 2004-05-27 | Yokogawa Electric Corp | 基板用印刷装置 |
DE102005032149A1 (de) * | 2005-06-22 | 2006-12-28 | Kba-Metronic Ag | Druckmaschine |
FR2899840B1 (fr) * | 2006-04-12 | 2008-07-04 | Mach Dubuit Soc Par Actions Si | Machine d'impression par serigraphie |
FR2936975B1 (fr) * | 2008-10-13 | 2011-06-03 | Dubuit Mach | Machine d'impression par serigraphie et procede d'impression associe |
-
2009
- 2009-09-03 IT ITUD2009A000157A patent/IT1398433B1/it active
-
2010
- 2010-09-02 EP EP10747868A patent/EP2473351A1/en not_active Withdrawn
- 2010-09-02 WO PCT/EP2010/062850 patent/WO2011026885A1/en active Application Filing
- 2010-09-02 CN CN2010800395519A patent/CN102481776A/zh active Pending
- 2010-09-02 US US13/394,126 patent/US20120219725A1/en not_active Abandoned
- 2010-09-02 TW TW099129736A patent/TW201124325A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
ITUD20090157A1 (it) | 2011-03-04 |
EP2473351A1 (en) | 2012-07-11 |
TW201124325A (en) | 2011-07-16 |
WO2011026885A1 (en) | 2011-03-10 |
US20120219725A1 (en) | 2012-08-30 |
CN102481776A (zh) | 2012-05-30 |
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