IT1307131B1 - Dispositivo di micro-rele' a controllo elettrostatico. - Google Patents

Dispositivo di micro-rele' a controllo elettrostatico.

Info

Publication number
IT1307131B1
IT1307131B1 ITTO990072A IT1307131B1 IT 1307131 B1 IT1307131 B1 IT 1307131B1 IT TO990072 A ITTO990072 A IT TO990072A IT 1307131 B1 IT1307131 B1 IT 1307131B1
Authority
IT
Italy
Prior art keywords
relay device
control micro
electrostatic control
electrostatic
micro
Prior art date
Application number
Other languages
English (en)
Italian (it)
Inventor
Piero Perlo
Sabino Sinesi
Marco Pizzi
Valerian Koniachkine
Original Assignee
Fiat Ricerche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fiat Ricerche filed Critical Fiat Ricerche
Priority to ITTO990072 priority Critical patent/IT1307131B1/it
Priority to ES99830731T priority patent/ES2189379T3/es
Priority to DE1999605233 priority patent/DE69905233T2/de
Priority to EP19990830731 priority patent/EP1026718B1/en
Publication of ITTO990072A1 publication Critical patent/ITTO990072A1/it
Application granted granted Critical
Publication of IT1307131B1 publication Critical patent/IT1307131B1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes
ITTO990072 1999-02-02 1999-02-02 Dispositivo di micro-rele' a controllo elettrostatico. IT1307131B1 (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
ITTO990072 IT1307131B1 (it) 1999-02-02 1999-02-02 Dispositivo di micro-rele' a controllo elettrostatico.
ES99830731T ES2189379T3 (es) 1999-02-02 1999-11-25 Dispositivo microrrele controlado electrostaticamente.
DE1999605233 DE69905233T2 (de) 1999-02-02 1999-11-25 Elektrostatisch gesteuertes Mikrorelais
EP19990830731 EP1026718B1 (en) 1999-02-02 1999-11-25 Electrostatically controlled micro-relay device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO990072 IT1307131B1 (it) 1999-02-02 1999-02-02 Dispositivo di micro-rele' a controllo elettrostatico.

Publications (2)

Publication Number Publication Date
ITTO990072A1 ITTO990072A1 (it) 2000-08-02
IT1307131B1 true IT1307131B1 (it) 2001-10-29

Family

ID=11417411

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO990072 IT1307131B1 (it) 1999-02-02 1999-02-02 Dispositivo di micro-rele' a controllo elettrostatico.

Country Status (4)

Country Link
EP (1) EP1026718B1 (es)
DE (1) DE69905233T2 (es)
ES (1) ES2189379T3 (es)
IT (1) IT1307131B1 (es)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10040867A1 (de) * 2000-08-21 2002-05-23 Abb Research Ltd Mikroschalter
FR2854726B1 (fr) * 2003-05-09 2005-08-26 St Microelectronics Sa Microcommutateur a plusieurs positions fermees a deplacement lateral
DE102004010150B9 (de) * 2004-02-27 2012-01-26 Eads Deutschland Gmbh Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung
KR100693345B1 (ko) * 2005-11-30 2007-03-09 삼성전자주식회사 Ｍｅｍｓ 스위치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19730715C1 (de) * 1996-11-12 1998-11-26 Fraunhofer Ges Forschung Verfahren zum Herstellen eines mikromechanischen Relais
JPH10162713A (ja) * 1996-11-29 1998-06-19 Omron Corp マイクロリレー
DE19736674C1 (de) * 1997-08-22 1998-11-26 Siemens Ag Mikromechanisches elektrostatisches Relais und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
DE69905233D1 (de) 2003-03-13
EP1026718A2 (en) 2000-08-09
ITTO990072A1 (it) 2000-08-02
ES2189379T3 (es) 2003-07-01
DE69905233T2 (de) 2003-11-06
EP1026718A3 (en) 2001-09-12
EP1026718B1 (en) 2003-02-05

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