FR2854726B1 - Microcommutateur a plusieurs positions fermees a deplacement lateral - Google Patents

Microcommutateur a plusieurs positions fermees a deplacement lateral

Info

Publication number
FR2854726B1
FR2854726B1 FR0305649A FR0305649A FR2854726B1 FR 2854726 B1 FR2854726 B1 FR 2854726B1 FR 0305649 A FR0305649 A FR 0305649A FR 0305649 A FR0305649 A FR 0305649A FR 2854726 B1 FR2854726 B1 FR 2854726B1
Authority
FR
France
Prior art keywords
microcommuter
closed positions
side movement
several closed
several
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0305649A
Other languages
English (en)
Other versions
FR2854726A1 (fr
Inventor
Guillaume Bouche
Daniel Saias
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR0305649A priority Critical patent/FR2854726B1/fr
Priority to US10/841,180 priority patent/US6927352B2/en
Publication of FR2854726A1 publication Critical patent/FR2854726A1/fr
Application granted granted Critical
Publication of FR2854726B1 publication Critical patent/FR2854726B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0068—Switches making use of microelectromechanical systems [MEMS] with multi dimensional movement, i.e. the movable actuator performing movements in at least two different directions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/02—Electrothermal relays wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively
FR0305649A 2003-05-09 2003-05-09 Microcommutateur a plusieurs positions fermees a deplacement lateral Expired - Fee Related FR2854726B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0305649A FR2854726B1 (fr) 2003-05-09 2003-05-09 Microcommutateur a plusieurs positions fermees a deplacement lateral
US10/841,180 US6927352B2 (en) 2003-05-09 2004-05-07 Lateral displacement multiposition microswitch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0305649A FR2854726B1 (fr) 2003-05-09 2003-05-09 Microcommutateur a plusieurs positions fermees a deplacement lateral

Publications (2)

Publication Number Publication Date
FR2854726A1 FR2854726A1 (fr) 2004-11-12
FR2854726B1 true FR2854726B1 (fr) 2005-08-26

Family

ID=33306269

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0305649A Expired - Fee Related FR2854726B1 (fr) 2003-05-09 2003-05-09 Microcommutateur a plusieurs positions fermees a deplacement lateral

Country Status (2)

Country Link
US (1) US6927352B2 (fr)
FR (1) FR2854726B1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7265477B2 (en) * 2004-01-05 2007-09-04 Chang-Feng Wan Stepping actuator and method of manufacture therefore
WO2008091868A2 (fr) * 2007-01-22 2008-07-31 Coactive Technologies, Inc. Feuille en dôme à guide de lumière pour commutateur à membrane
US7583169B1 (en) 2007-03-22 2009-09-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration MEMS switches having non-metallic crossbeams
EP2193096A1 (fr) * 2007-09-03 2010-06-09 Multusmems AB Actionneur multistable
EP2107038B1 (fr) * 2008-03-31 2012-05-16 Imec Dispositif MEMS d'activation électrostatique à chargement de substrat réduit
US7978045B2 (en) * 2008-12-04 2011-07-12 Industrial Technology Research Institute Multi-actuation MEMS switch
JP5418696B2 (ja) 2010-12-06 2014-02-19 大日本印刷株式会社 電子部品内蔵カード
CN108281286B (zh) 2012-09-20 2020-04-07 维斯普瑞公司 微机电系统(mems)可变电容器装置及相关方法
US10439591B2 (en) * 2015-11-12 2019-10-08 LGS Innovations LLC MEMS device with large out-of-plane actuation and low-resistance interconnect and methods of use
FR3084200B1 (fr) * 2018-07-18 2021-06-18 Expressive Controleur haptique ameliore

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8402974D0 (en) * 1984-02-03 1984-03-07 Npm Int Switches and keyboards
CN86101312A (zh) * 1985-02-12 1986-10-22 日本乐器制造株式会社 电子乐器键板开关装置
US5871088A (en) * 1995-03-30 1999-02-16 Matsushita Electric Industrial Co.,Ltd. EL sheet diaphragm and a switch using the same
DE19637928C2 (de) * 1996-02-10 1999-01-14 Fraunhofer Ges Forschung Bistabile Membran-Aktivierungseinrichtung und Membran
EP0880817B1 (fr) 1996-02-10 2005-04-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Microactionneur bistable a membranes couplees
US5824978A (en) * 1997-06-26 1998-10-20 Ut Automotive, Inc. Multiple detent membrane switch
DE19823690C1 (de) * 1998-05-27 2000-01-05 Siemens Ag Mikromechanisches elektrostatisches Relais
IT1307131B1 (it) * 1999-02-02 2001-10-29 Fiat Ricerche Dispositivo di micro-rele' a controllo elettrostatico.
EP1035557B1 (fr) * 1999-03-12 2007-11-14 Seiko Precision Inc. Interrupteur éclairé
DE19937811C2 (de) * 1999-08-11 2001-07-26 Bosch Gmbh Robert Relais, insbesondere Mikro Relais zum Schalen eines Stromkreises
US6483056B2 (en) * 2000-10-27 2002-11-19 Daniel J Hyman Microfabricated relay with multimorph actuator and electrostatic latch mechanism
FR2818795B1 (fr) * 2000-12-27 2003-12-05 Commissariat Energie Atomique Micro-dispositif a actionneur thermique
US6584678B2 (en) * 2001-04-17 2003-07-01 Lester E. Burgess Pressure actuated switching device and transfer method for making same

Also Published As

Publication number Publication date
US6927352B2 (en) 2005-08-09
FR2854726A1 (fr) 2004-11-12
US20040222074A1 (en) 2004-11-11

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20080131