EP1026718A3 - Electrostatically controlled micro-relay device - Google Patents

Electrostatically controlled micro-relay device Download PDF

Info

Publication number
EP1026718A3
EP1026718A3 EP99830731A EP99830731A EP1026718A3 EP 1026718 A3 EP1026718 A3 EP 1026718A3 EP 99830731 A EP99830731 A EP 99830731A EP 99830731 A EP99830731 A EP 99830731A EP 1026718 A3 EP1026718 A3 EP 1026718A3
Authority
EP
European Patent Office
Prior art keywords
base
relay device
petal
controlled micro
electrostatically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99830731A
Other languages
German (de)
French (fr)
Other versions
EP1026718B1 (en
EP1026718A2 (en
Inventor
Marco Pizzi
Valerian Koniachkine
Piero Perlo
Sabino Sinesi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centro Ricerche Fiat SCpA
Original Assignee
Centro Ricerche Fiat SCpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centro Ricerche Fiat SCpA filed Critical Centro Ricerche Fiat SCpA
Publication of EP1026718A2 publication Critical patent/EP1026718A2/en
Publication of EP1026718A3 publication Critical patent/EP1026718A3/en
Application granted granted Critical
Publication of EP1026718B1 publication Critical patent/EP1026718B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes

Abstract

An electrostatically controlled micro-relay device comprises a base (2) provided with a pair of separate electrodes (5, 6) and a petal (8) constituted by a conductive film having the ends connected to the base (2) and a movable part carrying a pair of movable contacts (10) adapted to co-operate with respective fixed contacts (11, 12) carried by the base (2). By applying an electric voltage between the petal (8) and one of electrode (5, 6) of the other, an adhesion is caused by electrostatically effect of one part of the petal to the base, which causes engagement of one or the other of the movable contacts (10) with the respective fixed contacts (11, 12).
EP19990830731 1999-02-02 1999-11-25 Electrostatically controlled micro-relay device Expired - Lifetime EP1026718B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITTO990072 1999-02-02
ITTO990072 IT1307131B1 (en) 1999-02-02 1999-02-02 ELECTROSTATIC CONTROL MICRO-RELAY DEVICE.

Publications (3)

Publication Number Publication Date
EP1026718A2 EP1026718A2 (en) 2000-08-09
EP1026718A3 true EP1026718A3 (en) 2001-09-12
EP1026718B1 EP1026718B1 (en) 2003-02-05

Family

ID=11417411

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19990830731 Expired - Lifetime EP1026718B1 (en) 1999-02-02 1999-11-25 Electrostatically controlled micro-relay device

Country Status (4)

Country Link
EP (1) EP1026718B1 (en)
DE (1) DE69905233T2 (en)
ES (1) ES2189379T3 (en)
IT (1) IT1307131B1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10040867A1 (en) * 2000-08-21 2002-05-23 Abb Research Ltd Microswitch has contact bearer deformable parallel to substrate with shape of symmetrical oscillation trough in stable off position, shape of asymmetrical trough in stable on position
FR2854726B1 (en) * 2003-05-09 2005-08-26 St Microelectronics Sa MICROCOMMUTER WITH SEVERAL CLOSED POSITIONS WITH SIDE MOVEMENT
DE102004010150B9 (en) * 2004-02-27 2012-01-26 Eads Deutschland Gmbh High-frequency MEMS switch with bent switching element and method for its production
KR100693345B1 (en) * 2005-11-30 2007-03-09 삼성전자주식회사 Mems switch

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10162713A (en) * 1996-11-29 1998-06-19 Omron Corp Micro relay
DE19730715C1 (en) * 1996-11-12 1998-11-26 Fraunhofer Ges Forschung Method of manufacturing a micromechanical relay
DE19736674C1 (en) * 1997-08-22 1998-11-26 Siemens Ag Micromechanical electrostatic relay

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19730715C1 (en) * 1996-11-12 1998-11-26 Fraunhofer Ges Forschung Method of manufacturing a micromechanical relay
US6162657A (en) * 1996-11-12 2000-12-19 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Method for manufacturing a micromechanical relay
JPH10162713A (en) * 1996-11-29 1998-06-19 Omron Corp Micro relay
DE19736674C1 (en) * 1997-08-22 1998-11-26 Siemens Ag Micromechanical electrostatic relay

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 11 30 September 1998 (1998-09-30) *

Also Published As

Publication number Publication date
EP1026718B1 (en) 2003-02-05
ITTO990072A1 (en) 2000-08-02
ES2189379T3 (en) 2003-07-01
DE69905233D1 (en) 2003-03-13
DE69905233T2 (en) 2003-11-06
IT1307131B1 (en) 2001-10-29
EP1026718A2 (en) 2000-08-09

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