IT1271921B - Impianto di rivestimento sotto alto vuoto - Google Patents
Impianto di rivestimento sotto alto vuotoInfo
- Publication number
- IT1271921B IT1271921B ITMI930025A ITMI930025A IT1271921B IT 1271921 B IT1271921 B IT 1271921B IT MI930025 A ITMI930025 A IT MI930025A IT MI930025 A ITMI930025 A IT MI930025A IT 1271921 B IT1271921 B IT 1271921B
- Authority
- IT
- Italy
- Prior art keywords
- high vacuum
- coating
- chamber
- coating chamber
- coating system
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Abstract
Un recipiente e depressione (1), nel quale una foglia (20) viene rivestita sotto alto vuoto, è suddiviso mediante una parete divisoria (26) in una camera di avvolgimento (27) con un rullo alimentatore (21) e un rullo avvolgitore (22) e in una camera di rivestimento (28). La camera di rivestimento (28) contiene un banco di vaporizzazione (24). Entro di esso sporge un cilindro di rivestimento (27). Pompe di diffusione (14, 15) sono collegate esclusivamente alla camera di rivestimento (28) per cui l'alto vuoto necessario per Il rivestimento deve essere generato soltanto in questa camera di rivestimento (28) e non nell'intero recipiente a depressione (1).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4207525A DE4207525C2 (de) | 1992-03-10 | 1992-03-10 | Hochvakuum-Beschichtungsanlage |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI930025A0 ITMI930025A0 (it) | 1993-01-13 |
ITMI930025A1 ITMI930025A1 (it) | 1994-07-13 |
IT1271921B true IT1271921B (it) | 1997-06-10 |
Family
ID=6453646
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI930025A IT1271921B (it) | 1992-03-10 | 1993-01-13 | Impianto di rivestimento sotto alto vuoto |
Country Status (4)
Country | Link |
---|---|
US (1) | US5254169A (it) |
DE (1) | DE4207525C2 (it) |
GB (1) | GB2264955B (it) |
IT (1) | IT1271921B (it) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4222013A1 (de) * | 1992-07-04 | 1994-01-05 | Leybold Ag | Vorrichtung zur Vakuumbeschichtung von Folien |
DE4310085A1 (de) * | 1993-03-27 | 1994-09-29 | Leybold Ag | Verfahren und Vorrichtung zur Erzeugung von Mustern auf Substraten |
US5522955A (en) * | 1994-07-07 | 1996-06-04 | Brodd; Ralph J. | Process and apparatus for producing thin lithium coatings on electrically conductive foil for use in solid state rechargeable electrochemical cells |
US6186090B1 (en) * | 1999-03-04 | 2001-02-13 | Energy Conversion Devices, Inc. | Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor |
DE19960751A1 (de) * | 1999-12-16 | 2001-07-05 | Fzm Ges Fuer Produktentwicklun | Schleuse und Verfahren zur Anwendung derselben |
DE10205805C1 (de) * | 2002-02-13 | 2003-08-14 | Ardenne Anlagentech Gmbh | Einrichtung zur Beschichtung von bandförmigen Substraten im Vakuum |
DE10348639B4 (de) * | 2003-10-15 | 2009-08-27 | Von Ardenne Anlagentechnik Gmbh | Schleusensystem für eine Vakuumanlage |
DE102004006131B4 (de) * | 2004-02-07 | 2005-12-15 | Applied Films Gmbh & Co. Kg | Bandbeschichtungsanlage mit einer Vakuumkammer und einer Beschichtungswalze |
DE502004008341D1 (de) * | 2004-03-31 | 2008-12-11 | Applied Materials Gmbh & Co Kg | Schleusenanordnung für eine Vakuumbehandlungsanlage und Verfahren zum Betreiben von dieser |
US20060260938A1 (en) * | 2005-05-20 | 2006-11-23 | Petrach Philip M | Module for Coating System and Associated Technology |
US20070256934A1 (en) * | 2006-05-08 | 2007-11-08 | Perata Michael R | Apparatus and Method for Coating Substrates With Approximate Process Isolation |
EP2299473A1 (en) | 2009-09-22 | 2011-03-23 | Applied Materials, Inc. | Modular substrate processing system and method |
EP2374914B1 (en) * | 2010-04-07 | 2015-07-22 | Applied Materials, Inc. | A device for sealing a chamber inlet or a chamber outlet for a flexible substrate; substrate processing apparatus, and method for assembling such a device |
GB2521645B (en) * | 2013-12-24 | 2016-01-06 | Bobst Manchester Ltd | Vacuum metallizers and methods of operating vacuum metallizers |
KR20180096728A (ko) * | 2015-12-21 | 2018-08-29 | 어플라이드 머티어리얼스, 인코포레이티드 | 필름 형성 장치 |
GB2579360A (en) * | 2018-11-28 | 2020-06-24 | Edwards Ltd | Multiple chamber vacuum exhaust system |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2971862A (en) * | 1957-04-26 | 1961-02-14 | Nat Res Corp | Vapor deposition method and apparatus |
DE2141723B2 (de) * | 1971-08-20 | 1976-03-04 | Robert Bosch Gmbh, 7000 Stuttgart | Vakuum-bedampfungsanlage zur kontinuierlichen bedampfung von baendern |
SU515833A1 (ru) * | 1974-02-11 | 1976-05-30 | Украинский Научно-Исследовательский Институт Специальных Сталей,Сплавов И Ферросплавов | Устройство дл нанесени покрытий в вакууме на рулонные материалы |
SU968097A1 (ru) * | 1980-04-30 | 1982-10-23 | Институт механики металлополимерных систем АН БССР | Установка дл вакуумной металлизации полимерной пленки |
JPS5754269A (en) * | 1980-09-17 | 1982-03-31 | Matsushita Electric Ind Co Ltd | Apparatus for forming film in vacuum |
US4450186A (en) * | 1981-08-20 | 1984-05-22 | Matsushita Electric Industrial Co., Ltd. | Method and device for manufacturing magnetic recording medium |
JPS58111127A (ja) * | 1981-12-24 | 1983-07-02 | Ulvac Corp | 耐摩耗性磁気記録体の製造法 |
US4469335A (en) * | 1982-07-22 | 1984-09-04 | American Sterilizer Company | Sealing apparatus with sealing device operable under pressure differential established thereacross |
JPS59124038A (ja) * | 1982-12-29 | 1984-07-18 | Matsushita Electric Ind Co Ltd | 磁気記録媒体の製造方法 |
EP0122092A3 (en) * | 1983-04-06 | 1985-07-10 | General Engineering Radcliffe Limited | Vacuum coating apparatus |
JPS6017074A (ja) * | 1983-07-09 | 1985-01-28 | Konishiroku Photo Ind Co Ltd | 薄膜形成装置、及びこれを構成する処理室ユニツト |
JPS60141869A (ja) * | 1983-12-29 | 1985-07-26 | Nissin Electric Co Ltd | 膜形成方法および膜形成装置 |
JPH0685211B2 (ja) * | 1985-05-13 | 1994-10-26 | 富士写真フイルム株式会社 | 磁気記録媒体の製造方法 |
JPS61278030A (ja) * | 1985-05-31 | 1986-12-08 | Hitachi Maxell Ltd | 磁気記録媒体の製造方法およびその装置 |
DE3726113A1 (de) * | 1987-08-06 | 1989-02-16 | Leybold Ag | Vorrichtung zum beschichten von baendern |
ES2032566T3 (es) * | 1987-10-07 | 1993-02-16 | Thorn Emi Plc | Aparato y metodo para revestir bandas. |
DE3738722C2 (de) * | 1987-11-14 | 1995-12-14 | Leybold Ag | Vorrichtung zum beidseitigen Beschichten von Bändern |
JPH01230775A (ja) * | 1988-03-10 | 1989-09-14 | Matsushita Electric Ind Co Ltd | 繊維・フィルム連続蒸着装置 |
DE3922187A1 (de) * | 1989-07-06 | 1991-01-17 | Leybold Ag | Vorrichtung zum herstellen von metallfreien streifen bei im vakuum beschichteten folienbahnen, insbesondere fuer kondensatoren |
-
1992
- 1992-03-10 DE DE4207525A patent/DE4207525C2/de not_active Expired - Lifetime
- 1992-07-15 US US07/914,752 patent/US5254169A/en not_active Expired - Lifetime
- 1992-12-04 GB GB9225407A patent/GB2264955B/en not_active Expired - Lifetime
-
1993
- 1993-01-13 IT ITMI930025A patent/IT1271921B/it active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
ITMI930025A1 (it) | 1994-07-13 |
DE4207525A1 (de) | 1993-09-16 |
DE4207525C2 (de) | 1999-12-16 |
GB2264955B (en) | 1995-07-05 |
GB2264955A (en) | 1993-09-15 |
GB9225407D0 (en) | 1993-01-27 |
US5254169A (en) | 1993-10-19 |
ITMI930025A0 (it) | 1993-01-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted | ||
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19981231 |