IT1256759B - Sensore di gas a base di ossido semiconduttore per determinare idrocarburi gassosi - Google Patents

Sensore di gas a base di ossido semiconduttore per determinare idrocarburi gassosi

Info

Publication number
IT1256759B
IT1256759B ITMI922939A ITMI922939A IT1256759B IT 1256759 B IT1256759 B IT 1256759B IT MI922939 A ITMI922939 A IT MI922939A IT MI922939 A ITMI922939 A IT MI922939A IT 1256759 B IT1256759 B IT 1256759B
Authority
IT
Italy
Prior art keywords
gaseous hydrocarbons
sensitive
gas sensor
oxide gas
semiconductive oxide
Prior art date
Application number
ITMI922939A
Other languages
English (en)
Inventor
Roberto Riva
Original Assignee
Eniricerche Spa
Snam Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eniricerche Spa, Snam Spa filed Critical Eniricerche Spa
Publication of ITMI922939A0 publication Critical patent/ITMI922939A0/it
Priority to ITMI922939A priority Critical patent/IT1256759B/it
Priority to ES93203531T priority patent/ES2113480T3/es
Priority to AT93203531T priority patent/ATE163092T1/de
Priority to DE69316862T priority patent/DE69316862T2/de
Priority to DK93203531T priority patent/DK0603945T3/da
Priority to EP93203531A priority patent/EP0603945B1/en
Priority to US08/168,232 priority patent/US5400643A/en
Priority to JP34564293A priority patent/JP3198396B2/ja
Publication of ITMI922939A1 publication Critical patent/ITMI922939A1/it
Application granted granted Critical
Publication of IT1256759B publication Critical patent/IT1256759B/it
Priority to GR980400455T priority patent/GR3026284T3/el

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
    • G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature
    • G01N27/124—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature varying the temperature, e.g. in a cyclic manner

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Un dispositivo sensore di idrocarburi gassosi comprende due elementi sensibili a base di ossido semiconduttore, uno dei quali è un elemento sensibile di riferimento e l'altro un elemento sensibile di misura, quest'ultimo essendo ricoperto da uno strato di materiale elettricamente isolante e poroso contenente disperso un metallo nobile.I due elementi sensibili sono realizzati con procedimenti serigrafici, sono collegati ad un sistema elettronico di comparazione dei segnali e, nelle condizioni di esercizio, sono mantenuti a temperature diverse.Il sensore presenta una migliorata selettività nella determinazione degli idrocarburi gassosi, in particolare metano, anche in presenza di concentrazioni elevate di gas interferenti, come ad esempio etanolo.
ITMI922939A 1992-12-23 1992-12-23 Sensore di gas a base di ossido semiconduttore per determinare idrocarburi gassosi IT1256759B (it)

Priority Applications (9)

Application Number Priority Date Filing Date Title
ITMI922939A IT1256759B (it) 1992-12-23 1992-12-23 Sensore di gas a base di ossido semiconduttore per determinare idrocarburi gassosi
DK93203531T DK0603945T3 (da) 1992-12-23 1993-12-15 Gassensor baseret på halvleder-oxid, til bestemmelse af gasformige kulhybrinter
AT93203531T ATE163092T1 (de) 1992-12-23 1993-12-15 Gassensor basierend auf halbleiteroxiden, zur bestimmung von gasförmigen kohlenwasserstoffen
DE69316862T DE69316862T2 (de) 1992-12-23 1993-12-15 Gassensor basierend auf Halbleiteroxiden, zur Bestimmung von gasförmigen Kohlenwasserstoffen
ES93203531T ES2113480T3 (es) 1992-12-23 1993-12-15 Sensor de gases basado en oxido semiconductor, para la determinacion de hidrocarburos gaseosos.
EP93203531A EP0603945B1 (en) 1992-12-23 1993-12-15 Gas sensor based on semiconductor oxide, for gaseous hydrocarbon determination
US08/168,232 US5400643A (en) 1992-12-23 1993-12-17 Gas sensor based on semiconductor oxide, for gaseous hydrocarbon determination
JP34564293A JP3198396B2 (ja) 1992-12-23 1993-12-22 検知素子
GR980400455T GR3026284T3 (en) 1992-12-23 1998-03-06 Gas sensor based on semiconductor oxide, for gaseous hydrocarbon determination.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITMI922939A IT1256759B (it) 1992-12-23 1992-12-23 Sensore di gas a base di ossido semiconduttore per determinare idrocarburi gassosi

Publications (3)

Publication Number Publication Date
ITMI922939A0 ITMI922939A0 (it) 1992-12-23
ITMI922939A1 ITMI922939A1 (it) 1994-06-23
IT1256759B true IT1256759B (it) 1995-12-15

Family

ID=11364518

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI922939A IT1256759B (it) 1992-12-23 1992-12-23 Sensore di gas a base di ossido semiconduttore per determinare idrocarburi gassosi

Country Status (9)

Country Link
US (1) US5400643A (it)
EP (1) EP0603945B1 (it)
JP (1) JP3198396B2 (it)
AT (1) ATE163092T1 (it)
DE (1) DE69316862T2 (it)
DK (1) DK0603945T3 (it)
ES (1) ES2113480T3 (it)
GR (1) GR3026284T3 (it)
IT (1) IT1256759B (it)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2692047B1 (fr) * 1992-06-04 1995-08-04 Gaz De France Capteur de detection selective de gaz et dispositif pour sa mise en óoeuvre.
DE4424342C1 (de) * 1994-07-11 1995-11-02 Fraunhofer Ges Forschung Sensorarray
US5635628A (en) * 1995-05-19 1997-06-03 Siemens Aktiengesellschaft Method for detecting methane in a gas mixture
DE19519189C1 (de) * 1995-05-24 1996-09-12 Siemens Ag Sensoranordnung zum Nachweis eines Gases
KR100426939B1 (ko) * 1995-06-19 2004-07-19 피가로 기켄 가부시키가이샤 가스센서
US5764150A (en) 1996-04-10 1998-06-09 Fleury; Byron Gas alarm
US5831146A (en) * 1996-05-09 1998-11-03 Cts Corporation Gas sensor with multiple exposed active elements
US5795545A (en) * 1996-05-20 1998-08-18 Motorola Inc. Integrated ceramic exhaust gas sensors
JP3802168B2 (ja) * 1996-12-10 2006-07-26 日本碍子株式会社 ガスセンサおよびそれを用いた排ガス浄化装置の劣化診断方法
US5880354A (en) * 1997-06-11 1999-03-09 Cts Corporation Gas sensor with orientation insensitivity
US6495892B2 (en) * 1997-08-08 2002-12-17 California Institute Of Technology Techniques and systems for analyte detection
CA2325886C (en) * 1998-04-09 2009-07-21 California Institute Of Technology Electronic techniques for analyte detection
DE19818474A1 (de) * 1998-04-24 1999-11-25 Siemens Ag Gassensor und Verwendung
DE19819575C1 (de) 1998-04-30 2000-03-16 Siemens Ag Wasserstoffsensor
ITMI981248A1 (it) * 1998-06-04 1999-12-04 Enitecnologie Spa Processo per la determinazione di mtbe nei terreni e nell'aria
DE19830709C2 (de) * 1998-07-09 2002-10-31 Daimler Chrysler Ag Meßwandler zur Detektion von Kohlenwasserstoffen in Gasen
US6095681A (en) * 1998-07-28 2000-08-01 The United States Of America As Represented By The Secretary Of Commerce Method for operating a sensor to differentiate between analytes in a sample
US6167747B1 (en) 1998-08-14 2001-01-02 Tokheim Corporation Apparatus for detecting hydrocarbon using crystal oscillators within fuel dispensers
IT1302616B1 (it) * 1998-10-07 2000-09-29 Uni Degli Studi Brescia Dispositivo multisensore per misure chimiche gravimetriche mediantestrati piezoelettrici risonanti in tecnologia a film spesso.
DE19955125A1 (de) * 1998-11-16 2000-06-21 Denso Corp Gassensor und Verfahren zur Messung der Konzentration eines bestimmten Gases
DE19916798C2 (de) * 1999-04-14 2001-10-18 Daimler Chrysler Ag Dünnschicht-Halbleiter-Gassensor und Verfahren zum Nachweis von Gasen
US6114943A (en) * 1999-05-26 2000-09-05 Ut-Battelle, L.L.C. Resistive hydrogen sensing element
RU2291416C1 (ru) * 2005-08-18 2007-01-10 Государственное образовательное учреждение высшего профессионального образования "Московский энергетический институт (технический университет)" (ГОУВПО "МЭИ (ТУ)") Датчик определения концентрации газов
RU2291417C1 (ru) * 2005-09-05 2007-01-10 Государственное образовательное учреждение высшего профессионального образования "Московский энергетический институт (технический университет") (ГОУВПО "МЭИ (ТУ)") Датчик определения концентрации газов
WO2016190820A1 (en) * 2015-05-28 2016-12-01 Agency For Science, Technology And Research Sensing device for measuring a level of an analyte, method of fabrication thereof
DE102017206124A1 (de) * 2017-04-10 2018-10-11 Infineon Technologies Ag Fluidsensor, Verfahren zum Bereitstellen desselben und Verfahren zum Bestimmen eines Bestandteils eines Fluids
BR112020015715A2 (pt) * 2018-02-01 2020-12-08 Sensor Development Corporation Dispositivo para detectar larvas de insetos e insetos adultos em produtos armazenados por sensoreação de seus feromônios voláteis e semioquímicos
TWI702392B (zh) * 2019-12-20 2020-08-21 財團法人工業技術研究院 氣體感測裝置及氣體濃度感測方法
CN111537664B (zh) * 2020-05-07 2022-12-20 江苏集萃智能集成电路设计技术研究所有限公司 催化式多气体传感系统

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4443791A (en) * 1978-01-05 1984-04-17 Risgin Ojars Self-compensating gas detection apparatus
JPS5729935A (en) * 1980-07-31 1982-02-18 Nippon Soken Inc Gas detecting apparatus
US4490715A (en) * 1980-09-13 1984-12-25 Matsushita Electric Works, Ltd. Gas detector
US4453397A (en) * 1981-08-17 1984-06-12 Nippon Soken, Inc. Gas detecting sensor
DE3519435A1 (de) * 1985-05-30 1986-12-11 Siemens AG, 1000 Berlin und 8000 München Sensor fuer gasanalyse
US4840913A (en) * 1986-11-06 1989-06-20 Ford Motor Company Oxides of nitrogen detector
JPS63222252A (ja) * 1987-03-12 1988-09-16 Figaro Eng Inc ガスセンサの製造方法
JPS63279149A (ja) * 1987-05-12 1988-11-16 Matsushita Electric Ind Co Ltd ガス感応素子
IT1241405B (it) * 1990-03-02 1994-01-14 Eniricerche Spa Sensori di gas per determinare idrocarburi gassosi realizzati con film sottili di ossido di stagno
JPH0486550A (ja) * 1990-07-30 1992-03-19 Fuji Electric Co Ltd ガスセンサ
US5104513A (en) * 1990-10-18 1992-04-14 Leybold Inficon Inc. Gas sensor

Also Published As

Publication number Publication date
US5400643A (en) 1995-03-28
ATE163092T1 (de) 1998-02-15
GR3026284T3 (en) 1998-06-30
ITMI922939A1 (it) 1994-06-23
JPH06229963A (ja) 1994-08-19
DK0603945T3 (da) 1998-09-23
JP3198396B2 (ja) 2001-08-13
ITMI922939A0 (it) 1992-12-23
EP0603945B1 (en) 1998-02-04
ES2113480T3 (es) 1998-05-01
EP0603945A1 (en) 1994-06-29
DE69316862D1 (de) 1998-03-12
DE69316862T2 (de) 1998-09-03

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