IT1255025B - Processo bicmos per collettore controdrogato - Google Patents
Processo bicmos per collettore controdrogatoInfo
- Publication number
- IT1255025B IT1255025B ITMI920749A ITMI920749A IT1255025B IT 1255025 B IT1255025 B IT 1255025B IT MI920749 A ITMI920749 A IT MI920749A IT MI920749 A ITMI920749 A IT MI920749A IT 1255025 B IT1255025 B IT 1255025B
- Authority
- IT
- Italy
- Prior art keywords
- counter
- bicmos process
- region
- ground collector
- base
- Prior art date
Links
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 1
- 229910052796 boron Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66272—Silicon vertical transistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28525—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising semiconducting material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8248—Combination of bipolar and field-effect technology
- H01L21/8249—Bipolar and MOS technology
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1004—Base region of bipolar transistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/73—Bipolar junction transistors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/009—Bi-MOS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/01—Bipolar transistors-ion implantation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/011—Bipolar transistors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
Abstract
Processo BiCMOS in cui viene formata una regione di base in una regione di substrato di tipo n drogato in misura relativamente elevata. Boro viene impiantato a due diversi livelli d'energia formando la regione, di base ed una regione n controdrogata in prossimità della giunzione del collettore di base per impedire ionizzazione per urto.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US69010391A | 1991-04-23 | 1991-04-23 |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI920749A0 ITMI920749A0 (it) | 1992-03-30 |
ITMI920749A1 ITMI920749A1 (it) | 1993-09-30 |
IT1255025B true IT1255025B (it) | 1995-10-13 |
Family
ID=24771103
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI920749A IT1255025B (it) | 1991-04-23 | 1992-03-30 | Processo bicmos per collettore controdrogato |
Country Status (8)
Country | Link |
---|---|
US (1) | US6124180A (it) |
JP (1) | JPH05121674A (it) |
KR (1) | KR100233366B1 (it) |
GB (1) | GB2255226B (it) |
HK (1) | HK153495A (it) |
IE (1) | IE66385B1 (it) |
IT (1) | IT1255025B (it) |
TW (1) | TW238408B (it) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6249030B1 (en) * | 1992-12-07 | 2001-06-19 | Hyundai Electronics Industries Co., Ltd. | BI-CMOS integrated circuit |
US6130122A (en) * | 1997-07-21 | 2000-10-10 | Texas Instruments Incorporated | Method for forming a BiCMOS integrated circuit with Nwell compensation implant and method |
SE511891C2 (sv) * | 1997-08-29 | 1999-12-13 | Ericsson Telefon Ab L M | Bipolär effekttransistor och framställningsförfarande |
US6894366B2 (en) * | 2000-10-10 | 2005-05-17 | Texas Instruments Incorporated | Bipolar junction transistor with a counterdoped collector region |
US6399455B1 (en) * | 2001-06-15 | 2002-06-04 | National Semiconductor Corporation | Method of fabricating a bipolar transistor with ultra small polysilicon emitter |
US8232156B2 (en) | 2010-11-04 | 2012-07-31 | International Business Machines Corporation | Vertical heterojunction bipolar transistors with reduced base-collector junction capacitance |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4066473A (en) * | 1976-07-15 | 1978-01-03 | Fairchild Camera And Instrument Corporation | Method of fabricating high-gain transistors |
US4283236A (en) * | 1979-09-19 | 1981-08-11 | Harris Corporation | Method of fabricating lateral PNP transistors utilizing selective diffusion and counter doping |
US4431460A (en) * | 1982-03-08 | 1984-02-14 | International Business Machines Corporation | Method of producing shallow, narrow base bipolar transistor structures via dual implantations of selected polycrystalline layer |
JPS58225663A (ja) * | 1982-06-23 | 1983-12-27 | Toshiba Corp | 半導体装置の製造方法 |
JPS5986923A (ja) * | 1982-11-10 | 1984-05-19 | Toshiba Corp | 半導体装置 |
EP0219641B1 (de) * | 1985-09-13 | 1991-01-09 | Siemens Aktiengesellschaft | Integrierte Bipolar- und komplementäre MOS-Transistoren auf einem gemeinsamen Substrat enthaltende Schaltung und Verfahren zu ihrer Herstellung |
JPH0628296B2 (ja) * | 1985-10-17 | 1994-04-13 | 日本電気株式会社 | 半導体装置の製造方法 |
GB2188479B (en) * | 1986-03-26 | 1990-05-23 | Stc Plc | Semiconductor devices |
DE3618166A1 (de) * | 1986-05-30 | 1987-12-03 | Telefunken Electronic Gmbh | Lateraltransistor |
JPS63140567A (ja) * | 1986-12-01 | 1988-06-13 | Mitsubishi Electric Corp | 半導体記憶装置 |
EP0278619B1 (en) * | 1987-01-30 | 1993-12-08 | Texas Instruments Incorporated | Integrated bipolar and CMOS transistor fabrication process |
US4740478A (en) * | 1987-01-30 | 1988-04-26 | Motorola Inc. | Integrated circuit method using double implant doping |
US4962053A (en) * | 1987-01-30 | 1990-10-09 | Texas Instruments Incorporated | Bipolar transistor fabrication utilizing CMOS techniques |
US4933295A (en) * | 1987-05-08 | 1990-06-12 | Raytheon Company | Method of forming a bipolar transistor having closely spaced device regions |
US4803175A (en) * | 1987-09-14 | 1989-02-07 | Motorola Inc. | Method of fabricating a bipolar semiconductor device with silicide contacts |
JPH0193167A (ja) * | 1987-10-05 | 1989-04-12 | Toyota Autom Loom Works Ltd | 高耐圧トランジスタ |
US4830973A (en) * | 1987-10-06 | 1989-05-16 | Motorola, Inc. | Merged complementary bipolar and MOS means and method |
US4994887A (en) * | 1987-11-13 | 1991-02-19 | Texas Instruments Incorporated | High voltage merged bipolar/CMOS technology |
JPH01140761A (ja) * | 1987-11-27 | 1989-06-01 | Nec Corp | 半導体装置 |
US5011784A (en) * | 1988-01-21 | 1991-04-30 | Exar Corporation | Method of making a complementary BiCMOS process with isolated vertical PNP transistors |
US5006476A (en) * | 1988-09-07 | 1991-04-09 | North American Philips Corp., Signetics Division | Transistor manufacturing process using three-step base doping |
US4993295A (en) * | 1988-12-08 | 1991-02-19 | Utica Enterprises, Inc. | Punch stripper |
US5107321A (en) * | 1990-04-02 | 1992-04-21 | National Semiconductor Corporation | Interconnect method for semiconductor devices |
US5101257A (en) * | 1991-07-01 | 1992-03-31 | Motorola, Inc. | Semiconductor device having merged bipolar and MOS transistors and process for making the same |
US5227657A (en) * | 1991-12-20 | 1993-07-13 | Intel Corporation | Base-emitter reverse bias protection for bicmos ic |
-
1992
- 1992-02-18 GB GB9203426A patent/GB2255226B/en not_active Expired - Fee Related
- 1992-03-04 KR KR1019920003533A patent/KR100233366B1/ko not_active IP Right Cessation
- 1992-03-17 TW TW081102020A patent/TW238408B/zh not_active IP Right Cessation
- 1992-03-27 JP JP4100281A patent/JPH05121674A/ja active Pending
- 1992-03-30 IT ITMI920749A patent/IT1255025B/it active IP Right Grant
- 1992-03-30 IE IE921018A patent/IE66385B1/en not_active IP Right Cessation
-
1993
- 1993-05-24 US US08/066,618 patent/US6124180A/en not_active Expired - Lifetime
-
1995
- 1995-09-28 HK HK153495A patent/HK153495A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
ITMI920749A0 (it) | 1992-03-30 |
US6124180A (en) | 2000-09-26 |
KR920020749A (ko) | 1992-11-21 |
IE66385B1 (en) | 1995-12-27 |
ITMI920749A1 (it) | 1993-09-30 |
KR100233366B1 (ko) | 1999-12-01 |
GB2255226A (en) | 1992-10-28 |
HK153495A (en) | 1995-10-06 |
TW238408B (it) | 1995-01-11 |
GB2255226B (en) | 1995-03-01 |
GB9203426D0 (en) | 1992-04-01 |
IE921018A1 (en) | 1992-11-04 |
JPH05121674A (ja) | 1993-05-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted | ||
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19980327 |