IT1247919B - Impianto per il rivestimento sotto vuoto di substrati ottici - Google Patents

Impianto per il rivestimento sotto vuoto di substrati ottici

Info

Publication number
IT1247919B
IT1247919B ITMI911294A ITMI911294A IT1247919B IT 1247919 B IT1247919 B IT 1247919B IT MI911294 A ITMI911294 A IT MI911294A IT MI911294 A ITMI911294 A IT MI911294A IT 1247919 B IT1247919 B IT 1247919B
Authority
IT
Italy
Prior art keywords
workpiece
vacuum coating
optical substrates
coating system
workpiece holding
Prior art date
Application number
ITMI911294A
Other languages
English (en)
Inventor
Delio Ciparisso
Original Assignee
Satis Vacuum Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Satis Vacuum Ag filed Critical Satis Vacuum Ag
Publication of ITMI911294A0 publication Critical patent/ITMI911294A0/it
Publication of ITMI911294A1 publication Critical patent/ITMI911294A1/it
Application granted granted Critical
Publication of IT1247919B publication Critical patent/IT1247919B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

L'impianto di rivestimento sotto vuoto mediante deposizione per vaporizzazione di strati di nobilitazione su substrati ottici (10) comprende dei mezzi portapezzi (3) che ruotano sopra sorgenti d'evaporazione in un recipiente, nel quale può essere generato il vuoto. I mezzi portapezzi (3) comprendono una pluralità di portapezzi voltabili (33) che presentano almeno approssimativamente una forma a settore di cerchio e sono montati in modo da formare una calotta su un albero rotante comune (32), in modo da poter essere ribaltati ciascuno di 180°. Ciascun portapezzi voltabile (33) presenta su entrambi i suoi lati delle superfici reggipezzi con dei mezzi per il bloccaggio mediante serraggio di una pluralità di substrati (10) che devono essere rivestiti unilateralmente ed appoggiano sulla rispettiva superficie reggipezzi.
ITMI911294A 1990-05-22 1991-05-10 Impianto per il rivestimento sotto vuoto di substrati ottici IT1247919B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1742/90A CH681308A5 (it) 1990-05-22 1990-05-22

Publications (3)

Publication Number Publication Date
ITMI911294A0 ITMI911294A0 (it) 1991-05-10
ITMI911294A1 ITMI911294A1 (it) 1992-11-10
IT1247919B true IT1247919B (it) 1995-01-05

Family

ID=4217521

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI911294A IT1247919B (it) 1990-05-22 1991-05-10 Impianto per il rivestimento sotto vuoto di substrati ottici

Country Status (7)

Country Link
US (1) US5138974A (it)
CA (1) CA2042932A1 (it)
CH (1) CH681308A5 (it)
DE (1) DE4115175C2 (it)
FR (1) FR2662448A1 (it)
GB (1) GB2244286A (it)
IT (1) IT1247919B (it)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4305749A1 (de) * 1993-02-25 1994-09-01 Leybold Ag Vorrichtung zum Halten von flachen, kreisscheibenförmigen Substraten in der Vakuumkammer einer Beschichtungs- oder Ätzanlage
DE4305750C2 (de) * 1993-02-25 2002-03-21 Unaxis Deutschland Holding Vorrichtung zum Halten von flachen, kreisscheibenförmigen Substraten in der Vakuumkammer einer Beschichtungs- oder Ätzanlage
DE4325011A1 (de) * 1993-07-28 1995-03-02 Herlitz Michael Erweiterung von Entspiegelung wie bei Brillengläsern üblich auf Autoglasscheiben sowie weitere Kraftfahrzeuge und Verkehrsmittel, sowie alle anderen Silikat- und Kunststoffscheiben
DE4407909C3 (de) * 1994-03-09 2003-05-15 Unaxis Deutschland Holding Verfahren und Vorrichtung zum kontinuierlichen oder quasi-kontinuierlichen Beschichten von Brillengläsern
CH691308A5 (de) * 1996-05-10 2001-06-29 Satis Vacuum Ind Vertriebs Ag Substrat-Träger für Vakuum-Beschichtungsanlagen.
US6017581A (en) * 1997-04-18 2000-01-25 Semi-Alloys Company Method for coating lenticular articles
DE19822064A1 (de) * 1998-05-16 1999-11-18 Leybold Ag Vorrichtung zum Halten von Linsen, insbesondere für in einer Vakuum-Aufdampfanlage oder Sputteranlage zu beschichtender Brillengläser
GB9821752D0 (en) * 1998-10-07 1998-12-02 Applied Vision Ltd Substrate holder
US6090444A (en) * 1999-02-08 2000-07-18 Saunders & Associates, Inc. Base plater or vacuum deposition apparatus with individually and selectively controlled work holders and capacitively coupled crystal monitor
FR2859487B1 (fr) * 2003-09-04 2006-12-15 Essilor Int Procede de depot d'une couche amorphe contenant majoritairement du fluor et du carbone et dispositif convenant a sa mise en oeuvre
TWI280986B (en) * 2004-04-30 2007-05-11 Hon Hai Prec Ind Co Ltd Vacuum vapor deposition apparatus
DE102004063703A1 (de) * 2004-12-28 2006-07-06 Schott Ag Vakuumbeschichtungssystem
EP1950323A1 (en) * 2007-01-25 2008-07-30 Essilor International (Compagnie Generale D'optique) Optical lens holder
JP2010135763A (ja) * 2008-11-05 2010-06-17 Toshiba Corp Ｌｅｄデバイスの製造装置、ｌｅｄデバイスの製造方法及びｌｅｄデバイス
TW201134969A (en) * 2010-04-09 2011-10-16 Hon Hai Prec Ind Co Ltd Coating bracket and coating device using same
EP2418545B1 (en) 2010-08-12 2018-10-10 Applied Materials, Inc. Mask handling module
CN103422061B (zh) * 2012-05-16 2016-01-27 深圳市正星光电技术有限公司 一种适用于大尺寸及超薄玻璃的镀膜工艺及设备
US9373534B2 (en) 2012-09-05 2016-06-21 Industrial Technology Research Institute Rotary positioning apparatus with dome carrier, automatic pick-and-place system, and operating method thereof
CN103668075B (zh) * 2012-09-05 2015-11-11 财团法人工业技术研究院 具有弧形载盘的旋转定位装置、自动取放系统及其操作方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1023652B (de) * 1956-04-28 1958-01-30 Balzers Geraeteverkaufsgesells Haltevorrichtung mit wendbarem Traeger fuer Gegenstaende, welche im Vakuum mit duennen Schichten belegt werden sollen
NL7205670A (it) * 1972-03-16 1973-09-18
CH585675A5 (it) * 1973-06-13 1977-03-15 Satis Vacuum Ag
US3859956A (en) * 1974-01-10 1975-01-14 Bell Telephone Labor Inc Multiworkpiece condensation coating apparatus
CH599982A5 (it) * 1975-09-02 1978-06-15 Balzers Patent Beteilig Ag
US3983838A (en) * 1975-12-31 1976-10-05 International Business Machines Corporation Planetary evaporator
US4062318A (en) * 1976-11-19 1977-12-13 Rca Corporation Apparatus for chemical vapor deposition
US4756815A (en) * 1979-12-21 1988-07-12 Varian Associates, Inc. Wafer coating system
CH668430A5 (de) * 1986-07-31 1988-12-30 Satis Vacuum Ag Vakuum-beschichtungsanlage fuer optische substrate.
DE3921671A1 (de) * 1989-07-01 1991-01-03 Leybold Ag Linsenhalterung, insbesondere halterung fuer in einer hochvakuum-aufdampfanlage oder -sputteranlage zu beschichtende brillenglaslinsen
DE3921672C2 (de) * 1989-07-01 1996-12-05 Leybold Ag Vorrichtung zum Halten und Wenden von Linsen, insbesondere für in einer Hochvakuum-Aufdampfanlage oder -Sputteranlage zu beschichtende Brillenglaslinsen

Also Published As

Publication number Publication date
GB2244286A (en) 1991-11-27
FR2662448A1 (fr) 1991-11-29
DE4115175A1 (de) 1991-11-28
CH681308A5 (it) 1993-02-26
GB9110176D0 (en) 1991-07-03
ITMI911294A1 (it) 1992-11-10
US5138974A (en) 1992-08-18
ITMI911294A0 (it) 1991-05-10
DE4115175C2 (de) 2000-08-31
CA2042932A1 (en) 1991-11-23

Similar Documents

Publication Publication Date Title
IT1247919B (it) Impianto per il rivestimento sotto vuoto di substrati ottici
ES371895A1 (es) Procedimiento para la aplicacion de un recubrimiento pro- tector y decorativo a una superficie.
CA2182452A1 (en) Shadow sculpted thin films
CA2261425A1 (en) Method and apparatus for three-dimensional micro-fabrication and processing on flexible filamentary substrates
CA919035A (en) Chemical vapor deposition coatings on titanium
AU567918B2 (en) Magnetron cathode sputtering
ES432508A1 (es) Perfeccionamientos introducidos en un aparato para depositaruna pelicula delgada de material de recubrimiento sobre piezas de trabajo.
ES2032566T3 (es) Aparato y metodo para revestir bandas.
GB2133764B (en) Planetary substrate support apparatus for vapour vacuum depositing coating
IT8720748A0 (it) Impianto di rivestimento sotto vuoto per substrati ottici.
GB1452720A (en) Coating apparatus
GB1393496A (en) Vacuum plant for the deposition of layer
US6082298A (en) Substrate carrier for a vacuum coating apparatus
ES8703166A1 (es) Procedimiento para formar una pelicula de dioxido de titanio sobre una superficie
IL95414A0 (en) Method to prevent backside growth on substrates in a vapor deposition system
GR3007065T3 (it)
CA2087151A1 (en) Thermal evaporation in two planes
AU3616297A (en) Capped porous thin films
EP0806493A3 (de) Vakuum-Beschichtungsanlage zum Aufdampfen von Vergütungsschichten auf optische Substrate
CA959721A (en) Precision deposition onto a textile substrate
CN211848121U (zh) 一种多级转动的铣刀挂具
ES2073257T3 (es) Lavavajillas con brazo horizontal giratorio de rociado de dos posiciones en el sentido vertical.
JPS54114483A (en) Bell jar for thin film-forming device
JPH0226851A (ja) 球状ガラスの全面膜付法及び装置
GB1392292A (en) Apparatus for vacuum deposition

Legal Events

Date Code Title Description
0001 Granted