NL7205670A - - Google Patents
Info
- Publication number
- NL7205670A NL7205670A NL7205670A NL7205670A NL7205670A NL 7205670 A NL7205670 A NL 7205670A NL 7205670 A NL7205670 A NL 7205670A NL 7205670 A NL7205670 A NL 7205670A NL 7205670 A NL7205670 A NL 7205670A
- Authority
- NL
- Netherlands
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH406672 | 1972-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7205670A true NL7205670A (it) | 1973-09-18 |
Family
ID=4269175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7205670A NL7205670A (it) | 1972-03-16 | 1972-04-26 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3799110A (it) |
| DE (1) | DE2306173B2 (it) |
| FR (1) | FR2176019B1 (it) |
| GB (1) | GB1393496A (it) |
| NL (1) | NL7205670A (it) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH599982A5 (it) * | 1975-09-02 | 1978-06-15 | Balzers Patent Beteilig Ag | |
| US4276855A (en) * | 1979-05-02 | 1981-07-07 | Optical Coating Laboratory, Inc. | Coating apparatus |
| DE2951465C2 (de) * | 1979-12-20 | 1982-10-21 | Siemens AG, 1000 Berlin und 8000 München | Halterung für Substrate in Bedampfungsanlagen |
| JPS61227165A (ja) * | 1985-03-29 | 1986-10-09 | Mitsubishi Electric Corp | 蒸着装置 |
| CH668430A5 (de) * | 1986-07-31 | 1988-12-30 | Satis Vacuum Ag | Vakuum-beschichtungsanlage fuer optische substrate. |
| DE3908894C1 (en) * | 1989-03-17 | 1990-01-11 | Siemens Ag, 1000 Berlin Und 8000 Muenchen, De | Substrate turning device for a vacuum coating installation (facility) |
| CH681308A5 (it) * | 1990-05-22 | 1993-02-26 | Satis Vacuum Ag | |
| EP0502385B1 (de) * | 1991-03-05 | 1995-06-21 | Balzers Aktiengesellschaft | Verfahren zur Herstellung einer doppelseitigen Beschichtung von optischen Werkstücken |
| CH691308A5 (de) * | 1996-05-10 | 2001-06-29 | Satis Vacuum Ind Vertriebs Ag | Substrat-Träger für Vakuum-Beschichtungsanlagen. |
| CH691306A5 (de) * | 1996-05-10 | 2001-06-29 | Satis Vacuum Ind Vertriebs Ag | Vakuum-Beschichtunsanlage zum Aufdampfen von Vergütungsschichten auf optische Substrate. |
| CH693747A5 (de) * | 1999-05-04 | 2004-01-15 | Satis Vacuum Ind Vetriebs Ag | Vakuum-Beschichtungsanlage zum Aufdampfen von Verguetungsschichten auf optische Substrate. |
| US6082296A (en) * | 1999-09-22 | 2000-07-04 | Xerox Corporation | Thin film deposition chamber |
| WO2003083162A1 (en) * | 2002-03-28 | 2003-10-09 | Satis Vacuum Industries S.P.A. | Vacuum deposition apparatus and method for depositing thin optical films on high curvature substrates |
| DE102004041854B4 (de) * | 2004-04-27 | 2008-11-13 | Von Ardenne Anlagentechnik Gmbh | Verfahren und Vorrichtung zur thermischen Vakuumbeschichtung |
| TWI280986B (en) * | 2004-04-30 | 2007-05-11 | Hon Hai Prec Ind Co Ltd | Vacuum vapor deposition apparatus |
| US20060099342A1 (en) * | 2004-10-28 | 2006-05-11 | Denton Vacuum | Deposition of coatings |
| KR20120083712A (ko) * | 2011-01-18 | 2012-07-26 | 삼성엘이디 주식회사 | 서셉터 및 이를 구비하는 화학 기상 증착 장치 |
| CN102899618A (zh) * | 2011-07-26 | 2013-01-30 | 御林汽配(昆山)有限公司 | 改进真空镀膜机传动机构 |
| CN103184416B (zh) * | 2011-12-29 | 2015-05-20 | 财团法人金属工业研究发展中心 | 具自转及公转复合式真空溅镀设备 |
| CN103243307B (zh) * | 2013-05-29 | 2015-04-29 | 东南大学 | 一种具有双旋转机构的oled镀膜机 |
| TWI794475B (zh) * | 2018-05-09 | 2023-03-01 | 德商索萊爾有限公司 | 用於接收多個基板以進行處理之保持裝置、處理系統及方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2912351A (en) * | 1956-09-21 | 1959-11-10 | Sylvania Electric Prod | Lens coating apparatus and process |
| US2997979A (en) * | 1958-09-15 | 1961-08-29 | Tassara Luigi | Apparatus for applying metallic film to electrical components and the like |
| US3396696A (en) * | 1966-10-06 | 1968-08-13 | Ralph F. Becker | Lens turner for high vacuum evaporators |
-
1972
- 1972-04-26 NL NL7205670A patent/NL7205670A/xx unknown
-
1973
- 1973-02-08 DE DE2306173A patent/DE2306173B2/de active Pending
- 1973-02-15 GB GB741773A patent/GB1393496A/en not_active Expired
- 1973-03-08 US US00339074A patent/US3799110A/en not_active Expired - Lifetime
- 1973-03-14 FR FR7309038A patent/FR2176019B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1393496A (en) | 1975-05-07 |
| DE2306173B2 (de) | 1974-10-03 |
| FR2176019A1 (it) | 1973-10-26 |
| FR2176019B1 (it) | 1977-02-04 |
| US3799110A (en) | 1974-03-26 |
| DE2306173A1 (de) | 1973-10-18 |