IT1244119B - Processo di introduzione e diffusione di ioni di platino in una fetta di silicio - Google Patents
Processo di introduzione e diffusione di ioni di platino in una fetta di silicioInfo
- Publication number
- IT1244119B IT1244119B IT02223790A IT2223790A IT1244119B IT 1244119 B IT1244119 B IT 1244119B IT 02223790 A IT02223790 A IT 02223790A IT 2223790 A IT2223790 A IT 2223790A IT 1244119 B IT1244119 B IT 1244119B
- Authority
- IT
- Italy
- Prior art keywords
- slice
- diffusion
- introduction
- silicon
- platinum ions
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/221—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities of killers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/904—Charge carrier lifetime control
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/914—Doping
- Y10S438/917—Deep level dopants, e.g. gold, chromium, iron or nickel
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT02223790A IT1244119B (it) | 1990-11-29 | 1990-11-29 | Processo di introduzione e diffusione di ioni di platino in una fetta di silicio |
DE69117889T DE69117889T2 (de) | 1990-11-29 | 1991-11-16 | Verfahren zur Einführung und Diffundierung von Platin-Ionen in einem Siliziumplättchen |
EP91202986A EP0488440B1 (en) | 1990-11-29 | 1991-11-16 | Process of introduction and diffusion of platinum ions in a slice of silicon |
US07/794,390 US5227315A (en) | 1990-11-29 | 1991-11-19 | Process of introduction and diffusion of platinum ions in a slice of silicon |
JP30736791A JP3213357B2 (ja) | 1990-11-29 | 1991-11-22 | シリコンスライス内に白金イオンを導入および拡散する方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT02223790A IT1244119B (it) | 1990-11-29 | 1990-11-29 | Processo di introduzione e diffusione di ioni di platino in una fetta di silicio |
Publications (3)
Publication Number | Publication Date |
---|---|
IT9022237A0 IT9022237A0 (it) | 1990-11-29 |
IT9022237A1 IT9022237A1 (it) | 1992-05-30 |
IT1244119B true IT1244119B (it) | 1994-07-05 |
Family
ID=11193497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT02223790A IT1244119B (it) | 1990-11-29 | 1990-11-29 | Processo di introduzione e diffusione di ioni di platino in una fetta di silicio |
Country Status (5)
Country | Link |
---|---|
US (1) | US5227315A (it) |
EP (1) | EP0488440B1 (it) |
JP (1) | JP3213357B2 (it) |
DE (1) | DE69117889T2 (it) |
IT (1) | IT1244119B (it) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5262336A (en) * | 1986-03-21 | 1993-11-16 | Advanced Power Technology, Inc. | IGBT process to produce platinum lifetime control |
US6624477B1 (en) | 1992-10-09 | 2003-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
TW232751B (en) | 1992-10-09 | 1994-10-21 | Semiconductor Energy Res Co Ltd | Semiconductor device and method for forming the same |
JP3637069B2 (ja) | 1993-03-12 | 2005-04-06 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
CN1542929B (zh) * | 1993-03-12 | 2012-05-30 | 株式会社半导体能源研究所 | 半导体器件的制造方法 |
EP0675527B1 (en) * | 1994-03-30 | 1999-11-10 | Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno | Manufacturing process for obtaining bipolar transistors with controlled storage time |
US6008092A (en) * | 1996-02-12 | 1999-12-28 | International Rectifier Corporation | Short channel IGBT with improved forward voltage drop and improved switching power loss |
US5747371A (en) * | 1996-07-22 | 1998-05-05 | Motorola, Inc. | Method of manufacturing vertical MOSFET |
EP0913872A1 (en) * | 1997-10-29 | 1999-05-06 | Motorola Semiconducteurs S.A. | Insulated gate bipolar transistor |
JP5061407B2 (ja) * | 2001-01-31 | 2012-10-31 | 富士電機株式会社 | 半導体装置およびその製造方法 |
WO2003088280A1 (en) * | 2002-04-08 | 2003-10-23 | Council Of Scientific And Industrial Research | Process for the production of neodymium-iron-boron permanent magnet alloy powder |
DE102007020039B4 (de) * | 2007-04-27 | 2011-07-14 | Infineon Technologies Austria Ag | Verfahren zur Herstellung einer vertikal inhomogenen Platin- oder Goldverteilung in einem Halbleitersubstrat und in einem Halbleiterbauelement, derart hergestelltes Halbleitersubstrat und Halbleiterbauelement |
US8646505B2 (en) | 2011-11-18 | 2014-02-11 | LuxVue Technology Corporation | Micro device transfer head |
US8794501B2 (en) | 2011-11-18 | 2014-08-05 | LuxVue Technology Corporation | Method of transferring a light emitting diode |
US10449781B2 (en) | 2013-10-09 | 2019-10-22 | Dover Europe Sarl | Apparatus and method for thermal transfer printing |
US8922611B1 (en) | 2013-10-09 | 2014-12-30 | Markem-Imaje Corporation | Apparatus and method for thermal transfer printing |
JP6237902B2 (ja) * | 2014-07-17 | 2017-11-29 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
US9209027B1 (en) * | 2014-08-14 | 2015-12-08 | Infineon Technologies Ag | Adjusting the charge carrier lifetime in a bipolar semiconductor device |
CN113223944B (zh) * | 2021-03-31 | 2022-09-27 | 青岛惠科微电子有限公司 | 一种快恢复芯片的制造方法、制造设备和快恢复芯片 |
CN113223953B (zh) * | 2021-03-31 | 2022-09-27 | 青岛惠科微电子有限公司 | 一种快恢复芯片的制造方法、制造设备和快恢复芯片 |
CN113178385B (zh) * | 2021-03-31 | 2022-12-23 | 青岛惠科微电子有限公司 | 一种芯片的制造方法、制造设备和芯片 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2341311C3 (de) * | 1973-08-16 | 1981-07-09 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum Einstellen der Lebensdauer von Ladungsträgern in Halbleiterkörpern |
US4165517A (en) * | 1977-02-28 | 1979-08-21 | Electric Power Research Institute, Inc. | Self-protection against breakover turn-on failure in thyristors through selective base lifetime control |
US4137370A (en) * | 1977-08-16 | 1979-01-30 | The United States Of America As Represented By The Secretary Of The Air Force | Titanium and titanium alloys ion plated with noble metals and their alloys |
DE3131914A1 (de) * | 1981-08-12 | 1983-02-24 | Siemens AG, 1000 Berlin und 8000 München | Leistungs-mos-feldeffekttransistor und verfahren zu seiner herstellung |
JPS5975662A (ja) * | 1982-10-22 | 1984-04-28 | Nec Corp | サイリスタ |
JPS6084881A (ja) * | 1983-10-17 | 1985-05-14 | Toshiba Corp | 大電力mos fetとその製造方法 |
JPS6143474A (ja) * | 1984-08-08 | 1986-03-03 | Toshiba Corp | 半導体装置 |
US4620211A (en) * | 1984-08-13 | 1986-10-28 | General Electric Company | Method of reducing the current gain of an inherent bipolar transistor in an insulated-gate semiconductor device and resulting devices |
JPS6262557A (ja) * | 1985-09-12 | 1987-03-19 | Fuji Electric Co Ltd | 半導体装置 |
US4717588A (en) * | 1985-12-23 | 1988-01-05 | Motorola Inc. | Metal redistribution by rapid thermal processing |
US4875082A (en) * | 1986-06-20 | 1989-10-17 | Ford Aerospace Corporation | Schottky barrier photodiode structure |
US4742017A (en) * | 1986-06-20 | 1988-05-03 | Ford Aerospace Corporation | Implantation method for forming Schottky barrier photodiodes |
US4855799A (en) * | 1987-12-22 | 1989-08-08 | Kabushiki Kaisha Toshiba | Power MOS FET with carrier lifetime killer |
FR2638892B1 (fr) * | 1988-11-09 | 1992-12-24 | Sgs Thomson Microelectronics | Procede de modulation de la quantite d'or diffusee dans un substrat de silicium et diode rapide obtenue par ce procede |
US4925812A (en) * | 1989-09-21 | 1990-05-15 | International Rectifier Corporation | Platinum diffusion process |
-
1990
- 1990-11-29 IT IT02223790A patent/IT1244119B/it active IP Right Grant
-
1991
- 1991-11-16 DE DE69117889T patent/DE69117889T2/de not_active Expired - Fee Related
- 1991-11-16 EP EP91202986A patent/EP0488440B1/en not_active Expired - Lifetime
- 1991-11-19 US US07/794,390 patent/US5227315A/en not_active Expired - Lifetime
- 1991-11-22 JP JP30736791A patent/JP3213357B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
IT9022237A0 (it) | 1990-11-29 |
JP3213357B2 (ja) | 2001-10-02 |
DE69117889D1 (de) | 1996-04-18 |
EP0488440A3 (en) | 1992-10-28 |
US5227315A (en) | 1993-07-13 |
EP0488440A2 (en) | 1992-06-03 |
JPH07111329A (ja) | 1995-04-25 |
DE69117889T2 (de) | 1996-09-05 |
IT9022237A1 (it) | 1992-05-30 |
EP0488440B1 (en) | 1996-03-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted | ||
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19971129 |