IT1229872B - Dispositivo per l'evaporazione di metalli. - Google Patents
Dispositivo per l'evaporazione di metalli.Info
- Publication number
- IT1229872B IT1229872B IT8919421A IT1942189A IT1229872B IT 1229872 B IT1229872 B IT 1229872B IT 8919421 A IT8919421 A IT 8919421A IT 1942189 A IT1942189 A IT 1942189A IT 1229872 B IT1229872 B IT 1229872B
- Authority
- IT
- Italy
- Prior art keywords
- evaporation device
- metal evaporation
- metal
- evaporation
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3817513A DE3817513C2 (de) | 1988-05-24 | 1988-05-24 | Vorrichtung zum Verdampfen von Metallen |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8919421A0 IT8919421A0 (it) | 1989-02-13 |
IT1229872B true IT1229872B (it) | 1991-09-13 |
Family
ID=6354965
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT8919421A IT1229872B (it) | 1988-05-24 | 1989-02-13 | Dispositivo per l'evaporazione di metalli. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4979468A (it) |
JP (1) | JPH0219458A (it) |
DE (1) | DE3817513C2 (it) |
GB (1) | GB2219008B (it) |
IT (1) | IT1229872B (it) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4100643C1 (it) * | 1991-01-11 | 1991-10-31 | Leybold Ag, 6450 Hanau, De | |
DE4204938C1 (it) * | 1992-02-19 | 1993-06-24 | Leybold Ag, 6450 Hanau, De | |
DE4310085A1 (de) * | 1993-03-27 | 1994-09-29 | Leybold Ag | Verfahren und Vorrichtung zur Erzeugung von Mustern auf Substraten |
DE4422697C1 (de) * | 1994-06-29 | 1996-01-25 | Zsw | Verdampferquelle für eine Aufdampfanlage und ihre Verwendung |
CH692000A5 (de) * | 1995-11-13 | 2001-12-31 | Unaxis Balzers Ag | Beschichtungskammer, Substratträger hierfür, Verfahren zum Vakuumbedampfen sowie Beschichtungsverfahren. |
US5951769A (en) | 1997-06-04 | 1999-09-14 | Crown Roll Leaf, Inc. | Method and apparatus for making high refractive index (HRI) film |
DE502004004046D1 (de) * | 2004-11-20 | 2007-07-19 | Applied Materials Gmbh & Co Kg | Vorrichtung zum Verdampfen von Materialien |
EP1752555A1 (de) | 2005-07-28 | 2007-02-14 | Applied Materials GmbH & Co. KG | Verdampfervorrichtung |
EP1889942A1 (de) * | 2006-08-16 | 2008-02-20 | Applied Materials GmbH & Co. KG | Verdampfervorrichtung mit automatischer Materialzuführung |
EP2048261A1 (fr) * | 2007-10-12 | 2009-04-15 | ArcelorMittal France | Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique |
JP5621258B2 (ja) * | 2009-12-28 | 2014-11-12 | ソニー株式会社 | 成膜装置および成膜方法 |
DE102013112067B4 (de) * | 2013-11-01 | 2018-01-04 | Von Ardenne Gmbh | Bandsubstratbehandlungsanlage |
JP5987154B2 (ja) * | 2014-10-14 | 2016-09-07 | マシン・テクノロジー株式会社 | 真空蒸着装置およびそれに用いるフィルムコンデンサ用の蒸発装置 |
US20160281212A1 (en) | 2015-03-24 | 2016-09-29 | Siva Power, Inc. | Thermal management of evaporation sources |
CN113684462B (zh) * | 2021-07-29 | 2023-07-21 | 苏州道一至诚纳米材料技术有限公司 | 双面往复镀膜装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE747257C (de) * | 1943-03-05 | 1944-09-18 | Bosch Gmbh Robert | Vorrichtung zur Metallisierung laufender Baender durch Metallbedampfung im Vakuum |
US2440135A (en) * | 1944-08-04 | 1948-04-20 | Alexander Paul | Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers |
DE938644C (de) * | 1953-07-03 | 1956-02-02 | Hubert Mansfeld | Verfahren zur Aufbringung lichtempfindlicher Stoffe auf Schichttraeger |
GB1173978A (en) * | 1967-11-14 | 1969-12-10 | Edwards High Vaccum Internat L | Vacuum Deposition Apparatus |
US3581529A (en) * | 1969-03-17 | 1971-06-01 | Bernard A Mitchell | Steamer |
DE2548357C2 (de) * | 1975-10-29 | 1983-05-26 | Robert Bosch Gmbh, 7000 Stuttgart | Einrichtung zur kontinuierlichen Vakuumbedampfung eines bandförmigen Trägermaterials mit Zink |
US4163038A (en) * | 1977-03-03 | 1979-07-31 | Earth Chemical Company, Limited | Fumigating method and apparatus |
EP0082001A1 (en) * | 1981-12-16 | 1983-06-22 | General Engineering Radcliffe 1979 Limited | Apparatus for and a method of metallising a length of material |
JPS62260051A (ja) * | 1986-05-02 | 1987-11-12 | Hitachi Ltd | 蒸気発生装置 |
-
1988
- 1988-05-24 DE DE3817513A patent/DE3817513C2/de not_active Expired - Fee Related
- 1988-07-12 US US07/217,940 patent/US4979468A/en not_active Expired - Fee Related
-
1989
- 1989-02-13 IT IT8919421A patent/IT1229872B/it active
- 1989-02-14 GB GB8903255A patent/GB2219008B/en not_active Expired - Lifetime
- 1989-05-24 JP JP1129036A patent/JPH0219458A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE3817513A1 (de) | 1989-12-07 |
IT8919421A0 (it) | 1989-02-13 |
GB2219008B (en) | 1992-07-29 |
JPH0219458A (ja) | 1990-01-23 |
GB8903255D0 (en) | 1989-04-05 |
GB2219008A (en) | 1989-11-29 |
US4979468A (en) | 1990-12-25 |
DE3817513C2 (de) | 1996-01-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970131 |